JP3473205B2 - Method for forming edge electrode of square chip component - Google Patents

Method for forming edge electrode of square chip component

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Publication number
JP3473205B2
JP3473205B2 JP21724395A JP21724395A JP3473205B2 JP 3473205 B2 JP3473205 B2 JP 3473205B2 JP 21724395 A JP21724395 A JP 21724395A JP 21724395 A JP21724395 A JP 21724395A JP 3473205 B2 JP3473205 B2 JP 3473205B2
Authority
JP
Japan
Prior art keywords
rectangular
rectangular chip
forming
electrode
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP21724395A
Other languages
Japanese (ja)
Other versions
JPH0963819A (en
Inventor
博之 山田
光成 中谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP21724395A priority Critical patent/JP3473205B2/en
Publication of JPH0963819A publication Critical patent/JPH0963819A/en
Application granted granted Critical
Publication of JP3473205B2 publication Critical patent/JP3473205B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Non-Adjustable Resistors (AREA)

Description

【発明の詳細な説明】 【0001】 【産業上の利用分野】本発明は、各種電子回路に用いら
れる角形チップ部品の端面電極形成方法に関するもので
ある。 【0002】 【従来の技術】近年、電子機器のダウンサイジング化に
伴い、その回路基板への実装密度を高めるため、搭載さ
れる電子部品に対する小形化への要求が高まっている。
角形チップ抵抗器に対しても小形化が進められるととも
に、様々な要求に対応すべく製品開発が進められてい
る。 【0003】従来の角形チップ部品の端面電極形成方法
としては、導電性ペーストをローラー転写方式により端
面部に塗布し、焼成または硬化する方法や、真空蒸着、
スパッタ等の薄膜技術により、金属薄膜で端面電極を形
成する方法が行われていた。 【0004】以下に、従来の角形チップ部品の端面電極
形成方法について、図面を参照しながら説明する。 【0005】図4(a)は短冊状角形チップ抵抗器の斜
視図、図4(b)は同A−A断面図である。図4(a)
(b)において、1はアルミナ等からなる基板である。
2,3は基板1の上面および裏面の側部のそれぞれに設
けた上面電極、裏面電極である。4は基板1の上面の側
部のそれぞれに設けた上面電極2と電気的に接続される
ように設けられた抵抗体である。5は少なくとも抵抗体
4を覆うように設けられた保護膜である。 【0006】以上のように構成された短冊状角形チップ
抵抗器について、以下にその端面電極形成方法を図面を
参照しながら説明する。 【0007】図5は従来の短冊状角形チップ抵抗器の端
面電極形成を説明する工程図である。この図5に示すよ
うに従来は、金属薄膜材料からなるターゲット面11に
対して、複数個の短冊状角形チップ抵抗器12の端面が
平行になるように配置して、平行平板マグネトロンスパ
ッタ方式により、短冊状角形チップ抵抗器12の片側ず
つ端面電極(図示せず)を形成していた。 【0008】 【発明が解決しようとする課題】しかしながら、上記従
来の角形チップ抵抗器の端面電極形成方法では、短冊状
角形チップ抵抗器12に端面電極を片側ずつ形成するた
め、薄膜技術による形成の場合、実際に金属薄膜を形成
する時間よりも、真空排気に要する時間の方が長くな
り、端面電極を両側に形成するのに必要な時間が非常に
長くなり、工数が悪化するという課題を有していた。 【0009】また、端面電極を形成する面をターゲット
面に向けて平行に配置した状態であるため、図5のよう
に複数の短冊状アルミナ基板を一括処理しても、各々の
