JP2017128754A - Can roll and vacuum film deposition apparatus, and film deposition method for long-sized body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a can roll, a vacuum film deposition apparatus or the like such that a heat-resistant film or the like can be suppressed from wrinkling even in use under a temperature condition greatly exceeding a use assumed temperature.SOLUTION: A can roll which comprises a cylinder part 70 provided with a refrigeration circulation path inside and a rotary shaft 71 provided at a center axis of rotation of the cylinder part, and is configured to wind an outer peripheral surface of the cylinder part with a resin film or the like conveyed on a roll-to-roll basis in a vacuum chamber and to cool it is characterized in that: the cylinder part is constituted using a metal material having a larger coefficient of thermal expansion than a metal material constituting the rotary shaft or cooling means for the rotary shaft is provided which controls the rotary shaft to a constant temperature. Thermal expansion of the outer peripheral surface of the cylinder part accompanying a rise in temperature of the outer peripheral surface of the cylinder part during cooling of the resin film or the like is larger than thermal expansion of the rotary shaft, so a crown quantity defined by a diameter difference (α=α1-α2) between an axial center part diameter α1 and a both-end diameter α2 of the outer peripheral surface of the cylinder part can be made larger than that of a conventional can roll.SELECTED DRAWING: Figure 5

Description

  The present invention provides a vacuum film forming apparatus that performs film formation such as sputtering while winding a long body (long heat-resistant resin film, metal foil, metal strip, etc.) conveyed by roll-to-roll around the outer surface of a can roll. In particular, the present invention relates to a can roll, a vacuum film forming apparatus, and a method for forming a long body that can suppress wrinkles of the long body that are likely to occur during film formation.

  Flexible wiring boards are used in liquid crystal panels, notebook computers, digital cameras, mobile phones, and the like. The flexible wiring board is manufactured from a heat-resistant resin film with a metal film in which a metal film is formed on one side or both sides of a heat-resistant resin film. In recent years, wiring patterns formed on flexible wiring boards have become increasingly finer and denser, and it has become even more important that the heat-resistant resin film with metal film itself is smooth and free from defects. .

  As a manufacturing method of this kind of heat-resistant resin film with a metal film, a method of manufacturing by attaching a metal foil to a heat-resistant resin film with an adhesive (referred to as a manufacturing method of a three-layer substrate), heat-resistant to the metal foil By coating with a conductive resin solution and drying to manufacture (called casting method), dry plating method (vacuum film forming method) or a combination of dry plating method (vacuum film forming method) and wet plating method A method for producing a metal film on a heat-resistant resin film (referred to as a metallizing method) has been conventionally known. Further, the dry plating method (vacuum film forming method) in the metalizing method includes a vacuum deposition method, a sputtering method, an ion plating method, an ion beam sputtering method and the like.

  Regarding the metallizing method, Patent Document 1 discloses a method in which chromium is sputtered on a polyimide insulating layer and then copper is sputtered to form a conductor layer on the polyimide insulating layer. In Patent Document 2, a first metal thin film formed by sputtering using a copper nickel alloy as a target and a second metal thin film formed by sputtering using copper as a target are laminated on a polyimide film in this order. A flexible circuit board material (that is, a copper-clad laminated resin film substrate) is disclosed. In addition, when manufacturing a heat resistant resin film with a metal film by vacuum film-forming on heat resistant resin films, such as a polyimide film, it is common to use the sputtering web coater described below.

  In general, the sputtering method has an advantage of excellent adhesion of a formed metal thin film or the like, but it is said that the thermal load applied to the heat resistant resin film is larger than that of the vacuum deposition method. It is also known that wrinkles are likely to occur in the film when a large heat load is applied to the heat resistant resin film during film formation.

  In order to prevent wrinkling, the sputtering web coater has a long heat-resistant resin film conveyed by roll-to-roll wound around the outer peripheral surface of the can roll having a cooling function so that the heat-resistant resin film being formed is backside. The method of cooling from the side is adopted. For example, Patent Literature 3 discloses an unwinding type (roll-to-roll type) vacuum sputtering apparatus which is an example of a sputtering web coater. This unwinding / winding-type vacuum sputtering apparatus includes a cooling roll that functions as a can roll, and a sub-roll (pre-feed roll) is provided at least on the carry-in side (upstream side of the heat-resistant resin film) of the cooling roll. The sub-roll is used to control the heat-resistant resin film in close contact with the cooling roll.

  By the way, even when a tension is applied in the length direction to the long heat-resistant resin film to which no thermal load is applied, the central portion of the resin film as shown in FIGS.皺 will occur. That is, as shown in FIG. 1 (A), when no tension in the length direction is applied to the resin film (tension release state), the resin film is flat without a slack, but with respect to the resin film When tension is applied in the length direction (tension applied state), as shown in FIGS. 1 (B) to (C), the entire resin film even in a conveying state where it does not contact the can roll (cooling roll) It becomes a state (medium sagging state) where wrinkles are generated and wrinkles are generated at the center of the resin film.

  For this reason, when tension (conveyance tension) is applied in the length direction to the long heat-resistant resin film, even if it is wound around a parallel can roll (parallel shape type can roll), Although it is very small, as shown to FIG. 2 (A), it will be in the state (medium slack state) in which wrinkles generate | occur | produce in the center part of a heat resistant resin film.

