JP2001277110A - Processing method and processing apparatus for forming rectangular member into rod-shaped member - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a processing method and a processing apparatus for forming a rod-shaped member by dividing a rectangular member capable of improving the productivity of polishing a cut surface and improving the productivity. I do. SOLUTION: A first work integration jig 361 and a second work integration jig 362 are attached and integrated on both side surfaces of a rectangular work 11, and a first fixing member 352 and a second fixing member are provided. While being fixed on the 353, the bar-shaped work 111 and the remaining rectangular work are cut along the cutting line of the rectangular work. Then, a first fixing member to which the first work integrated jig to which the bar-shaped work is adhered is fixed, and the second work integral to which the second rectangular work to which the rectangular work is adhered is fixed. Separate the fixing members. Next, the cut surface of the rod-shaped work adhered to the first work integrated jig and the cut surface of the remaining rectangular work adhered to the second work integrated jig are polished to form the first work. Remove the bar-shaped workpiece whose cut surface has been polished from the workpiece integration jig.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a processing method for dividing a rectangular member into a rod-shaped member and a processing apparatus for performing the processing method.

[0002]

2. Description of the Related Art As a head for a recording medium, for example, a chip obtained by cutting and dividing an Altic (alumina / titanium / carbide composite ceramics) substrate formed in a wafer shape into predetermined dimensions is used. Altic, which is a material for such a recording medium head, has a high Vickers hardness of approximately 2000, and is cut into chips having predetermined dimensions by a cutting blade obtained by solidifying diamond abrasive grains with a bonding agent. A conventional method of processing a recording medium head will be described with reference to FIG. FIG.
13 (a) is set on a chuck table of a dicing apparatus, and cut into blocks to form a rectangular work 11 as shown in FIG. 13 (b). I do. This rectangular work 1
13 is further set on a chuck table of a dicing apparatus and cut into a rod shape having a width of about 0.3 mm, and FIG.
A bar-shaped work 111 is formed as shown in FIG. Then, the rod-shaped work 111 is cut into pieces each having a length of about 1 mm to form a recording medium head chip 111a as shown in an enlarged manner in FIG. 13D.

In order to use the chip 111a obtained by cutting the Altic substrate 1 into a predetermined size as described above as a recording medium head, the cut surface is processed to a surface accuracy of 20 nm (nanometer) or less. There is a need. For this reason, conventionally, a processing operation for polishing a cut surface in the process of forming the bar-shaped work 111 from the rectangular work 11 is performed as follows. (1) When the rectangular work 11 shown in (b) of FIG. 13 is cut into the bar-shaped work 111 shown in (c) of FIG. 13, one cut surface of the bar-shaped work 111 is set to the upper side and the other cut surface is made of wax or the like. Adhere to a predetermined base with an adhesive. (2) In order to polish one cut surface of the bar-shaped work 111, a base to which the bar-shaped work 111 is adhered is set on a chuck table of a grinding device, and one cut surface of the bar-shaped work 111 is subjected to surface roughness. Is polished until the precision becomes 20 nm (nanometer) or less. (3) When polishing of one cut surface of the bar-shaped work 111 is completed, the base to which the bar-shaped work 111 is adhered is removed from the chuck table of the grinding device. (4) In order to grind the other cut surface of the bar-shaped work 111, the bar-shaped work 111 is removed from the base, and the other cut surface is polished with the other cut surface facing upward with an adhesive such as wax. Stick it on (5) In order to polish the other cut surface of the bar-shaped work 111, a base to which the bar-shaped work 111 is attached is set on a chuck table of a grinding device, and the other cut surface of the bar-shaped work 111 is subjected to surface roughness. Is polished until the precision becomes 20 nm (nanometer) or less. (6) When the other cut surface of the bar-shaped work 111 has been polished, the base to which the bar-shaped work 111 has been attached is removed from the chuck table of the grinding device, and the bar-shaped work 111 is removed from the base.

[0004]

However, the above-mentioned (1) to (6) processing operations for polishing a cut surface of a rod-shaped work cut and divided from a rectangular work are complicated and poor in productivity, and a recording medium head is used. Is a factor that increases production costs.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned circumstances, and its main technical problem is to form a rectangular member into a rod-like member by dividing a rectangular member capable of improving the efficiency of polishing the cut surface and improving the productivity. And a processing apparatus for performing the processing method.

