JP2009262012A - Ultrasonic sprayer - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ultrasonic sprayer that has a simple structure and is suitable for downsizing its body in a direction vertical to the oscillation direction of its piezoelectric oscillator. <P>SOLUTION: The ultrasonic sprayer includes a cylindrical member equipped with a perforated plate fixed to its opening end in a manner covering the opening disposed on one end of the cylindrical member and a liquid flow path disposed therein, a pair of piezoelectric oscillators overlaid in the oscillation direction, a pair of metal members sandwiching the piezoelectric oscillators from the upper and the lower sides in the overlaying direction, a bolt-tightening Langevin oscillator that causes the perforated plate to ultrasonically oscillate, and a static member positioned inside the cylinder of the cylindrical member to constitute at least a part of the liquid flow path in a manner facing the perforated plate and suppressing the transfer of the ultrasonic oscillation from the bolt-tightening Langevin oscillator, characterized in that a pressure chamber connected to one end of the liquid flow path with its pressure varying according to the oscillation of the perforated plate is constructed between the perforated plate and the static member that face each other, inside the cylinder of the cylindrical member. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an ultrasonic spray apparatus including a bolted Langevin type vibrator.

  Conventionally, as a liquid spraying device, for example, as shown in Patent Document 1, an ultrasonic spraying device including a bolted Langevin type vibrator is known.

In the liquid ejecting apparatus (ultrasonic spraying apparatus) disclosed in Patent Document 1, a central portion of a nozzle plate (perforated plate) having nozzles (injection holes) is fixed to the tip of a horn. In addition, a pair of piezoelectric vibrators connected in parallel is attached to the rear end of the horn with bolts and nuts with an electrode plate interposed therebetween, thereby constituting a bolt-tightened Langevin vibrator. Further, the outer peripheral portion of the nozzle plate is fixed to a body having a pressurizing chamber around the horn. Then, the vibration of the horn causes the nozzle plate to vibrate with the middle part between the central part and the outer peripheral part as an antinode, so that the liquid filled in the pressurizing chamber is pressurized and depressurized, and droplets are ejected from the nozzle. Yes.
JP-A-3-73343

  However, in the liquid ejecting apparatus disclosed in Patent Literature 1, the body is provided with a pressurizing chamber around the horn in a direction perpendicular to the vibration direction of the piezoelectric vibrator. Therefore, it is difficult to reduce the size of the device in the direction perpendicular to the vibration direction of the piezoelectric vibrator.

  Further, as described above, the pressurizing chamber is provided in the body and the nozzle plate is fixed to the tip of the horn and the body, so that the device configuration is complicated.

  In view of the above problems, an object of the present invention is to provide an ultrasonic spray apparatus that has a simple structure and is suitable for downsizing a physique in a direction perpendicular to the vibration direction of a piezoelectric vibrator.

  In order to achieve the above object, the ultrasonic spray apparatus according to claim 1 is a cylindrical shape in which a perforated plate is fixed to an opening end so as to close an opening on one end side, and a liquid flow path is provided inside the cylinder. A bolt-clamped Langevin type vibrator that has a member, a pair of piezoelectric vibrators laminated in the vibration direction, and a pair of metal members that sandwich the piezoelectric vibrator from above and below in the lamination direction and ultrasonically vibrates the porous plate; A stationary member that is positioned and disposed so as to be opposed to the perforated plate while constituting at least a part of the flow path inside the cylinder of the cylindrical member, wherein transmission of ultrasonic vibration from the bolted Langevin type vibrator is suppressed. In the cylinder of the cylindrical member, a pressure chamber connected to one end of the flow path and changing in pressure according to the vibration of the porous plate is configured between the opposed porous plate and the stationary member. It is characterized by being.

  As described above, according to the present invention, the perforated plate is ultrasonically vibrated by the bolted Langevin type vibrator, and the liquid in the pressurized chamber is sprayed to the outside through the pores of the perforated plate according to the ultrasonic vibration of the perforated plate. In the ultrasonic spray apparatus, a pressurizing chamber is provided between the opposed perforated plate and the stationary member inside the cylinder of the cylindrical member. Therefore, the physique of the ultrasonic spray device can be made smaller than before in the direction perpendicular to the vibration direction of the piezoelectric vibrator.

