JP4240868B2 - 電子線またはｘ線用ネガ型レジスト組成物 - Google Patents

電子線またはｘ線用ネガ型レジスト組成物 Download PDF

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Publication number: JP4240868B2
Authority: JP; Japan
Prior art keywords: group; electron beam; ray; resist composition; acid
Prior art date: 2001-09-28
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

JP2001301492A

Other languages

English (en)

Japanese (ja)

Other versions

JP2003107704A5 (2

JP2003107704A (ja

Inventor

表高橋

昭一郎安波

豊阿出川

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Fujifilm Corp

Original Assignee

Fujifilm Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2001-09-28

Filing date

2001-09-28

Publication date

2009-03-18

2001-09-28 Application filed by Fujifilm Corp filed Critical Fujifilm Corp

2001-09-28 Priority to JP2001301492A priority Critical patent/JP4240868B2/ja

2003-04-09 Publication of JP2003107704A publication Critical patent/JP2003107704A/ja

2006-01-19 Publication of JP2003107704A5 publication Critical patent/JP2003107704A5/ja

2009-03-18 Application granted granted Critical

2009-03-18 Publication of JP4240868B2 publication Critical patent/JP4240868B2/ja

2021-09-28 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

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Materials For Photolithography (AREA)

JP2001301492A 2001-09-28 2001-09-28 電子線またはｘ線用ネガ型レジスト組成物 Expired - Lifetime JP4240868B2 (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP2001301492A JP4240868B2 (ja)	2001-09-28	2001-09-28	電子線またはｘ線用ネガ型レジスト組成物

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP2001301492A JP4240868B2 (ja)	2001-09-28	2001-09-28	電子線またはｘ線用ネガ型レジスト組成物

Publications (3)

Publication Number	Publication Date
JP2003107704A JP2003107704A (ja)	2003-04-09
JP2003107704A5 JP2003107704A5 (2)	2006-01-19
JP4240868B2 true JP4240868B2 (ja)	2009-03-18

Family

ID=19121896

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP2001301492A Expired - Lifetime JP4240868B2 (ja)	2001-09-28	2001-09-28	電子線またはｘ線用ネガ型レジスト組成物

Country Status (1)

Country	Link
JP (1)	JP4240868B2 (2)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP4990344B2 (ja) *	2009-12-04	2012-08-01	富士フイルム株式会社	ネガ型レジスト組成物及びそれを用いたパターン形成方法
WO2011153109A2 (en) *	2010-05-31	2011-12-08	Bridgestone Corporation	Hydroxyl group-containing methylstyrene and polymers incorporating same

2001
- 2001-09-28 JP JP2001301492A patent/JP4240868B2/ja not_active Expired - Lifetime

Also Published As

Publication number	Publication date
JP2003107704A (ja)	2003-04-09

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