[0006]

According to the present invention, there is provided a processing method for forming a rod-shaped member by dividing a rectangular work, the method comprising the steps of: A work integration step in which the first work integration jig and the second work integration jig are adhered to each other with an adhesive, and a first fixing for fixing the first work integration jig A work holding means having a member and a second fixing member for fixing the second work integration jig and a separating mechanism for separating the first fixing member and the second fixing member is provided on the rectangular work. A work fixing step of fixing the attached first work integrating jig and the second work integrating jig, and the first work integrating jig and the second work being attached to the work holding means. Cutting to cut a rectangular work held through an integrated jig into a bar shape An alignment step of detecting a region to be cut, a cutting step of applying a cutting blade to the area detected in the alignment step to cut the rectangular work into a rod-shaped work and the remaining rectangular work, and cutting by the cutting step. The first fixing member to which the first work integrated jig to which the bar-shaped work is adhered is fixed, and the first fixing member to which the second work integrated jig to which the remaining rectangular work is adhered is fixed. A work separating step of separating the second fixing member by the separation mechanism; and a rod-shaped work adhered to the first work integrated jig separated by the work separating step and fixed to the first fixing member. A cutting surface polishing step of polishing the cut surface of the remaining rectangular work adhered to the second work integrated jig fixed to the second fixing portion member with a polishing wheel, The second A rod-shaped workpiece removing step of removing the rod-shaped workpiece adhered to the workpiece integrated jig and having a polished cut surface from the first workpiece integrated jig; and affixed to the second workpiece integrated jig and cut. The first work-integrating jig is attached to the cut surface of the remaining rectangular work whose surface has been polished with an adhesive, and the remaining rectangular work is attached to the first work-integrating jig and the second work. A remaining work integration step of integrating with an integration jig, and thereafter, the alignment step, the cutting step, the work separation step,
There is provided a processing method for forming a rectangular member into a rod-shaped member, wherein the step of polishing the cut surface, the step of removing the rod-shaped work, and the step of integrating the remaining work are sequentially and repeatedly performed.

Further, according to the present invention, there is provided a work holding means for holding a rectangular work, and a processing means for dividing the rectangular work into a rod-shaped work, wherein the work holding means holds the rectangular work. A first fixing member and a second fixing member for holding, and a separation mechanism for relatively separating the first fixing member and the second fixing member, are supported rotatably at least 180 degrees. The processing means comprises a cutting blade for cutting the rectangular work, and a polishing wheel for polishing a cut surface of the cut rectangular work, the rectangular member into a rod-shaped member A processing device for forming is provided.

The processing means comprises a composite tool comprising a cylindrical base, the cutting blade provided on one side of the base, and the polishing wheel provided on the other side of the base. Is desirable.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of a processing method and a processing apparatus for forming a rectangular member into a rod-shaped member according to the present invention will be described below in detail with reference to the accompanying drawings.

FIG. 1 is a perspective view of a processing apparatus for performing a processing method according to the present invention. The processing device shown in FIG. 1 includes a substantially rectangular parallelepiped device housing 10. In the apparatus housing 10, a stationary base 2 shown in FIG. 2 and a chuck table mechanism movably disposed on the stationary base 2 in a direction indicated by an arrow X which is a cutting feed direction and holding a workpiece. 3 and a direction indicated by an arrow Y which is an indexing direction on the stationary base 2 (an arrow X which is a cutting feed direction).
A spindle support mechanism 4 movably disposed in a direction (perpendicular to the direction indicated by) and a spindle unit 5 movably disposed in the spindle support mechanism 4 in a direction indicated by an arrow Z, which is a cutting direction. Has been established.