短冊状アルミナ基板間に隙間があるために、金属薄膜材
料が侵入し、図6のように保護膜31の上面にまで金属
薄膜による端面電極32が形成されてしまうことにな
り、この防止策として、端面電極形成面以外に金属薄膜
が形成されないように不必要部分にレジストをあらかじ
め形成し、端面電極形成後リフトオフする方法もとられ
るが、工程が煩雑になり、コスト高になるという課題を
有していた。 【0010】本発明は上記従来の課題を解決するもの
で、端面電極を形成する場合、均一な膜厚の端面電極形
成が行え、かつ安価に得られる角形チップ部品の端面電
極形成方法を提供することを目的とするものである。 【0011】 【課題を解決するための手段】上記目的を達成するため
に本発明の角形チップ部品の端面電極形成方法は、角形
チップ部品が連なってなる短冊状角形チップ部品を2本
以上積み重ねた組を複数組準備し、この複数組の短冊状
角形チップ部品を互いに間隔をおいて平行に、かつ端面
電極を形成したい面とターゲット面とが垂直になるよう
に配置して、複数組の短冊状角形チップ部品の端面に薄
膜技術により金属薄膜による端面電極を同時に形成する
とき、積み重ねた短冊状角形チップ部品の高さが平行に
配置された複数組の短冊状角形チップ部品の互いの間隔
よりも大きくなるように、入射角度(ターゲット面から
の角度)が45度より大きい治具を用いたものである。 【0012】 【作用】本発明によれば、角形チップ部品が連なってな
る短冊状角形チップ部品を2本以上積み重ねた組を複数
組準備し、この複数組の短冊状角形チップ部品を互いに
間隔をおいて平行に、かつ端面電極を形成したい面とタ
ーゲット面とが垂直になるように配置して、複数組の短
冊状角形チップ部品の端面に薄膜技術により金属薄膜に
よる端面電極を同時に形成するとき、積み重ねた短冊状
角形チップ部品の高さが平行に配置された複数組の短冊
状角形チップ部品の互いの間隔よりも大きくなるよう
に、入射角度(ターゲット面からの角度)が45度より
大きい治具を用いているため、ターゲット面から端面電
極を形成する面に入射してくる薄膜金属材料を制限で
き、これにより、均一な膜厚の端面電極を形成すること
ができるとともに、抵抗器の上面側に位置する保護膜へ
の薄膜金属材料の不必要な回り込みも防止でき、しかも
角形チップ部品が連なってなる短冊状角形チップ部品を
本以上積み重ねた組を複数組準備し、この複数組の短
冊状角形チップ部品を互いに間隔をおいて平行に、かつ
端面電極を形成したい面とターゲット面とが垂直になる
ように配置したことにより、複数組の短冊状角形チップ
部品の両端面に同時に端面電極を形成することができる
ため、工数の低減および工程の簡略化が図れて安価に得
ることができる。 【0013】 【実施例】以下、本発明の一実施例の角形チップ部品の
端面電極形成方法について、角形チップ抵抗器を例にし
て図面を参照しながら説明する。 【0014】図1は本発明の一実施例における角形チッ
プ抵抗器の端面電極形成方法の工程図である。図1にお
いて、40は短冊状角形チップ抵抗器で、従来と同様
に、基板41の上面および裏面の側部のそれぞれに設け
た上面電極42、裏面電極(図示せず)と、前記上面電
極42と電気的に接続されるように設けた抵抗体(図示
せず)と、少なくともこの抵抗体(図示せず)を覆うよ
うに設けた保護膜43とを備えている。45は金属薄膜
材料のターゲット面で、後述する端面電極を形成するた
めのNi:Crが50:50wt%であるNi−Cr合
金を有するものである。上記した短冊状角形チップ抵抗
器40に端面電極を形成する際、ターゲット面45の面
と短冊状角形チップ抵抗器40の端面電極を形成したい
面とを垂直となるように配置して、DC平行平板マグネ
トロンスパッタリング方式により、端面電極を形成する
ものである。 【0015】また図2は、本発明の一実施例における端
面電極を形成する際に用いる治具に複数の短冊状角形チ
ップ抵抗器を充填した状態を示す斜視図である。この治
具51は、複数の短冊状角形チップ抵抗器52を積み上
げた状態に保持するもので、短冊状角形チップ抵抗器5
2の両側の端面部分が露出するように設けられている。
この治具51内に積み上げられた短冊状角形チップ抵抗
器52同士は、きっちりと重なり、ずれないように固定
されている。このように治具51に充填された状態で、
図1のように治具51の下面(底面)に対し、垂直方向
からスパッタリングにより金属薄膜による端面電極を形
成する。この状態であれば、ターゲット面から上方の全
方向に対して金属薄板材料が飛び出しているが、短冊状
角形チップ抵抗器52相互間の隙間が、短冊状角形チッ
プ抵抗器52を積み上げた自重により抑えられ、保護膜
の厚みしか生じず、よって角形チップ抵抗器の上面(保
護膜)への薄膜金属材料の回り込みを抑えることができ
る。また、治具51の底面にもスパッタリングされる
