JP2000321076A - Angular velocity detecting device and its driving method - Google Patents
Angular velocity detecting device and its driving methodInfo
- Publication number
- JP2000321076A JP2000321076A JP11128857A JP12885799A JP2000321076A JP 2000321076 A JP2000321076 A JP 2000321076A JP 11128857 A JP11128857 A JP 11128857A JP 12885799 A JP12885799 A JP 12885799A JP 2000321076 A JP2000321076 A JP 2000321076A
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- circuit
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- 238000000034 method Methods 0.000 title claims description 13
- 238000001514 detection method Methods 0.000 claims abstract description 226
- 239000003990 capacitor Substances 0.000 claims abstract description 37
- 230000010355 oscillation Effects 0.000 claims abstract description 35
- 238000006243 chemical reaction Methods 0.000 claims abstract description 5
- 230000001360 synchronised effect Effects 0.000 claims description 5
- 239000013078 crystal Substances 0.000 abstract description 42
- 238000007493 shaping process Methods 0.000 abstract description 8
- 230000005540 biological transmission Effects 0.000 description 15
- 238000010586 diagram Methods 0.000 description 15
- 239000010453 quartz Substances 0.000 description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 13
- 239000004020 conductor Substances 0.000 description 11
- 230000010363 phase shift Effects 0.000 description 9
- 230000003321 amplification Effects 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000003199 nucleic acid amplification method Methods 0.000 description 4
- 238000001771 vacuum deposition Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- VIKNJXKGJWUCNN-XGXHKTLJSA-N norethisterone Chemical compound O=C1CC[C@@H]2[C@H]3CC[C@](C)([C@](CC4)(O)C#C)[C@@H]4[C@@H]3CCC2=C1 VIKNJXKGJWUCNN-XGXHKTLJSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- RIUWBIIVUYSTCN-UHFFFAOYSA-N trilithium borate Chemical compound [Li+].[Li+].[Li+].[O-]B([O-])[O-] RIUWBIIVUYSTCN-UHFFFAOYSA-N 0.000 description 1
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- Gyroscopes (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は単結晶水晶からなる
角速度検出素子を用いた角速度検出装置およびその駆動
方法に関するものである。[0001] 1. Field of the Invention [0002] The present invention relates to an angular velocity detecting device using an angular velocity detecting element made of single crystal quartz and a driving method thereof.
【０００２】[0002]
【従来の技術】従来から機械式の回転ジャイロスコープ
が、飛行機や船舶の慣性航法装置として使われている。
この機械式の回転ジャイロスコープは、高安定かつ高性
能を有しているが、その反面、装置が大きく価格も高
く、寿命も短いという欠点があった。2. Description of the Related Art Conventionally, a mechanical rotary gyroscope has been used as an inertial navigation device for airplanes and ships.
Although this mechanical rotary gyroscope has high stability and high performance, it has disadvantages in that the device is large, expensive, and has a short life.
【０００３】さらに、この機械式回転ジャイロスコープ
に代わるものとして、チタン酸バリウム、ジルコン酸鉛
系の圧電セラミックスである多結晶体の圧電素子を用い
て振動体を励振させておき、回転の角速度にともなうコ
リオリ力で励起する振動により発生する電圧を、圧電素
子で検出する小型の振動式ジャイロスコープの実用化が
進められている。たとえば、特開平３−１０１１３号公
報に振動体を用いた角速度検出装置が提案されている。Further, as an alternative to this mechanical rotary gyroscope, a vibrating body is excited by using a polycrystalline piezoelectric element, which is a barium titanate-lead zirconate-based piezoelectric ceramic, to reduce the angular velocity of rotation. Practical use of a small vibratory gyroscope that detects a voltage generated by vibration excited by Coriolis force with a piezoelectric element has been advanced. For example, Japanese Patent Laid-Open Publication No. Hei 3-10113 proposes an angular velocity detecting device using a vibrating body.
【０００４】以下に従来のジャイロスコープを用いた角
速度検出装置を簡単に説明する。特開平３−１０１１２
号公報に開示されている角速度検出装置は、中央の連結
部を有する音叉型振動体に駆動用の圧電素子を設け、振
動体の基部から伸張した中央の連結部と直交するヒンジ
部をケースを兼ねる円筒状部材で支持する構造である。A conventional angular velocity detecting device using a gyroscope will be briefly described below. JP-A-3-10112
The angular velocity detecting device disclosed in Japanese Patent Application Laid-Open Publication No. H11-15064 discloses a tuning fork type vibrating body having a central connecting part, a driving piezoelectric element provided, and a hinge part orthogonal to the central connecting part extending from the base of the vibrating body. It is a structure that is supported by a cylindrical member that also functions.
【０００５】この駆動用の圧電素子に交流電圧を加える
ことによって音叉型振動体を振動させ、回転にともなう
コリオリ力によってヒンジ部がＳ字状に変形しながら曲
げ振動するのをヒンジ部に設けた検出用の圧電素子の発
生電圧を電圧検出回路で検出し角速度を求める。An AC voltage is applied to the driving piezoelectric element to vibrate the tuning-fork type vibrating body, and the hinge part is bent and vibrated while being deformed into an S shape by Coriolis force due to rotation. The voltage generated by the detection piezoelectric element is detected by a voltage detection circuit to determine the angular velocity.
【０００６】図９は、この角速度検出用の圧電素子を用
いた電圧検出回路を示している。図９において、検出用
の圧電素子は、等価的に容量Ｃ３（９６）と電圧源９４
と抵抗Ｒ５（９５）とで表すことができ、圧電素子の一
端は演算増幅回路９３のプラス入力端子に接続し、発生
電圧Ｖｉはマイナス入力端子に接続された抵抗Ｒ３（９
７）と抵抗Ｒ４（９８）とにより、信号処理可能な（１
＋Ｒ４／Ｒ３）Ｖｉ倍の出力電圧まで電圧増幅される。
この出力電圧を音叉振動体の規準周波数で同期検波する
ことにより角速度を求めている。FIG. 9 shows a voltage detection circuit using a piezoelectric element for detecting the angular velocity. In FIG. 9, the detecting piezoelectric element is equivalent to a capacitor C3 (96) and a voltage source 94.
And one end of the piezoelectric element is connected to the plus input terminal of the operational amplifier circuit 93, and the generated voltage Vi is generated by the resistor R3 (9) connected to the minus input terminal.
7) and the resistor R4 (98) enable signal processing (1
+ R4 / R3) The voltage is amplified to the output voltage of Vi times.
The angular velocity is obtained by synchronously detecting the output voltage at the reference frequency of the tuning fork vibrator.
【０００７】この従来技術に用いられる圧電セラミック
スのような多結晶体からなる圧電素子の入力抵抗９５
（Ｒ５）で示されている等価抵抗は、１ｋΩ以下の低い
値であり、しかも、１秒間に１度回転する角速度を受け
たときに圧電歪効果により圧電素子に発生する電圧は、
数百マイクロから数ミリＶ程度である。したがって、圧
電セラミックス系の圧電素子を検出用に用いた角速度検
出装置は、図９のような入力インピーダンスが数１０ｋ
Ω程度の通常の電圧増幅回路を用いた電圧検出回路によ
り、角速度を求めている。The input resistance 95 of a piezoelectric element made of a polycrystalline material such as a piezoelectric ceramic used in the prior art.
The equivalent resistance indicated by (R5) is a low value of 1 kΩ or less, and the voltage generated in the piezoelectric element by the piezoelectric strain effect when subjected to an angular velocity rotating once per second is:
It is on the order of several hundred micro to several milli volts. Therefore, an angular velocity detecting device using a piezoelectric ceramics-based piezoelectric element for detection has an input impedance of several tens of k as shown in FIG.
The angular velocity is obtained by a voltage detection circuit using a normal voltage amplification circuit of about Ω.
【０００８】[0008]
【発明が解決しようとする課題】しかしながら、特開平
３−１０１１２号公報に開示されている角速度検出装置
は、つぎのような課題が指摘される。However, the following problems are pointed out in the angular velocity detecting device disclosed in Japanese Patent Laid-Open Publication No. Hei 3-10112.
【０００９】第１の課題として、音叉型振動体は、振動
体の基部から延長した中央の連結部と直交するヒンジ部
を設けて円筒状の部材で支持する構造のため、形状が複
雑である。さらに、金属製の音叉型振動体とヒンジ部に
複数の圧電素子を接着する必要があり、このため組立工
程が複雑になり、全体形状も大きくなり、低価格化が困
難である。A first problem is that the tuning-fork type vibrating body has a complicated shape because it has a structure in which a hinge portion extending from the base of the vibrating body and orthogonal to a central connecting portion is provided and supported by a cylindrical member. . Further, it is necessary to bond a plurality of piezoelectric elements to the metal tuning-fork type vibrating body and the hinge part, which complicates the assembly process, increases the overall shape, and makes it difficult to reduce the cost.
【００１０】第２の課題として、検出用素子として圧電
セラミックスの代わりに等価抵抗あるいは、等価電氣イ
ンピーダンスが１０ｋΩ以上高い物性値の単結晶材料を
用いると、１秒間に１度回転する角速度を受けたとき
に、圧電歪効果により発生する電圧は数マイクロＶであ
る。この発生電圧の検出に従来の電圧検出回路を用いる
とノイズ電圧のため角速度の検出ができなくなり実用化
が困難になるという課題がある。As a second problem, when a single crystal material having a property value equivalent to 10 kΩ or higher in electrical resistance or equivalent electric impedance is used as a detecting element instead of piezoelectric ceramics, the element receives an angular velocity that rotates once per second. Sometimes, the voltage generated by the piezoelectric distortion effect is several micro volts. If a conventional voltage detecting circuit is used to detect the generated voltage, the angular velocity cannot be detected due to the noise voltage, and there is a problem that practical application becomes difficult.
【００１１】〔発明の目的〕そこで本発明の目的は、前
述の問題点を解決して、角速度の検出精度を高めること
が可能な角速度検出装置およびその駆動方法を提供する
ことである。SUMMARY OF THE INVENTION It is an object of the present invention to solve the above-mentioned problems and to provide an angular velocity detecting device capable of improving the angular velocity detecting accuracy and a driving method thereof.
【００１２】[0012]
【課題を解決するための手段】上記目的を達成するため
に、本発明の角速度検出装置およびその駆動方法は、下
記記載の手段を採用する。In order to achieve the above object, an angular velocity detecting device and a driving method thereof according to the present invention employ the following means.