The chuck table mechanism 3 is arranged on a stationary base 2 and fixed by a plurality of mounting bolts 3a. The two guide rails 32, 3 provided
2 and a chuck table 33 disposed on the guide rails 32, 32 so as to be movable in a direction indicated by an arrow X. The chuck table 33 includes a guide rail 32,
The suction chuck support 33 movably disposed on the support 32
1 and a suction chuck 332 mounted on the suction chuck support 331. The chuck table mechanism 3 includes a driving unit 34 for moving the chuck table 33 along the two guide rails 32 in the direction indicated by the arrow X. The driving means 34 includes a male screw rod 341 disposed in parallel between the two guide rails 32, 32, and a driving source such as a pulse motor 342 for driving the male screw 341 to rotate. In. One end of the male screw rod 341 is connected to the support base 31.
The other end is rotatably supported by a bearing block 343 fixed at the other end, and the other end is power-coupled to the output shaft of the pulse motor 342 via a speed reducer (not shown). The male screw rod 341 is screwed into a female screw hole (not shown) formed in a female screw block (not shown) provided on the lower surface of the central part of the suction chuck support 331 constituting the chuck table 33. Therefore, the pulse motor 3
42 drives the male screw rod 341 in the forward and reverse directions, so that the chuck table 33
It is moved along the direction 2, 32 in the direction indicated by the arrow X. Further, the chuck table mechanism 3 includes a rotating mechanism (not shown) for rotating the chuck table 33.
Note that a rotation mechanism (not shown) that rotates the chuck table 33 can rotate the chuck table 33 by at least 180 degrees or more.

A work holding means 35 shown in FIG. 3 is detachably provided on the suction chuck 332 described above. The work holding means 35 will be described with reference to FIG. The work holding means 35 in the illustrated embodiment includes a substrate 351, a first fixing member 352 and a second fixing member 353 disposed on the substrate 351, and a second fixing member And a separation mechanism 354 that separates from the fixing member 353 of FIG. The substrate 351 is formed in a rectangular shape, and is held on the suction chuck 332 by suction means (not shown). In the illustrated embodiment, an example is shown in which the substrate 351 is formed in a rectangular shape.
The substrate 351 may be formed in a circular shape and have the same shape as the suction chuck 332. The first fixing member 352 is formed in a rectangular shape, is provided with a suction port 352a opened on the upper surface thereof, and is slidably disposed on a guide rail 355 provided on the substrate 351 along the longitudinal direction. Has been established. The suction port 353a is connected to a suction unit (not shown). The second fixing member 353 is formed in a rectangular shape, is provided with a suction port 353a opened on the upper surface thereof, and is formed to stand upright along the outer peripheral edge of the upper surface.
It has character-shaped positioning portions 353b and 353c, is disposed on the substrate 351 in parallel with the guide rail 355, and is fixed by appropriate fixing means. The suction port 352a is connected to a suction unit (not shown). The separation mechanism 354 is formed of, for example, an air cylinder, and its piston rod 354a is connected to the first fixing member 352 via a connection member 354b. Therefore,
By operating the piston rod 354a in the axial direction, the separation mechanism 354 moves the first fixing member 352 to the set position facing the second fixing member 353 shown in FIG. Activate the separating position (see FIG. 9) that moves downward. The work holding means 35 configured as described above is used for the suction chuck 3 as described above.
Since the suction chuck 332 is provided on the suction chuck 332, the suction chuck 332 is rotated.

The spindle support mechanism 4 includes a stationary base 2
A support table 41 disposed thereon and fixed by a plurality of mounting bolts 4a, and two guide rails 42, 42 disposed on the support table 41 in parallel along a direction indicated by an arrow Y.
And a movable support base 43 disposed on the guide rails 42, 42 so as to be movable in a direction indicated by an arrow Y.
The movable support base 43 includes a movable support portion 431 movably disposed on the guide rails 42, 42 and a spindle mounting portion 432 attached to the movable support portion 431. A mounting bracket 433 is fixed to the spindle mounting portion 432.
33 is fastened to the moving support portion 431 by a plurality of mounting bolts 40a, so that the spindle mounting portion 432 is
Is attached to the movement support portion 431. The spindle mounting portion 432 is provided with two guide rails 432a and 432a extending in the direction indicated by the arrow Z on the surface opposite to the surface on which the mounting bracket 433 is mounted. The spindle support mechanism 4 includes a movable support base 43
Is provided in the direction indicated by the arrow Y along the two guide rails 42, 42. The driving means 44 includes a driving source such as a male screw rod 441 disposed in parallel between the two guide rails 42 and 42 and a pulse motor 442 for driving the male screw rod 441 to rotate. One end of the male screw rod 441 is rotatably supported by a bearing block (not shown) fixed to the support table 41, and the other end is power-coupled to the output shaft of the pulse motor 442 via a speed reducer (not shown). ing. The male screw rod 441 is screwed into a female screw hole (not shown) formed in a female screw block (not shown) protruding from the lower surface of the central part of the movable support part 431 constituting the movable support base 43. Accordingly, by driving the male screw rod 441 to rotate forward and reverse by the pulse motor 442, the movable support base 43 is moved in the direction indicated by the arrow Y along the guide rails 42,42.