  Even if the above “sagging state” is very small, a gap occurs in the “sagging part” and the heat conduction efficiency with the parallel can roll (parallel shape type can roll) becomes insufficient. There has been a problem that wrinkles in the width direction are likely to occur at the above-mentioned “sagging portion” due to the thermal load of sputtering film formation. In particular, when the transport speed of the heat-resistant resin film is increased for the purpose of increasing the efficiency of sputtering film formation, a large amount of power is applied to the sputtering cathode because it is necessary to perform sputtering film formation with a desired film thickness in a short time. As a result, the heat load applied to the heat-resistant resin film is further increased, and the above problem becomes remarkable.

  In order to solve this problem, Non-Patent Document 1 adopts a “reverse crown-shaped” can roll in which the roll end side is processed higher than the roll center portion, and the peripheral speed on the can roll end portion side is the roll center. An apparatus is proposed in which wrinkles are less likely to occur in the width direction of the heat-resistant resin film so as to be faster than the part. However, the method using the “reverse crown shape” can roll is effective when the grip force between the long resin film and the roll is weak and the film transport speed is fast in the atmosphere. It was not an effective method when the long resin film and the roll had a strong grip force and the film transport speed was slow.

  On the other hand, in order to solve the above-mentioned problem, in Patent Document 4, a drum type (crown shape type: calculated from Patent Document 4) in which the axial central portion is processed higher than the axial end portion side of the roll has an axial central portion. By adopting a can roll having a height of about 2 to 3 mm higher than the axial end side, an apparatus that is less likely to cause wrinkles in the width direction of the film is proposed.

  When compared with the apparatus of Non-Patent Document 1 using a “reverse crown-shaped” can roll, when the grip force between the resin film and the roll is strong and the transport speed of the film is slow in vacuum, FIG. As shown, the apparatus (method) of Patent Document 4 using a drum-shaped (crown-shaped) can roll has an action of winding a resin film around the outer peripheral surface of the crown-shaped can-roll and extending the above-mentioned “sagging portion”. It was effective.

  By the way, the parallel shape type can roll and the crown shape type can roll described above have the cylindrical portion 30 provided with the refrigerant circulation path inside as shown in FIG. 4 and the rotation provided at the rotation center axis portion of the cylindrical portion 30. The main part is constituted with the shaft 31, and the shape of the cylindrical part is set in consideration of the expected use temperature of the roll (for example, the temperature of the outer surface of the can roll is 20 ° C), The outer peripheral surface of the cylindrical portion is ground and polished to be processed into a parallel shape mold or a crown shape mold. Then, in the “parallel shape type can roll” processed so that the diameter difference (α = α 1 −α 2) between the axial center diameter α 1 and the both end diameter α 2 of the outer peripheral surface of the cylindrical portion 30 is zero. When the cylinder is used under temperature conditions exceeding the expected temperature of use, the outer peripheral surface of the cylindrical portion 30 expands more thermally than the rotary shaft 31 (rotation that does not structurally contact with a long resin film or the like) The temperature of the shaft 31 is smaller than that of the outer peripheral surface of the cylindrical portion 30), the diameter difference (α = α 1 −α 2) is naturally deformed into a positive “crown-shaped can roll”, and the cylindrical portion 30 The “crown-shaped can roll” processed so that the diameter difference (α = α1-α2) between the axial center diameter α1 of the outer peripheral surface and both end diameters α2 is positive also exceeds the expected use temperature of the roll. When used under different temperature conditions, the rotating shaft 31 Since the outer peripheral surface of the cylindrical portion 30 as compared to large thermal expansion, crown value defined above diameter difference (α = α1-α2) increases naturally compared to the initial set value. For this reason, even if high power is applied to the sputtering cathode for the purpose of increasing the film formation efficiency, the original “parallel-shaped can roll” is naturally transformed into a “crown-shaped can roll”. Since the initial crown amount naturally increased in “Can Roll”, it was possible to suppress the generation of wrinkles in the long resin film to some extent.

  However, when a large amount of power is applied to the sputtering cathode for the purpose of further increasing the film formation efficiency, there is a limit to the effect of suppressing the generation of soot.

Japanese Patent Laid-Open No. 02-098994 Japanese Patent Laid-Open No. 06-009616 Japanese Patent Laid-Open No. 62-247073 JP-A-10-008249

“The Mechanics of Web Handling”, David R. Roisum, Ph.D, TAPPI PRESS, (1998) p.83-84

  The present invention has been made by paying attention to such problems, and the problem is that even when a can roll is used under a temperature condition that greatly exceeds the expected use temperature, An object of the present invention is to provide a can roll and a vacuum film forming apparatus capable of suppressing the generation of wrinkles in a long body, and to provide a method for forming a long body in which the generation of wrinkles is suppressed.