【００１３】本発明の角速度検出装置では、面内（面
外）方向に自励振動する駆動用枝と駆動用枝に同期して
面内（面外）振動し、回転にともなうコリオリ力によっ
て面外（面内）振動する少なくとも一対の検出電極を有
する検出用枝とを有する振動子と、振動子の駆動用枝が
自励振動するための発振回路と、振動子の検出用枝の検
出電極に接続し、帰還容量と演算増幅器とからなる電流
電圧変換回路と高域カット回路とを有する検出回路と、
検出回路の出力を発振回路の出力で検波する検波回路
と、検波回路の交流出力をカットするローパスフィルタ
とを備えたことを特徴とする。In the angular velocity detecting device according to the present invention, the drive branch vibrating in the in-plane (out-of-plane) direction and the in-plane (out-of-plane) vibration synchronized with the drive branch, and the Coriolis force accompanying the rotation causes the surface to vibrate. A vibrator having a detection branch having at least a pair of detection electrodes vibrating outside (in plane), an oscillation circuit for self-exciting a driving branch of the vibrator, and a detection electrode of the vibrator detection branch And a detection circuit having a high-frequency cutoff circuit and a current-voltage conversion circuit including a feedback capacitor and an operational amplifier,
It is characterized by comprising a detection circuit for detecting the output of the detection circuit by the output of the oscillation circuit, and a low-pass filter for cutting off the AC output of the detection circuit.
【００１４】本発明の角速度検出装置では、面内（面
外）方向に自励振動する駆動用枝と駆動用枝に同期して
面内（面外）振動し、回転にともなうコリオリ力によっ
て面外（面内）振動する少なくとも一対の検出電極を有
する検出用枝とを有する振動子と、振動子の駆動用枝が
自励振動するための発振回路と、検出用枝の第１の検出
電極とプラス入力端子に接続した抵抗とを同電位のアー
ス線に接続し、第２の検出電極とマイナス入力端子とを
接続し、マイナス入力端子と出力端子とを帰還容量Ｃｆ
を介して接続し、さらに出力端子とプラス入力端子とを
高域カット回路を介して接続した演算増幅器からなる検
出回路と検出電圧出力を発振回路出力で検波する検波回
路と検波回路の交流出力をカットするローパスフィルタ
とを備えたことを特徴とする。In the angular velocity detecting device according to the present invention, the drive branch vibrates in the in-plane (out-of-plane) direction and vibrates in-plane (out-of-plane) in synchronization with the drive branch, and the Coriolis force accompanying rotation causes the surface to vibrate. A vibrator having a detection branch having at least a pair of detection electrodes vibrating outside (in plane), an oscillation circuit for self-exciting a driving branch of the vibrator, and a first detection electrode of the detection branch And the resistor connected to the positive input terminal are connected to a ground wire having the same potential, the second detection electrode is connected to the negative input terminal, and the negative input terminal and the output terminal are connected to the feedback capacitance Cf.
And a detection circuit consisting of an operational amplifier in which the output terminal and the plus input terminal are connected via a high-frequency cutoff circuit, a detection circuit for detecting the detection voltage output with the oscillation circuit output, and an AC output of the detection circuit. And a low-pass filter for cutting.
【００１５】本発明の角速度検出装置では、面内（面
外）方向に自励振動する駆動用枝と駆動用枝に同期して
面内（面外）振動し、回転にともなうコリオリ力によっ
て面外（面内）振動する少なくとも一対の検出電極を有
する検出用枝とを有する振動子と、振動子の駆動用枝が
自励振動するための発振回路と、検出用枝の第１の検出
電極とプラス入力端子に接続した抵抗とを同電位のアー
ス線に接続し、第２の検出電極とマイナス入力端子とを
接続し、出力端子と第１の抵抗の一端とを接続し、第１
の抵抗の他端と第２の抵抗の一端とを接続し、第２の抵
抗の他端をプラス入力端子と同電位の電圧ラインに接続
し、マイナス入力端子と第１の抵抗の他端とを帰還容量
Ｃｆを介して接続し、さらに第１の抵抗の他端とプラス
入力端子とを高域カット回路を介して接続した演算増幅
器からなる検出回路と、検出電圧出力を発振回路出力で
検波する検波回路と検波回路の交流出力をカットするロ
ーパスフィルタとを備えたことを特徴とする。In the angular velocity detecting device according to the present invention, the drive branch vibrating in the in-plane (out-of-plane) direction and the in-plane (out-of-plane) vibration synchronized with the drive branch, and the Coriolis force accompanying the rotation causes the surface to vibrate. A vibrator having a detection branch having at least a pair of detection electrodes vibrating outside (in plane), an oscillation circuit for self-exciting a driving branch of the vibrator, and a first detection electrode of the detection branch And the resistor connected to the plus input terminal are connected to a ground wire having the same potential, the second detection electrode is connected to the minus input terminal, the output terminal is connected to one end of the first resistor, and the first
The other end of the resistor is connected to one end of the second resistor, the other end of the second resistor is connected to a voltage line having the same potential as the positive input terminal, and the other end of the negative input terminal is connected to the other end of the first resistor. Is connected via a feedback capacitor Cf, and the other end of the first resistor and the plus input terminal are connected via a high-frequency cutoff circuit, and a detection voltage output is detected by an oscillation circuit output. And a low-pass filter that cuts off the AC output of the detection circuit.
【００１６】本発明の角速度検出装置の駆動方法は、面
内（面外）方向に自励振動する駆動用枝と駆動用枝に同
期して面内（面外）振動し、回転にともなうコリオリ力
によって面外（面内）振動する少なくとも一対の検出電
極を有する検出用枝とを有する振動子と、振動子の駆動
用枝が自励振動するための発振回路と、振動子の検出用
枝の検出電極に接続し、帰還容量と演算増幅器とからな
る電流電圧変換回路と高域カット回路とを有する検出回
路と、検出回路の出力を発振回路の出力で検波する検波
回路と、検波回路の交流出力をカットするローパスフィ
ルタとを備え、回転にともなうコリオリ力によって、振
動子の検出用枝の検出電極に発生する短絡電流の帰還容
量への充電電圧の直流成分を高域カット回路を介して演
算増幅器に帰還することにより、交流成分のみの検出電
圧を得ることを特徴とする。According to the driving method of the angular velocity detecting device of the present invention, there is provided a driving branch which self-oscillates in an in-plane (out-of-plane) direction, and vibrates in-plane (out-of-plane) in synchronization with the driving branch, and Coriolis accompanying rotation. A vibrator having a detection branch having at least a pair of detection electrodes vibrating out-of-plane (in-plane) by a force, an oscillation circuit for self-exciting a driving branch of the vibrator, and a detection branch of the vibrator A detection circuit having a current-voltage conversion circuit comprising a feedback capacitor and an operational amplifier and a high-frequency cutoff circuit, a detection circuit for detecting the output of the detection circuit with the output of the oscillation circuit, and a detection circuit connected to the detection electrode. A low-pass filter that cuts off the AC output, and the DC component of the charging voltage to the feedback capacitor of the short-circuit current generated at the detection electrode of the detection branch of the vibrator is applied by the Coriolis force due to rotation through the high-frequency cutoff circuit. Return to operational amplifier It allows characterized by obtaining a detection voltage of the AC components only.
【００１７】本発明の角速度検出装置の駆動方法は、面
内（面外）方向に自励振動する駆動用枝と駆動用枝に同
期して面内（面外）振動し、回転にともなうコリオリ力
によって面外（面内）振動する少なくとも一対の検出電
極を有する検出用枝とを有する振動子と、振動子の駆動
用枝が自励振動するための発振回路と、検出用枝の第１
の検出電極とプラス入力端子に接続した抵抗とを同電位
のアース線に接続し、第２の検出電極とマイナス入力端
子とを接続し、マイナス入力端子と出力端子とを帰還容
量Ｃｆを介して接続し、さらに出力端子とプラス入力端
子とを高域カット回路を介して接続した演算増幅器から
なる演算増幅器からなる検出回路と、検出回路の出力を
発振回路の出力で検波する検波回路と、検波回路の交流
出力をカットするローパスフィルタとを備え、回転にと
もなうコリオリ力によって、振動子の検出用枝の検出電
極に発生する短絡電流の帰還容量への充電電圧の直流成
分を高域カット回路を介して演算増幅器に帰還すること
により、交流成分のみの検出電圧を得ることを特徴とす
る。According to the driving method of the angular velocity detecting device of the present invention, a driving branch which self-oscillates in an in-plane (out-of-plane) direction and an in-plane (out-of-plane) vibration synchronized with the driving branch and Coriolis accompanying rotation are provided. A vibrator having a detection branch having at least a pair of detection electrodes vibrating out-of-plane (in-plane) by a force, an oscillation circuit for self-exciting a driving branch of the vibrator, and a first detection branch
Is connected to the ground wire having the same potential, the second detection electrode is connected to the negative input terminal, and the negative input terminal and the output terminal are connected via the feedback capacitance Cf. A detection circuit comprising an operational amplifier having an operational amplifier connected to the output terminal and a plus input terminal via a high-frequency cutoff circuit, a detection circuit for detecting an output of the detection circuit by an output of the oscillation circuit, and a detection circuit. A low-pass filter that cuts off the AC output of the circuit, and a high-frequency cutoff circuit that cuts the DC component of the charging voltage to the feedback capacitor of the short-circuit current generated on the detection electrode of the detection branch of the vibrator due to the Coriolis force accompanying rotation. It is characterized in that a detection voltage of only the AC component is obtained by feeding back to the operational amplifier via the control amplifier.