The spindle unit 5 includes a movable base 5
1, a spindle holder 52 fixed to the moving base 51 by a plurality of mounting bolts 5a, and a spindle housing 53 mounted to the spindle holder 52.
Is provided. The movable base 51 is provided with two guided rails 51a, 51a which are slidably fitted to two guide rails 432a, 432a provided on the spindle mounting portion 432 of the spindle support mechanism 4. The guided rails 51a, 51a are connected to the guide rails 432.
a and 432a, it is movably supported in the direction indicated by arrow Z. The spindle housing 5
A rotary spindle 56 on which a composite tool 54 shown in FIG. The rotary spindle 56 is driven to rotate by a rotation drive mechanism (not shown). In addition, the spindle unit 5 is configured to move the movable base 51 to the two guide rails 432a, 432.
There is provided a driving means 55 for moving in the direction indicated by arrow Z along 2a. The driving means 55 includes guide rails 432a, 432 similarly to the driving means 34 and 44 described above.
and a drive source such as a pulse motor 552 for rotationally driving the male screw rod disposed between the male screw rod (not shown). By driving in the reverse direction, the spindle unit 5 moves the guide rails 432a, 4
It is moved in the direction indicated by arrow Z along 32a.

Next, the composite tool 54 will be described with reference to FIG. The composite tool 54 includes a cylindrical base (hub) 541, an annular cutting blade 542 provided on an outer peripheral portion of one side of the base 541, and an annular polishing wheel provided on the other side of the base 541. 543. The composite tool 54 thus configured is mounted on a mounter 57 mounted on the rotary spindle 56.
41 is mounted on the rotary spindle 56 by screwing a tightening nut 58 onto a screw formed on the outer peripheral surface of the end of the mounter 57.

When the processing apparatus shown in FIG. 1 cuts the Altic disk substrate 1 shown in FIG. 13A which is a workpiece as shown in FIG. 1, a cassette 12 for stocking the Altic disk substrate 1 is provided. , A work carrying-out means 13, a work carrying means 14, a cleaning means 15, a cleaning carrying means 16, and an alignment means 17 comprising a microscope, a CCD camera and the like. The Altic disk substrate 1 is mounted on a frame 101 by a tape 102, and is accommodated in the cassette 12 while being mounted on the frame 101. Further, the cassette 12 is placed on a cassette table 121 which is vertically movable by a lifting means (not shown).

Next, a brief description will be given of a processing operation for cutting the Altic disc substrate 1 shown in FIG. 13A into a rectangular work 11 shown in FIG. 13B by the processing apparatus in the illustrated embodiment. I do. The Altic disk substrate 1 mounted on the frame 101 accommodated in a predetermined position of the cassette 12 (hereinafter, the Altic disk substrate 1 mounted on the frame 101 is simply referred to as the Altic disk substrate 1) is provided with a lifting means (not shown). As a result, the cassette table 121 moves up and down to be positioned at the carry-out position. Next, the workpiece discharging means 13 moves forward and backward to move the Altic disk substrate 1 positioned at the unloading position.
Is carried out to the workpiece mounting area 18. The Altic disk substrate 1 carried out to the workpiece placing area 18 is rotated by the workpiece transporting means 14 so that the suction chuck 3 of the chuck table 33 constituting the chuck table mechanism 3 is moved.
32, and is sucked and held by the suction chuck 332. The chuck table 33 holding the Altic disk substrate 1 by suction in this manner is moved to a position directly below the alignment means 17 along the guide rails 32. When the chuck table 33 is positioned immediately below the alignment means 17, the alignment means 17 detects a cutting line formed on the Altic disk substrate 1, and performs a precise alignment operation.

