JP2003100844A5 - - Google Patents

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Publication number
JP2003100844A5
JP2003100844A5 JP2001296393A JP2001296393A JP2003100844A5 JP 2003100844 A5 JP2003100844 A5 JP 2003100844A5 JP 2001296393 A JP2001296393 A JP 2001296393A JP 2001296393 A JP2001296393 A JP 2001296393A JP 2003100844 A5 JP2003100844 A5 JP 2003100844A5
Authority
JP
Japan
Prior art keywords
substrate
quadrilateral
cleaning
axis
quadrilateral substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001296393A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003100844A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001296393A priority Critical patent/JP2003100844A/ja
Priority claimed from JP2001296393A external-priority patent/JP2003100844A/ja
Publication of JP2003100844A publication Critical patent/JP2003100844A/ja
Publication of JP2003100844A5 publication Critical patent/JP2003100844A5/ja
Pending legal-status Critical Current

Links

JP2001296393A 2001-09-27 2001-09-27 四辺形基板反転装置及び四辺形基板洗浄ユニット Pending JP2003100844A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001296393A JP2003100844A (ja) 2001-09-27 2001-09-27 四辺形基板反転装置及び四辺形基板洗浄ユニット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001296393A JP2003100844A (ja) 2001-09-27 2001-09-27 四辺形基板反転装置及び四辺形基板洗浄ユニット

Publications (2)

Publication Number Publication Date
JP2003100844A JP2003100844A (ja) 2003-04-04
JP2003100844A5 true JP2003100844A5 (2) 2005-01-06

Family

ID=19117644

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001296393A Pending JP2003100844A (ja) 2001-09-27 2001-09-27 四辺形基板反転装置及び四辺形基板洗浄ユニット

Country Status (1)

Country Link
JP (1) JP2003100844A (2)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007053154A (ja) * 2005-08-16 2007-03-01 Pre-Tech Co Ltd マスク基板用の洗浄装置及びそれを用いたマスク基板の洗浄方法
KR100814506B1 (ko) 2005-12-29 2008-03-18 주식회사 탑 엔지니어링 기판 턴 오버 장치
JP5111285B2 (ja) * 2008-08-06 2013-01-09 株式会社日立ハイテクノロジーズ 試料搬送機構
TWI626091B (zh) * 2016-10-28 2018-06-11 旭東機械工業股份有限公司 板邊清洗系統
WO2023106041A1 (ja) * 2021-12-08 2023-06-15 株式会社村田製作所 ハンドリング装置

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