【００１８】本発明の角速度検出装置の駆動方法は、面
内（面外）方向に自励振動する駆動用枝と駆動用枝に同
期して面内（面外）振動し、回転にともなうコリオリ力
によって面外（面内）振動する少なくとも一対の検出電
極を有する検出用枝とを有する振動子と、振動子の駆動
用枝が自励振動するための発振回路と、検出用枝の第１
の検出電極とプラス入力端子に接続した抵抗とを同電位
のアース線に接続し、第２の検出電極とマイナス入力端
子とを接続し、出力端子と第１の抵抗の一端とを接続
し、第１の抵抗の他端と第２の抵抗の一端とを接続し、
第２の抵抗の他端をプラス入力端子と同電位の電圧ライ
ンに接続し、マイナス入力端子と第１の抵抗の他端とを
帰還容量Ｃｆを介して接続し、さらに第１の抵抗の他端
とプラス入力端子とを高域カット回路を介して接続した
演算増幅器からなる検出回路と、検出回路の出力を発振
回路の出力で検波する検波回路と、検波回路の交流出力
をカットするローパスフィルタとを備え、回転にともな
うコリオリ力によって、振動子の検出用枝の検出電極に
発生する短絡電流の帰還容量への充電電圧の直流成分を
高域カット回路を介して演算増幅器に帰還することによ
り、交流成分のみの検出電圧を得ることを特徴とする。According to the driving method of the angular velocity detecting device of the present invention, a driving branch which self-oscillates in an in-plane (out-of-plane) direction and an in-plane (out-of-plane) vibration synchronized with the driving branch and Coriolis accompanying rotation are provided. A vibrator having a detection branch having at least a pair of detection electrodes vibrating out-of-plane (in-plane) by a force, an oscillation circuit for self-exciting a driving branch of the vibrator, and a first detection branch
Connecting the detection electrode and the resistor connected to the plus input terminal to a ground wire of the same potential, connecting the second detection electrode and the minus input terminal, connecting the output terminal to one end of the first resistor, Connecting the other end of the first resistor and one end of the second resistor,
The other end of the second resistor is connected to a voltage line having the same potential as the plus input terminal, the minus input terminal is connected to the other end of the first resistor via a feedback capacitor Cf, and the other end of the first resistor is connected to the other end. A detection circuit consisting of an operational amplifier whose end and the positive input terminal are connected via a high-frequency cutoff circuit, a detection circuit that detects the output of the detection circuit with the output of the oscillation circuit, and a low-pass filter that cuts off the AC output of the detection circuit The DC component of the charging voltage to the feedback capacitor of the short-circuit current generated on the detection electrode of the detection branch of the vibrator is fed back to the operational amplifier via the high-frequency cutoff circuit by the Coriolis force accompanying the rotation. , A detection voltage of only the AC component is obtained.
【００１９】〔作用〕本発明の角速度検出装置において
は、圧電性を有する単結晶体の水晶を音叉あるいは三叉
振動子に用いたため、形状が単純になり、電極は真空蒸
着法やスパッタリング法により形成でき、圧電素子を接
着する必要がないため、組立工程が簡単になり、全体形
状も小さく、低価格化も可能になる。また、水晶を振動
体に用いるため、温度特性も改良される。[Operation] In the angular velocity detecting device of the present invention, since a single crystal quartz having piezoelectricity is used for the tuning fork or the three-forked vibrator, the shape becomes simple, and the electrodes are formed by a vacuum evaporation method or a sputtering method. Since there is no need to bond the piezoelectric elements, the assembly process is simplified, the overall shape is small, and the cost can be reduced. Further, since quartz is used for the vibrator, the temperature characteristics are also improved.
【００２０】水晶振動子の一つの枝を検出用枝とし、そ
の検出用枝に一対の検出電極を設けると、二つの電極間
の等価電氣インピーダンスは、１０ｋΩ以上となるが、
従来の電圧検出回路の代わりに、等価的に二つの検出電
極を短絡し、短絡電流を電圧に変換する検出回路を用い
たため、ノイズ電圧の影響を受けることなく従来よりも
大きな出力が得られる。When one branch of the crystal unit is used as a detection branch and a pair of detection electrodes are provided on the detection branch, the equivalent electrical impedance between the two electrodes becomes 10 kΩ or more.
Instead of the conventional voltage detection circuit, a detection circuit that short-circuits two detection electrodes equivalently and converts a short-circuit current into a voltage is used, so that a larger output than before can be obtained without being affected by noise voltage.
【００２１】[0021]
【発明の実施の形態】以下図面を用いて本発明を実施す
るための最良の形態における角速度検出装置の構成を説
明する。図１は本発明の実施形態における角速度検出装
置を示す全体システム図であり、図２は本発明の実施形
態における角速度検出装置の一部である検出回路の具体
的一実施例の動作原理図である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The configuration of an angular velocity detecting device in the best mode for carrying out the present invention will be described below with reference to the drawings. FIG. 1 is an overall system diagram showing an angular velocity detecting device according to an embodiment of the present invention, and FIG. 2 is an operation principle diagram of a specific example of a detecting circuit which is a part of the angular velocity detecting device according to the embodiment of the present invention. is there.
【００２２】図３は本発明の実施形態における水晶振動
子の具体的実施例を斜め右表からみた斜視図であり、図
４は斜め右裏からみた斜視図である。図５は本発明の他
の実施形態における水晶振動子の電極構造を示す断面図
である。図６は本発明の実施形態における水晶振動子が
右回転の角速度をうけたときの、図７は左回転の角速度
を受けたときの図１の角速度検出装置の全体システム各
部の波形図である。図８は本発明の実施形態における角
速度検出装置の一部である検出回路の他の具体的実施例
である。以下、適時各図を参照しながら説明する。FIG. 3 is a perspective view of a specific example of the crystal unit according to the embodiment of the present invention as viewed obliquely from the right side, and FIG. 4 is a perspective view as viewed obliquely from the back right side. FIG. 5 is a cross-sectional view showing an electrode structure of a crystal resonator according to another embodiment of the present invention. FIG. 6 is a waveform diagram of each part of the whole system of the angular velocity detecting device of FIG. 1 when the crystal unit receives a clockwise angular velocity in the embodiment of the present invention, and FIG. . FIG. 8 shows another specific example of the detection circuit which is a part of the angular velocity detection device according to the embodiment of the present invention. Hereinafter, description will be made with reference to the drawings as appropriate.
【００２３】〔全体システムの説明：図１〕角速度検出
装置の全体システムは、水晶振動子１と発振回路２と移
相回路３と波形整形回路４と検出回路５と反転回路６と
検波回路７とローパスフィルタ８とから構成され、ロー
パスフィルタ８の出力が角速度出力９となる。水晶振動
子１は、図３と図４とに示すように、単結晶水晶から一
体に形成した駆動用枝１０と検出用枝１１とを備え、駆
動用枝１０には駆動電極１３、１４、１５、１６が検出
用枝１１には検出電極１７、１８、１９、２０が真空蒸
着法などにより形成される。[Explanation of the whole system: FIG. 1] The whole system of the angular velocity detecting device comprises a quartz oscillator 1, an oscillation circuit 2, a phase shift circuit 3, a waveform shaping circuit 4, a detection circuit 5, an inversion circuit 6, and a detection circuit 7. And the low-pass filter 8, and the output of the low-pass filter 8 is an angular velocity output 9. As shown in FIGS. 3 and 4, the crystal resonator 1 includes a drive branch 10 and a detection branch 11 integrally formed from single crystal quartz, and the drive branch 10 includes drive electrodes 13, 14, Detection electrodes 17, 18, 19 and 20 are formed on the detection branches 11 and 16 by a vacuum deposition method or the like.
【００２４】発振回路２は、演算増幅器２５と演算増幅
器２６と抵抗２７，２９，３０と、容量２８とからな
る。水晶振動子１の駆動用枝１０の駆動電極１５と駆動
電極１６は、駆動用枝１０上で接続し、導線７６により
接続端子８２と接続する。接続端子７６は導線５０によ
り、演算増幅器２５のマイナス入力端子に接続する。ま
た、駆動電極１３と駆動電極１４とは、導線７７により
接続端子８３と接続する。接続端子８３は導線５１によ
り演算増幅器２６の出力端子に接続する。The oscillation circuit 2 comprises an operational amplifier 25, an operational amplifier 26, resistors 27, 29, 30 and a capacitor 28. The drive electrode 15 and the drive electrode 16 of the drive branch 10 of the crystal unit 1 are connected on the drive branch 10, and are connected to the connection terminal 82 by the conducting wire 76. The connection terminal 76 is connected to the minus input terminal of the operational amplifier 25 via the conductor 50. Further, the drive electrode 13 and the drive electrode 14 are connected to the connection terminal 83 by the conducting wire 77. The connection terminal 83 is connected to the output terminal of the operational amplifier 26 via the conductor 51.
【００２５】演算増幅器２５のプラス入力端子はアース
線５７に、マイナス入力端子は抵抗２７を介して出力端
子に接続している。演算増幅器２５の出力端子は容量２
８と抵抗３０とを介して演算増幅器２６のマイナス入力
端子に接続する。マイナス入力端子は抵抗２９を介して
出力端子に接続し、プラス入力端子はアース線５７に接
続する。The positive input terminal of the operational amplifier 25 is connected to the ground line 57, and the negative input terminal is connected to the output terminal via the resistor 27. The output terminal of the operational amplifier 25 has a capacitance of 2
8 and the resistor 30 are connected to the minus input terminal of the operational amplifier 26. The negative input terminal is connected to the output terminal via the resistor 29, and the positive input terminal is connected to the ground line 57.
【００２６】ここに、演算増幅器２６は反転増幅器であ
り、抵抗２９と抵抗３０との抵抗比によって電圧増幅度
を設定している。また、演算増幅器２５は反転電流増幅
器であり、水晶振動子１の駆動用枝１０に流れる電流を
電圧に変換して、増幅器２６にフィードバックする。Here, the operational amplifier 26 is an inverting amplifier, and the voltage amplification is set by the resistance ratio between the resistors 29 and 30. The operational amplifier 25 is an inverting current amplifier, and converts a current flowing through the driving branch 10 of the crystal unit 1 into a voltage, and feeds back the voltage to the amplifier 26.
【００２７】検出回路５は、演算増幅器３８と帰還容量
３９と抵抗８８と、抵抗６１と容量６９とからなる高域
カット回路とからなる。水晶振動子１の検出用枝１１の
検出電極１７と検出電極２０とは、検出用枝１１の上部
で接続し、導線７９により接続端子８５に接続する。接
続端子８５は導線５６により演算増幅器３８のマイナス
入力端子に接続する。さらに、検出用枝１１の検出電極
１８と検出電極１９とは、検出用枝１１の下部で接続
し、導線７８により接続端子８４に接続する。接続端子
８４はアース線５７に接続する。The detection circuit 5 comprises a high-frequency cutoff circuit comprising an operational amplifier 38, a feedback capacitance 39, a resistor 88, and a resistor 61 and a capacitor 69. The detection electrode 17 and the detection electrode 20 of the detection branch 11 of the crystal unit 1 are connected at an upper portion of the detection branch 11, and are connected to a connection terminal 85 by a conducting wire 79. The connection terminal 85 is connected to the minus input terminal of the operational amplifier 38 by the conducting wire 56. Further, the detection electrode 18 and the detection electrode 19 of the detection branch 11 are connected at a lower portion of the detection branch 11, and are connected to a connection terminal 84 by a conductor 78. The connection terminal 84 is connected to the ground wire 57.