When the alignment operation is completed as described above, the chuck table 33 holding the Altic disk substrate 1 by suction is moved in a cutting feed direction indicated by an arrow X (a direction orthogonal to the rotation axis of the cutting blade 54). As a result, the Altic disk substrate 1 held on the chuck table 33 is cut by the cutting blade 542 of the composite tool 54.
Is cut along a predetermined cutting line. That is, the cutting blade 542 of the composite tool 54 is mounted on the spindle unit 5 that is moved and adjusted in the direction indicated by the arrow Y which is the indexing direction and the direction indicated by the arrow Z which is the cutting direction, and is driven to rotate. By moving the chuck table 33 in the cutting feed direction along the lower side of the cutting blade 542, the chuck table 33 is moved.
The Altic disk substrate 1 held by the cutting blade 54
2 cuts along a predetermined cutting line and is divided into rectangular works 11. The divided rectangular work 11 does not fall apart due to the action of the tape 102, and the state of the Altic disk substrate 1 mounted on the frame 101 is maintained. After the cutting of the Altic disk substrate 1 is completed in this manner, the chuck table 33 holding the Altic disk substrate 1 is first returned to the position where the Altic disk substrate 1 is suction-held, and the suction of the Altic disk substrate 1 is performed here. Release the hold. Next, Altic disk substrate 1
Is transported to the cleaning means 15 by the cleaning and transporting means 16, where it is cleaned. The Altic disk substrate 1 thus cleaned is carried out to the work placement area 18 by the work transfer means 14. Then, the Altic disk substrate 1 is stored at a predetermined position of the cassette 12 by the work carrying-out means 13. The Altic disk substrate 1 housed in the cassette 12 and cut as described above is removed from the tape 102 mounted on the frame 101 to obtain the rectangular work 11 shown in FIG.

Next, a rectangular work 1 shown in FIG.
A method of forming the bar-shaped workpiece 111 shown in FIGS. 1 to 13C will be described with reference to FIGS.
In forming the bar-shaped work 111 from the rectangular work 11, the work holding means 35 is disposed at a predetermined position on the suction chuck 332 of the above-described processing apparatus. In addition, the above-described processing apparatus uses the work holding means 35
As shown in FIG. 5A, a first work integration jig 361 and a second work integration jig 362 formed in a rectangular shape are provided. In forming the bar-shaped work 111 from the rectangular work 11, first, FIG.
As shown in (b), the side surfaces of the first work integration jig 361 and the second work integration jig 362 are adhered to both sides in the longitudinal direction of the rectangular work 11 with an adhesive such as wax to form a rectangular work. The work 11 is integrated with the first work integration jig 361 and the second work integration jig 362 (work integration step).

As described above, the rectangular work 11, the first work integration jig 361, and the second work integration jig 3
When the first fixing member 352 is integrated with the first fixing member 352 positioned at the set position of the work holding means 35 disposed on the suction chuck 332 as shown in FIG.
Is set on the fixing member 353. At this time, the second work integration jig 362 can be set at a predetermined position by contacting the L-shaped positioning portions 353b and 353c formed on the second fixing member 353. Then, the first fixing member 352 and the second fixing member 353
The first work integration jig 361 and the second work integration jig 362 integrated with the rectangular work 11 are sucked by suction means connected to the suction ports 352a and 353a opened on the upper surface of the work. First fixing member 352
And it is suction-fixed on the second fixing member 353 (work fixing step). The work integration step may be performed on the second fixing member 353 and the first fixing member 352.

Next, the chuck table 33 on which the work holding means 35 holding the rectangular work 11 is disposed is moved along the guide rails 32 to just below the alignment means 17. When the chuck table 33 is positioned immediately below the alignment means 17, the alignment means 17 detects a cutting line formed on the rectangular work 11, and performs a precise alignment work. That is, as shown in FIG. 7, the cutting line 11a formed on the rectangular work 11 is enlarged and displayed on the monitor 171 provided in the processing apparatus. Monitor 1
At 71, a right alignment pattern 172 and a left alignment pattern 173 when the rectangular work 11 held on the chuck table 33 is at a predetermined position are displayed. The chuck table 33 is rotated so that the right alignment pattern 172, the left alignment pattern 173, and the cutting line 11a are parallel to each other with a predetermined distance, and a precision alignment operation is performed.
A region to be cut is detected (alignment step).

