JP2000337684A5 - - Google Patents

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Publication number
JP2000337684A5
JP2000337684A5 JP1999142775A JP14277599A JP2000337684A5 JP 2000337684 A5 JP2000337684 A5 JP 2000337684A5 JP 1999142775 A JP1999142775 A JP 1999142775A JP 14277599 A JP14277599 A JP 14277599A JP 2000337684 A5 JP2000337684 A5 JP 2000337684A5
Authority
JP
Japan
Prior art keywords
temperature
heater
switching means
temperature sensor
controls
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP1999142775A
Other languages
Japanese (ja)
Other versions
JP2000337684A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP11142775A priority Critical patent/JP2000337684A/en
Priority claimed from JP11142775A external-priority patent/JP2000337684A/en
Publication of JP2000337684A publication Critical patent/JP2000337684A/en
Publication of JP2000337684A5 publication Critical patent/JP2000337684A5/ja
Withdrawn legal-status Critical Current

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Description

【特許請求の範囲】
請求項1
複数の温度センサと、所定の前記温度センサの温度情報に基づきヒータを制御するヒータ制御回路とを有し、前記ヒータを制御する前記温度センサを切り替える切替手段を備えることを特徴とする温度調節器。
請求項2
請求項1において、前記切替手段はマイクロコンピュータからの指令により前記温度センサを切り替えることを特徴とする温度調節器。
請求項3
請求項1において、前記切替手段は前記ヒーターを制御する前記温度センサを順次切り替えることを特徴とする温度調節器。
請求項4
温度センサと、複数のヒーターと前記温度センサの温度情報に基づき複数の前記ヒーターのうちの所定のヒーターを制御するヒータ制御回路とを有し、前記温度センサにより制御される前記ヒータを切り替える切替手段を備えることを特徴とする温度調節器。
請求項5
請求項4において、前記切替手段はマイクロコンピュータからの指令により前記ヒータを切り替えることを特徴とする温度調節器。
請求項6
請求項4において、前記切替手段は前記温度センサにより制御される前記温度センサを順次切り替えることを特徴とする温度調節器。

[Claims]
[ Claim 1 ]
A temperature controller having a plurality of temperature sensors and a heater control circuit that controls a heater based on the temperature information of the predetermined temperature sensor, and provided with a switching means for switching the temperature sensor that controls the heater. ..
2.
The temperature controller according to claim 1, wherein the switching means switches the temperature sensor according to a command from a microcomputer.
3.
The temperature controller according to claim 1, wherein the switching means sequentially switches the temperature sensor that controls the heater.
4.
A switching means that has a temperature sensor, a plurality of heaters, and a heater control circuit that controls a predetermined heater among the plurality of heaters based on the temperature information of the temperature sensors, and switches the heaters controlled by the temperature sensors. A temperature controller characterized by being equipped with.
5.
The temperature controller according to claim 4, wherein the switching means switches the heater according to a command from a microcomputer.
6.
The temperature controller according to claim 4, wherein the switching means sequentially switches the temperature sensor controlled by the temperature sensor.

JP11142775A 1999-05-24 1999-05-24 Control system of temperature controller Withdrawn JP2000337684A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11142775A JP2000337684A (en) 1999-05-24 1999-05-24 Control system of temperature controller

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11142775A JP2000337684A (en) 1999-05-24 1999-05-24 Control system of temperature controller

Publications (2)

Publication Number Publication Date
JP2000337684A JP2000337684A (en) 2000-12-08
JP2000337684A5 true JP2000337684A5 (en) 2006-03-02

Family

ID=15323312

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11142775A Withdrawn JP2000337684A (en) 1999-05-24 1999-05-24 Control system of temperature controller

Country Status (1)

Country Link
JP (1) JP2000337684A (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7605351B2 (en) * 2005-05-06 2009-10-20 Illinois Tool Works Inc. Redundant control circuit for hot melt adhesive hose assembly heater circuits and temperature sensors
US7332692B2 (en) * 2005-05-06 2008-02-19 Illinois Tool Works Inc. Redundant control circuit for hot melt adhesive assembly heater circuits and temperature sensors
US7732735B2 (en) * 2005-05-06 2010-06-08 Illinois Tool Works Inc. Hot melt adhesive hose assembly having redundant components
US7773867B2 (en) * 2005-05-06 2010-08-10 Illinois Tool Works Inc. Hot melt adhesive hose assembly having redundant components
JP2007327724A (en) * 2006-06-09 2007-12-20 Omron Corp Environmental control system and environmental control device
JP4569550B2 (en) * 2006-09-29 2010-10-27 ダイキン工業株式会社 Humidification control device, humidification control system, humidification control method, and humidification control program
TWI524160B (en) 2013-04-16 2016-03-01 瓦特洛威電子製造公司 Process controller with integrated optical sensing
TW201723716A (en) * 2015-09-30 2017-07-01 芝浦機械電子裝置股份有限公司 Heater control device, heater control method, substrate processing device, and substrate processing method

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