【００２８】検出回路５の演算増幅器３８のマイナス入
力端子は帰還容量３９を介して、出力端子に接続され
る。さなにまた、演算増幅器３８のプラス入力端子は、
抵抗８８を介して検出電極１８と検出電極１９と同電位
のアース線５７に接続する。The negative input terminal of the operational amplifier 38 of the detection circuit 5 is connected to the output terminal via a feedback capacitance 39. In addition, the plus input terminal of the operational amplifier 38 is
The detection electrode 18 and the detection electrode 19 are connected to the ground line 57 having the same potential via the resistor 88.
【００２９】演算増幅器３８の出力端子は、抵抗６１の
一端に接続し抵抗６１の他端は容量６９の一端に接続す
る。さらに、抵抗６１の他端は演算増幅器３８のプラス
入力端子に接続し、容量６９の他端はアース線５７に接
続する。ここに、抵抗６１と容量６９とは高域カット回
路である。The output terminal of the operational amplifier 38 is connected to one end of a resistor 61, and the other end of the resistor 61 is connected to one end of a capacitor 69. Further, the other end of the resistor 61 is connected to the plus input terminal of the operational amplifier 38, and the other end of the capacitor 69 is connected to the ground line 57. Here, the resistor 61 and the capacitor 69 are a high-frequency cut circuit.
【００３０】帰還容量３９には検出用枝１１の検出電極
１７、２０と検出電極１８、１９とのあいだを等価的に
短絡した短絡電流が流れ、帰還容量３９には電気量が蓄
積される。A short-circuit current equivalently short-circuiting between the detection electrodes 17 and 20 of the detection branch 11 and the detection electrodes 18 and 19 flows through the feedback capacitance 39, and the feedback capacitance 39 stores an electric quantity.
【００３１】移相回路３は演算増幅器３１と抵抗３２、
３３、３４と容量３５とからなる。発振回路２の出力
は、容量２８に接続した導線５２により抵抗３２を介し
て演算増幅器３１のマイナス入力端子と、抵抗３４を介
して演算増幅器のプラス入力端子と接続する。また、プ
ラス入力端子は容量３５を介してアース線５７に接続
し、マイナス入力端子は抵抗３３を介して出力端子に接
続する。The phase shift circuit 3 comprises an operational amplifier 31 and a resistor 32,
33 and 34 and a capacitor 35. The output of the oscillating circuit 2 is connected to the minus input terminal of the operational amplifier 31 via a resistor 32 via a conductor 52 connected to the capacitor 28 and the plus input terminal of the operational amplifier via a resistor 34. The plus input terminal is connected to the ground line 57 via the capacitor 35, and the minus input terminal is connected to the output terminal via the resistor 33.
【００３２】移相回路３はオールパス・フィルターで増
幅度を変えずに、発振回路２の発振周波数の位相を変え
ることができる。The phase shift circuit 3 can change the phase of the oscillation frequency of the oscillation circuit 2 without changing the amplification degree by using an all-pass filter.
【００３３】波形整形回路４は、インバータ３６、３７
と抵抗３８とからなる。移相回路３の出力端子は導線５
３によりインバータ３６の入力端子と接続する。インバ
ータ３６の入力端子と出力端子とは抵抗３８を介して接
続する。インバータ３６の出力端子はインバータ３７の
入力端子に接続する。導線５４と導線５５には、位相は
１８０度反転したパルス幅１体の検波用パルスが発生す
る。The waveform shaping circuit 4 includes inverters 36 and 37
And a resistor 38. The output terminal of the phase shift circuit 3 is a conductor 5
3 is connected to the input terminal of the inverter 36. The input terminal and the output terminal of the inverter 36 are connected via a resistor 38. The output terminal of the inverter 36 is connected to the input terminal of the inverter 37. A detection pulse having a pulse width of 180 degrees and a phase inverted by 180 degrees is generated on the conductors 54 and 55.
【００３４】反転回路６は演算増幅器４０と抵抗４１、
４２とからなる。検出回路５の出力端子は、導線５８に
より反転回路６の抵抗４１を介して演算増幅器４０のマ
イナス入力端子と接続する。マイナス入力端子は抵抗４
２を介して出力端子と接続する。プラス入力端子はアー
ス線５７に接続する。反転回路６は検出回路５の交流出
力電圧を増幅度を変えずに位相を１８０度反転する。The inverting circuit 6 includes an operational amplifier 40 and a resistor 41,
42. An output terminal of the detection circuit 5 is connected to a minus input terminal of the operational amplifier 40 via a resistor 41 of the inverting circuit 6 by a conducting wire 58. Negative input terminal is resistor 4
2 and an output terminal. The positive input terminal is connected to the ground line 57. The inversion circuit 6 inverts the phase of the AC output voltage of the detection circuit 5 by 180 degrees without changing the amplification degree.
【００３５】検波回路７はトランスミッションゲート４
３とトランスミッションゲート４４とからなる。検出回
路５の出力端子は、導線６８によりトランスミッション
ゲート４３の入力端子と、反転回路６の出力端子は導線
５９により、トランスミッションゲート４４の入力端子
と接続する。The detection circuit 7 includes a transmission gate 4
3 and a transmission gate 44. The output terminal of the detection circuit 5 is connected to the input terminal of the transmission gate 43 by a conductor 68, and the output terminal of the inverting circuit 6 is connected to the input terminal of the transmission gate 44 by a conductor 59.
【００３６】波形整形回路４のインバータ３６の出力端
子は、導線５４によりトランスミッションゲート４３の
反転制御端子とトランスミッションゲート４４の非反転
制御端子に接続する。また、インバータ３７の出力端子
は、導線５５によりトランスミッションゲート４３の非
反転制御端子とトランスミッションゲート４４の反転制
御端子とに接続する。さらにまた、トランスミッション
ゲート４３とトランスミッションゲート４４との出力端
子を導線６０に接続する。The output terminal of the inverter 36 of the waveform shaping circuit 4 is connected to the inversion control terminal of the transmission gate 43 and the non-inversion control terminal of the transmission gate 44 by a conducting wire 54. The output terminal of the inverter 37 is connected to the non-inversion control terminal of the transmission gate 43 and the inversion control terminal of the transmission gate 44 by a conducting wire 55. Furthermore, the output terminals of the transmission gate 43 and the transmission gate 44 are connected to the conductor 60.
【００３７】ローパスフィルター８は演算増幅器４５と
抵抗４６、４７と容量４８、４９とからなる。検波回路
７の各トランスミッションゲートの出力端子は導線６０
によりローパスフィルター８の抵抗４６と抵抗４７とを
介して演算増幅器４５のプラス入力端子に接続する。演
算増幅器４５のプラス入力端子は容量４９を介してアー
ス線５７に接続する。抵抗４６と抵抗４７との接続部分
は容量４８を介して演算増幅器４５のマイナス入力端子
と出力端子に接続する。ローパスフィルター８はアクテ
ィブフィルターの一種である電圧ソース型フィルターで
あり、高域は４０ｄＢ／ｄｅｃで減衰する。The low-pass filter 8 comprises an operational amplifier 45, resistors 46 and 47, and capacitors 48 and 49. The output terminal of each transmission gate of the detection circuit 7 is a conductor 60
To the positive input terminal of the operational amplifier 45 via the resistors 46 and 47 of the low-pass filter 8. The positive input terminal of the operational amplifier 45 is connected to a ground line 57 via a capacitor 49. The connection between the resistors 46 and 47 is connected to the minus input terminal and the output terminal of the operational amplifier 45 via the capacitor 48. The low-pass filter 8 is a voltage source type filter which is a kind of an active filter, and a high frequency band is attenuated at 40 dB / dec.
【００３８】〔角速度検出装置の動作説明〕つぎに以上
の構成による角速度検出装置の動作を説明する。発振回
路２は反転電圧増幅回路である演算増幅器２６と反転電
流増幅回路である演算増幅器２５とからなる正帰還の発
振器であり、そのループの中に周波数選択素子として水
晶振動子１の駆動用枝１０を配置してあり、直列共振周
波数近傍の周波数ｆ０（Ｈｚ）で発振し、駆動用枝１０
は図３のＸ方向に面内振動する。ここに、図３のＸは水
晶の電氣軸に、Ｙは水晶の機械軸に、Ｚは水晶光軸にほ
ぼ平行であるが、最適な温度特性を得るため１度から１
０度程度回転することもある。[Description of Operation of Angular Velocity Detecting Apparatus] Next, the operation of the angular velocity detecting apparatus having the above configuration will be described. The oscillation circuit 2 is a positive feedback oscillator including an operational amplifier 26 which is an inverting voltage amplifier circuit and an operational amplifier 25 which is an inverting current amplifier circuit, and includes a driving branch of the crystal unit 1 as a frequency selection element in a loop thereof. 10 oscillate at a frequency f0 (Hz) near the series resonance frequency,
Vibrates in the plane in the X direction of FIG. Here, X in FIG. 3 is substantially parallel to the electric axis of the crystal, Y is the mechanical axis of the crystal, and Z is substantially parallel to the optical axis of the crystal.
It may rotate about 0 degrees.
【００３９】反転電流増幅回路である演算増幅器２５は
水晶振動子１の駆動用枝１０の流れる交流の水晶電流を
交流電圧に変換した出力とする。すなわち、図６および
図７各部の波形図の５２に示すように、導線５２には、
発振周波数ｆ０（Ｈｚ）の信号電圧が発生する。The operational amplifier 25, which is an inverting current amplifier circuit, outputs an AC voltage obtained by converting an AC crystal current flowing through the drive branch 10 of the crystal unit 1 into an AC voltage. That is, as shown in the waveform diagram 52 of each part of FIG. 6 and FIG.
A signal voltage having an oscillation frequency f0 (Hz) is generated.
【００４０】水晶振動子１の駆動用枝１０に同期して検
出用枝１１も、Ｘ方向に面内振動する。このとき水晶振
動子１がベクトル軸がＹ方向に平行な角速度ωの回転を
受けると、面内振動と直角なＺ方向に角速度ωに比例し
たコリオリ力Ｆが働く。Ｆは以下のように表せる。 Ｆ＝２・ｍ・ω・Ｖ ここに、ｍは駆動用枝１０または検出用枝１１の等価質
量、Ｖは周波数 ｆ０（Ｈｚ）で振動する速度である。
このコリオリ力Ｆにより面内振動と同じ周波数ｆ０（Ｈ
ｚ）の面外振動が励振される。この振動により検出用枝
１１の検出電極にプラス電荷とマイナス電荷とが交互に
発生する。The detection branch 11 also oscillates in-plane in the X direction in synchronization with the drive branch 10 of the crystal unit 1. At this time, when the crystal resonator 1 is rotated at an angular velocity ω whose vector axis is parallel to the Y direction, a Coriolis force F proportional to the angular velocity ω acts in the Z direction perpendicular to the in-plane vibration. F can be expressed as follows. F = 2 · m · ω · V Here, m is the equivalent mass of the drive branch 10 or the detection branch 11, and V is the speed of vibration at the frequency f0 (Hz).