  In addition, a porous plate is fixed to one open end of the cylindrical member, and the pressurizing chamber is provided inside the cylindrical member, as described above, including the porous plate. Therefore, the apparatus configuration can be simplified as compared with the prior art.

  In the first aspect of the present invention, for example, as described in the second aspect, the stationary member is formed into a cylindrical shape having an outer peripheral shape corresponding to the inner peripheral shape of the cylindrical member. It is preferable to have a configuration in which the cylindrical member is positioned and arranged through a buffer member that suppresses transmission of the ultrasonic vibration.

  According to this, since the flow path is formed in the cylinder of the stationary member, the liquid can be stably supplied to the pressurizing chamber. Further, the stationary member can be positioned and fixed at a predetermined position inside the cylinder so that it hardly vibrates due to ultrasonic vibration and becomes the reference surface of the pressurizing chamber relative to the perforated plate. The stationary member may be fixed to the cylindrical member via a buffer member, or may be fixed to a metal member constituting the bolt-tightened Langevin type vibrator.

  In the first or second aspect of the invention, as described in the third aspect of the present invention, the cylindrical member serves as one of a pair of metal members constituting the bolted Langevin type vibrator. Is preferred. According to this, the apparatus configuration can be further simplified. As a result, the number of steps for assembling the apparatus can also be reduced.

  In the invention according to any one of claims 1 to 3, as described in claim 4, a horn that amplifies the amplitude of ultrasonic vibration may be employed as the cylindrical member. According to this, the amplitude of the ultrasonic vibration of the porous plate can be increased according to the area ratio.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
(First embodiment)
FIG. 1 is a cross-sectional view showing a schematic configuration of the ultrasonic spraying apparatus according to the first embodiment of the present invention. The ultrasonic spray device shown in the present embodiment is applied as a spray device that atomizes and sprays liquids such as water, fuel, and chemicals. As a more specific example, in the urea SCR system of a vehicle, Applied to urea water spray for purifying nitrogen oxides.

  As shown in FIG. 1, the ultrasonic spraying apparatus 100 includes a tubular member 10, a porous plate 20 fixed to one end side (spraying tip side) of the tubular member 10, and a porous plate 20 as main parts. A bolt-clamped Langevin type vibrator 30 that vibrates with sound waves and a stationary member 40 disposed inside the cylindrical member 10 are provided.

  The cylindrical member 10 is a cylindrical member that has a function of transmitting ultrasonic vibration generated by the bolted Langevin type vibrator 30 to the perforated plate 20 at least partially. The perforated plate 20 is directly fixed to the tip surface 11) so that the plurality of stoma holes 21 face the opening region of the cylinder interior 12. Further, a flow path 51 for the liquid 50 supplied to the porous plate 20 and a pressure chamber 52 for the liquid 50 connected to the end of the flow path 51 are provided in the cylinder interior 12.

  In this embodiment, the cylindrical member 10 is formed in a substantially circular cross section using a metal material, and the opening region of the cylindrical interior 12 extends linearly along the vibration direction while keeping the cross sectional area constant. Yes. Further, the cylindrical member 10 is in a vibration direction of piezoelectric vibrators 31 and 32 to be described later (in other words, a vibration direction of the porous plate 20 indicated by a white arrow in FIG. 1 and simply referred to as a vibration direction hereinafter). The horn shape has a smaller cross-sectional area as the predetermined range from the front end surface 11 is closer to the front end surface 11, and the outer peripheral shape of the remaining part is substantially the same as the outer peripheral diameter of the piezoelectric vibrators 31 and 32 described later. Equally constant shape. More specifically, as in the vibration mode shown on the right side of FIG. 1, the position of the perforated plate 20 is the position of the antinode of ultrasonic vibration, and the position of the node that is shifted from the position of the antinode by a quarter cycle. The range up to is a horn shape. As described above, when the horn-shaped cylindrical member 10 is employed, ultrasonic vibration (amplitude) can be amplified as shown in FIG. 1 according to the area ratio.