  Therefore, when the present inventor conducted intensive research on a new can roll structure in which wrinkles are unlikely to occur in a long body even under temperature conditions greatly exceeding the assumed temperature of use, the rotation of the can roll is performed on the cylindrical portion of the can roll. Rotating shaft that finds that a sufficient crown amount corresponding to the operating temperature is secured when it is configured using a metal material having a thermal expansion coefficient larger than that of the shaft, and that controls the temperature of the rotating shaft to be constant. It has been found that a sufficient crown amount that can correspond to the operating temperature is secured even when a cooling means for the above is provided. The present invention has been completed based on such technical findings.

That is, the first invention according to the present invention is:
It has a cylindrical part with a refrigerant circulation path inside and a rotating shaft provided at the center of rotation of the cylindrical part, and a long body that is conveyed by roll-to-roll in a vacuum chamber is wound around the outer peripheral surface of the cylindrical part In the can roll that cools
The cylindrical portion is configured using a metal material having a larger coefficient of thermal expansion than the metal material constituting the rotating shaft,
The second invention is
It has a cylindrical part with a refrigerant circulation path inside and a rotating shaft provided at the center of rotation of the cylindrical part, and a long body that is conveyed by roll-to-roll in a vacuum chamber is wound around the outer peripheral surface of the cylindrical part In the can roll that cools
A cooling means for the rotating shaft for controlling the temperature of the rotating shaft to be constant is provided.

Further, the third invention according to the present invention is
In the can roll according to the first invention or the second invention,
Machining into a parallel-shaped mold where the diameter difference (α = α1-α2) between the axial center diameter α1 and the both-ends diameter α2 of the cylindrical outer peripheral surface is 0 or a crown-shaped mold where the diameter difference (α) is positive It is characterized by being,
The fourth invention is:
In the can roll according to any one of the first to third inventions,
The crown amount defined by the diameter difference (α) in the crown-shaped can roll is changed in a range of 100 to 500 μm.

Next, the fifth invention according to the present invention is:
A vacuum chamber, a transport mechanism that transports a long body in a roll-to-roll manner in the vacuum chamber, a can roll that winds and cools the long body around the outer peripheral surface, and a vacuum against the long body wound around the can roll In a vacuum film forming apparatus provided with means for performing film formation,
The can roll according to any one of the first to fourth aspects of the invention is constituted by the can roll,
The sixth invention is:
In the vacuum film forming apparatus according to the fifth invention,
The means for performing the vacuum film formation is magnetron sputtering,
The seventh invention according to the present invention is:
In a film forming method of a long body that wraps a long body conveyed by roll-to-roll in a vacuum chamber around the outer peripheral surface of the can roll and performs vacuum film formation on the long body wound around the can roll,
The can roll according to any one of the first to fourth inventions is characterized in that the can roll is configured.

According to the can roll described in the first invention,
The cylindrical portion is made of a metal material whose thermal expansion coefficient is larger than that of the metal material constituting the rotating shaft, and the cylindrical portion outer peripheral surface is associated with the temperature rise of the cylindrical portion outer peripheral surface when the long body is cooled. Since the thermal expansion is larger than the thermal expansion of the rotating shaft, it is possible to increase the difference in diameter (α = α1−α2) between the axial center diameter α1 and both end diameters α2 of the outer peripheral surface of the cylindrical portion. .

Moreover, according to the can roll as described in 2nd invention,
A cooling means for the rotating shaft that controls the temperature of the rotating shaft to be constant is provided, and the thermal expansion of the outer peripheral surface of the cylindrical portion accompanying the rise in the temperature of the outer peripheral surface of the cylindrical portion when the long body is cooled Since it becomes larger than the thermal expansion of the provided rotating shaft, it is possible to increase the diameter difference (α = α1−α2) between the axial center diameter α1 and the both end diameter α2 of the outer peripheral surface of the cylindrical portion.

  Even when the can roll is used under a temperature condition that greatly exceeds the expected use temperature, the crown amount defined by the diameter difference between the axial center diameter α1 and the both end diameter α2 (α = α1-α2) Therefore, it is possible to suppress the generation of wrinkles in the long body.

FIG. 1A is a plan view showing the surface of a long body when no tension is applied in the length direction to the long body (elongated heat-resistant resin film or the like) (that is, in a tension released state), FIG. 1 (B) is a plan view showing a “slack portion” of the long body when tension is applied to the long body in the length direction (tension applied state), and FIG. 1 (C) is a diagram. FIG. 1B is a cross-sectional view taken along the plane AA ′ of FIG. FIG. 2A is a schematic cross-sectional view showing a “center slack portion” that appears when a long body is wound around a parallel can roll (parallel shape type can roll) surface according to a conventional example, and FIG. 2B is a drum type. FIG. 3 is a schematic cross-sectional view showing a state in which the above-mentioned “sagging portion” is expanded in the width direction when a long body is wound around the can roll surface of (crown shape type). Explanatory drawing of a vacuum film-forming apparatus. Explanatory drawing of the can roll which comprises the cylindrical part provided with the refrigerant | coolant circulation path inside, and the rotating shaft provided in the rotation center axis | shaft part of this cylindrical part. FIG. 5 (A) shows the present invention processed so that the difference in diameter (α = α1−α2) between the axial center diameter α1 and both end diameters α2 of the outer peripheral surface of the cylindrical portion becomes 0 at the assumed use temperature of the roll. FIG. 5 (B) is an explanatory view showing such a parallel-shaped can roll, and FIG. 5 (B) shows the axial center diameter α1 and both end diameters of the outer peripheral surface of the cylindrical portion when used under temperature conditions exceeding the expected use temperature of the roll. Explanatory drawing of the can roll which concerns on this invention which the diameter difference ((alpha) = (alpha) 1- (alpha) 2) of (alpha) 2 fluctuate | varied positively and it transformed into the crown shape type | mold. Explanatory drawing of the can roll which concerns on this invention to which the cooling means for rotating shafts which control the temperature of a rotating shaft uniformly was attached.