が、それ以外の金属薄膜が端面電極として形成されるの
で、従来のように端面電極に過度に集中して形成される
こともなく、安定した均一な端面電極を形成することが
できる。また、最上段の短冊状角形チップ抵抗器52の
上には、同じ大きさのダミーを載せることにより、上面
(保護膜)に金属薄膜材料が形成されないようにするこ
とができる(図示せず)。 【0016】図3(a)は本発明の一実施例における複
数の角形チップ抵抗器を保持する治具の斜視図、図3
(b)は同断面図である。図2に示す端面電極形成用の
1つの治具51だけで端面電極を形成する場合には、タ
ーゲット面45の大きさがある程度大きい場合、当然な
がら端面電極を形成する面に対して、ターゲット面45
からの金属薄膜材料の入射角度が平行に近くなるものが
発生する。よって、強制的に入射角度を規制する必要が
あり、そのために図3(a)に示す治具61を用いて端
面電極を形成した。図3(b)の断面図に示すように、
複数の短冊状角形チップ抵抗器62を積み重ねた高さA
が平行に配置された複数組の短冊状角形チップ抵抗器6
2の互いの間隔Bよりも大きくなるように、すなわち、
入射角度(ターゲット面45からの角度)が45度より
大きい治具61を設計した。これにより、治具61内に
充填された短冊状角形チップ抵抗器62の端面に形成さ
れる端面電極の膜厚を均一にすることができ、かつ上面
部への回り込み量を制限することができた。なお、この
際も図2と同様に、最上段の短冊状角形チップ抵抗器6
2の上には、同じ大きさのダミーを載せ、上面(保護
膜)に金属薄膜材料が形成されないようにした(図示せ
ず)。 【0017】なお本実施例では、平行平板マグネトロン
スパッタ方式による実施例を示したが、スパッタリング
方式を限定するものではなく、カルーセル方式でもよ
く、また他の薄膜技術(真空蒸着、イオンプレーティン
グ、溶射、等)でも、本実施例と同様にターゲット面と
端面電極形成面を垂直に配置すれば、同様の効果が得ら
れることはいうまでもない。 【0018】また、スパッタ方向は下面からだけに限定
するものではなく、端面電極を形成する面に対して平行
な方向からであれば、同様の効果が得られる。 【0019】また、図2に示す治具51を複数使用して
平行に配置し、その相互間の間隔を図3に示す治具61
と同様に設定しても、同様の効果が得られる。 【0020】また、本実施例では角形チップ抵抗器の端
面電極形成方法について説明したが、これに限定されず
他の角形チップ部品の端面電極形成方法適用しても同
様の効果が得られる。 【0021】 【発明の効果】以上のように本発明によれば、角形チッ
プ部品が連なってなる短冊状角形チップ部品を2本以上
積み重ねた組を複数組準備し、この複数組の短冊状角形
チップ部品を互いに間隔をおいて平行に、かつ端面電極
を形成したい面とターゲット面とが垂直になるように
置して、複数組の短冊状角形チップ部品の端面に薄膜技
術により金属薄膜による端面電極を同時に形成すると
き、積み重ねた短冊状角形チップ部品の高さが平行に配
置された複数組の短冊状角形チップ部品の互いの間隔よ
りも大きくなるように、入射角度(ターゲット面からの
角度)が45度より大きい治具を用いているため、ター
ゲット面から端面電極を形成する面に入射してくる薄膜
金属材料を制限でき、これにより、均一な膜厚の端面電
極を形成することができるとともに、抵抗器の上面側に
位置する保護膜への薄膜金属材料の不必要な回り込みも
防止でき、しかも角形チップ部品が連なってなる短冊状
角形チップ部品を2本以上積み重ねた組を複数組準備
し、この複数組の短冊状角形チップ部品を互いに間隔を
おいて平行に、かつ端面電極を形成したい面とターゲッ
ト面とが垂直になるように配置したことにより、複数組
の短冊状角形チップ部品の両端面に同時に端面電極を形
成することができるため、工数の低減および工程の簡略
化が図れて安価に得ることができるという優れた効果を
奏するものである。
Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming an end face electrode of a rectangular chip component used for various electronic circuits. 2. Description of the Related Art In recent years, with downsizing of electronic devices, there has been an increasing demand for downsizing of electronic components to be mounted in order to increase the mounting density on circuit boards.