  And on the front end surface 11 of the cylindrical member 10 described above, a perforated plate 20 formed by forming a plurality of pores 21 having a diameter of about several tens of μm on a metal plate having a thickness of about 0.1 to 1 mm is brazed, It is fixed by welding or the like. The outer peripheral shape of the perforated plate 20 is substantially the same as the outer peripheral shape of the cylindrical member 10, and the outer peripheral end of the perforated plate 20 is substantially coincident with the outer peripheral end of the distal end surface 11 of the cylindrical member 10. Yes.

  In addition, a piezoelectric vibrator 31, a power source (positive side) electrode plate 33, a piezoelectric vibrator 32, and a GND side (grounding side) are provided on a back surface 13 (hereinafter, referred to as a rear end surface 13) of the front end surface 11 of the cylindrical member 10. ) The electrode plate 34 and the metal block 35 are stacked in this order. And these 31-35 are integrally connected to the cylindrical member 10 by bolting, and the bolting Langevin type vibrator | oscillator 30 is comprised. As in the vibration mode shown in FIG. 1, the power supply side electrode plate 33 disposed between the pair of piezoelectric vibrators 31 and 32 becomes a vibration node position, and the abdomen is shifted by 1/4 cycle from this node. A half-cycle portion is a bolted Langevin type vibrator 30. That is, in the present embodiment, a part of the cylindrical member 10 (range from the rear end surface 13 to the one antinode described above in the vibration direction) moves the pair of piezoelectric vibrators 31 and 32 together with the metal block 35 in the vibration direction. One of the metal members sandwiched from above and below (in other words, a part of the bolted Langevin type vibrator 30).

  More specifically, the metal block 35 has a cylindrical shape extending in the vibration direction like the cylindrical member 10, and a flow path 51 is provided in the cylindrical interior 35 a. This cylinder interior 35a is in a state in which the bolted Langevin vibrator 30 is configured (hereinafter simply referred to as a fastening state) so that it is integrally connected to the cylinder interior 12 of the cylindrical member 10 with respect to the vibration direction. The shape and the cross-sectional area of the substantially vertical opening region coincide with the opening region in the cylinder interior 12. In addition, the metal block 35 has a substantially annular cross section substantially perpendicular to the vibration direction, and its outer peripheral end substantially coincides with the outer peripheral end of the rear end surface 13 of the tubular member 10 in the fastened state ( The outer peripheral diameter is substantially equal to the outer peripheral diameter of the piezoelectric vibrators 31 and 32). A sandwiching portion 35b, and a projecting portion 35c projecting from a part of the sandwiching portion 35b and having a bolt formed in a part of the range from the tip. Have.

  On the other hand, a concave portion 14 having a predetermined depth is provided in the central region of the rear end surface 13 of the cylindrical member 10 so as to surround the opening region of the cylindrical interior 12, and the side wall of the concave portion 14 is paired with the above-described bolt. A nut is configured. The pair of piezoelectric vibrators 31 and 32 has a substantially circular cross section in which a cross section substantially perpendicular to the vibration direction substantially coincides with a peripheral region surrounding the central region on the rear end surface 13 of the tubular member 10. The power supply side electrode plate 33 and the GND side electrode plate 34 are also substantially circular in cross section. And the convex part 35c of the metal block 35 is penetrated with respect to the GND side electrode plate 34, the piezoelectric vibrator 32, the power supply side electrode plate 33, and the piezoelectric vibrator 31, and the volt | bolt comprised at the front-end | tip of the convex part 35c, A bolted Langevin type vibrator 30 is configured by being fastened with a nut of a recess 14 provided on the rear end surface 13 of the tubular member 10.

  Note that a part of the power supply side electrode plate 33 and the GND side electrode plate 34 are drawn out in a direction substantially perpendicular to the vibration direction, so that a drive voltage can be applied. The piezoelectric vibrators 31 and 32 are not in contact with the metal block 35, and the piezoelectric vibrator 31 has an upper and lower surface in the vibration direction that is connected to the GND side electrode plate 34 via the power supply side electrode plate 33 and the metal block 35. The piezoelectric vibrator 32 is in contact with the power supply side electrode plate 33 and the GND side electrode plate 34 at the upper and lower surfaces in the vibration direction.