Due to this Coriolis force F, the same frequency f0 (H
The out-of-plane vibration of z) is excited. Due to this vibration, positive charges and negative charges are generated alternately on the detection electrodes of the detection branches 11.
【００４１】検出用枝１１が受けるコリオリ力Ｆにした
がって、この検出用枝１１の検出電極１８と検出電極１
９とに、プラス電荷が、検出電極１７と検出電極２０と
にマイナス電荷が発生している状態と、検出電極１８と
検出電極１９とにマイナス電荷が、検出電極１７と検出
電極２０とにプラス電荷が発生する状態が交互に生じ
る。According to the Coriolis force F applied to the detection branch 11, the detection electrode 18 and the detection electrode 1 of the detection branch 11 are
9, a state in which a positive charge is generated in the detection electrode 17 and the detection electrode 20, and a state in which a negative charge is generated in the detection electrode 18 and the detection electrode 20. The states in which charges are generated alternately occur.
【００４２】〔水晶振動子の検出用枝１１と検出回路５
との動作説明：図２〕ここで、水晶振動子１の検出用枝
１１と検出回路５との動作について、図２を用いて詳細
に説明する。図２の点線内は、コリオリ力Ｆによって水
晶振動子の駆動用枝１０と検出用枝１１とが発振周波数
ｆ０（Ｈｚ）で面外振動するときの機械的定数を電気的
等価回路に置き換えたものである。[Detection Branch 11 of Crystal Resonator and Detection Circuit 5
2] Here, the operation of the detection branch 11 of the crystal unit 1 and the detection circuit 5 will be described in detail with reference to FIG. In the dotted line in FIG. 2, the mechanical constants when the drive branch 10 and the detection branch 11 of the quartz oscillator vibrate out of plane at the oscillation frequency f0 (Hz) due to the Coriolis force F are replaced with an electric equivalent circuit. Things.
【００４３】各等価回路定数のうち、Ｃ０（６２）は検
出電極１８、１９と検出電極１７、２０とのあいだの電
極間容量や形状寸法などによる等価並列容量、Ｌ１（６
３）は等価インダクタンス、Ｃ１（６４）は等価容量、
Ｒ１（６５）は等価抵抗である。水晶振動子１の機械的
な等価質量ｍ、等価コンプライアンスｃ、等価粘性抵抗
係数ｒ、比例定数である力係数Ａとすると、 Ｌ１＝ｍ／Ａ2 Ｃ１＝ｃＡ2 Ｒ１＝ｒ／Ａ2 の関係がある。Among the equivalent circuit constants, C0 (62) is the equivalent parallel capacitance between the detection electrodes 18, 19 and the detection electrodes 17, 20 due to the interelectrode capacitance and the shape and size, and L1 (6).
3) is equivalent inductance, C1 (64) is equivalent capacitance,
R1 (65) is an equivalent resistance. Assuming that the mechanical equivalent mass m, the equivalent compliance c, the equivalent viscous resistance coefficient r, and the force coefficient A, which is a proportionality constant, of the crystal unit 1 are: L1 = m / A 2 C1 = cA 2 R1 = r / A 2 There is.
【００４４】水晶振動子の具体的な実施形態として、形
状が時計用水晶振動子で厚さのみを変更する例を示す。
水晶振動子の面内振動の駆動用枝１０と検出用枝１１の
幅を５９０μｍとし、各枝の長さを３６６０μｍとし、
振動子の全長を５９００μｍとし、面外振動の教師周波
数ｆ１（Ｈｚ）を面内振動の共振周波数ｆ０（Ｈｚ）に
近づけるために厚さを７００μｍとする。As a specific embodiment of the quartz oscillator, an example in which only a thickness is changed in a quartz oscillator for a timepiece will be described.
The width of the drive branch 10 and the detection branch 11 for in-plane vibration of the crystal resonator is 590 μm, and the length of each branch is 3660 μm.
The total length of the vibrator is 5900 μm, and the thickness is 700 μm so that the teacher frequency f1 (Hz) of the out-of-plane vibration approaches the resonance frequency f0 (Hz) of the in-plane vibration.
【００４５】この水晶振動子の真空中で面外振動すると
きの等価回路定数は、等価抵抗Ｒ１＝１０ｋΩ以上、等
価容量Ｃ１＝１×１０-15 Ｆ、等価インダクタンスＬ１
＝２３．１×１０3 Ｈとなり、面外振動の共振周波数は
ｆ１は３３ｋＨｚとなる。大気中または１気圧の不活性
ガス中では、等価抵抗は約１０倍のＲ１＝１００ｋΩ以
上に増加する。The equivalent circuit constants when the crystal unit vibrates out of plane in a vacuum are: equivalent resistance R1 = 10 kΩ or more, equivalent capacitance C1 = 1 × 10 −15 F, equivalent inductance L1
= 23.1 × 10 3 H, and the resonance frequency f1 of the out-of-plane vibration is 33 kHz. In the atmosphere or an inert gas at 1 atm, the equivalent resistance increases about 10 times to R1 = 100 kΩ or more.
【００４６】水晶振動子１の検出用枝１１の検出電極の
等価容量Ｃ０の一端と、演算増幅器３８のプラス入力端
子とは抵抗８８を介して同じアース線５７に接続してい
る。一方、等価容量Ｃ０の他端はマイナス入力端子に接
続している。したがって、演算増幅器３８のマイナス入
力端子はバーチュアル・ショートされてプラス入力端子
と同じ電位になり、等価的に短絡された状態になる。し
かしながら、演算増幅器３８のマイナス入力端子とプラ
ス入力端子間の入力抵抗Ｒｉ（６６）は非常に大きく、
ほぼ無限大である。このため、等価的な短絡電流Ｉｓが
帰還容量Ｃｆ（３９）に流れる。One end of the equivalent capacitance C 0 of the detection electrode of the detection branch 11 of the crystal unit 1 and the positive input terminal of the operational amplifier 38 are connected to the same ground line 57 via a resistor 88. On the other hand, the other end of the equivalent capacitance C0 is connected to a negative input terminal. Therefore, the negative input terminal of the operational amplifier 38 is virtual-short-circuited, has the same potential as the positive input terminal, and is equivalently short-circuited. However, the input resistance Ri (66) between the minus input terminal and the plus input terminal of the operational amplifier 38 is very large,
It is almost infinite. Therefore, an equivalent short-circuit current Is flows through the feedback capacitance Cf (39).
【００４７】この短絡電流Ｉｓは Ｉｓ＝Ｉ０・ｓｉｎ２πｆ０・ｔ と表せる。ここで、ｆ０は振動子の共振周波数である。
この短絡電流Ｉｓは帰還容量Ｃｆ（３９）を通って流
れ、演算増幅器３８の出力電圧Ｖは Ｖ＝（−１／Ｃｆ）∫Ｉｓ・ｄｔ ＝（−１／Ｃｆ）∫Ｉ０・ｓｉｎ２πｆ０・ｔ・ｄｔ ＝（−Ｉ０／２πｆ０・Ｃｆ１）（−ｃｏｓ２πｆ０・ｔ＋１） となる。This short-circuit current Is can be expressed as Is = I0 · sin2πf0 · t. Here, f0 is the resonance frequency of the vibrator.
This short-circuit current Is flows through the feedback capacitance Cf (39), and the output voltage V of the operational amplifier 38 is V = (− 1 / Cf) ∫Is · dt = (− 1 / Cf) ∫I0 · sin2πf0 · t · dt = (− I0 / 2πf0 · Cf1) (− cos2πf0 · t + 1)
【００４８】ここに、水晶振動子の検出電極の短絡電流
は数ピコアンペアから数マイクロアンペアと小さいた
め、演算増幅器３８は、入力電流に比べて、フェムトア
ンペアオーダーの非常に小さいバイアス電流が要求され
るため、低雑音のＦＥＴ入力の演算増幅器あるいはＭＯ
Ｓ演算増幅器を用いる。Here, since the short-circuit current of the detection electrode of the crystal unit is as small as several pico-amps to several micro-amps, the operational amplifier 38 is required to have a very small bias current on the order of femto-amperes as compared with the input current. Therefore, a low noise FET input operational amplifier or MO
An S operational amplifier is used.
【００４９】演算増幅器３８の上記した出力電圧Ｖのう
ち、直流出力分は演算増幅器３８の出力端子に接続した
抵抗６１と容量６９とからなるカットオフ周波数が発振
周波数ｆ０（Ｈｚ）を含む高域カット回路により演算増
幅器３８のプラス入力端子にフィードバックすることに
より、直流出力成分をゼロになるように制御する。この
ため出力電圧は交流出力成分のみの出力電圧Ｖ０のみの Ｖ０＝（１／２πｆ０・Ｃｆ１）（ｃｏｓ２πｆ０・
ｔ） となる。また、高域カット回路は出力電圧Ｖのオフセッ
トドリフト変動の補償も行う。Of the above-mentioned output voltage V of the operational amplifier 38, the DC output component has a cut-off frequency composed of a resistor 61 and a capacitor 69 connected to the output terminal of the operational amplifier 38 in a high frequency range including the oscillation frequency f0 (Hz). By feeding back to the plus input terminal of the operational amplifier 38 by the cut circuit, the DC output component is controlled to be zero. Therefore, the output voltage is V0 = (1 / 2πf0 · Cf1) (cos2πf0 ·) of only the output voltage V0 of only the AC output component.
t) The high-frequency cutoff circuit also compensates for offset drift fluctuation of the output voltage V.
【００５０】〔全体システム図の動作説明：図６と図
７〕以上で検出回路５の動作の説明を終わり、図１の全
体システム図の動作の説明を、図６と図７の各部の波形
図を参照しながら行う。[Explanation of Operation of Overall System Diagram: FIGS. 6 and 7] The operation of the detection circuit 5 has been described above, and the operation of the overall system diagram of FIG. 1 will be described with reference to FIGS. 6 and 7. Perform this with reference to the figure.