Along with the miniaturization of square chip resistors, product development is being promoted to meet various requirements. Conventional methods for forming an end face electrode of a rectangular chip component include a method of applying a conductive paste to an end face portion by a roller transfer method and baking or curing, a method of vacuum deposition, and the like.
A method of forming an end face electrode with a metal thin film by a thin film technique such as sputtering has been used. Hereinafter, a conventional method for forming an end face electrode of a rectangular chip component will be described with reference to the drawings. FIG. 4A is a perspective view of a strip-shaped rectangular chip resistor, and FIG. 4B is a sectional view taken along the line AA. FIG. 4 (a)
In (b), 1 is a substrate made of alumina or the like.
Reference numerals 2 and 3 denote an upper surface electrode and a rear surface electrode provided on the upper surface and the rear surface side of the substrate 1, respectively. Reference numeral 4 denotes a resistor provided so as to be electrically connected to the upper electrode 2 provided on each side of the upper surface of the substrate 1. 5 is a protective film provided so as to cover at least the resistor 4. A method of forming an end face electrode of the rectangular chip resistor configured as described above will be described below with reference to the drawings. FIG. 5 is a process chart for explaining the formation of the end face electrodes of the conventional rectangular chip resistor. Conventionally, as shown in FIG. 5, a plurality of strip-shaped rectangular chip resistors 12 are arranged so that the end faces thereof are parallel to a target surface 11 made of a metal thin film material, and a parallel plate magnetron sputtering method is used. An end surface electrode (not shown) was formed on each side of the rectangular chip resistor 12. However, in the above-described conventional method for forming an end face electrode of a rectangular chip resistor, the end electrodes are formed on the strip-shaped square chip resistor 12 one by one. In this case, there is a problem that the time required for evacuation is longer than the time for actually forming the metal thin film, the time required for forming the end face electrodes on both sides is extremely long, and the man-hour is deteriorated. Was. Further, since the surface on which the end surface electrode is formed is arranged parallel to the target surface, even if a plurality of strip-shaped alumina substrates are collectively processed as shown in FIG. Since there is a gap therebetween, the metal thin film material invades, and the end face electrode 32 of the metal thin film is formed up to the upper surface of the protective film 31 as shown in FIG. There is a method in which a resist is previously formed on an unnecessary portion so that a metal thin film is not formed on a surface other than the surface, and lift-off is performed after formation of the end face electrode. However, there has been a problem that the process is complicated and the cost is increased. SUMMARY OF THE INVENTION The present invention solves the above-mentioned conventional problems and provides a method for forming an end face electrode of a square chip component, which can form an end face electrode having a uniform film thickness and can be obtained at low cost when forming an end face electrode. The purpose is to do so. In order to achieve the above object, a method for forming an end face electrode of a rectangular chip component according to the present invention comprises stacking two or more rectangular rectangular chip components in which the rectangular chip components are connected. pairs were prepared plural sets, in parallel spaced apart from each other the plurality of sets of strip-like rectangular chip components, and that the surface and the target surface to be formed to the end surface electrode disposed so as to be perpendicular, a plurality of sets of strip At the same time forms the end face electrode of a metal thin film by a thin film technique to an end face of the Jo chip parts
When the height of the stacked rectangular chip components is parallel
Spacing between a plurality of arranged rectangular rectangular chip components
Angle of incidence (from the target surface
Is larger than 45 degrees . [0012] According to the present invention, rectangular chip component prepared plural sets a strip Chip two or more stacked pairs of parts comprising continuous, together the plurality of sets of strip-like rectangular chip components
A plurality of sets of short-circuit electrodes are arranged in parallel at intervals and arranged so that the surface on which the end face electrode is to be formed is perpendicular to the target surface.