  Hereinafter, embodiments according to the present invention will be described in detail.

(1) Can Roll As shown in FIG. 4, the can roll includes a cylindrical portion 30, a side plate 32, and a rotating shaft 31 having a bearing 35. The cylindrical portion 30 of the can roll has a double structure called a jacket structure, and the inside is filled with refrigerant (heating medium) from the inner introduction pipe 33 of the central shaft double pipe in the rotating shaft 31, and the outer side. A refrigerant (warm medium) is discharged from the discharge pipe 34.

  The can roll is processed into a parallel shape mold, a crown shape mold, an inverted crown shape mold, or the like by cutting and polishing the cylindrical portion 30 in a state where the temperature is controlled to the expected use temperature (for example, 20 ° C.) of the roll.

  In consideration of the weight of the large can roll, the cylindrical portion on the side where the long resin film or the like contacts may be ground and polished so as to be parallel to the rotation axis. For example, when a long resin film or the like is in contact with the upper side of the can roll, the diameter of the central portion in the axial direction of the roll is increased so that the upper side of the cylindrical portion is parallel to the rotation axis in consideration of bending due to the weight of the can roll. (That is, a crown shape type) may be set. Alternatively, when a long resin film or the like is in contact with the lower side of the can roll, the diameter of the central portion in the axial direction of the roll is set so that the lower side of the cylindrical portion is parallel to the rotation axis in consideration of bending due to the weight of the can roll. It may be set to be thin (that is, an inverted crown shape type).

  The parallel-shaped can roll that has been cut and polished so that the cylindrical portion is parallel to the rotation axis under the assumed use temperature (for example, 20 ° C.) of the roll is used under a temperature condition that exceeds the assumed use temperature. In this case, due to the thermal expansion action of the metal material constituting the cylindrical part, the roll is naturally thermally deformed into a crown-shaped mold having a large diameter in the axial direction of the roll. In a can roll that has been cut and polished into a crown-shaped mold with a large diameter, when used under temperature conditions exceeding the expected temperature, the crown amount is naturally reduced by the thermal expansion action of the metal material constituting the cylindrical portion. Therefore, it was possible to suppress the occurrence of wrinkles in a long body such as a long resin film to some extent as described above.

  However, the optimum crown amount that reduces the above-mentioned “sagging state” due to the occurrence of wrinkles on a long body such as a resin film [diameter difference between the axial center diameter α1 of the cylindrical outer peripheral surface and both end diameters α2 (α = α1 -Defined by -α2)] depends on the type and thickness of the long body, the thermal load during film formation, the thickness of the film to be formed, the transport speed of the long body, etc. It is not preferable to predetermine the crown amount to a specific value based on conditions. For this reason, instead of determining the crown amount to a specific value at the time of manufacturing the can roll, it is desired to be able to adjust the crown amount to an appropriate value corresponding to the temperature condition in which the can roll is used. However, in the conventional can roll, when the operating temperature condition becomes extremely high exceeding the assumption, there is a limit to the effect of suppressing wrinkle generation in a long body such as a long resin film as described above. That is, if the crown amount intended to extend the above-mentioned “sagging state” is not 100 μm or more, the effect cannot be expected, and if it exceeds 500 μm, the film approaches the direction in which the film speed is high (the peripheral speed is high). Wrinkles may occur in the center of the film due to the properties.

  Therefore, as shown in FIGS. 5A and 5B, when a metal material having a large thermal expansion coefficient is employed for the cylindrical portion 70 and a metal material having a small thermal expansion coefficient is employed for the rotating shaft 71, By increasing the temperature, the thermal expansion of the outer peripheral surface of the cylindrical portion 70 becomes larger than the thermal expansion of the rotating shaft 71. Therefore, the crown amount can be increased more efficiently than the conventional can roll, which is efficient. . When a metal material having a small thermal expansion coefficient is used for the cylindrical portion 70 and a metal having a large thermal expansion coefficient is used for the rotating shaft 71, the crown amount of the can roll is increased by lowering the temperature of the rotating shaft portion. It is also possible. However, if the components are extremely cooled in the vacuum chamber, the adsorption of moisture existing in the vacuum chamber becomes a problem. For this reason, the former method which comprises the cylindrical part 70 using the metal material whose thermal expansion coefficient is larger than the metal material which comprises the rotating shaft 71 is desirable.