【００５１】図６はＹ軸方向の右回転する角速度を受け
たときの波形図である。発振回路２の出力は周波数ｆ０
（Ｈｚ）の電圧波形５２であり、この電圧波形５２は、
移相回路３により検出回路５の出力の電圧波形５８と同
相にするため、時刻ｔ＝ｔ１が時刻ｔ＝ｔ２に対応する
ように全体が移相されて、電圧波形５３となる。この移
相回路３は、発振回路２の後段に入れる代わりに、検出
回路５の後段に入れて電圧波形５８を移相する構成とす
ることもできる。FIG. 6 is a waveform diagram when an angular velocity of clockwise rotation in the Y-axis direction is received. The output of the oscillation circuit 2 has a frequency f0
(Hz) voltage waveform 52, and this voltage waveform 52
In order for the phase shift circuit 3 to have the same phase as the voltage waveform 58 of the output of the detection circuit 5, the entire phase is shifted so that the time t = t1 corresponds to the time t = t2, and a voltage waveform 53 is obtained. The phase shift circuit 3 may be arranged after the detection circuit 5 to shift the phase of the voltage waveform 58, instead of being arranged after the oscillation circuit 2.
【００５２】右回転の角速度を受けると、検出回路５は
角速度に比例したピーク電圧の電圧波形５８を発生す
る。この電圧波形５８は反転回路６で１８０度反転し
て、同じピーク値の電圧波形５９となる。When receiving the clockwise angular velocity, the detection circuit 5 generates a voltage waveform 58 having a peak voltage proportional to the angular velocity. This voltage waveform 58 is inverted by 180 degrees by the inverting circuit 6 to become a voltage waveform 59 having the same peak value.
【００５３】移相回路３の出力の電圧波形５３は、波形
整形回路４によって、電圧波形５４と１８０度位相の異
なる電圧波形５５とになる。この電圧波形５４と電圧波
形５５とにより、検波回路７のトランスミッションゲー
ト４３が電圧波形５４がｈｉｇｈのとき、たとえば、時
刻ｔ＝ｔ２からｔ＝ｔ４、時刻ｔ＝ｔ６からｔ＝ｔ８の
間導通する。電圧波形５８のプラス部分のみが検波回路
７の出力となる。The voltage waveform 53 output from the phase shift circuit 3 is changed by the waveform shaping circuit 4 into a voltage waveform 55 which is 180 degrees out of phase with the voltage waveform 54. By the voltage waveform 54 and the voltage waveform 55, the transmission gate 43 of the detection circuit 7 conducts when the voltage waveform 54 is high, for example, from time t = t2 to t = t4 and from time t = t6 to t = t8. . Only the plus portion of the voltage waveform 58 is the output of the detection circuit 7.
【００５４】また、この電圧波形５４と電圧波形５５と
により、検波回路７のトランスミッションゲート４４が
電圧波形５５がｈｉｇｈのとき、たとえば、時刻ｔ＝ｔ
１からｔ２、ｔ＝ｔ４からｔ＝ｔ６の間導通する。電圧
波形５９のプラス部分のみが検波回路７の出力となり、
二つの波形５８と波形５９とは検波されて、プラス部分
が連続した電圧波形６０となる。この電圧波形６０が、
ローパスフィルタ８により交流成分がカットされ、角速
度に比例した正の直流出力波形９となる。Further, based on the voltage waveform 54 and the voltage waveform 55, the transmission gate 44 of the detection circuit 7 detects when the voltage waveform 55 is high, for example, at time t = t.
It conducts from 1 to t2 and from t = t4 to t = t6. Only the plus portion of the voltage waveform 59 becomes the output of the detection circuit 7,
The two waveforms 58 and 59 are detected to form a voltage waveform 60 having a continuous positive portion. This voltage waveform 60
The AC component is cut by the low-pass filter 8, and a positive DC output waveform 9 proportional to the angular velocity is obtained.
【００５５】つぎに、Ｙ軸方向の左回転する角速度を受
けたときは、図７のような波形図となる。発振回路２出
力の電圧波形５２と、移相回路３の出力の電圧波形５３
と、波形整形回路４の出力の電圧波形５４と、電圧波形
５５とは、右回転時と同じである。Next, when an angular velocity of counterclockwise rotation in the Y-axis direction is received, a waveform diagram as shown in FIG. 7 is obtained. A voltage waveform 52 output from the oscillation circuit 2 and a voltage waveform 53 output from the phase shift circuit 3
, And the voltage waveform 54 output from the waveform shaping circuit 4 and the voltage waveform 55 are the same as those at the time of clockwise rotation.
【００５６】左回転の角速度を受けると、検出回路５は
角速度に比例したピーク値の電圧波形５８を発生する。
この波形は右回転をうけたときの電圧波形を反転した波
形である。電圧波形６８は反転回路６で１８０度反転し
て同じピーク値の電圧波形５９となる。Upon receiving the left-handed angular velocity, the detection circuit 5 generates a voltage waveform 58 having a peak value proportional to the angular velocity.
This waveform is a waveform obtained by inverting the voltage waveform when the clockwise rotation is applied. The voltage waveform 68 is inverted by 180 degrees by the inverting circuit 6 to become a voltage waveform 59 having the same peak value.
【００５７】波形整形回路４の出力の電圧波形５４と５
５とにより、右回転のときに述べたように検波回路７の
トランスミッションゲート４３が電圧波形５４がｈｉｇ
ｈのとき、たとえば、時刻ｔ＝ｔ２からｔ＝ｔ４、時刻
ｔ＝ｔ６からｔ＝ｔ８のあいだ導通する。電圧波形５８
のマイナス部分のみが検波回路７の出力となる。Voltage waveforms 54 and 5 output from waveform shaping circuit 4
5, the transmission gate 43 of the detection circuit 7 changes the voltage waveform 54 to a high level as described in the case of the clockwise rotation.
At the time of h, for example, conduction is performed from time t = t2 to t = t4 and from time t = t6 to t = t8. Voltage waveform 58
Is the output of the detection circuit 7 only.
【００５８】また、この電圧波形５４と電圧波形５５と
のより、検波回路７のトランスミッションゲート４４が
電圧波形５５がｈｉｇｈのとき、たとえば、時刻ｔ＝ｔ
１からｔ＝ｔ２，ｔ＝ｔ４からｔ＝ｔ６のあいだ導通す
る。電圧波形５９のマイナス部分のみが検波回路７の出
力となり、二つの波形５８と波形５９とは検波されて、
マイナス部分が連続した電圧波形６０となる。この電圧
波形６０が、ローパスフィルタ８により交流部分がカッ
トされ、角速度に比例した負の出力電圧波形９となる。Further, based on the voltage waveform 54 and the voltage waveform 55, when the transmission gate 44 of the detection circuit 7 has the voltage waveform 55 high, for example, at time t = t
It conducts from 1 to t = t2 and t = t4 to t = t6. Only the minus part of the voltage waveform 59 becomes the output of the detection circuit 7, and the two waveforms 58 and 59 are detected,
The negative portion becomes a continuous voltage waveform 60. This voltage waveform 60 has a negative output voltage waveform 9 proportional to the angular velocity, with the AC portion cut off by the low-pass filter 8.
【００５９】このようにして、右回転の角速度を受けた
ときは、角速度に比例した正の直流の出力電圧を、左回
転の角速度を受けたときは、角速度に比例した負の直流
の出力電圧を得ることができる。In this way, when receiving a clockwise angular velocity, a positive DC output voltage proportional to the angular velocity is output, and when receiving a counterclockwise angular velocity, a negative DC output voltage proportional to the angular velocity is output. Can be obtained.
【００６０】図５は本発明の角速度検出装置の第２の実
施形態における水晶振動子の電極構造を示す断面図であ
る。図３および図４の水晶振動子に新たに駆動用枝２１
を追加して三叉振動子としたものである。駆動用枝が２
本になるため、発振の安定度が高くなる。FIG. 5 is a sectional view showing an electrode structure of a quartz oscillator in a second embodiment of the angular velocity detecting device according to the present invention. The driving branch 21 is newly added to the crystal unit shown in FIGS.
Is added to form a three-pronged vibrator. 2 drive branches
Since this is a book, the stability of oscillation increases.
【００６１】〔第２の実施形態：図８〕図８は検出回路
５の第２の実施形態を示す。検出用枝１１の検出電極１
８、１９と、プラス入力端子に接続した抵抗Ｒｉ２（８
８）を同じ電位のアース線５７に接続し、検出電極１
７、２０とマイナス入力端子とを導線５６で接続し、出
力端子と第１の抵抗Ｒａ（９１）の一端とを接続し、第
１の抵抗Ｒａ（９１）の他端と第２の抵抗Ｒｂ（９２）
の一端とを接続し、第２の抵抗Ｒｂ（９２）の他端をプ
ラス入力端子と同電位のアース線５７に接続し、さら
に、マイナス入力端子と第１の抵抗Ｒａ（９１）の他端
とを帰還容量Ｃｆ２（９０）を介して接続した演算増幅
器３８と、第１の抵抗Ｒａ（９１）の他端と抵抗６１の
一端とを接続し、抵抗６１の他端と容量６９の一端とを
接続し、抵抗６１の他端と演算増幅器３８のプラス入力
端子とを接続し、さらに、容量６９の他端をアース線５
７に接続した抵抗６１と容量６９とからなる高域カット
回路とを有する。[Second Embodiment: FIG. 8] FIG. 8 shows a detection circuit 5 according to a second embodiment. Detection electrode 1 of detection branch 11
8, 19 and a resistor Ri2 (8
8) is connected to a ground wire 57 of the same potential,
7, 20 and the negative input terminal are connected by a conductor 56, the output terminal is connected to one end of a first resistor Ra (91), the other end of the first resistor Ra (91) is connected to a second resistor Rb. (92)
, The other end of the second resistor Rb (92) is connected to the ground wire 57 having the same potential as the positive input terminal, and the other end of the negative input terminal and the other end of the first resistor Ra (91). And the other end of the first resistor Ra (91) and one end of the resistor 61, and the other end of the resistor 61 and one end of the capacitor 69 are connected to each other through the feedback capacitor Cf2 (90). And the other end of the resistor 61 is connected to the plus input terminal of the operational amplifier 38. Further, the other end of the capacitor 69 is connected to the ground line 5.
And a high-frequency cutoff circuit composed of a resistor 61 and a capacitor 69 connected to the circuit 7.