Metallic thin film by thin film technology on the end face of book-shaped square chip component
When simultaneously forming the end face electrodes, stacked strips
Multiple sets of strips in which the height of square chip parts are arranged in parallel
So that they are larger than the distance between the square chip components
The incident angle (angle from the target surface) is 45 degrees
Since a large jig is used, it is possible to limit the thin-film metal material that enters from the target surface to the surface on which the end face electrode is to be formed, thereby forming an end face electrode having a uniform thickness and a resistor. To the protective film located on the top side of the
Unnecessary wraparound of thin film metal material can be prevented, and
A rectangular rectangular chip component consisting of a series of rectangular chip components
Prepare multiple sets of two or more stacked sets,
Place rectangular chip components parallel to each other at intervals
The surface on which the end electrode is to be formed is perpendicular to the target surface
With this arrangement, the end electrodes can be formed on both end surfaces of a plurality of sets of rectangular chip components at the same time, so that the number of steps can be reduced and the steps can be simplified and the cost can be reduced. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A method for forming an end face electrode of a rectangular chip component according to an embodiment of the present invention will be described below with reference to the drawings, taking a rectangular chip resistor as an example. FIG. 1 is a process chart of a method of forming an end face electrode of a rectangular chip resistor according to an embodiment of the present invention. In FIG. 1, reference numeral 40 denotes a strip-shaped rectangular chip resistor. As in the conventional case, an upper electrode 42 and a lower electrode (not shown) provided on the upper and lower sides of a substrate 41, respectively, and the upper electrode 42 And a protective film 43 provided so as to cover at least the resistor (not shown). Reference numeral 45 denotes a target surface of a metal thin film material, which has a Ni: Cr alloy in which Ni: Cr for forming an end face electrode described later is 50:50 wt%. When forming the end face electrodes on the above-described rectangular chip resistor 40, the surface of the target surface 45 and the surface on which the end electrodes of the rectangular chip resistor 40 are to be formed are arranged to be perpendicular to each other, The end face electrode is formed by a flat plate magnetron sputtering method. FIG. 2 is a perspective view showing a state in which a plurality of strip-shaped rectangular chip resistors are filled in a jig used for forming an end face electrode in one embodiment of the present invention. The jig 51 holds a plurality of strip-shaped square chip resistors 52 in a stacked state.
2 are provided so that the end face portions on both sides are exposed.
The strip-shaped rectangular chip resistors 52 stacked in the jig 51 are tightly overlapped and fixed so as not to shift. With the jig 51 filled in this way,
As shown in FIG. 1, an end face electrode made of a metal thin film is formed on the lower surface (bottom surface) of the jig 51 by sputtering from a vertical direction. In this state, the metal sheet material protrudes from the target surface in all directions upward, but the gap between the rectangular rectangular chip resistors 52 is increased by the weight of the rectangular rectangular chip resistors 52 stacked. Therefore, only the thickness of the protective film is generated, so that it is possible to prevent the thin film metal material from flowing to the upper surface (protective film) of the rectangular chip resistor. In addition, although the sputtering is also performed on the bottom surface of the jig 51, the other thin metal film is formed as the end face electrode, so that it is not formed excessively concentrated on the end face electrode as in the related art, and is stable and uniform. A simple end face electrode can be formed. Further, by mounting a dummy of the same size on the strip-shaped rectangular chip resistor 52 at the uppermost stage, it is possible to prevent the metal thin film material from being formed on the upper surface (protective film) (not shown). . FIG. 3A is a perspective view of a jig for holding a plurality of square chip resistors according to an embodiment of the present invention.
(B) is the same sectional view. In the case where the end face electrode is formed only by one jig 51 for forming the end face electrode shown in FIG. 2, when the size of the target face 45 is large to some extent, the target face 45
In some cases, the incident angle of the metal thin film material from the surface becomes nearly parallel. Therefore, it is necessary to forcibly regulate the incident angle. For this purpose, an end face electrode is formed using a jig 61 shown in FIG. As shown in the sectional view of FIG.