  In addition, even when a configuration provided with a cooling means for the rotating shaft that controls the temperature of the rotating shaft 41 as shown in FIG. 6 is adopted, the outer peripheral surface of the cylindrical portion 40 is increased by increasing the temperature of the cylindrical portion 40. Is larger than the thermal expansion of the rotating shaft 41 (the expansion of the rotating shaft is small due to the action of the cooling means), so that the amount of crown can be increased more efficiently than the conventional can roll. It is. That is, the temperature of the rotary shaft 41 is controlled to be constant by adopting a structure in which the refrigerant enters from the rotary shaft refrigerant introduction pipe 46 constituting the cooling means and the refrigerant comes out from the rotary shaft refrigerant discharge pipe 47 also constituting the cooling means. It becomes possible to do. In FIG. 6, reference numeral 42 denotes a side plate, reference numeral 43 denotes an inner introduction pipe of the central shaft double pipe, reference numeral 44 denotes an outer discharge pipe of the central shaft double pipe, and reference numeral 45 denotes a bearing.

(2) Vacuum film-forming apparatus Sputtering is given as an example of a vacuum film-forming means, and a long heat-resistant resin film is given as an example of a long body conveyed by roll-to-roll. The film apparatus (sputtering web coater) will be described in detail.

  A vacuum film forming apparatus (sputtering web coater) according to the present embodiment includes an unwinding roll 51 for unwinding a long heat-resistant resin film 52 in a vacuum chamber (decompression chamber) 50 as shown in FIG. A take-up roll 64 that winds up the long heat-resistant resin film 52, a refrigerant that is provided between the take-up roll 51 and the take-up roll 64, and whose temperature is internally circulated, is rotated by a servo motor. A cooling can roll 56, and a long heat-resistant resin film 52 provided on the upstream side of the cooling can roll 56 and driven by a servo motor and supplied from the unwinding roll 51 is carried into the cooling can roll 56. It is provided on the downstream side of the front feed roll 55 and the cooling can roll 56 and is rotated by a servo motor and cooled. The long heat-resistant resin film 52 fed from the can roll 56 has a structure in which a feed roll 61 is disposed after the long heat-resistant resin film 52 is carried out to the take-up roll 64 side, and on the opposite side of the cooling can roll 56 Magnetron sputtering cathodes 57, 58, 59, and 60 are provided along the outer peripheral surface of the cooling can roll 56 as vacuum film forming means with a thermal load. In addition, about the cooling can roll 56, the above-mentioned can roll which comprised the cylindrical part using the metal material whose thermal expansion coefficient is larger than the metal material which comprises a rotating shaft is used.

  Further, on the upstream conveyance path from the unwinding roll 51 to the cooling can roll 56, a free roll 53 for guiding the long heat resistant resin film 52 and a tension for measuring the tension of the long heat resistant resin film 52. A sensor roll 54 and a front feed roll 55 that is rotationally driven by a servo motor are arranged.

  Then, the long heat-resistant resin film 52 is brought into close contact with the outer peripheral surface of the cooling can roll 56 by the front feed roll 55 adjusted so that the peripheral speed of the cooling can roll 56 driven to rotate by the servo motor is slow. Then it is transported.

  Also, a tension sensor that measures the tension of the rear feed roll 61 and the long heat-resistant resin film 52 that are rotated by a servo motor on the downstream conveyance path from the cooling can roll 56 to the take-up roll 64. A roll 62 and a free roll 63 that guides the long heat-resistant resin film 52 are disposed.

  Then, the long heat-resistant resin film 52 is discharged from the cooling can roll 56 toward the take-up roll 64 by the rear feed roll 61 adjusted to have the same or higher peripheral speed than the cooling can roll 56. It has come to be.

  The unwinding roll 51 and the winding roll 64 are configured so that the tension balance of the long heat-resistant resin film 52 is maintained by torque control using a powder clutch or the like. Further, the long heat-resistant resin film 52 is unwound from the unwinding roll 51 by the rotation of the cooling can roll 56 and the servomotor-driven front feed roll 55 and the rear feed roll 61 that rotate in conjunction with the rotation of the cooling can roll 56. It is designed to be wound on a winding roll 64.

  Further, in the vacuum film forming apparatus (sputtering web coater), as described above, the magnetron sputtering cathodes 57, 58, 59, 60 as vacuum film forming means with a thermal load are provided along the outer peripheral surface of the cooling can roll 56. It has been.

In sputtering film formation, the pressure inside the reduced pressure chamber of the sputtering web coater is reduced to an ultimate pressure of about 10 ⁻⁴ Pa, and then the pressure is adjusted to about 0.1 to 10 Pa by introducing a sputtering gas. A known gas such as argon is used as the sputtering gas, and a gas such as oxygen is further added depending on the purpose. The shape and material of the vacuum film forming apparatus (sputtering web coater) are not particularly limited as long as they can withstand a reduced pressure state, and various types can be used. In order to maintain the reduced pressure state in the reduced pressure chamber of the sputtering web coater, the sputtering web coater is provided with various devices such as a dry pump, a turbo molecular pump, and a cryocoil (not shown).