  In addition, the transmission of ultrasonic vibration from the bolted Langevin transducer 30 is suppressed in the cylinder interior 12 of the cylindrical member 10, and at least a part of the flow path 51 of the liquid 50 is formed, and the porous plate 20. The stationary member 40 is positioned and disposed so as to be opposed to each other. The stationary member 40, the porous plate 20, and the wall surface of the cylinder interior 12 (inner peripheral surface of the cylindrical member 10) constitute a pressure chamber 52 whose pressure changes according to the vibration of the porous plate 20.

  In the present embodiment, the stationary member 40 has a cylindrical shape that extends in the vibration direction using a metal material, and is disposed in the cylindrical interior 12 of the cylindrical member 10 and the cylindrical interior 35 a of the metal block 35. Further, the outer periphery of the cross section perpendicular to the vibration direction in the stationary member 40 has an annular shape corresponding to the wall surface of the cylinder interior 12 in the cylindrical member 10 and the wall surface of the cylinder interior 35a in the metal block 35. The metal block 35 is fixed to the wall surface of the cylinder interior 35a through an elastic member 60 such as rubber. The elastic member 60 corresponds to the buffer member described in the claims, and the elastic member 60 suppresses transmission of ultrasonic vibration from the bolted Langevin vibrator 30 to the stationary member 40. It is like that. Further, the stationary member 40 is positioned and fixed by the elastic member 60 with respect to the metal block 35, and eventually the cylindrical member 10 integrated with the metal block 35.

Further, the cylindrical stationary member 40 has one opening end that extends through the cylinder interior 35a of the metal block 35 to the outside, and the other opening end 42 (opening end 42 on the porous plate 20 side) The porous plate 20 and the stationary member 40 are in a positional relationship in which the porous plate 20 and the stationary member 40 are opposed to each other by a predetermined distance from a portion facing the opening region of the cylinder interior 12 in the porous plate 20. And the flow path 51 in the ultrasonic spray apparatus 100 is comprised by the internal peripheral surface 41 of the stationary member 40, and the site | part which is not opposite to the stationary member 40 in the opening end 42 in the stationary member 40, and the wall surface of the cylinder inside 12 The pressure chamber 52 is configured by the inner surface 22 of the porous plate 20 (the surface facing the stationary member 40). Thus, the pressure chamber 52 communicates with one end of the flow path 51 so that the liquid 50 can flow, and the cross-sectional area of the opening region in the direction substantially perpendicular to the vibration direction is larger than that of the flow path 51.
The open end 42 of the stationary member 40 is the bottom surface of the pressure chamber 52. The position of the opening end 42 as such a bottom surface is a pressure chamber in which the pressure in the pressure chamber 52 can be easily increased by the ultrasonic vibration of the perforated plate 20 and the liquid 50 can easily flow into the pressure chamber 52. It is preferable that the thickness of 52 be about 0.5 to 1 mm.

  1 denotes the piezoelectric vibrators 31 and 32 and the electrodes from the pressure chamber 52 side through a gap between the wall surface of the cylinder interior 12 of the cylindrical member 10 and the outer peripheral surface of the stationary member 40. An O-ring 61 prevents the liquid 50 from leaking to the plates 33 and 34. Reference numeral 15 denotes a flange provided at the rear end (position of the vibration node) of the horn-shaped portion of the cylindrical member 10, and the ultrasonic spray device 100 is fixed to another member via the flange 15. It has become so.

  Next, the spray principle in the ultrasonic spray apparatus 100 described above will be described. When a predetermined drive voltage is applied to the electrode plates 33 and 34 constituting the bolted Langevin type vibrator 30, the piezoelectric vibrators 31 and 32 vibrate in the stacking direction. The ultrasonic vibration of the bolted Langevin type transducer 30 is transmitted through the cylindrical member 10 and the amplitude of the vibration is enlarged at the horn-shaped portion, and the perforated plate 20 fixed to the distal end surface 11 of the cylindrical member 10. Is transmitted to. In the present embodiment, since the perforated plate 20 is positioned at the antinode of vibration, the perforated plate 20 (the part facing the opening region of the cylinder interior 12) ultrasonically vibrates in the vibration direction shown in FIG. Become.