【００６２】この演算増幅器３８の出力電圧Ｖ０２は、
Ｖ０（１＋Ｒａ／Ｒｂ）となる。第１の実施形態で詳細
に説明したように、直流電圧成分は高域カット回路によ
って反転出力が演算増幅器３８のプラス入力端子に加算
されるため、直流出力は発生しない。また、図８の回路
構成にすると抵抗比Ｒａ／Ｒｂで出力電圧が調節でき
る。たとえば、比較的高い容量値の帰還容量を用いて
も、抵抗Ｒａと抵抗Ｒｂとに温度特性の等しい抵抗を使
用すれば、温度特性のひじょうに良い検出回路が実現で
きる。The output voltage V02 of the operational amplifier 38 is
V0 (1 + Ra / Rb). As described in detail in the first embodiment, since the inverted output of the DC voltage component is added to the plus input terminal of the operational amplifier 38 by the high frequency cut circuit, no DC output is generated. Further, with the circuit configuration of FIG. 8, the output voltage can be adjusted by the resistance ratio Ra / Rb. For example, even if a feedback capacitor having a relatively high capacitance value is used, a detection circuit having very good temperature characteristics can be realized by using resistors having the same temperature characteristics for the resistors Ra and Rb.
【００６３】以上説明した実施形態では、水晶振動子の
Ｘ軸方向の面内振動を共振周波数としたが、検出用枝を
駆動用とし、駆動用枝を検出用とすることにより、Ｚ軸
方向の面外振動を共振周波数にすることも可能である。
同様のことは、水晶のＹ軸を通信に９０度回転したＸカ
ット振動子としても可能である。In the embodiment described above, the in-plane vibration in the X-axis direction of the quartz oscillator is used as the resonance frequency. However, the detection branch is used for driving, and the driving branch is used for detection. It is also possible to make the out-of-plane vibration at a resonance frequency.
The same is also possible with an X-cut resonator in which the Y axis of the crystal is rotated 90 degrees for communication.
【００６４】以上説明した実施の形態においては、振動
子の基板の材料が水晶の例を示したが、タンタル酸リチ
ウム単結晶や、ニオブ酸リチウム単結晶や、ホウ酸リチ
ウム単結晶などの圧電性を示す単結晶材料でもよい。In the embodiment described above, the example in which the material of the substrate of the vibrator is quartz is described, but the piezoelectric material such as a lithium tantalate single crystal, a lithium niobate single crystal, or a lithium borate single crystal is used. May be used.
【００６５】また、実施形態では、振動子の形状とし
て、音叉および三叉の例を示したが、これに限定せず
に、少なくとも一つの駆動用枝と少なくとも一つの検出
用枝とを有する振動子であればよい。In the above embodiment, the examples of the shape of the vibrator include a tuning fork and a trifurcation. However, the shape of the vibrator is not limited thereto. The vibrator has at least one drive branch and at least one detection branch. Should be fine.
【００６６】[0066]
【発明の効果】以上の説明から明らかなように、本発明
の角速度検出装置は、圧電性を有する単結晶水晶体を用
いた振動子として、駆動用枝に駆動電極を、検出用枝に
検出電極を直接真空蒸着法やスパッタリング法などによ
って形成できるため、形状が単純になる。また、本発明
の角速度検出装置は、従来技術のように圧電素子を接着
する必要がないため、組立工程が簡単になり、全体形状
も小さくでき、低価格化が実現できる。さらに本発明で
は、水晶を振動子に用いているため、エージングによる
特性の低下が防止でき、温度特性が向上する。As is apparent from the above description, the angular velocity detecting device according to the present invention is a vibrator using a single crystal crystal having a piezoelectric property. Can be directly formed by a vacuum evaporation method, a sputtering method, or the like, so that the shape is simplified. Further, the angular velocity detecting device of the present invention does not need to bond the piezoelectric element unlike the prior art, so that the assembling process is simplified, the overall shape can be reduced, and the cost can be reduced. Further, in the present invention, since the quartz crystal is used for the vibrator, deterioration of characteristics due to aging can be prevented, and temperature characteristics can be improved.
【００６７】さらに、本発明の角速度検出装置は、水晶
振動子の検出用枝の一方の検出電極とプラス入力端子に
接続した抵抗とを同電位のアース線に接続し、他方の検
出電極とマイナス入力端子とを接続し、さらにマイナス
入力端子と出力端子とを帰還容量Ｃｆを介して接続した
演算増幅器と、演算増幅器の出力端子とプラス入力端子
とのあいだを接続する高域カット回路とからなる検出回
路を用い、等価的に二つの検出電極を短絡して、帰還容
量Ｃｆに短絡電流を充電するともとに直流カットするこ
とにより、大きな交流出力電圧を得ることができる。Further, in the angular velocity detecting device according to the present invention, one detecting electrode of the detecting branch of the crystal unit and the resistor connected to the positive input terminal are connected to the ground line having the same potential, and the other detecting electrode is connected to the negative electrode. An operational amplifier having an input terminal connected thereto, and further having a negative input terminal and an output terminal connected thereto via a feedback capacitor Cf, and a high-frequency cut circuit connecting the output terminal of the operational amplifier and the positive input terminal. A large AC output voltage can be obtained by short-circuiting the two detection electrodes equivalently using the detection circuit and cutting the direct current based on charging the short-circuit current to the feedback capacitance Cf.
【００６８】また、本発明の角速度検出装置では、上に
述べたように、検出回路の演算増幅器の出力端子とプラ
ス入力端子との間に高域カット回路を挿入してある。こ
のため、直流オフセット電圧を反転して直流出力がつね
にゼロになるように補償している。したがって、本発明
の角速度検出装置においては、検出精度も著しく向上で
きる。Further, in the angular velocity detecting device of the present invention, as described above, the high frequency cutoff circuit is inserted between the output terminal of the operational amplifier of the detection circuit and the positive input terminal. Therefore, the DC offset voltage is inverted to compensate for the DC output to be always zero. Therefore, in the angular velocity detection device of the present invention, the detection accuracy can be significantly improved.
【図１】本発明の実施形態における角速度検出装置の全
体システム図を示す回路図である。FIG. 1 is a circuit diagram showing an overall system diagram of an angular velocity detecting device according to an embodiment of the present invention.
【図２】本発明の実施形態における角速度検出装置の検
出回路の動作原理の説明図である。FIG. 2 is an explanatory diagram of an operation principle of a detection circuit of the angular velocity detection device according to the embodiment of the present invention.
【図３】本発明の実施形態における角速度検出装置の水
晶振動子を表側からみた斜視図である。FIG. 3 is a perspective view of the crystal unit of the angular velocity detecting device according to the embodiment of the present invention as viewed from the front side.
【図４】本発明の実施形態における角速度検出装置の水
晶振動子を裏側からみた斜視図である。FIG. 4 is a perspective view of the crystal unit of the angular velocity detecting device according to the embodiment of the present invention as viewed from the back side.
【図５】本発明の実施形態における角速度検出装置の他
の実施形態の水晶振動子の電極構造を示す断面図であ
る。FIG. 5 is a cross-sectional view illustrating an electrode structure of a quartz oscillator according to another embodiment of the angular velocity detecting device according to the embodiment of the present invention.
【図６】本発明の実施形態の角速度検出装置の水晶振動
子が右回転の角速度を受けたときの各部の波形図であ
る。FIG. 6 is a waveform diagram of each part when the crystal unit of the angular velocity detecting device according to the embodiment of the present invention receives a clockwise angular velocity.
【図７】本発明の実施形態の角速度検出装置の水晶振動
子が左回転の角速度を受けたときの各部の波形図であ
る。FIG. 7 is a waveform diagram of each part when the crystal unit of the angular velocity detecting device according to the embodiment of the present invention receives an angular velocity of left rotation.
【図８】本発明の他の実施形態における角速度検出装置
の検出回路を示す図面である。FIG. 8 is a diagram illustrating a detection circuit of an angular velocity detection device according to another embodiment of the present invention.
【図９】従来技術における角速度検出装置の検出回路の
動作を説明するための図面である。FIG. 9 is a diagram for explaining an operation of a detection circuit of the angular velocity detection device according to the related art.
１：水晶振動子 ２：発振回路
３：移相回路 ４：波形整形回路 ５：検出回路
６：反転回路 ７：検波回路 ８：ローパスフルタ １０、２１、２２：駆動用枝 １１、２
３：検出用枝 １３、１４、１５，１６：駆動電極 １７、１８、１８、２０：検出電極 ３９：帰還容量 ３８：演算増幅器 ６１、８８：抵抗 ６９：容量1: Crystal oscillator 2: Oscillation circuit
3: Phase shift circuit 4: Waveform shaping circuit 5: Detection circuit
6: Inverting circuit 7: Detection circuit 8: Low-pass filter 10, 21, 22: Driving branch 11, 2
3: detection branch 13, 14, 15, 16: drive electrode 17, 18, 18, 20: detection electrode 39: feedback capacitance 38: operational amplifier 61, 88: resistance 69: capacitance
Claims (6)
枝と駆動用枝に同期して面内（面外）振動し、回転にと
もなうコリオリ力によって面外（面内）振動する少なく
とも一対の検出電極を有する検出用枝とを有する振動子
と、 振動子の駆動用枝が自励振動するための発振回路と、 振動子の検出用枝の検出電極に接続し、帰還容量と演算
増幅器とからなる電流電圧変換回路と高域カット回路と
を有する検出回路と、 検出回路の出力を発振回路の出力で検波する検波回路
と、 検波回路の交流出力をカットするローパスフィルタとを
備えたことを特徴とする角速度検出装置。An in-plane (out-of-plane) vibration in synchronization with a drive branch and a drive branch that self-excited in an in-plane (out-of-plane) direction, and an out-of-plane (in-plane) vibration caused by Coriolis force accompanying rotation. A vibrator having a detection branch having at least a pair of detection electrodes, an oscillation circuit for self-exciting a driving branch of the vibrator, and a feedback capacitor connected to the detection electrode of the vibrator detection branch. A detection circuit having a current-to-voltage conversion circuit and an high-frequency cutoff circuit composed of a circuit and an operational amplifier, a detection circuit for detecting the output of the detection circuit with the output of the oscillation circuit, and a low-pass filter for cutting the AC output of the detection circuit. An angular velocity detecting device, comprising:
枝と駆動用枝に同期して面内（面外）振動し、回転にと
もなうコリオリ力によって面外（面内）振動する少なく
とも一対の検出電極を有する検出用枝とを有する振動子
と、 振動子の駆動用枝が自励振動するための発振回路と、 検出用枝の第１の検出電極とプラス入力端子に接続した
抵抗とを同電位のアース線に接続し、 第２の検出電極とマイナス入力端子とを接続し、 マイナス入力端子と出力端子とを帰還容量Ｃｆを介して
接続し、 さらに出力端子とプラス入力端子とを高域カット回路を
介して接続した演算増幅器からなる検出回路と、 検出回路の出力を発振回路の出力で検波する検波回路
と、 検波回路の交流出力をカットするローパスフィルタとを
備えたことを特徴とする角速度検出装置。2. A drive branch that self-excitedly vibrates in an in-plane (out-of-plane) direction and vibrates in-plane (out-of-plane) in synchronization with the drive branch, and out-of-plane (in-plane) vibration due to Coriolis force accompanying rotation. A vibrator having a detection branch having at least a pair of detection electrodes, an oscillator circuit for self-exciting a driving branch of the vibrator, and a connection to the first detection electrode and the plus input terminal of the detection branch Connected to the ground wire of the same potential, connected to the second detection electrode and the negative input terminal, connected between the negative input terminal and the output terminal via the feedback capacitance Cf, and further connected to the output terminal and the positive input It has a detection circuit consisting of an operational amplifier whose terminals are connected via a high-frequency cutoff circuit, a detection circuit that detects the output of the detection circuit with the output of the oscillation circuit, and a low-pass filter that cuts off the AC output of the detection circuit. Angular velocity characterized by: Detection device.
