JP2003107704A5 - - Google Patents
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- Publication number
- JP2003107704A5 JP2003107704A5 JP2001301492A JP2001301492A JP2003107704A5 JP 2003107704 A5 JP2003107704 A5 JP 2003107704A5 JP 2001301492 A JP2001301492 A JP 2001301492A JP 2001301492 A JP2001301492 A JP 2001301492A JP 2003107704 A5 JP2003107704 A5 JP 2003107704A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001301492A JP4240868B2 (ja) | 2001-09-28 | 2001-09-28 | 電子線またはｘ線用ネガ型レジスト組成物 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001301492A JP4240868B2 (ja) | 2001-09-28 | 2001-09-28 | 電子線またはｘ線用ネガ型レジスト組成物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003107704A JP2003107704A (ja) | 2003-04-09 |
| JP2003107704A5 true JP2003107704A5 (2) | 2006-01-19 |
| JP4240868B2 JP4240868B2 (ja) | 2009-03-18 |
Family
ID=19121896
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001301492A Expired - Lifetime JP4240868B2 (ja) | 2001-09-28 | 2001-09-28 | 電子線またはｘ線用ネガ型レジスト組成物 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4240868B2 (2) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4990344B2 (ja) * | 2009-12-04 | 2012-08-01 | 富士フイルム株式会社 | ネガ型レジスト組成物及びそれを用いたパターン形成方法 |
| WO2011153109A2 (en) * | 2010-05-31 | 2011-12-08 | Bridgestone Corporation | Hydroxyl group-containing methylstyrene and polymers incorporating same |
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2001
- 2001-09-28 JP JP2001301492A patent/JP4240868B2/ja not_active Expired - Lifetime