As described above, if the area of the rectangular work 11 to be cut is detected, the cutting blade 542 of the composite tool 54 attached to the rotary spindle 56 is moved to the area to be cut as shown in FIG. The rectangular workpiece 11 is cut into a bar-shaped workpiece 111 and the remaining rectangular workpieces by acting (cutting step). That is, the chuck table 33 holding the work holding means 35 to which the rectangular work 11 is fixed.
Is moved in the direction indicated by the arrow X, which is the cutting feed direction, so that the rectangular work 11 held on the chuck table 33 is cut along the predetermined cutting line 11 a by the cutting blade 542 of the composite tool 54.

When the rectangular work 11 is cut into the bar-shaped work 111 and the remaining rectangular work by the above-described cutting step, the separating mechanism 354 is operated to move the first fixing member 352 from the set position shown in FIGS. Operate to the separated position shown in. As a result, the bar-shaped work 111 adhered to the first work integration jig 361 fixed to the first fixing member 352 and the second work integration jig fixed to the second fixing member 353 The remaining rectangular work 11 adhered to 362 is separated (work separation step).

In the state where the second fixing member 353 is located at the separated position by the work separating step, first, FIG.
As shown in FIG. 0 (a), the composite attached to the rotary spindle 56 on the cut surface of the remaining rectangular work 11 attached to the second work integrated jig 362 fixed to the second fixing member 353. The cut surface is polished by a polishing wheel 543 of the tool 54 until the surface roughness has an accuracy of 20 nm (nanometer) or less (first cut surface polishing step). That is, the spindle unit 5 is moved and adjusted in the directions indicated by arrows Y and Z, and the grinding wheel 5 of the composite tool 54 attached to the rotary spindle 56 is adjusted.
The second work fixed to the second fixing member 353 is integrated by moving the chuck table 33 in the direction indicated by the arrow X by positioning the end surface of the work 43 at a position acting on the cut surface of the remaining rectangular work 11. The cut surface of the remaining rectangular work 11 stuck on the jig 362 can be polished.
When the first cut surface polishing step is completed, the suction chuck 332 provided with the work holding means 35, that is, the chuck table 33 is rotated by 180 degrees as shown in FIG. 10B. Then, the first work integrated jig 3 fixed to the first fixing member 352 in the same manner as in the first cut surface polishing step.
The grinding wheel 543 of the composite tool 54 attached to the rotary spindle 56 acts on the cut surface of the bar-shaped work 111 adhered to 61, and the cut surface has a surface roughness of 20 n.
Polishing is performed to an accuracy of m (nanometer) or less (second cut surface polishing step). In this manner, the work of cutting the rectangular work 11 and the work of polishing the cut surface are performed by the work holding means 35 provided on the chuck table 33 by the work 11.
Is carried out in a state where is maintained, so that the work efficiency is dramatically improved.

As described above, when the first cut surface polishing step and the second cut surface polishing step are completed, the first work integrated with the bar-shaped work 111 is integrated as shown in FIG. The jig 361 is removed from the first fixing member 352. This removal can be easily performed by stopping the suction operation by the suction means (not shown) connected to the first fixing member 352. And FIG.
As shown in (b), the bar-shaped work 111 adhered to the first work integrated jig 361 removed from the first fixing member 352 is removed and sent out to the next step (bar-shaped work removal step).

On the other hand, the remaining rectangular work 11 that must be further cut and separated into the bar-shaped work 111 is adhered to the second work integration jig 362 fixed to the second fixing member 353. I have. In order to cut the remaining rectangular work 11 and polish the cut surface, the first work integrated jig 361 is attached to the cut surface polished in the first cut surface polishing step. It is necessary to perform the above cutting and polishing in an integrated state. Therefore, the remaining rectangular work 11 adhered to the second work integrated jig 362 fixed to the second fixing member 353
The rod-shaped work 1 is applied to the cut surface polished in the first cut surface polishing step in the rod-shaped work removing step.
The first rectangular jig 361 from which the first rectangular workpiece 11 has been removed is attached by an adhesive such as wax, and the remaining rectangular workpiece 11 is attached.
And the first work integration jig 361 and the second work integration jig 362 are integrated (remaining work integration step).
In addition, this remaining work integration step is performed for the remaining rectangular work 1
1 can be performed in a state where the second work integration jig 362 to which the first work 1 is attached is positioned on the second fixing member 353.

