JP2702183B2 - 半導体製造装置 - Google Patents

半導体製造装置

Info

Publication number
JP2702183B2
JP2702183B2 JP63279605A JP27960588A JP2702183B2 JP 2702183 B2 JP2702183 B2 JP 2702183B2 JP 63279605 A JP63279605 A JP 63279605A JP 27960588 A JP27960588 A JP 27960588A JP 2702183 B2 JP2702183 B2 JP 2702183B2
Authority
JP
Japan
Prior art keywords
pattern
electron beam
transmission hole
pattern group
hole mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63279605A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02125609A (ja
Inventor
樹一 坂本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=17613316&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP2702183(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority to JP63279605A priority Critical patent/JP2702183B2/ja
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to EP89119949A priority patent/EP0367126B1/de
Priority to DE68925266T priority patent/DE68925266T2/de
Priority to KR1019890015872A priority patent/KR940006209B1/ko
Publication of JPH02125609A publication Critical patent/JPH02125609A/ja
Priority to US08/227,696 priority patent/US5393988A/en
Priority to US08/277,137 priority patent/US5422491A/en
Publication of JP2702183B2 publication Critical patent/JP2702183B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
    • H01J37/3175—Projection methods, i.e. transfer substantially complete pattern to substrate
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/20—Masks or mask blanks for imaging by charged particle beam [CPB] radiation, e.g. by electron beam; Preparation thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP63279605A 1988-11-04 1988-11-04 半導体製造装置 Expired - Lifetime JP2702183B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP63279605A JP2702183B2 (ja) 1988-11-04 1988-11-04 半導体製造装置
EP89119949A EP0367126B1 (de) 1988-11-04 1989-10-27 Korpuskularbestrahlungsverfahren mit einer Maske
DE68925266T DE68925266T2 (de) 1988-11-04 1989-10-27 Korpuskularbestrahlungsverfahren mit einer Maske
KR1019890015872A KR940006209B1 (ko) 1988-11-04 1989-11-02 충전입자 비임 노출방법 및 장치
US08/227,696 US5393988A (en) 1988-11-04 1994-04-14 Mask and charged particle beam exposure method using the mask
US08/277,137 US5422491A (en) 1988-11-04 1994-07-19 Mask and charged particle beam exposure method using the mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63279605A JP2702183B2 (ja) 1988-11-04 1988-11-04 半導体製造装置

Publications (2)

Publication Number Publication Date
JPH02125609A JPH02125609A (ja) 1990-05-14
JP2702183B2 true JP2702183B2 (ja) 1998-01-21

Family

ID=17613316

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63279605A Expired - Lifetime JP2702183B2 (ja) 1988-11-04 1988-11-04 半導体製造装置

Country Status (5)