  In the case of sputtering a metal film, a plate-like target (not shown) can be used. However, when a plate-like target is used, nodules (foreign material growth) are generated on the target. Sometimes. When this becomes a problem, it is preferable to use a cylindrical rotary target that generates no nodules and has high target use efficiency. Further, since the vacuum film forming apparatus (sputtering web coater) shown in FIG. 3 assumes sputtering as a vacuum film forming means with a thermal load, magnetron sputtering cathodes 57, 58, 59 and 60 are shown. However, when the vacuum film forming means with a thermal load is another film forming means such as vapor deposition, another film forming means is provided in place of the plate target. Examples of other vacuum film forming means include CVD (chemical vapor deposition) and vapor deposition.

(3) Long body and heat resistant resin film with metal film (3-1) Long body Examples of the long body include a long resin film, metal foil, and metal strip. Examples of the resin film include a long resin film such as a polyethylene terephthalate (PET) film, a long heat resistant resin film such as a polyimide film, and the like.

(3-2) Heat-resistant resin film with metal film (copper-clad laminated resin film substrate)
A heat-resistant resin film with a metal film (copper-clad laminated resin film substrate) can be produced using the method for forming a long body according to the present invention.

  As the heat-resistant resin film with metal film (copper-clad laminated resin film substrate), a base metal layer made of Ni, Ni-based alloy, chromium, etc. on the surface of the heat-resistant resin film, and copper laminated on the surface of the base metal layer A structure composed of a thin film layer is exemplified. The copper clad laminated resin film substrate having such a structure is processed into a flexible wiring substrate by a subtractive method. Here, the subtractive method is a method of manufacturing a flexible wiring board by removing a metal film (for example, the copper thin film layer) not covered with a resist by etching.

  The layer made of Ni alloy or the like is called a seed layer (underlying metal layer), and its composition is selected depending on desired characteristics such as electrical insulation and migration resistance of the copper-clad laminated resin film substrate. The seed layer can be made of various known alloys such as Ni—Cr alloy or Inconel, Condanthan, Monel and the like. Moreover, when it is desired to further increase the thickness of the metal film (copper thin film layer) of the heat-resistant resin film with metal film (copper-clad laminated resin film substrate), the metal film may be formed using a wet plating method. There are cases where a metal film is formed only by electroplating (ie, electroplating), and electroless plating is performed as primary plating and wet plating such as electrolytic plating is combined as secondary plating. is there. The wet plating process may employ various conditions of a conventional wet plating method.

  Moreover, as a heat resistant resin film used for the said heat resistant resin film with a metal film (copper clad laminated resin film substrate), for example, polyimide film, polyamide film, polyester film, polytetrafluoroethylene film, polyphenylene sulfide Resin film selected from polyethylene film, polyethylene naphthalate film or liquid crystal polymer film, flexibility as heat-resistant resin film with metal film (copper-clad laminated resin film), practically necessary strength, as wiring material It is preferable from the viewpoint of having suitable electrical insulation.

  In addition, as the heat-resistant resin film with a metal film (copper-clad laminated resin film), a structure in which a metal film such as a Ni—Cr alloy or Cu is laminated on a long heat-resistant resin film is exemplified. In addition, an oxide film, a nitride film, a carbide film, or the like can be used depending on the purpose.

  Hereinafter, examples of the present invention will be specifically described with reference to comparative examples, but the technical configuration according to the present invention is not limited to the configurations of the following examples.

  First, in this embodiment, the vacuum film forming apparatus (sputtering web coater) shown in FIG. 3 is used, and the heat-resistant resin film 52 as a long body has a width of 500 mm, a length of 800 m, and a thickness of 25 μm. A heat-resistant polyimide film “UPILEX (registered trademark)” manufactured by Co., Ltd. was used.

  In addition, the can roll incorporated in the vacuum film forming apparatus (sputtering web coater) has the cylindrical portion parallel to the rotation axis under the assumed use temperature (20 ° C.) of the roll (that is, the axial center of the outer peripheral surface of the cylindrical portion). Applying a parallel-shaped can roll that has been cut and polished so that the part diameter α1 and the both end diameters α2 are set to be the same), the central part diameter α1 and both end diameters α2 are 900 mm, the width is 750 mm, and the can roll Hard chrome plating is applied to the surface of the main body (cylindrical part).

  In addition, the metal material constituting the cylindrical portion of the can roll and the rotating shaft includes aluminum having a large thermal expansion coefficient (linear thermal expansion coefficient: 23 ppm / K) and stainless steel having a small thermal expansion coefficient (linear thermal expansion coefficient: 15 ppm / K). ), And as shown in Tables 1 to 4 below, the cylindrical portion and the rotating shaft can each be made of stainless steel, the cylindrical portion and the rotating shaft can be made of aluminum (aluminum), respectively. Also, three types of can rolls having a cylindrical portion made of aluminum having a large thermal expansion coefficient and a rotating shaft made of stainless steel having a small thermal expansion coefficient are manufactured. Further, for each of the three types of can rolls, the temperature of the rotating shaft is prepared. A can roll provided with a cooling means for a rotating shaft for controlling the temperature at 20 ° C. and a can roll provided with no cooling means were prepared.