  On the other hand, since the stationary member 40 is fixed to the wall surface of the cylinder interior 35a in the metal block 35 through the elastic member 60 as described above, the ultrasonic vibration of the bolted Langevin transducer 30 is hardly transmitted, It is always stationary. The open end 42 of the stationary member 40 constitutes a pressure chamber 52 together with a portion of the wall surface of the cylinder interior 12 that is not opposed to the stationary member 40 and the inner surface 22 of the porous plate 20, and the porous plate 20 that vibrates ultrasonically. The stationary member 40 is in a relative positional relationship. Therefore, in the liquid 50 that has flowed into the pressure chamber 52 through the flow path 51, a pressure change of the ultrasonic vibration cycle occurs with the ultrasonic vibration of the bolted Langevin type vibrator 30 (porous plate 20).

  This pressure change increases in the vibration direction when the perforated plate 20 is displaced toward the stationary member 40, and conversely, when the porous plate 20 is displaced away from the stationary member 40, the pressure decreases and cavitation of the liquid 50 occurs. When such a pressure change acts on the liquid 50 ejected from the pressure chamber 52 through the nozzle hole 21 of the perforated plate 20, the ejection is accelerated when the pressure in the pressure chamber 52 is high, and conversely, the pressure is low and cavitation occurs. When doing so, the eruption will be hindered. Thus, the liquid 50 ejected through the nozzle hole 21 of the perforated plate 20 is in the form of a spray 53 ejected at an ultrasonic vibration cycle.

  Next, a characteristic effect of the ultrasonic spray apparatus 100 according to the present embodiment will be described. The ultrasonic spraying device 100 according to the present embodiment has a device configuration in which the porous plate 20 is ultrasonically vibrated by a bolted Langevin type vibrator 30, and is an inner porous portion 12 of the tubular member 10 that is opposed to the porous plate 20. A pressure chamber 52 is provided between the plate 20 and the stationary member 40 so as to communicate with the flow path 51. Therefore, in the direction perpendicular to the vibration direction, the physique of the ultrasonic spray device 100 can be made smaller than before. In addition, the porous plate 20 is directly fixed to the distal end surface 11 of the cylindrical member 10, and the pressure chamber 52 is provided in the cylindrical interior 12 of the cylindrical member 10 including the porous plate 20 as described above. Yes. Therefore, the configuration of the apparatus 100 can be simplified as compared with the conventional case. From the above, the ultrasonic spraying apparatus 100 according to the present embodiment is an ultrasonic spraying apparatus that has a simple structure and is suitable for size reduction in a direction perpendicular to the vibration direction of the piezoelectric vibrators 31 and 32.

  In this embodiment, the porous plate 20 is directly fixed to the distal end surface 11 of the cylindrical member 10, and the ultrasonic vibration of the bolted Langevin transducer 30 is transmitted to the porous plate 20 through the cylindrical member 10. The Therefore, even if a liquid film having a thickness of about several tens of μm is formed on the surface 23 of the porous plate 20 (the outer surface 23 on the back side of the inner surface 22), the pressure of the liquid 50 pumped by a pump (not shown) is low. The liquid film can be atomized and sprayed by ultrasonic vibration of the perforated plate 20 itself. Accordingly, the liquid 50 can be prevented from dropping at low pressure.

  In the present embodiment, the stationary member 40 has a cylindrical shape having an outer peripheral shape corresponding to the inner peripheral shape of the cylindrical member 10, and is an elastic member that suppresses transmission of ultrasonic vibrations from the bolted Langevin transducer 30. It is positioned and arranged in the cylinder interior 12 of the cylindrical member 10 via the member 60. A flow path 51 is formed in the cylinder of the stationary member 40 by the inner peripheral surface 41 of the stationary member 40. Therefore, the elastic member 60 and the liquid 50 are not in contact with each other, and the shape of the inner peripheral surface 41 of the stationary member 40 is stable, so that the liquid 50 can be stably supplied to the pressure chamber 52.

  In the present embodiment, a part of the cylindrical member 10 also serves as one of a pair of metal members constituting the bolted Langevin type vibrator 30. Therefore, the configuration of the device 100 can be further simplified. And thereby, the assembly man-hour of the apparatus 100 can also be reduced.

  The preferred embodiments of the present invention have been described above. However, the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit of the present invention.