枝と駆動用枝に同期して面内（面外）振動し、回転にと
もなうコリオリ力によって面外（面内）振動する少なく
とも一対の検出電極を有する検出用枝とを有する振動子
と、 振動子の駆動用枝が自励振動するための発振回路と、 検出用枝の第１の検出電極とプラス入力端子に接続した
抵抗とを同電位のアース線に接続し、 第２の検出電極とマイナス入力端子とを接続し、 出力端子と第１の抵抗の一端とを接続し、第１の抵抗の
他端と第２の抵抗の一端とを接続し、第２の抵抗の他端
をプラス入力端子と同電位の電圧ラインに接続し、マイ
ナス入力端子と第１の抵抗の他端とを帰還容量Ｃｆを介
して接続し、 さらに第１の抵抗の他端とプラス入力端子とを高域カッ
ト回路を介して接続した演算増幅器からなる検出回路と
検出回路の出力を発振回路の出力で検波する検波回路
と、 検波回路の交流出力をカットするローパスフィルタとを
備えたことを特徴とする角速度検出装置。3. A drive branch that self-excited in an in-plane (out-of-plane) direction and vibrates in-plane (out-of-plane) in synchronization with the drive branch, and out-of-plane (in-plane) vibration due to Coriolis force accompanying rotation. A vibrator having a detection branch having at least a pair of detection electrodes, an oscillator circuit for self-exciting a driving branch of the vibrator, and a connection to the first detection electrode and the plus input terminal of the detection branch Connected to the ground wire of the same potential, connected to the second detection electrode and the negative input terminal, connected to the output terminal and one end of the first resistor, and connected to the other end of the first resistor and the 2 and one end of the second resistor, the other end of the second resistor is connected to a voltage line having the same potential as the plus input terminal, and the minus input terminal and the other end of the first resistor are connected via a feedback capacitor Cf. And the other end of the first resistor and the positive input terminal are connected via a high frequency cut circuit. A detection circuit for detecting the output of the detection circuit and the detection circuit comprising a calculation amplifier at the output of the oscillation circuit, an angular velocity detecting device characterized by comprising a low-pass filter for cutting the AC output of the detection circuit.
枝と駆動用枝に同期して面内（面外）振動し、回転にと
もなうコリオリ力によって面外（面内）振動する少なく
とも一対の検出電極を有する検出用枝とを有する振動子
と、 振動子の駆動用枝が自励振動するための発振回路と、 振動子の検出用枝の検出電極に接続し、帰還容量と演算
増幅器とからなる電流電圧変換回路と高域カット回路と
を有する検出回路と、 検出回路の出力を発振回路の出力で検波する検波回路
と、 検波回路の交流出力をカットするローパスフィルタとを
備え、 回転にともなうコリオリ力によって、振動子の検出用枝
の検出電極に発生する短絡電流の帰還容量への充電電圧
の直流成分を高域カット回路を介して演算増幅器に帰還
することにより、交流成分のみの検出電圧を得ることを
特徴とする角速度検出装置の駆動方法。4. An in-plane (out-of-plane) vibration synchronized with the drive branch and a drive branch vibrating in the in-plane (out-of-plane) direction, and an out-of-plane (in-plane) vibration caused by Coriolis force accompanying rotation. A vibrator having a detection branch having at least a pair of detection electrodes, an oscillation circuit for self-exciting a driving branch of the vibrator, and a feedback capacitor connected to the detection electrode of the vibrator detection branch. A detection circuit having a current-to-voltage conversion circuit and an high-frequency cutoff circuit composed of a circuit and an operational amplifier, a detection circuit for detecting the output of the detection circuit with the output of the oscillation circuit, and a low-pass filter for cutting the AC output of the detection circuit. The DC component of the charging voltage to the feedback capacitor of the short-circuit current generated on the detection electrode of the detection branch of the vibrator is fed back to the operational amplifier via the high-frequency cutoff circuit by the Coriolis force due to the rotation. Component only detection The driving method of the angular velocity detecting apparatus characterized by obtaining the pressure.
枝と駆動用枝に同期して面内（面外）振動し、回転にと
もなうコリオリ力によって面外（面内）振動する少なく
とも一対の検出電極を有する検出用枝とを有する振動子
と、 振動子の駆動用枝が自励振動するための発振回路と、 検出用枝の第１の検出電極とプラス入力端子に接続した
抵抗とを同電位のアース線に接続し、 第２の検出電極とマイナス入力端子とを接続し、 マイナス入力端子と出力端子とを帰還容量Ｃｆを介して
接続し、 さらに出力端子とプラス入力端子とを高域カット回路を
介して接続した演算増幅器からなる検出回路と、 検出回路の出力を発振回路の出力で検波する検波回路
と、 検波回路の交流出力をカットするローパスフィルタとを
備え、 回転にともなうコリオリ力によって、振動子の検出用枝
の検出電極に発生する短絡電流の帰還容量への充電電圧
の直流成分を高域カット回路を介して演算増幅器に帰還
することにより、交流成分のみの検出電圧を得ることを
特徴とする角速度検出装置の駆動方法。5. A drive branch that self-excitedly vibrates in an in-plane (out-of-plane) direction and vibrates in-plane (out-of-plane) in synchronization with the drive branch, and out-of-plane (in-plane) vibration due to Coriolis force accompanying rotation. A vibrator having a detection branch having at least a pair of detection electrodes, an oscillator circuit for self-exciting a driving branch of the vibrator, and a connection to the first detection electrode and the plus input terminal of the detection branch Connected to the ground wire of the same potential, connected to the second detection electrode and the negative input terminal, connected between the negative input terminal and the output terminal via the feedback capacitance Cf, and further connected to the output terminal and the positive input A detection circuit comprising an operational amplifier connected to the terminal via a high-frequency cutoff circuit, a detection circuit for detecting the output of the detection circuit with the output of the oscillation circuit, and a low-pass filter for cutting off the AC output of the detection circuit, Coriolis associated with rotation Thus, the detection voltage of only the AC component is obtained by feeding back the DC component of the charging voltage to the feedback capacitor of the short-circuit current generated at the detection electrode of the detection branch of the vibrator to the operational amplifier via the high-frequency cutoff circuit. A method for driving an angular velocity detecting device, comprising:
枝と駆動用枝に同期して面内（面外）振動し、回転にと
もなうコリオリ力によって面外（面内）振動する少なく
とも一対の検出電極を有する検出用枝とを有する振動子
と、 振動子の駆動用枝が自励振動するための発振回路と、 検出用枝の第１の検出電極とプラス入力端子に接続した
抵抗とを同電位のアース線に接続し、 第２の検出電極とマイナス入力端子とを接続し、 出力端子と第１の抵抗の一端とを接続し、第１の抵抗の
他端と第２の抵抗の一端とを接続し、第２の抵抗の他端
をプラス入力端子と同電位の電圧ラインに接続し、マイ
ナス入力端子と第１の抵抗の他端とを帰還容量Ｃｆを介
して接続し、さらに第１の抵抗の他端とプラス入力端子
とを高域カット回路を介して接続した演算増幅器からな
る検出回路と、 検出回路の出力を発振回路の出力で検波する検波回路
と、 検波回路の交流出力をカットするローパスフィルタとを
備え、 回転にともなうコリオリ力によって、振動子の検出用枝
の検出電極に発生する短絡電流の帰還容量への充電電圧
の直流成分を高域カット回路を介して演算増幅器に帰還
することにより、交流成分のみの検出電圧を得ることを
特徴とする角速度検出装置の駆動方法。6. A drive branch that self-excitedly vibrates in an in-plane (out-of-plane) direction and vibrates in-plane (out-of-plane) in synchronization with the drive branch, and out-of-plane (in-plane) vibration due to Coriolis force accompanying rotation. A vibrator having a detection branch having at least a pair of detection electrodes, an oscillator circuit for self-exciting a driving branch of the vibrator, and a connection to the first detection electrode and the plus input terminal of the detection branch Connected to the ground wire of the same potential, connected to the second detection electrode and the negative input terminal, connected to the output terminal and one end of the first resistor, and connected to the other end of the first resistor and the 2 and one end of the second resistor, the other end of the second resistor is connected to a voltage line having the same potential as the plus input terminal, and the minus input terminal and the other end of the first resistor are connected via a feedback capacitor Cf. And the other end of the first resistor and the plus input terminal were connected via a high-frequency cut circuit. A detection circuit consisting of an operational amplifier, a detection circuit that detects the output of the detection circuit with the output of the oscillation circuit, and a low-pass filter that cuts the AC output of the detection circuit, is used to detect the vibrator by the Coriolis force accompanying rotation. Angular velocity detection characterized by obtaining the detection voltage of only the AC component by feeding back the DC component of the charging voltage to the feedback capacitor of the short-circuit current generated at the detection electrode of the branch to the operational amplifier via the high-frequency cutoff circuit. How to drive the device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11128857A JP2000321076A (en) | 1999-05-10 | 1999-05-10 | Angular velocity detecting device and its driving method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11128857A JP2000321076A (en) | 1999-05-10 | 1999-05-10 | Angular velocity detecting device and its driving method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2000321076A true JP2000321076A (en) | 2000-11-24 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11128857A Pending JP2000321076A (en) | 1999-05-10 | 1999-05-10 | Angular velocity detecting device and its driving method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000321076A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006075764A1 (en) * | 2005-01-13 | 2006-07-20 | Nec Corporation | Oscillatory gyroscope |
-
1999
- 1999-05-10 JP JP11128857A patent/JP2000321076A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006075764A1 (en) * | 2005-01-13 | 2006-07-20 | Nec Corporation | Oscillatory gyroscope |
| US7528533B2 (en) | 2005-01-13 | 2009-05-05 | Japan Aviation Electronics Industry, Limited | Vibratory gyroscope |
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