  In addition, the three types of can rolls (Examples 1 to 3) to which the cooling means for the rotating shaft is attached, and the cylindrical portion is made of aluminum having a large thermal expansion coefficient and the rotating shaft is made of stainless steel having a small thermal expansion coefficient. The can roll (Embodiment 4) that is configured and not provided with the rotating shaft cooling means is a can roll according to the embodiment, the cylindrical portion and the rotating shaft are each made of stainless steel, and the rotating shaft cooling means Can rolls (Comparative Example 1) that are not provided with a cylindrical part and a rotating shaft that is made of aluminum (aluminum) and are not provided with cooling means for the rotating shaft (Comparative Example 2). It was set as the can roll which concerns on a comparative example.

  And about the can roll which concerns on Examples 1-4 and the can roll which concerns on Comparative Examples 1-2, when used on the following temperature (20 degreeC, 40 degreeC, 60 degreeC) conditions, "the axial direction center part diameter (alpha) 1. And “the crown amount (μm) defined by the diameter difference between the two end diameters α2 (α = α1−α2)” and “the maximum sputter power (total of four units) kW at which no wrinkle is generated” were obtained by experiments. .

[Comparison of crown amount]
About the can roll which concerns on Examples 1-4 and Comparative Examples 1-2, the crown amount when it is used on the conditions (based on the cylindrical part outer peripheral surface temperature of each can roll) of 20 degreeC, 40 degreeC, and 60 degreeC (The outer peripheral surface shape of the can roll) was measured.

  In addition, about the cylindrical part outer peripheral surface temperature in each can roll, 20 degreeC cold water, 40 degreeC, and 60 degreeC hot water are separately supplied to each can roll from the inner introduction pipe shown by the code | symbol 33 of FIG. 4, the code | symbol 43 of FIG. The temperature of the outer peripheral surface of the cylindrical portion of each can roll is set as the temperature.

  The results are shown in Tables 1 and 2 below.

[Evaluation]
(1) Comparison in which the cooling means for the rotating shaft is not provided as confirmed from the comparison between the first embodiment and the first comparative example, the second embodiment and the second comparative example, and the third embodiment and the fourth embodiment. In the can roll according to Example 1, Comparative Example 2, and Example 4, since the temperature of the cylindrical portion is transferred to the rotating shaft, the rotating shaft cooling means is attached to Examples 1-3. It is confirmed that the crown amount is smaller than that of the can roll. In particular, in the can roll according to Comparative Example 1, when it is used under a temperature condition that greatly exceeds the assumed use temperature, it is confirmed that it is difficult to secure a sufficient crown amount that can correspond to the use temperature.

(2) It is also confirmed that when aluminum having a large thermal expansion coefficient is applied to the material of the cylindrical portion, the crown amount becomes larger than when stainless steel is applied.

[Maximum spatter power without soot]
Next, using the vacuum film-forming apparatus (sputtering web coater) which concerns on Examples 1-4 and Comparative Examples 1-2 in which the can roll concerning Examples 1-4 and Comparative Examples 1-2 was integrated separately, it was heat-resistant. When the Ni—Cr film and the Cu film of the seed layer (underlying metal layer) were sequentially formed on the conductive resin film (heat resistant polyimide film) 52, the maximum sputtering power at which no wrinkle was generated was measured.

  The film forming conditions are as follows.

That is, a Ni—Cr target is used for the magnetron sputter target 57 shown in FIG. 3, a Cu target is used for the magnetron sputter targets 58, 59, and 60, 300 sccm of argon gas is introduced, and the power applied to each cathode is 5 kW. Performed with power control. Further, the tension of the unwinding roll 51 and the winding roll 64 is 80 N, the heat resistant resin film (heat resistant polyimide film) 52 is set on the unwinding roll 51, and the heat resistant resin is passed through the can roll 56. The tip of the film (heat resistant polyimide film) 52 was attached to the take-up roll 64. The vacuum chamber 50 was evacuated to 5 Pa with a plurality of dry pumps, and further evacuated to 3 × 10 ⁻³ Pa using a plurality of turbo molecular pumps and cryocoils.

  Next, after the conveyance speed of the heat-resistant resin film (heat-resistant polyimide film) 52 was set to 3 m / min, argon gas was introduced into each of the magnetron sputter cathodes 57, 58, 59, and 60 to apply electric power, and Ni -Start of film formation of Cr film and Cu film.

  And it implemented from the window which can observe the heat resistant resin film (heat resistant polyimide film) surface on the can roll 56 in each vacuum film-forming apparatus (sputtering web coater) which concerns on Examples 1-4 and Comparative Examples 1-2. Heat-resistant resin conveyed on the can roll 56 at a conveyance speed of 3 m / min under the control temperature (20 ° C., 40 ° C., 60 ° C.) conditions in the cylindrical portion of the can roll according to Examples 1-4 and Comparative Examples 1-2. The film (heat-resistant polyimide film) was observed for the presence or absence of wrinkle generation, and the maximum sputter power (total of four units) at which wrinkle generation due to the thermal load of sputtering did not occur was determined.

  The results are shown in Tables 3 and 4 below.

[Evaluation]
(1) It is confirmed by comparing “Table 1” and “Table 3” according to Examples 1 to 3 and “Table 2” and “Table 4” according to Comparative Examples 1 and 2 and Example 4. In addition, “crown amount” and “maximum sputter power at which no soot is generated” are in a substantially proportional relationship, and “maximum sputter power at which no soot is generated” tends to increase as “crown amount” increases.