After the remaining work integration step is completed, the above work fixing step, alignment step, cutting step, work separation step, cut surface polishing step, rod-shaped work removal step, and remaining work integration step are performed. The process is sequentially repeated until the last bar-shaped work 111 is separated.

As described above, the present invention has been described based on the embodiment in which the head for the recording medium is formed from the Altic substrate. However, the present invention is not limited to the embodiment.
Various modifications are possible within the spirit of the present invention. That is,
INDUSTRIAL APPLICABILITY The present invention can be widely applied to a case where a rectangular member is cut and divided and a cut surface thereof is polished to form a rod-shaped member.

[0029]

The processing method and the processing apparatus for forming a rectangular member into a rod-shaped member according to the present invention are constructed as described above, and have the following effects.

That is, according to the present invention, the cutting work of the bar-shaped work and the polishing work of the cut surface thereof are performed in a state where the rectangular work is held by the work holding means, so that the cutting and polishing work is efficiently performed. be able to. Therefore, according to the present invention, when removing the rod-shaped work obtained by cutting and dividing the rectangular work from the work holding means of the processing apparatus, the cut surface of the rod-shaped work is polished to a desired surface accuracy. The work efficiency can be dramatically improved as compared with a conventional processing method in which the cut and polished work is set in a polishing apparatus after the cut and divided into rod-shaped works and the cut surface is polished.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an embodiment of a processing apparatus for performing a processing method for forming a rectangular member into a rod-shaped member according to the present invention.

FIG. 2 is a perspective view of a main part of the processing apparatus shown in FIG.

FIG. 3 is a perspective view showing one embodiment of a work holding means provided in the processing apparatus shown in FIG. 1;

FIG. 4 is a perspective view showing a state in which a composite tool provided in the processing apparatus shown in FIG. 1 is mounted on a rotary spindle.

FIG. 5 is a perspective view showing a work integration step in the processing method of the present invention.

FIG. 6 is a perspective view showing a work fixing step in the processing method of the present invention.

FIG. 7 is a perspective view showing an alignment step in the processing method of the present invention.

FIG. 8 is a perspective view showing a cutting step in the processing method of the present invention.

FIG. 9 is a perspective view showing a work separating step in the processing method of the present invention.

FIG. 10 is a perspective view showing a cutting surface polishing step in the processing method of the present invention.

FIG. 11 is a perspective view showing a rod-shaped workpiece removing step in the processing method of the present invention.

FIG. 12 is a perspective view showing a remaining work integration step in the processing method of the present invention.

FIG. 13 is an explanatory view of a conventional processing method for forming a rod-shaped work from a rectangular work.

[Explanation of symbols]

 1: Altic disk substrate 11: Rectangular work 111: Bar-shaped work 111a: Chip for recording medium head 2: Stationary base 3: Chuck tail mechanism 31: Support table of chuck table mechanism 32: Guide rail of chuck table mechanism 33: Chuck tail of chuck table mechanism 34: Drive means of chuck table mechanism 35: Work holding means 351: Substrate of work holding means 352: First fixing member 353: Second fixing member 354: Separation mechanism 355: Guide rail 361: First work integration jig 362: Second work integration jig 4: Spindle support mechanism 41: Support table of chuck table mechanism 42: Guide rail of chuck table mechanism 43: Movable support base 44 of chuck table mechanism : Drive means for chuck table mechanism 5: Spindle unit G 53: Spindle housing of spindle unit 54: Composite tool 541: Cylindrical base (hub) 55: Driving means of spindle unit 56: Rotating spindle 10: Device housing 12: Cassette 13: Workpiece unloading means 14: Workpiece Work transfer means 15: Cleaning means 16: Cleaning transfer means 17: Alignment means