Country Link
US (1) US5393988A (de)
EP (1) EP0367126B1 (de)
JP (1) JP2702183B2 (de)
KR (1) KR940006209B1 (de)
DE (1) DE68925266T2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69032280T2 (de) * 1989-12-04 1998-08-20 Fujitsu Ltd Verfahren zur Wahrnehmung und Justierung der Belichtungsbedingungen in einem Belichtungssystem mittels Ladungsträgern und ein solches System
JP3245882B2 (ja) * 1990-10-24 2002-01-15 株式会社日立製作所 パターン形成方法、および投影露光装置
JP2616676B2 (ja) * 1993-11-30 1997-06-04 日本電気株式会社 半導体装置の製造方法
JPH09293472A (ja) * 1996-04-26 1997-11-11 Fujitsu Ltd 荷電粒子ビーム露光装置、その露光方法及びその製造方法
US5808892A (en) * 1996-11-05 1998-09-15 Taiwan Semiconductor Manufacturing Company Ltd. Line edge and size definition in e-beam exposure
JPH10321502A (ja) * 1997-05-16 1998-12-04 Nikon Corp 荷電粒子線投影方法
US6180289B1 (en) 1997-07-23 2001-01-30 Nikon Corporation Projection-microlithography mask with separate mask substrates
US6040892A (en) 1997-08-19 2000-03-21 Micron Technology, Inc. Multiple image reticle for forming layers
JPH11142121A (ja) 1997-11-11 1999-05-28 Nikon Corp レチクルの歪み計測方法および歪み計測装置
US6128067A (en) * 1998-04-28 2000-10-03 Kabushiki Kaisha Toshiba Correcting method and correcting system for mask pattern
JP2000089448A (ja) * 1998-09-11 2000-03-31 Fujitsu Ltd 露光用パターン表示・検査・修正方法
JP2000277425A (ja) 1999-03-26 2000-10-06 Nec Corp 電子線描画方法とその装置
JP3360666B2 (ja) * 1999-11-12 2002-12-24 日本電気株式会社 描画パターン検証方法
US7623250B2 (en) * 2005-02-04 2009-11-24 Stryker Leibinger Gmbh & Co. Kg. Enhanced shape characterization device and method
KR20110101904A (ko) * 2010-03-10 2011-09-16 삼성모바일디스플레이주식회사 이온 도핑 장치 및 도핑 방법
KR101456794B1 (ko) * 2013-08-08 2014-11-03 (주)오로스 테크놀로지 빔 스폿 조절이 가능한 주사전자현미경 및 이를 이용한 측정방법
US10495982B2 (en) * 2013-10-28 2019-12-03 Taiwan Semiconductor Manufacturing Company, Ltd. System and method for real-time overlay error reduction

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52119185A (en) * 1976-03-31 1977-10-06 Fujitsu Ltd Electron beam exposure equipment
DE2837590A1 (de) * 1978-08-29 1980-03-13 Ibm Deutschland Verfahren zur schattenwurfbelichtung
US4213053A (en) * 1978-11-13 1980-07-15 International Business Machines Corporation Electron beam system with character projection capability
DE2939044A1 (de) * 1979-09-27 1981-04-09 Ibm Deutschland Gmbh, 7000 Stuttgart Einrichtung fuer elektronenstrahllithographie
JPS5731134A (en) * 1980-08-01 1982-02-19 Hitachi Ltd Drawing device by electron beam
JPS5968928A (ja) * 1982-10-13 1984-04-19 Pioneer Electronic Corp 半導体装置の製造方法
JPS62202518A (ja) * 1986-02-03 1987-09-07 Fujitsu Ltd Ｘ線露光用マスク
JPS62260322A (ja) * 1986-05-06 1987-11-12 Hitachi Ltd 可変成形型電子線描画装置
AT391772B (de) * 1986-05-16 1990-11-26 Ims Ionen Mikrofab Syst Anordnung zum positionieren der abbildung der struktur einer maske auf ein substrat
JPH0789534B2 (ja) * 1986-07-04 1995-09-27 キヤノン株式会社 露光方法
US4812661A (en) * 1986-08-20 1989-03-14 Hewlett-Packard Company Method and apparatus for hybrid I.C. lithography
JPH0673344B2 (ja) * 1987-04-08 1994-09-14 株式会社日立製作所 電子線描画方法
JPH01243422A (ja) * 1988-03-25 1989-09-28 Hitachi Ltd 任意図形露光方法
US4849313A (en) * 1988-04-28 1989-07-18 Vlsi Technology, Inc. Method for making a reticle mask

Also Published As

Publication number Publication date
JPH02125609A (ja) 1990-05-14
KR940006209B1 (ko) 1994-07-11
DE68925266D1 (de) 1996-02-08
DE68925266T2 (de) 1996-05-15
EP0367126B1 (de) 1995-12-27
EP0367126A3 (de) 1991-06-12
US5393988A (en) 1995-02-28
KR900008614A (ko) 1990-06-04
EP0367126A2 (de) 1990-05-09

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US20020036273A1 (en) Methods for manufacturing reticles for charged-particle-beam microlithography exhibiting reduced proximity effects, and reticles produced using same
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