  This eliminates the above-mentioned “sagging state” due to the crown shape of the can roll, improves the adhesion between the heat resistant resin film (heat resistant polyimide film) and the can roll, and efficiently cools the thermal load due to sputtering by the can roll. It is thought that it was because it was done.

(2) Moreover, although not shown in each table | surface, when the control temperature of the can-roll cylindrical part exceeded 80 degreeC, there existed a tendency for the maximum sputter | spatter electric power which a wrinkle does not generate to fall extremely.

  This is the cooling effect of the above can roll (the effect that the “sagging state” is eliminated by the crown shape, the adhesion between the heat resistant resin film and the can roll is improved, and the thermal load due to sputtering is efficiently cooled by the can roll) In comparison, the temperature of the can roll is too high (when it exceeds 80 ° C.), and as a result, the effect of the cooling effect of the heat resistant resin film becoming insufficient is considered to be larger.

(3) In order to avoid the adverse effect of the temperature of the can roll being too high, the surface of the can roll at the assumed use temperature is cut and polished into a slight crown shape (that is, the crown amount is set larger than necessary). Not), it becomes possible to lower the control temperature of the cylindrical portion that achieves the optimum crown amount.

(4) On the other hand, a method of cutting and polishing the surface of the can roll at the assumed use temperature into a large crown shape (that is, setting the crown amount large) and lowering the control temperature of the can roll cylindrical portion to reduce the crown amount In some cases, the temperature difference between the resin film cooled by a can roll before sputtering film formation and the film surface due to the thermal load of sputtering becomes large and wrinkles due to rapid thermal distortion may occur.

  According to the can roll according to the present invention, a sufficient crown amount can be secured even when used under a temperature condition that greatly exceeds the assumed use temperature for reasons such as increasing the film formation rate. It becomes possible to suppress wrinkle generation. For this reason, it has the industrial applicability used for manufacture of the copper clad laminated resin film (heat resistant resin film with a metal film) used for flexible wiring boards, such as a liquid crystal television and a mobile phone.

DESCRIPTION OF SYMBOLS 30 Cylindrical part 31 Rotating shaft 32 Side plate 33 Inner introduction pipe 34 Outer discharge pipe 35 Bearing 40 Cylindrical part 41 Rotation shaft 42 Side plate 43 Inner introduction pipe 44 Outer discharge pipe 45 Bearing 46 Rotating shaft refrigerant introduction pipe 47 Rotating shaft refrigerant discharge pipe 50 Vacuum Chamber (decompression chamber)
51 Unwinding Roll 52 Long Heat Resistant Resin Film 53 Free Roll 54 Tension Sensor Roll 55 Pre-Feed Roll 56 Can Roll 57 Magnetron Sputtering Cathode 58 Magnetron Sputtering Cathode 59 Magnetron Sputtering Cathode 60 Magnetron Sputtering Cathode 61 Post Feed Roll 62 Tension Sensor Roll 63 Free roll 64 Winding roll 70 Cylindrical part 71 Rotating shaft

Claims (7)

It has a cylindrical part with a refrigerant circulation path inside and a rotating shaft provided at the center of rotation of the cylindrical part, and a long body that is conveyed by roll-to-roll in a vacuum chamber is wound around the outer peripheral surface of the cylindrical part In the can roll that cools
A can roll characterized in that the cylindrical portion is made of a metal material having a larger thermal expansion coefficient than the metal material constituting the rotating shaft. It has a cylindrical part with a refrigerant circulation path inside and a rotating shaft provided at the center of rotation of the cylindrical part, and a long body that is conveyed by roll-to-roll in a vacuum chamber is wound around the outer peripheral surface of the cylindrical part In the can roll that cools
A can roll, characterized in that a cooling means for the rotary shaft for controlling the temperature of the rotary shaft to be constant is provided.   Machining into a parallel-shaped mold where the diameter difference (α = α1-α2) between the axial center diameter α1 and the both-ends diameter α2 of the cylindrical outer peripheral surface is 0 or a crown-shaped mold where the diameter difference (α) is positive The can roll according to claim 1, wherein the can roll.   The can roll according to any one of claims 1 to 3, wherein a crown amount defined by the diameter difference (α) in the crown-shaped can roll is changed in a range of 100 to 500 µm. A vacuum chamber, a transport mechanism that transports a long body in a roll-to-roll manner in the vacuum chamber, a can roll that winds and cools the long body around the outer peripheral surface, and a vacuum against the long body wound around the can roll In a vacuum film forming apparatus provided with means for performing film formation,
The vacuum film-forming apparatus characterized by the said can roll being comprised with the can roll in any one of Claims 1-4.   6. The vacuum film forming apparatus according to claim 5, wherein the means for performing the vacuum film formation is magnetron sputtering. In a film forming method of a long body that wraps a long body conveyed by roll-to-roll in a vacuum chamber around the outer peripheral surface of the can roll and performs vacuum film formation on the long body wound around the can roll,
The can roll according to any one of claims 1 to 4, wherein the can roll is constituted.

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