  In this embodiment, the example in which the stationary member 40 penetrates the cylinder interior 35a of the metal block 35 was shown. However, the form of the stationary member 40 is not limited to the above example. Transmission of ultrasonic vibration from the bolted Langevin transducer 30 is suppressed, and at least a part of the flow path 51 of the liquid 50 is used. What is necessary is just to be positioned and arrange | positioned so that it may oppose with the perforated panel 20 while comprising. For example, in the example shown in FIG. 2, the length of the stationary member 40 is shorter than that in the example shown in FIG. 1, and the stationary member 40 extends to the vicinity of the rear end of the horn-shaped portion of the tubular member 10. In the vicinity of the rear end of the horn-shaped portion of the member 10 (near the node position of ultrasonic vibration), the member 10 is positioned and fixed to the wall surface of the cylinder interior 12 via the elastic member 60. The flow path 51 is configured not only by the inner peripheral surface 41 of the stationary member 40 but also by the wall surface of the cylinder interior 12 in the cylindrical member 10. Specifically, the cylindrical interior 12 of the cylindrical member 10 is located on the rear end side with respect to the front end side portion 12a in the range from the rear end where the stationary member 40 is disposed to the front end surface 11 and the rear end where the stationary member 40 is disposed. A rear end side portion 12b, and the front end side portion 12a has a larger sectional area in the opening region than the rear end side portion 12b. Further, the cross-sectional area and shape of the opening region are matched between the rear end side portion 12 b and the inner peripheral surface 41 of the stationary member 40, and the flow path 51 is arranged at the rear of the inner peripheral surface 41 of the stationary member 40 and the inner part 12 of the cylinder. It is comprised by the wall surface of the end side site | part 12b. Moreover, the cylindrical member 10 has a convex portion 16 that protrudes from a part of the rear end surface 13 and is partially configured with a bolt, and the metal block 35 has a central region on the surface on the porous plate 20 side. A concave portion 35d having a predetermined depth is provided so as to surround the opening region of the cylinder interior 35a, and a nut that makes a pair with the above-described bolt is formed on the side wall of the concave portion 35d. Then, the convex portion 16 of the cylindrical member 10 is inserted into the piezoelectric vibrator 31, the power supply side electrode plate 33, the piezoelectric vibrator 32, the GND side electrode plate 34, and the metal block 35, thereby forming the convex portion 16. The bolts are fastened to the nuts of the recesses 35 d provided in the metal block 35, so that the bolted Langevin type vibrator 30 is configured. FIG. 2 is a cross-sectional view showing a schematic configuration of a modified example.

  Further, in the present embodiment, an example in which the stationary member 40 is cylindrical is shown. However, it is also possible to adopt a shape in which the outer surface of the stationary member 40 is not the cylindrical shape but the flow path 51.

  In this embodiment, the example in which the flow path 51 is provided in the inside of the cylindrical member 10 and the inside of the metal block 35 was shown. However, for example, as shown in FIG. 3, the flow path 51 may be provided only inside the tubular member 10. In the example shown in FIG. 3, a flow having a substantially L-shaped cross section is formed only inside the tubular member 10 by the wall surface of the tubular interior 12 (rear end side portion 12 b) of the tubular member 10 and the inner peripheral surface 41 of the stationary member 40. A path 51 is configured. One end of the flow path 51 is exposed to the outside at a portion near the vibration node on the outer peripheral surface of the cylindrical member 10. In the example shown in FIG. 3, the configuration of the stationary member 40 is the same as the configuration shown in FIG. 2, and the metal block 35 is not provided with an opening region extending along the vibration direction. FIG. 3 is a cross-sectional view showing a schematic configuration of a modified example.

  In the present embodiment, an example in which a part of the cylindrical member 10 also serves as a part of the bolted Langevin vibrator 30 (one of a pair of metal members) is shown. However, for example, as shown in FIG. 4, the tubular member 10 and the bolted Langevin transducer 30 may be independent. In FIG. 4, as a pair of metal members, a metal block 35 and a metal member 36 that sandwiches the piezoelectric vibrators 31 and 32 and the electrode plates 33 and 34 are provided. In the example shown in FIG. 4, the configurations of the piezoelectric vibrators 31 and 32, the electrode plates 33 and 34, and the metal block 35 are the same as those shown in the first embodiment (see FIG. 1). . The metal member 36 has a cylindrical shape extending along the vibration direction, and a cross section substantially perpendicular to the vibration direction has a substantially annular shape. In the fastened state, the outer peripheral end is substantially coincident with the outer peripheral end of the rear end surface 13 of the tubular member 10 (the outer peripheral diameter is substantially equal to the outer peripheral diameter of the piezoelectric vibrators 31 and 32), and the center of the rear end surface In the region, a recess 36b having a predetermined depth is provided so as to surround the opening region of the cylinder interior 36a. And the nut which makes a pair with the volt | bolt comprised by the convex part 35c of the metal block 35 is comprised by the side wall of this recessed part 36b. Moreover, as shown in FIG. 4, the metal block 35 and the cylindrical member 10 are integrated with each other by fastening. FIG. 4 is a cross-sectional view showing a schematic configuration of a modified example.

  In this embodiment, the example which the cylindrical member 10 has a horn-shaped site | part was shown. However, it is good also as a structure which does not have a horn shape site | part.

  In the present embodiment, an example in which the pressure chamber 52 is configured by the open end 42 of the stationary member 40, the wall surface in the cylinder interior 12 of the cylindrical member 10, and the inner surface 22 of the porous plate 20 is shown. However, the pressure chamber 52 may be any one that is inside the cylinder 12 of the cylindrical member 10 and uses the opposed porous plate 20 and the stationary member 40 as the wall surface of the pressure chamber 52. In other words, what is necessary is just the inside of the cylinder 12 of the cylindrical member 10, which is configured between the opposed porous plate 20 and the stationary member 40. Therefore, the side surface of the pressure chamber 52 is not limited to the wall surface in the cylinder interior 12 of the cylindrical member 10. For example, the inner peripheral surface of the annular convex portion that protrudes from the peripheral region at the open end 42 of the stationary member 40 and is adjacent to the wall surface of the cylinder interior 12 may be the side surface of the pressure chamber 52.

It is sectional drawing which shows schematic structure of the ultrasonic spray apparatus which concerns on 1st Embodiment. It is sectional drawing which shows schematic structure of a modification. It is sectional drawing which shows schematic structure of a modification. It is sectional drawing which shows schematic structure of a modification.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Cylindrical member 11 ... Tip surface 12 ... Inside of cylinder 20 ... Perforated plate 30 ... Bolt tightening Langevin type vibrator 31, 32 ... Piezoelectric vibrator 35 ... Metal block (Metal member)
40 ... stationary member 42 ... open end 50 ... liquid 51 ... flow path 52 ... pressure chamber 100 ... ultrasonic spraying device

Claims (4)

A cylindrical member in which a porous plate is fixed to an opening end so as to close an opening on one end side, and a liquid flow path is provided inside the cylinder;
A bolt-clamped Langevin type vibrator that has a pair of piezoelectric vibrators laminated in the vibration direction and a pair of metal members that sandwich the piezoelectric vibrator from above and below in the lamination direction, and ultrasonically vibrates the porous plate;
Transmission of ultrasonic vibration from the bolted Langevin type vibrator is suppressed, and positioning is arranged inside the cylinder of the cylindrical member so as to be opposed to the porous plate while forming at least a part of the flow path. A stationary member,
Inside the cylinder of the cylindrical member, a pressure chamber connected to one end of the flow path and changing pressure according to vibration of the porous plate is formed between the opposed porous plate and the stationary member. An ultrasonic spraying device characterized by comprising:   The stationary member has a cylindrical shape having an outer peripheral shape corresponding to an inner peripheral shape of the cylindrical member, and the cylindrical member is interposed via a buffer member that suppresses transmission of ultrasonic vibration from the bolt-tightened Langevin type vibrator. The ultrasonic spraying device according to claim 1, wherein the ultrasonic spraying device is positioned and arranged inside the cylinder of the member.   The ultrasonic spraying device according to claim 1 or 2, wherein the cylindrical member also serves as one of a pair of the metal members constituting the bolt-clamped Langevin type vibrator.   The ultrasonic spray apparatus according to claim 1, wherein the cylindrical member is a horn that amplifies the amplitude of ultrasonic vibration.

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