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Takashi Mochizuki 6-7-35 Kita Shinagawa, Shinagawa-ku, Tokyo Inside Sony Corporation (72) Inventor Susumu Nii 2-14-3 Higashi-Kojiya, Ota-ku, Tokyo Shares (72) Inventor Koji Kusube 2-14-3 Higashi-Kojiya, Ota-ku, Tokyo, Japan Incorporated in Disco Corporation (72) Inventor Toru Uekura 2-14-3, Higashi-Kojiya, Ota-ku, Tokyo Intranet, Inc. (72) Inventor Toshihiko Nakasei 2-14-3 Higashi-Kojiya, Ota-ku, Tokyo In-house DISCO Corporation (72) Inventor Naoto Minagawa 2-14-3 Higashi-Kojiya, Ota-ku, Tokyo In-house DISCO Corporation (72) Inventor Masanobu Kaneko Tokyo 2-14-3 Higashi-Kojiya, Ota-ku, Tokyo Inside the DISCO Corporation (72) Inventor Akira Yamaguchi 2-14-3, Higashi-Kojiya, Ota-ku, Tokyo Company Deisuko in the F-term (reference) 3C034 AA13 BB32 BB37 BB73 BB75 CB08 CB11 DD10 3C058 AA03 AA04 AA11 AA13 AA18 AB01 AB04 AB06 AC01 BC01 CA01 CB03 CB05 3C069 AA01 BA04 CA03 EA01 5D093 FA23 FA26

Claims (4)

[Claims] 1. A processing method for dividing a rectangular work into a rod-shaped member, comprising: a first work integrating jig and a second work integrated jig on both side surfaces of the rectangular work.
A work integrating step in which the work integrating jig is adhered with an adhesive to integrate the work integrating jig, a first fixing member for fixing the first work integrating jig, and the second work integrating jig A first fixing member attached to the rectangular work and to a work holding means having a second fixing member for fixing the first work and a separating mechanism for separating the first fixing member and the second fixing member. Fixing step for fixing the tool and the second work integrating jig, and a rectangle held by the work holding means via the first work integrating jig and the second work integrating jig. An alignment step of detecting an area to be cut in order to cut the work into a rod shape, and a cutting step of applying a cutting blade to the area detected in the alignment step to cut the rectangular work into a rod-shaped work and the remaining rectangular work And cutting by the cutting step The first fixing member to which the first work-integrated jig to which the bar-shaped work is attached is fixed, and the second work-integrating jig to which the remaining rectangular work is attached is fixed. A work separation step of separating the second fixing member by the separation mechanism; and a first work integration jig separated and fixed to the first work member separated by the work separation step. A cutting surface polishing step of polishing a cut surface of the rod-shaped work and a cut surface of the remaining rectangular work adhered to the second work integrated jig fixed to the second fixing member by a polishing wheel; A rod-shaped workpiece removing step of removing a rod-shaped workpiece adhered to the first workpiece integrated jig and having a polished cut surface from the first workpiece integrated jig; and the second workpiece integrated jig. The remaining rectangular wafer that has been affixed to The first work-integrating jig is adhered to the cut surface of the work with an adhesive, and the remaining rectangular work is integrated with the first work-integrating jig and the second work-integrating jig. After that, the alignment step, the cutting step, the work separating step, the cut surface polishing step, the rod-shaped work removing step, and the remaining work integrating step. And a step of sequentially repeating the steps of: forming a rectangular member into a rod-shaped member. 2. The processing method according to claim 1, wherein said rectangular workpiece is formed of an Altic material. 3. A work holding means for holding a rectangular work, and a processing means for dividing the rectangular work into a rod-shaped work, wherein the work holding means comprises a first work for holding the rectangular work. A fixing member and a second fixing member, and a separation mechanism that relatively separates the first fixing member and the second fixing member, and are supported rotatably at least 180 degrees. A processing apparatus for forming a rectangular member into a rod-shaped member, comprising: a cutting blade for cutting the rectangular work; and a polishing wheel for polishing a cut surface of the cut rectangular work. 4. A composite tool comprising: a cylindrical base; a cutting blade provided on one side of the base; and a polishing wheel provided on the other side of the base. The processing device for forming a rectangular member according to claim 3 into a rod-shaped member, comprising: