JP2012193068A - Method of producing high-purity cupric oxide fine powder and method of supplying copper ion to copper sulfate solution - Google Patents

Method of producing high-purity cupric oxide fine powder and method of supplying copper ion to copper sulfate solution Download PDF

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JP2012193068A
JP2012193068A JP2011057829A JP2011057829A JP2012193068A JP 2012193068 A JP2012193068 A JP 2012193068A JP 2011057829 A JP2011057829 A JP 2011057829A JP 2011057829 A JP2011057829 A JP 2011057829A JP 2012193068 A JP2012193068 A JP 2012193068A
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cupric oxide
fine powder
powder
oxide fine
copper
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Kazuo Kasai
一雄 河西
Takeshi Naganami
武 長南
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Sumitomo Metal Mining Co Ltd
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Abstract

【課題】 酸化銅の純度が高く、かつめっき液への溶解性が高い高純度酸化第二銅微粉末とその製造方法の提供と共に、高純度酸化第二銅粉末を用いた銅の電気めっきに用いる硫酸銅水溶液への銅イオンの供給方法を提供する。
【解決手段】 フレーク状銅粉を原料に用い、そのフレーク状銅粉から熱処理により得られた酸化第二銅粗粉末を粉砕処理する高純度酸化第二銅微粉末の製造方法であって、酸素含有雰囲気下で一次熱処理して酸化第二銅粗粉末を得る工程と、その酸化第二銅粗粉末を粉砕処理して一次熱処理酸化第二銅微粉末を得る工程と、その一次熱処理酸化第二銅微粉末を酸素含有雰囲気下で二次熱処理する工程とを具備することを特徴とする。
【選択図】図2
PROBLEM TO BE SOLVED: To provide high-purity cupric oxide fine powder having high purity of copper oxide and high solubility in a plating solution and a method for producing the same, and to electroplating copper using the high-purity cupric oxide powder. Provided is a method for supplying copper ions to an aqueous copper sulfate solution to be used.
SOLUTION: A method for producing high-purity cupric oxide fine powder, which uses flaky copper powder as a raw material, and pulverizes cupric oxide coarse powder obtained by heat treatment from the flaky copper powder, comprising oxygen A step of obtaining a cupric oxide coarse powder by primary heat treatment in a containing atmosphere; a step of obtaining a primary heat treated cupric oxide fine powder by pulverizing the cupric oxide coarse powder; And a secondary heat treatment of the copper fine powder in an oxygen-containing atmosphere.
[Selection] Figure 2

Description

本発明は、高純度酸化第二銅微粉末の製造方法と、その製造方法による高純度酸化第二銅微粉末を用いた硫酸銅水溶液の銅イオンの供給方法に関するものである。   The present invention relates to a method for producing a high-purity cupric oxide fine powder and a method for supplying copper ions in an aqueous copper sulfate solution using the high-purity cupric oxide fine powder by the production method.

酸化第二銅は、顔料、塗料、触媒、陶磁器の着色剤や銅めっき液の補給用銅源などに使用されている。その製造方法は、湿式法と乾式法に大別される。   Cupric oxide is used as a copper source for replenishing pigments, paints, catalysts, ceramic colorants and copper plating solutions. The manufacturing method is roughly classified into a wet method and a dry method.

湿式法は、例えば、特許文献1に記載されるような塩化第二銅や硫酸銅の水溶液に水酸化ナトリウムを反応させて水酸化銅を生成させた後、加熱する方法である。より詳細には、塩化第二銅を含むプリント基板のエッチング廃液を苛性アルカリで中和し、その中和した銅溶液と苛性アルカリ水溶液とを、温度40〜50℃に保持した水溶液中に同時に滴下混合して、その混合した水溶液のpHを弱酸性から弱アルカリ性の範囲に維持しながら銅の水和物を生成させる。次いでpH12〜13に調製し、70〜80℃の温度に30分間保持した後、水洗、固液分離して酸化第二銅を製造する方法が特許文献1に提案されている。
しかし、不純物として塩化ナトリウム(NaCl)が副生することから、不純物除去のために水洗工程が必要であること、さらには水洗しても完全に除去することは困難である、といった問題を抱えている。
The wet method is, for example, a method in which sodium hydroxide is reacted with an aqueous solution of cupric chloride or copper sulfate as described in Patent Document 1 to form copper hydroxide and then heated. More specifically, the etching waste solution of the printed circuit board containing cupric chloride is neutralized with caustic alkali, and the neutralized copper solution and caustic aqueous solution are simultaneously dropped into an aqueous solution maintained at a temperature of 40 to 50 ° C. Mixing to form a copper hydrate while maintaining the pH of the mixed aqueous solution in a weakly acidic to weakly alkaline range. Next, Patent Document 1 proposes a method of preparing cupric oxide by adjusting the pH to 12 to 13 and maintaining the temperature at 70 to 80 ° C. for 30 minutes, followed by washing with water and solid-liquid separation.
However, since sodium chloride (NaCl) is produced as a by-product as an impurity, there is a problem that a water washing step is necessary for removing impurities, and that it is difficult to completely remove even after washing with water. Yes.

また、特許文献2には、硫酸銅水溶液と水酸化ナトリウム水溶液とを30℃以下の温度で反応させて水酸化第二銅を生成し、次に60〜80℃の温度に加熱、熟成して酸化第二銅を形成する製造方法が開示されている。   In Patent Document 2, a copper sulfate aqueous solution and a sodium hydroxide aqueous solution are reacted at a temperature of 30 ° C. or lower to produce cupric hydroxide, and then heated and aged at a temperature of 60 to 80 ° C. A manufacturing method for forming cupric oxide is disclosed.

特許文献1、2に示す湿式法で製造された酸化第二銅粉末は、銅めっき液への溶解性が優れているものが多い。しかし、この方法で得られた酸化第二銅粉末は、不純物としてNaやSO体でのSの残留濃度が高い問題があり、めっき液の硫酸銅水溶液を使用すると、その不純物などに起因するめっき不具合といった問題を生じ易かった。 Many cupric oxide powders manufactured by the wet method shown in Patent Documents 1 and 2 have excellent solubility in a copper plating solution. However, the cupric oxide powder obtained by this method has a problem that the residual concentration of S in Na and SO 4 bodies is high as an impurity. When a copper sulfate aqueous solution of a plating solution is used, the cupric oxide powder is caused by the impurity. Problems such as plating defects were likely to occur.

一方、乾式法は、非特許文献1に記載されるように、硝酸銅、硫酸銅、炭酸銅、水酸化銅などを空気中で600℃程度で熱分解する方法であり、湿式法に比べて生産性が高く、金属銅を原料とした場合、高純度の酸化第二銅が得られる利点がある。しかし、乾式法では、その熱分解温度が高いため、得られた酸化第二銅粉末は、焼結の影響でめっき液への溶解速度が極めて遅くなってしまう問題を生じていた。   On the other hand, as described in Non-Patent Document 1, the dry method is a method in which copper nitrate, copper sulfate, copper carbonate, copper hydroxide, etc. are thermally decomposed at about 600 ° C. in the air, compared with the wet method. Productivity is high, and when metallic copper is used as a raw material, there is an advantage that high-purity cupric oxide can be obtained. However, since the thermal decomposition temperature is high in the dry method, the obtained cupric oxide powder has a problem that the dissolution rate in the plating solution is extremely slow due to the influence of sintering.

特開平5−319825号公報JP-A-5-31825 特開平3−80116号公報Japanese Patent Laid-Open No. 3-80116

第4版実験化学講座 無機化合物4th edition experimental chemistry course inorganic compounds

本発明は、生産性が高い乾式法の問題点、すなわち、めっき液への溶解性に着目してなされたもので、その課題とするところは、酸化銅の純度が高く、かつめっき液への溶解性が高い高純度酸化第二銅微粉末とその製造方法を提供すると共に、高純度酸化第二銅粉末を用いた銅の電気めっきに用いる硫酸銅水溶液への銅イオンを供給することにある。   The present invention was made by paying attention to the problem of the dry method with high productivity, that is, the solubility in the plating solution. The problem is that the purity of the copper oxide is high and the solution to the plating solution is high. To provide a high-purity cupric oxide fine powder having high solubility and a method for producing the same, and to supply copper ions to an aqueous copper sulfate solution used for electroplating copper using the high-purity cupric oxide powder .

そこで、上記課題を解決するため、本発明者等が鋭意研究を継続した結果、酸化第二銅源としてフレーク状銅粉を用い、酸素含有雰囲気下350℃以上で一次熱処理して得た酸化第二銅粗粉末を、粉砕し、さらに回収した一次熱処理酸化第二銅微粉末を酸素含有雰囲気下で二次熱処理することによって得られた酸化第二銅微粉末は、めっき液への溶解性がさらに高くなる現象を見出した。
本発明はこのような技術的知見に基づき完成に至ったものである。
Therefore, in order to solve the above problems, as a result of continual research by the present inventors, flaky copper powder was used as a cupric oxide source, and the first oxidized heat treatment obtained at 350 ° C. or higher in an oxygen-containing atmosphere. The cupric oxide fine powder obtained by pulverizing the cupric coarse powder and subjecting the recovered primary heat-treated cupric oxide fine powder to a secondary heat treatment in an oxygen-containing atmosphere has a solubility in the plating solution. We found a phenomenon that was even higher.
The present invention has been completed based on such technical knowledge.

本発明の第1の発明は、フレーク状銅粉を原料に用い、そのフレーク状銅粉から熱処理により得られた酸化第二銅粗粉末を粉砕処理する高純度酸化第二銅微粉末の製造方法であって、酸素含有雰囲気下で一次熱処理して酸化第二銅粗粉末を得る工程と、得られた酸化第二銅粗粉末を粉砕処理して一次熱処理酸化第二銅微粉末を得る工程と、その一次熱処理酸化第二銅微粉末を酸素含有雰囲気下で二次熱処理する工程とを具備することを特徴とするものである。   1st invention of this invention uses the flaky copper powder as a raw material, The manufacturing method of the high purity cupric oxide fine powder which grind | pulverizes the cupric oxide coarse powder obtained by heat processing from the flaky copper powder A step of obtaining a cupric oxide coarse powder by primary heat treatment in an oxygen-containing atmosphere; a step of obtaining a primary heat-treated cupric oxide fine powder by pulverizing the obtained cupric oxide coarse powder; The primary heat treatment cupric oxide fine powder is subjected to a secondary heat treatment in an oxygen-containing atmosphere.

本発明の第2の発明は、第1の発明における二次熱処理の処理温度が350℃〜800℃であることを特徴とする高純度酸化第二銅微粉末の製造方法である。   2nd invention of this invention is a manufacturing method of the high-purity cupric oxide fine powder characterized by the processing temperature of the secondary heat processing in 1st invention being 350 to 800 degreeC.

本発明の第3の発明は、第1及び第2の発明における一次熱処理が、フレーク状銅粉を酸素含有雰囲気下で温度350℃〜800℃で熱処理することを特徴とする高純度酸化第二銅微粉末の製造方法である。   According to a third invention of the present invention, the primary heat treatment in the first and second inventions is characterized in that the flaky copper powder is heat-treated at a temperature of 350 ° C. to 800 ° C. in an oxygen-containing atmosphere. It is a manufacturing method of copper fine powder.

本発明の第4の発明は、第1の発明におけるフレーク状銅粉から酸化第二銅粗粉末を得る熱処理が、そのフレーク状銅粉を酸素含有雰囲気下、熱処理温度が350℃〜800℃の条件で行うことを特徴とする高純度酸化第二銅微粉末の製造方法である。   In the fourth invention of the present invention, the heat treatment for obtaining cupric oxide coarse powder from the flaky copper powder in the first invention is carried out at a heat treatment temperature of 350 ° C. to 800 ° C. in an oxygen-containing atmosphere. It is the manufacturing method of the highly purified cupric oxide fine powder characterized by performing on conditions.

本発明の第5の発明は、第1から第4の発明における粉砕処理が、酸化第二銅粗粉末と溶媒とを混合したスラリーを、媒体攪拌ミルを用いて粉砕した処理、もしくは酸化第二銅粗粉末を気流式ミルを用いて粉砕した処理であることを特徴とする高純度酸化第二銅微粉末の製造方法である。   According to a fifth aspect of the present invention, in the first to fourth aspects, the pulverization treatment is a treatment in which a slurry obtained by mixing a cupric oxide coarse powder and a solvent is pulverized using a medium stirring mill, or the second oxidation It is a process for producing a high-purity cupric oxide fine powder, characterized in that it is a treatment in which a coarse copper powder is pulverized using an airflow mill.

本発明の第6の発明は、第1から第5の発明における高純度酸化第二銅微粉末の製造方法により製造された粒状酸化第二銅微粉末である。   6th invention of this invention is the granular cupric oxide fine powder manufactured by the manufacturing method of the highly purified cupric oxide fine powder in 1st-5th invention.

本発明の第7の発明は、高純度酸化第二銅微粉末を溶解させて硫酸銅水溶液の銅イオン濃度を調整する硫酸銅水溶液への銅イオンの供給方法であって、その高純度酸化第二銅微粉末が、第1から第5の発明により得られたもので、且つ、その高純度酸化第二銅微粉末を、CuSO・5HOを50〜130g/L、HSOを150〜240g/L、塩素イオンを30〜70mg/L含む水溶液に溶解させることを特徴とする。 A seventh invention of the present invention is a method for supplying copper ions to an aqueous copper sulfate solution, in which a high-purity cupric oxide fine powder is dissolved to adjust the copper ion concentration of the aqueous copper sulfate solution. The cupric fine powder was obtained by the first to fifth inventions, and the high-purity cupric oxide fine powder was made of CuSO 4 .5H 2 O at 50 to 130 g / L, H 2 SO 4 Is dissolved in an aqueous solution containing 150 to 240 g / L and 30 to 70 mg / L of chlorine ions.

本発明に係る製造方法による高純度酸化第二銅微粉末は、生産性が高い乾式法で製造してもめっき液への溶解性が高いため、銅めっき液の補給用銅源として好適である。   The high-purity cupric oxide fine powder produced by the production method according to the present invention is suitable as a copper source for replenishing the copper plating solution because it is highly soluble in the plating solution even if produced by a dry method with high productivity. .

電解銅粉のSEM像である。It is a SEM image of electrolytic copper powder. フレーク状銅粉のSEM像である。It is a SEM image of flaky copper powder. フレーク状銅粉のSEM像である。It is a SEM image of flaky copper powder.

本発明の酸化第二銅微粉末の製造方法は、酸化第二銅源にフレーク状銅粉を用い、そのフレーク状銅粉を熱処理することにより得られた酸化第二銅粗粉末を粉砕処理する高純度酸化第二銅微粉末製造方法であり、酸素含有雰囲気下で一次熱処理して、酸化第二銅粗粉末を得る工程と、酸化第二銅粗粉末を粉砕して一次熱処理酸化第二銅微粉末を得る工程と、その一次熱処理酸化第二銅微粉末を酸素含有雰囲気下で二次熱処理する工程と、を具備することを特徴とするものである。
さらに、このような一次熱処理で得られた酸化第二銅粗粉末を粉砕処理して得られる一次熱処理酸化第二銅微粉末を二次熱処理することで得られた酸化第二銅微粉末は、一次熱処理酸化第二銅微粉末に比べて硫酸銅水溶液への溶解時間が短い特長を有している。
The method for producing cupric oxide fine powder of the present invention uses flaky copper powder as a cupric oxide source, and pulverizes the cupric oxide coarse powder obtained by heat-treating the flaky copper powder. This is a method for producing high-purity cupric oxide fine powder, a step of primary heat treatment in an oxygen-containing atmosphere to obtain a cupric oxide crude powder, and a heat treatment of cupric oxide coarse powder by pulverizing the cupric oxide coarse powder. And a step of obtaining a fine powder and a step of subjecting the fine powder of the primary heat treatment cupric oxide fine powder to a secondary heat treatment in an oxygen-containing atmosphere.
Furthermore, the cupric oxide fine powder obtained by subjecting the primary heat-treated cupric oxide fine powder obtained by pulverizing the cupric oxide coarse powder obtained by such primary heat treatment to the secondary heat treatment, Compared to the primary heat-treated cupric oxide fine powder, it has a feature that the dissolution time in the aqueous copper sulfate solution is short.

以下、本発明の実施の形態について、具体的に説明する。
[フレーク状銅粉]
酸化第二銅源に用いるフレーク状銅粉は、扁平形状をした銅粉で、また凝集性が低いことから、熱処理による酸化反応性や溶解性の向上に寄与する。
このフレーク状銅粉の形態に関し、その粒径と厚みについては、酸化速度の観点からは小さく、薄い方が好ましく、取扱いの容易性の観点からは大きく、厚い方が好ましい。
このような観点から本発明で用いるフレーク状銅粉の粒径は、1〜100μm、好ましくは3〜50μm以下、より好ましくは5〜30μmである。その厚みは、5μm以下、好ましくは3μm以下、より好ましくは2μm以下である。
使用するフレーク状銅粉は、市販されているものを用いることが可能であるが、市販の銅粉を粉砕して調製しても良い。
Hereinafter, embodiments of the present invention will be specifically described.
[Flake copper powder]
The flaky copper powder used for the cupric oxide source is a flat copper powder and has low cohesiveness, and therefore contributes to the improvement of oxidation reactivity and solubility by heat treatment.
Regarding the form of the flaky copper powder, the particle size and thickness are small from the viewpoint of oxidation rate and are preferably thin, and large from the viewpoint of ease of handling, and are preferably thick.
From such a viewpoint, the particle size of the flaky copper powder used in the present invention is 1 to 100 μm, preferably 3 to 50 μm or less, and more preferably 5 to 30 μm. The thickness is 5 μm or less, preferably 3 μm or less, more preferably 2 μm or less.
Although what is marketed can be used for the flaky copper powder to be used, you may grind | pulverize and prepare a commercially available copper powder.

[酸化第二銅微粉末の製造方法]
(1)酸化第二銅粗粉末の形成
酸化第二銅粗粉末は、原料とするフレーク状銅粉を酸素含有雰囲気下で、熱処理温度を350℃〜800℃とした条件で行うことで形成することができる。
[Manufacturing method of cupric oxide fine powder]
(1) Formation of cupric oxide coarse powder The cupric oxide coarse powder is formed by performing flaky copper powder as a raw material in an oxygen-containing atmosphere under a heat treatment temperature of 350 ° C to 800 ° C. be able to.

熱処理温度が350℃未満では、酸化に長時間を要したり、異相が混在してしまったりする。
特に、問題となるのは異相であり、異相のうち酸化第一銅は、硫酸銅水溶液であるめっき液に溶解しない。そのため、異相の存在はめっき液の溶解性やめっき液の特性に悪影響を与えると考えられる。
一方、熱処理温度の上限は、媒体攪拌ミルや気流式ミルでの粉砕性の点から800℃が好ましく、熱処理温度が、800℃を超えると、酸化第二銅粗粉末が焼結し粉砕しにくくなる。なお、雰囲気は適宜選択できるが、大気中で熱処理しても良い。
When the heat treatment temperature is less than 350 ° C., it takes a long time for the oxidation or a heterogeneous phase is mixed.
In particular, the problem is the heterogeneous phase, and cuprous oxide among the heterogeneous phases does not dissolve in the plating solution which is an aqueous copper sulfate solution. For this reason, the presence of a different phase is considered to adversely affect the solubility of the plating solution and the properties of the plating solution.
On the other hand, the upper limit of the heat treatment temperature is preferably 800 ° C. from the viewpoint of grindability in a medium stirring mill or an airflow mill, and when the heat treatment temperature exceeds 800 ° C., the cupric oxide coarse powder is difficult to sinter and pulverize. Become. Although the atmosphere can be selected as appropriate, heat treatment may be performed in the air.

熱処理時間は、適宜選択でき、酸化第二銅粗粉末の異相の有無や粉砕性から適宜選択されるものである。   The heat treatment time can be appropriately selected, and is appropriately selected from the presence or absence of a different phase of the cupric oxide coarse powder and the pulverizability.

(2)粉砕処理と一次熱処理酸化第二銅粉末
一次熱処理酸化第二銅微粉末は、上記(1)により形成したフレーク状銅粉から形成された酸化第二銅粗粉末を粉砕したものである。
ここでの粉砕処理において得られる嵩密度、タップ密度、比表面積および平均粒子径の粉末特性が、次の二次熱処理された酸化第二銅微粉末の粉末特性を決めるものである。なお、後述する二次熱処理は、一次熱処理酸化第二銅微粉末を焼結させることはない。
(2) Grinding treatment and primary heat treatment cupric oxide powder The primary heat treatment cupric oxide fine powder is obtained by pulverizing the cupric oxide coarse powder formed from the flaky copper powder formed by the above (1). .
The powder characteristics of the bulk density, tap density, specific surface area, and average particle diameter obtained in the pulverization process here determine the powder characteristics of the subsequent secondary heat-treated cupric oxide fine powder. The secondary heat treatment described later does not sinter the primary heat-treated cupric oxide fine powder.

酸化第二銅粗粉末の粉砕処理には、媒体攪拌ミルや気流式ミルを用いることが望ましい。
この媒体攪拌ミルを用いると、下記段落[0035]の(1)式で求めた平均粒子径が1100nmを越えた粒子が形成されてしまう可能性を低減できる。
媒体攪拌ミルは、ビーズなどの粉砕媒体と酸化第二銅粗粉末と溶媒を含むスラリーに攪拌により運動エネルギーを与え、酸化第二銅粗粉末同士の衝突や粉砕媒体と酸化第二銅粗粉末のせん断応力により微粉末を得る装置である。
媒体攪拌ミルの攪拌機構は、ビーズのせん断応力が酸化第二銅粗粉末に効率よく伝達されれば良く、その機構や形状は特に限定されない。
It is desirable to use a medium stirring mill or an airflow mill for pulverizing the cupric oxide coarse powder.
When this medium stirring mill is used, it is possible to reduce the possibility that particles having an average particle diameter determined by the equation (1) in the following paragraph [0035] exceeding 1100 nm will be formed.
The media agitation mill gives kinetic energy to the slurry containing the grinding media such as beads, the cupric oxide coarse powder and the solvent by stirring, and the collision between the cupric oxide coarse powders and the grinding media and the cupric oxide coarse powder. It is a device that obtains fine powder by shear stress.
The stirring mechanism of the medium stirring mill is not particularly limited as long as the shear stress of the beads is efficiently transmitted to the cupric oxide coarse powder.

粉砕媒体であるビーズ径は、目的とする酸化第二銅微粉末の最終粒子径によって選択することが一般的であるが、好ましくは直径1mm以下である。直径1mm以下であれば、粒子を微細に砕く効率が高くなる。
さらに、ビーズ径は、小さいほど粉砕スピードが速く、粉砕される酸化第二銅粉末の粒子径も小さくなる。特に、めっき液への溶解性が高い粒子径に粉砕するには、特に直径0.3mm以下のビーズが好ましい。
ビーズの材質は、特に限定されないが、例えば比重が小さいガラスビーズや比重が大きいZrOビーズ、YSZビーズが挙げられる。比重が大きいビーズでは、粉砕効率が高く、摩耗が少なく、特に好ましい。
The bead diameter as a grinding medium is generally selected according to the final particle diameter of the desired cupric oxide fine powder, but is preferably 1 mm or less in diameter. If it is 1 mm or less in diameter, the efficiency which grinds particles finely will become high.
Furthermore, the smaller the bead diameter, the faster the grinding speed and the smaller the particle diameter of the cupric oxide powder to be ground. In particular, beads having a diameter of 0.3 mm or less are particularly preferable for pulverization to a particle diameter having high solubility in the plating solution.
The material of the beads is not particularly limited, and examples thereof include glass beads having a low specific gravity, ZrO 2 beads having a high specific gravity, and YSZ beads. Beads having a large specific gravity are particularly preferred because of high grinding efficiency and low wear.

媒体攪拌ミルは、特に限定されず、例えばビーズミル、ボールミル、サンドミル、ペイントシェーカー、超音波ホモジナイザーなどが挙げられる。
一方、気流式ミルは、高速のジェット気流中で酸化第二銅粗粉末を相互に衝突させることにより、微粉末を得る装置である。
なお、湿式媒体ミルを用いても気流式ミルを用いても、粉砕条件は、特に限定されるものではなく、得られる酸化第二銅微粉末が所望の比表面積や平均粒子径となるように適宜選択すればよい。
The medium stirring mill is not particularly limited, and examples thereof include a bead mill, a ball mill, a sand mill, a paint shaker, and an ultrasonic homogenizer.
On the other hand, the airflow mill is a device that obtains fine powder by causing the cupric oxide coarse powder to collide with each other in a high-speed jet stream.
The pulverization conditions are not particularly limited regardless of whether the wet medium mill or the airflow mill is used, so that the obtained cupric oxide fine powder has a desired specific surface area and average particle diameter. What is necessary is just to select suitably.

溶媒は、特に限定されるものではなく、例えば、水、エタノール、プロパノール、ブタノール、イソプロピルアルコール、イソブチルアルコール、ジアセトンアルコールなどのアルコール類、メチルエーテル、エチルエーテル、プロピルエーテルなどのエーテル類、エステル類、またはアセトン、メチルエチルケトン、ジエチルケトン、シクロヘキサノン、イソブチルケトンなどのケトン類といった各種の有機溶媒が使用可能である。   The solvent is not particularly limited, and examples thereof include water, ethanol, propanol, butanol, isopropyl alcohol, isobutyl alcohol, diacetone alcohol and other ethers, methyl ether, ethyl ether, propyl ether and other ethers, and esters. Alternatively, various organic solvents such as acetone, methyl ethyl ketone, diethyl ketone, cyclohexanone, and ketones such as isobutyl ketone can be used.

さらに、酸化第二銅微粉末の使用目的に応じて、このスラリーには、適宜公知の消泡剤や分散剤や酸化第二銅微粉末の表面を被覆する化合物などを添加しても良い。   Furthermore, depending on the intended use of the cupric oxide fine powder, a known antifoaming agent or dispersant, a compound that coats the surface of the cupric oxide fine powder, or the like may be added to the slurry as appropriate.

(3)二次熱処理
上記の工程を経て得られた一次熱処理酸化第二銅微粉末を、酸素含有雰囲気下で熱処理して二次熱処理酸化第二銅微粉末を形成する。
その熱処理温度は350℃〜800℃が望ましく、熱処理時間は1時間〜3時間が望ましいが、最終的に完全なCuOの形態となるように両者は適宜選択される。
(3) Secondary heat treatment The primary heat-treated cupric oxide fine powder obtained through the above steps is heat-treated in an oxygen-containing atmosphere to form a secondary heat-treated cupric oxide fine powder.
The heat treatment temperature is desirably 350 ° C. to 800 ° C., and the heat treatment time is desirably 1 hour to 3 hours, but both are appropriately selected so as to finally form a complete CuO form.

この酸素含有雰囲気下での二次熱処理により、得られた酸化第二銅微粉末のめっき液への溶解性がさらに高くなるのは、一部酸素欠損の状態(CuO1−x)から完全なCuOの状態になるためと推察している。
なお、この二次熱処理では、一次熱処理酸化第二銅微粉末を焼結させないことに留意しなければならない。そのため上記の熱処理温度、および熱処理時間が望ましい。
さらに、本発明の酸化第二銅微粉末の製造方法は、酸化第二銅粗粉末を粉砕した微粉末化した一次熱処理酸化第二銅微粉末を二次熱処理するので、完全なCuOの形態となりやすい。
The solubility of the obtained cupric oxide fine powder in the plating solution by the secondary heat treatment in the oxygen-containing atmosphere is further increased from the state of partial oxygen deficiency (CuO 1-x ). This is presumed to be in the state of CuO.
It should be noted that this secondary heat treatment does not sinter the primary heat treated cupric oxide fine powder. Therefore, the above heat treatment temperature and heat treatment time are desirable.
Furthermore, the manufacturing method of the cupric oxide fine powder according to the present invention performs the secondary heat treatment of the finely powdered primary heat treated cupric oxide fine powder obtained by pulverizing the cupric oxide coarse powder. Cheap.

硫酸銅水溶液への溶解時間は、二次熱処理を実施することで短くなる。
そのため、本発明の酸化第二銅微粉末は、銅めっき用補給銅源としてより望ましい。具体的には、本発明の製造方法で得られた酸化第二銅微粉末の7gの溶解時間は、CuSO・5HOを90g/L、HSOを220g/L、塩素イオンを60mg/L含み、攪拌されている1リットルの硫酸銅水溶液に投入した時に、2分以下で溶解する易溶性を有する。
The dissolution time in the copper sulfate aqueous solution is shortened by performing the secondary heat treatment.
Therefore, the cupric oxide fine powder of the present invention is more desirable as a replenishing copper source for copper plating. Specifically, the dissolution time of 7 g of the cupric oxide fine powder obtained by the production method of the present invention is 90 g / L for CuSO 4 .5H 2 O, 220 g / L for H 2 SO 4 , and chloride ions. It contains 60 mg / L and has a solubility that dissolves in 2 minutes or less when added to a stirred 1 liter aqueous copper sulfate solution.

以上のようにして、得られる酸化銅微粉末は、二次熱処理の効果と、比表面積が1m/g〜50m/gで、かつ平均粒子径が20nm〜1100nmとなり、硫酸銅水溶液(めっき液)への溶解性が高くなる。なお、当該平均粒子径は、下記(1)式から求めた値である。 As described above, the copper oxide fine powder obtained has a effect of secondary heat treatment, a specific surface area of 1m 2 / g~50m 2 / g, and an average particle diameter of 20nm~1100nm next, an aqueous solution of copper sulfate (Plating Solubility in the liquid). In addition, the said average particle diameter is the value calculated | required from the following (1) formula.

[硫酸銅水溶液(めっき液)の銅イオン供給方法]
銅を電解めっきする際に用いる銅めっき液(硫酸銅水溶液)は、硫酸銅、硫酸および塩素イオンを含有し、pHは1よりも低いものが用いられることが多い。そして、この銅めっき液には、銅めっきの品質向上のため公知の添加剤が加えられている。
[Copper ion supply method for copper sulfate aqueous solution (plating solution)]
A copper plating solution (copper sulfate aqueous solution) used for electrolytic plating of copper contains copper sulfate, sulfuric acid and chlorine ions, and a pH lower than 1 is often used. A known additive is added to the copper plating solution to improve the quality of the copper plating.

一方、銅の電解めっきを行うと、めっき液中の銅が析出し、めっき液の銅の濃度が低下する。そこで、めっき液の銅濃度の低下を防ぐ為、陽極に銅を用いて陽極を溶解しながら銅電解めっきを行う方法と、陽極に導電性酸化物セラミック等で覆われたチタン等からなる不溶性陽極を用い併せてめっき液へ銅を供給する機構を備えた不溶性陽極を用いる方法がある。   On the other hand, when copper is electroplated, copper in the plating solution is deposited, and the concentration of copper in the plating solution is lowered. Therefore, in order to prevent a decrease in the copper concentration of the plating solution, a method of performing copper electrolytic plating while dissolving the anode using copper as the anode, and an insoluble anode made of titanium or the like covered with a conductive oxide ceramic on the anode In addition, there is a method using an insoluble anode provided with a mechanism for supplying copper to the plating solution.

この不溶性陽極を用いる場合のめっき液へどのように銅を補うかが問題となる。
めっき液へ銅を供給するには、めっき液に銅または銅を含む化合物等の銅源が速やかに溶解することと、銅源が溶解することでめっき液のSO 2+イオンなどのバランスが崩れないこと、さらにめっき液に含まれる添加剤が分解しないことが要求される。
このような要求に対して、酸化第二銅微粉末は、めっき液のSO 2+イオンなどのバランスを崩すことなく、また、各種添加剤の分解も少ない利点を有するものである。
The problem is how to supplement copper to the plating solution when this insoluble anode is used.
To supply copper to the plating solution, the copper source such as copper or a compound containing copper dissolves rapidly in the plating solution, and the balance of SO 4 2+ ions of the plating solution is lost due to the dissolution of the copper source. Further, it is required that the additive contained in the plating solution does not decompose.
In response to such demands, cupric oxide fine powder has the advantage that the balance of SO 4 2+ ions and the like of the plating solution is not lost, and the decomposition of various additives is small.

さらに、めっき液への銅の供給は、めっき液中の銅が減少する都度、速やかに行う必要がある。
具体的は、攪拌されたCuSO・5HOを90g/L、HSOを220g/L、塩素イオンを60mg/L含むめっき液に近似した水溶液1リットルに、酸化第二銅粉末7gを投入したときの溶解時間は、短いほどより望ましい。
本発明に係る酸化第二銅微粉末は、上記めっき液に近似した水溶液1リットルに投入すると2分以内に溶解する。
Furthermore, it is necessary to supply the copper to the plating solution promptly whenever the copper in the plating solution decreases.
Specifically, 7 g of cupric oxide powder was added to 1 liter of an aqueous solution approximated to 90 g / L of stirred CuSO 4 .5H 2 O, 220 g / L of H 2 SO 4 , and 60 mg / L of chlorine ions. It is more desirable that the dissolution time when adding is shorter.
The cupric oxide fine powder according to the present invention dissolves within 2 minutes when introduced into 1 liter of an aqueous solution similar to the above plating solution.

また、めっき液に投入される酸化第二銅微粉末は、溶解残渣を生じてはならない。特に酸化第一銅は、めっき液に溶解せずに残渣となることから生成を避けるべきものである。本発明の酸化第二銅微粉末の製造方法では、酸化第二銅粗粉末を製造する際の熱処理で異相となる酸化第一銅が生じにくい。
さらに、この熱処理の処理条件では、媒体攪拌ミルもしくは気流式ミルで微粉末化可能な酸化第二銅粗粉末が得られるので、結果的には、微粉砕によりめっき液へ速やかに溶解する酸化第二銅微粉末を得ることになる。したがって、めっき液の調整、すなわち硫酸銅水溶液への銅イオンの供給が可能となる。
Moreover, the cupric oxide fine powder thrown into the plating solution should not produce a dissolution residue. In particular, cuprous oxide should be prevented from being formed because it is not dissolved in the plating solution and becomes a residue. In the manufacturing method of cupric oxide fine powder of the present invention, cuprous oxide which becomes a different phase by heat treatment at the time of manufacturing cupric oxide coarse powder is hard to occur.
Further, under the heat treatment conditions, a cupric oxide crude powder that can be made fine by a medium agitating mill or an airflow mill is obtained. A fine copper powder will be obtained. Therefore, it is possible to adjust the plating solution, that is, supply copper ions to the aqueous copper sulfate solution.

電解めっき装置で、本発明の硫酸銅水溶液への銅イオンの供給方法を実施するには、電解めっき装置のめっきを行うめっき槽と別に酸化第二銅微粉末を溶解する酸化第二銅溶解槽を設け、めっき槽と酸化第二銅溶解槽の間で水溶液(めっき液)を循環させればよい。
この酸化第二銅溶解槽は、めっき槽から供給された水溶液に酸化第二銅微粉末を溶解させて形成した水溶液を、めっき槽へ送り返す。使用する酸化第二銅溶解槽には、プロペラなどの攪拌機構を付属させることが好ましい。また、めっき槽と酸化第二銅溶解槽の間には、ゴミや異物等の除去のため公知の各種フィルターを備えても良い。
なお、本発明の硫酸銅水溶液への銅イオンの供給方法に用いる硫酸銅水溶液は、硫酸銅を水に溶解した水溶液でもよいし、硫酸に本発明に係る酸化第二銅微粉末を溶解させた水溶液でも良い。
In order to carry out the method of supplying copper ions to the aqueous copper sulfate solution of the present invention in an electrolytic plating apparatus, a cupric oxide dissolution tank that dissolves cupric oxide fine powder separately from the plating tank for plating of the electrolytic plating apparatus And an aqueous solution (plating solution) may be circulated between the plating tank and the cupric oxide dissolution tank.
This cupric oxide dissolution tank returns an aqueous solution formed by dissolving cupric oxide fine powder in the aqueous solution supplied from the plating tank to the plating tank. It is preferable to attach a stirring mechanism such as a propeller to the cupric oxide dissolution tank to be used. Moreover, you may provide a well-known various filter between a plating tank and a cupric oxide dissolution tank for removal of a dust, a foreign material, etc.
The copper sulfate aqueous solution used in the method for supplying copper ions to the copper sulfate aqueous solution of the present invention may be an aqueous solution in which copper sulfate is dissolved in water, or the cupric oxide fine powder according to the present invention is dissolved in sulfuric acid. An aqueous solution may be used.

以下に、本発明の実施例を比較例と共に具体的に説明する。但し、本発明は以下の実施例に限定されるものではない。
得られた酸化第二銅粗粉末のうち、X線回折測定(XRD)でCuO単一相が確認された試料は、すべて黒色を呈していた。
Examples of the present invention will be specifically described below together with comparative examples. However, the present invention is not limited to the following examples.
Among the obtained cupric oxide crude powder, all the samples in which the CuO single phase was confirmed by X-ray diffraction measurement (XRD) were black.

(フレーク状銅粉の調製)
三井金属株式会社製電解銅粉(グレ−ド:MF−D2、図1参照)を20重量%、水80重量%となるように秤量し、0.3mmφZrOビ−ズ(東レ株式会社製トレセラム )を入れたペイントシェーカー(浅田鉄工所株式会社製)で12時間粉砕処理した後、ビーズを分離した液を105℃で乾燥し、フレーク状銅粉を得た。
(Preparation of flaky copper powder)
Electrolytic copper powder (Grade: MF-D2, see FIG. 1) manufactured by Mitsui Kinzoku Co., Ltd. was weighed to 20 wt% and water 80 wt%, and 0.3 mmφZrO 2 beads (Tracelum manufactured by Toray Industries, Inc.) ) For 12 hours with a paint shaker (made by Asada Iron Works Co., Ltd.), and then the bead-separated liquid was dried at 105 ° C. to obtain flaky copper powder.

乾燥後のフレーク状銅粉のSEM像を図2、図3に示す。このSEM像から粒子の径と厚みを測定した。
粒子径の測定は、粒子を楕円形状と見なして、長径と短径を定めることで行った。
この結果、粒子径は5〜30μmとなった。ここで粒子径の最小値は短径の最小値であり、粒子径の最大値は長径の最大値である。また、厚みは0.1〜2.0μmであった。
The SEM image of the flaky copper powder after drying is shown in FIGS. The particle diameter and thickness were measured from this SEM image.
The particle diameter was measured by defining the major axis and the minor axis by regarding the particle as an ellipse.
As a result, the particle diameter was 5 to 30 μm. Here, the minimum value of the particle diameter is the minimum value of the short diameter, and the maximum value of the particle diameter is the maximum value of the long diameter. The thickness was 0.1 to 2.0 μm.

(一次熱処理による酸化第二銅粗粉末の調製)
このフレーク状銅粉10gを、大気雰囲気下500℃の温度で3時間熱処理(一次熱処理)することによって酸化第二銅粗粉末aを得た。
(Preparation of cupric oxide coarse powder by primary heat treatment)
A cupric oxide coarse powder a was obtained by heat-treating 10 g of this flaky copper powder at a temperature of 500 ° C. for 3 hours (primary heat treatment) in an air atmosphere.

(粉砕処理による一次熱処理酸化第二銅微粉末の調製)
次に、調製した酸化第二銅粗粉末aが20重量%、残りを水が80重量%となるように秤量し、直径0.3mmのZrOビーズを入れたペイントシェーカーで2時間粉砕処理した後、ビーズを分離した分散液を105℃で乾燥し、一次熱処理酸化第二銅微粉末aを得た。
(Preparation of primary heat-treated cupric oxide fine powder by grinding)
Next, the prepared cupric oxide coarse powder a 20% by weight, were weighed rest so water is 80 wt%, and 2 hours milling in a paint shaker containing the ZrO 2 beads with a diameter of 0.3mm Thereafter, the dispersion from which the beads were separated was dried at 105 ° C. to obtain a primary heat-treated cupric oxide fine powder a.

(二次熱処理による酸化第二銅微粉末の調製)
その後、その一次熱処理酸化第二銅微粉末aを、大気雰囲気下500℃の温度で3時間二次熱処理することによって酸化第二銅微粉末aを形成した。
その酸化第二銅微粉末aは、粉末X線解析の結果、CuO単一相であった。
(Preparation of cupric oxide fine powder by secondary heat treatment)
Thereafter, the cupric oxide fine powder a was formed by subjecting the primary heat-treated cupric oxide fine powder a to a secondary heat treatment at a temperature of 500 ° C. for 3 hours in an air atmosphere.
The cupric oxide fine powder a was a CuO single phase as a result of powder X-ray analysis.

(酸化第二銅微粉末の溶解性の評価)
次に、めっき液組成として、CuSO・5HO :68g/L、HSO:228g/L、Clイオン:60mg/Lとなるように調製し、室温にてスターラーで攪拌しながら、7gの酸化第二銅微粉末aを添加したところ、12秒で溶解した。
(Evaluation of solubility of cupric oxide fine powder)
Next, as the plating solution composition, CuSO 4 · 5H 2 O: 68 g / L, H 2 SO 4 : 228 g / L, Cl ion: 60 mg / L, and while stirring with a stirrer at room temperature, When 7 g of cupric oxide fine powder a was added, it dissolved in 12 seconds.

実施例1において、フレ−ク状銅粉から酸化第二銅粗粉末を形成する際の一次熱処理温度を400℃とした以外は、実施例1と同様にして実施例2に係る酸化第二銅微粉末bを形成した。
この酸化第二銅微粉末bは、粉末X線解析の結果、CuO単一相であった。
次に、実施例1と同様の方法でめっき液への溶解試験を行ったところ、18秒で溶解した。
In Example 1, the cupric oxide according to Example 2 was performed in the same manner as in Example 1 except that the primary heat treatment temperature when forming the cupric oxide coarse powder from the flake-shaped copper powder was 400 ° C. A fine powder b was formed.
The cupric oxide fine powder b was a CuO single phase as a result of powder X-ray analysis.
Next, when a dissolution test in the plating solution was performed in the same manner as in Example 1, it was dissolved in 18 seconds.

実施例1において、フレ−ク状銅粉から酸化第二銅粗粉末を形成する際の一次熱処理の温度を700℃とした以外は、実施例1と同様にして実施例3に係る酸化第二銅微粉末cを形成した。
この酸化第二銅微粉末cは、粉末X線解析の結果、CuO単一相であった。
次に、実施例1と同様の方法でめっき液への溶解試験を行ったところ、36秒で溶解した。
In Example 1, the second heat treatment according to Example 3 was performed in the same manner as in Example 1 except that the temperature of the primary heat treatment when forming the cupric oxide coarse powder from the flake-shaped copper powder was set to 700 ° C. Copper fine powder c was formed.
The cupric oxide fine powder c was a CuO single phase as a result of powder X-ray analysis.
Next, when a dissolution test in the plating solution was performed in the same manner as in Example 1, it was dissolved in 36 seconds.

実施例1において、一次熱処理酸化第二銅微粉末の二次熱処理の際の熱処理温度を600℃とした以外は、実施例1と同様にして実施例4に係る酸化第二銅微粉末dを形成した。この酸化第二銅微粉末dの粉末X線解析の結果、CuO単一相であった。
次に、実施例1と同様の方法でめっき液への溶解試験を行ったところ、25秒で溶解した。
In Example 1, the cupric oxide fine powder d according to Example 4 was prepared in the same manner as in Example 1 except that the heat treatment temperature during the secondary heat treatment of the primary heat treated cupric oxide fine powder was 600 ° C. Formed. As a result of the powder X-ray analysis of the cupric oxide fine powder d, it was a CuO single phase.
Next, when a dissolution test in a plating solution was performed in the same manner as in Example 1, it was dissolved in 25 seconds.

(比較例1)
実施例1において、フレ−ク状銅粉から酸化第二銅粗粉末を形成する際の一次熱処理の温度を300℃とし、二次熱処理の温度を600℃とした以外は、実施例1と同様にして比較例1に係る酸化第二銅微粉末eを形成した。
この酸化第二銅微粉末eは、粉末X線解析の結果、CuOの他にCuの混在が認められたことから、めっき液への溶解試験を行わなかった。
(Comparative Example 1)
Example 1 is the same as Example 1 except that the temperature of the primary heat treatment when forming cupric oxide coarse powder from the flake-shaped copper powder is 300 ° C. and the temperature of the secondary heat treatment is 600 ° C. Thus, cupric oxide fine powder e according to Comparative Example 1 was formed.
As a result of powder X-ray analysis, Cu cuprate fine powder e was not subjected to a dissolution test in a plating solution because Cu was mixed in addition to CuO.

(比較例2)
実施例1において、フレ−ク状銅粉から酸化第二銅粗粉末を形成する際の一次熱処理の温度を900℃とした以外は、実施例1と同様にして比較例2に係る酸化第二銅微粉末fを形成した。
次に、実施例1と同様の方法でめっき液への溶解試験を行ったところ、溶解には15分以上要した。
(Comparative Example 2)
In Example 1, the second oxide according to Comparative Example 2 was made in the same manner as in Example 1 except that the temperature of the primary heat treatment when forming the cupric oxide coarse powder from the flake-shaped copper powder was set to 900 ° C. Copper fine powder f was formed.
Next, when a dissolution test in a plating solution was performed in the same manner as in Example 1, it took 15 minutes or more for dissolution.

(比較例3)
実施例1において、三井金属製電解銅粉(グレ−ド:MF−D2)をフレーク状にせず、かつ大気中500℃で3時間の熱処理後のペイントシェーカー粉砕と大気中500℃で3時間の二次熱処理を行わなかった以外は、実施例1と同様にして比較例3に係る酸化第二銅微粉末gを形成した。
次に、実施例1と同様の方法でめっき液への溶解試験を行ったところ、溶解には15分以上要した。
(Comparative Example 3)
In Example 1, the Mitsui Metals electrolytic copper powder (Grade: MF-D2) was not made into flakes, and the paint shaker was pulverized after being heat-treated at 500 ° C. for 3 hours in the atmosphere and at 500 ° C. for 3 hours in the atmosphere. A cupric oxide fine powder g according to Comparative Example 3 was formed in the same manner as in Example 1 except that the secondary heat treatment was not performed.
Next, when a dissolution test in a plating solution was performed in the same manner as in Example 1, it took 15 minutes or more for dissolution.

(比較例4)
実施例1において、酸化第二銅粗粉末をペイントシェーカーで2時間粉砕した後の二次熱処理を行わなかった以外は、実施例1と同様にして比較例4に係る酸化第二銅微粉末hを形成した。
次に、実施例1と同様の方法でめっき液への溶解試験を行ったところ、溶解には6分要した。
(Comparative Example 4)
In Example 1, the cupric oxide fine powder h according to Comparative Example 4 was obtained in the same manner as in Example 1 except that the secondary heat treatment after pulverizing the cupric oxide coarse powder with a paint shaker for 2 hours was not performed. Formed.
Next, when a dissolution test in a plating solution was performed in the same manner as in Example 1, it took 6 minutes for dissolution.

(比較例5)
実施例1において、酸化第二銅粗粉末をペイントシェーカー粉砕やその後の二次熱処理を行わなかった以外は、実施例1と同様にして比較例5に係る酸化第二銅微粉末iを形成した。
次に、実施例1と同様の方法でめっき液への溶解試験を行ったところ、溶解には15分以上要した。
(Comparative Example 5)
In Example 1, cupric oxide fine powder i according to Comparative Example 5 was formed in the same manner as Example 1 except that the cupric oxide coarse powder was not subjected to paint shaker pulverization and subsequent secondary heat treatment. .
Next, when a dissolution test in a plating solution was performed in the same manner as in Example 1, it took 15 minutes or more for dissolution.

(比較例6)
実施例1において、三井金属株式会社製電解銅粉をフレ−ク状とせず、また、粉砕処理による一次熱処理酸化第二銅微粉末の調製におけるペイントシェーカーでの粉砕時間を12時間とした以外は、実施例1と同様にして比較例6に係る酸化第二銅微粉末jを形成した。
次に、実施例1と同様の方法でめっき液への溶解試験を行ったところ、12秒で溶解した。
(Comparative Example 6)
In Example 1, the electrolytic copper powder made by Mitsui Kinzoku Co., Ltd. was not made into a flake shape, and the grinding time in the paint shaker in the preparation of the primary heat-treated cupric oxide fine powder by the grinding treatment was 12 hours. In the same manner as in Example 1, cupric oxide fine powder j according to Comparative Example 6 was formed.
Next, when a dissolution test in a plating solution was performed in the same manner as in Example 1, it was dissolved in 12 seconds.

以上、実施例1から実施例4および比較例1から比較例6の結果をまとめて表1に示す。
表1から明らかなように、本発明の製造方法による酸化第二銅微粉末である実施例1から実施例4では、1分以内にめっき液である硫酸銅水溶液に溶解し、易溶性であることがわかる。一方、製造条件のいずれかが外れた比較例1から比較例5では、めっき液への溶解性を満足していないことは明らかである。また、比較例6はめっき液への溶解性は満足しているが、粉砕時間が長く粉砕効率が悪いことがわかる。
The results of Examples 1 to 4 and Comparative Examples 1 to 6 are summarized in Table 1 above.
As is clear from Table 1, in Examples 1 to 4 which are cupric oxide fine powders produced by the production method of the present invention, it dissolves in a copper sulfate aqueous solution as a plating solution within 1 minute and is easily soluble. I understand that. On the other hand, it is clear that Comparative Examples 1 to 5 in which any of the manufacturing conditions are not satisfied do not satisfy the solubility in the plating solution. Moreover, although Comparative Example 6 is satisfactory in solubility in the plating solution, it can be seen that the pulverization time is long and the pulverization efficiency is poor.

Claims (7)

フレーク状銅粉を原料に用い、前記フレーク状銅粉から熱処理により得られた酸化第二銅粗粉末を粉砕処理する高純度酸化第二銅微粉末の製造方法であって、
酸素含有雰囲気下で一次熱処理して酸化第二銅粗粉末を得る工程と、
前記酸化第二銅粗粉末を粉砕処理して一次熱処理酸化第二銅微粉末を得る工程と、
前記一次熱処理酸化第二銅微粉末を、酸素含有雰囲気下で二次熱処理する工程と、
を具備することを特徴とする高純度酸化第二銅微粉末の製造方法。
Using a flaky copper powder as a raw material, a method for producing a high-purity cupric oxide fine powder that pulverizes a cupric oxide coarse powder obtained by heat treatment from the flaky copper powder,
A step of primary heat treatment in an oxygen-containing atmosphere to obtain a cupric oxide crude powder;
Crushing the cupric oxide coarse powder to obtain a primary heat treated cupric oxide fine powder;
Performing the secondary heat treatment of the primary heat-treated cupric oxide fine powder in an oxygen-containing atmosphere;
The manufacturing method of the highly purified cupric oxide fine powder characterized by comprising.
前記二次熱処理の処理温度が350℃〜800℃であることを特徴とする請求項1に記載の高純度酸化第二銅微粉末の製造方法。   The process temperature of the said secondary heat processing is 350 to 800 degreeC, The manufacturing method of the highly purified cupric oxide fine powder of Claim 1 characterized by the above-mentioned. 前記一次熱処理が、フレーク状銅粉を酸素含有雰囲気下で温度350℃〜800℃で熱処理することを特徴とする請求項1または2に記載の高純度酸化第二銅微粉末の製造方法。   The said primary heat processing heat-processes flake shaped copper powder at the temperature of 350 to 800 degreeC by oxygen-containing atmosphere, The manufacturing method of the high purity cupric oxide fine powder of Claim 1 or 2 characterized by the above-mentioned. 前記熱処理が、前記フレーク状銅粉を酸素含有雰囲気下で、最高温度を350℃〜800℃での熱処理であることを特徴とする請求項1記載の高純度酸化第二銅微粉末の製造方法。   The method for producing a high-purity cupric oxide fine powder according to claim 1, wherein the heat treatment is a heat treatment of the flaky copper powder in an oxygen-containing atmosphere at a maximum temperature of 350 ° C to 800 ° C. . 前記粉砕処理が、前記酸化第二銅粗粉末と溶媒とを混合したスラリーを、媒体攪拌ミルを用いた粉砕処理、もしくは前記酸化第二銅粗粉末を気流式ミルを用いた粉砕処理であることを特徴とする請求項1から4に記載の高純度酸化第二銅微粉末の製造方法。   The pulverization treatment is a slurry obtained by mixing the cupric oxide coarse powder and the solvent, a pulverization treatment using a medium stirring mill, or a pulverization treatment of the cupric oxide coarse powder using an airflow mill. The manufacturing method of the highly purified cupric oxide fine powder of Claim 1 to 4 characterized by these. 粒状酸化第二銅微粉末であって、
請求項1から5に記載のいずれかの高純度酸化第二銅微粉末の製造方法により製造されたことを特徴とする粒状酸化第二銅微粉末。
Granular cupric oxide fine powder,
A granular cupric oxide fine powder produced by the method for producing a high-purity cupric oxide fine powder according to any one of claims 1 to 5.
高純度酸化第二銅微粉末を溶解させて硫酸銅水溶液の銅イオン濃度を調整する硫酸銅水溶液への銅イオンの供給方法であって、
前記高純度酸化第二銅微粉末が、請求項1から5に記載の高純度酸化第二銅微粉末の製造方法により得られたもので、
且つ、前記高純度酸化第二銅微粉末を、CuSO・5HOを50〜130g/L、HSOを150〜240g/L、塩素イオンを30〜70mg/L含む水溶液に溶解させることを特徴とする硫酸銅水溶液への銅イオンの供給方法。
A method for supplying copper ions to an aqueous copper sulfate solution, wherein high-purity cupric oxide fine powder is dissolved to adjust the copper ion concentration of the aqueous copper sulfate solution,
The high-purity cupric oxide fine powder is obtained by the method for producing a high-purity cupric oxide fine powder according to claim 1,
The high-purity cupric oxide fine powder is dissolved in an aqueous solution containing 50 to 130 g / L of CuSO 4 .5H 2 O, 150 to 240 g / L of H 2 SO 4, and 30 to 70 mg / L of chlorine ions. A method for supplying copper ions to an aqueous copper sulfate solution.
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CN103663539A (en) * 2013-12-09 2014-03-26 上海应用技术学院 CuO nanometer sheet and preparation method thereof
WO2014087707A1 (en) * 2012-12-07 2014-06-12 住友金属鉱山株式会社 Copper (ii) oxide fine powder and method for producing same
CN115921850A (en) * 2022-11-29 2023-04-07 西北有色金属研究院 Preparation method of high-strength high-conductivity non-uniform grain structure aluminum oxide dispersion strengthened copper

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014087707A1 (en) * 2012-12-07 2014-06-12 住友金属鉱山株式会社 Copper (ii) oxide fine powder and method for producing same
JP2014114472A (en) * 2012-12-07 2014-06-26 Sumitomo Metal Mining Co Ltd Cupric oxide powder and method for producing the same
TWI580643B (en) * 2012-12-07 2017-05-01 Sumitomo Metal Mining Co Copper oxide (II) oxide powder and method for producing the same
CN103663539A (en) * 2013-12-09 2014-03-26 上海应用技术学院 CuO nanometer sheet and preparation method thereof
CN115921850A (en) * 2022-11-29 2023-04-07 西北有色金属研究院 Preparation method of high-strength high-conductivity non-uniform grain structure aluminum oxide dispersion strengthened copper
CN115921850B (en) * 2022-11-29 2024-12-06 西北有色金属研究院 A method for preparing high-strength and high-conductivity non-uniform grain structure alumina dispersion strengthened copper

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