Height A in which a plurality of strip-shaped square chip resistors 62 are stacked
Sets of strip-shaped rectangular chip resistors 6 arranged in parallel
2 are greater than each other's spacing B, ie,
Incident angle (angle from target surface 45) is greater than 45 degrees
A large jig 61 was designed. Thereby, the film thickness of the end face electrode formed on the end face of the strip-shaped rectangular chip resistor 62 filled in the jig 61 can be made uniform, and the amount of wrap around to the upper surface portion can be limited. Was. In this case, as in FIG. 2, the rectangular chip resistor 6 at the uppermost stage is also used.
A dummy of the same size was placed on 2 so that the metal thin film material was not formed on the upper surface (protective film) (not shown). In this embodiment, the embodiment using the parallel plate magnetron sputtering method has been described. However, the sputtering method is not limited, and a carousel method may be used. Other thin film technologies (vacuum deposition, ion plating, thermal spraying, etc.) , Etc.), it goes without saying that the same effect can be obtained by arranging the target surface and the end face electrode formation surface vertically as in the present embodiment. The sputtering direction is not limited to the direction from the lower surface, and the same effect can be obtained if the sputtering direction is from a direction parallel to the surface on which the end face electrodes are formed. Further, a plurality of jigs 51 shown in FIG. 2 are used and arranged in parallel.
The same effect can be obtained even if the setting is made in the same manner. In this embodiment, the method for forming the end face electrodes of the square chip resistor has been described. However, the present invention is not limited to this, and the same effect can be obtained by applying the present invention to the method for forming the end face electrodes of other square chip components. According to the present invention as described above, according to the present invention, rectangular chip component prepared plural sets a strip Chip two or more stacked pairs of parts comprising continuous, the plurality of sets of strip-shaped rectangular distribution chip parts in parallel at a distance from one another, and as the surface and the target surface to be formed the edge electrode is perpendicular
And place thin film technology on the end faces of multiple sets of rectangular
When simultaneously forming the end face electrodes by metal thin film
The height of the stacked rectangular chip components is parallel.
The distance between the plural sets of rectangular rectangular chip parts
Angle (incident from the target surface)
(Angle) is larger than 45 degrees, so that the thin-film metal material entering from the target surface to the surface on which the end face electrode is formed can be limited, thereby forming the end face electrode having a uniform film thickness. Along with the top of the resistor
Unnecessary sneaking of the thin film metal material into the protective film is also prevented. <br/> Also , a rectangular shape with a series of square chip components
Prepare multiple sets of stacked two or more square chip parts
Then, the plural sets of strip-shaped rectangular chip parts are spaced from each other.
Parallel to the surface where the end face electrode is to be formed
Since the electrodes are arranged perpendicular to the contact surface, it is possible to simultaneously form end electrodes on both end surfaces of a plurality of sets of rectangular chip components, thereby reducing man-hours and simplifying the process and reducing costs. It has an excellent effect that it can be obtained.

【図面の簡単な説明】 【図1】本発明の一実施例における角形チップ抵抗器の
端面電極形成方法の工程図 【図2】同要部である端面電極形成用治具に短冊状角形
チップ抵抗器を充填した状態を示す斜視図 【図3】(a)同要部である連結した端面電極形成用治
具に短冊状角形チップ抵抗器を充填した状態を示す斜視
図 (b)同断面図 【図4】(a)角形チップ抵抗器が連なってなる短冊状
角形チップ抵抗器の斜視図 (b)同A−A断面図 【図5】従来の角形チップ抵抗器の端面電極形成方法の
工程図 【図6】同角形チップ抵抗器の端面電極形成方法の課題
を説明する斜視図 【符号の説明】 40 短冊状角形チップ抵抗器 45 ターゲット面
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a process diagram of a method of forming an end face electrode of a square chip resistor according to one embodiment of the present invention. FIG. FIG. 3 (a) is a perspective view showing a state in which a strip-shaped rectangular chip resistor is filled in a connected end face electrode forming jig which is a main part of the same; FIG. FIG. 4 (a) is a perspective view of a strip-shaped rectangular chip resistor in which rectangular chip resistors are connected, and FIG. 4 (b) is a cross-sectional view taken along the line AA. FIG. 5 shows a conventional method for forming an end face electrode of a rectangular chip resistor. Process drawing [FIG. 6] A perspective view for explaining a problem of a method of forming an end face electrode of a square chip resistor [Description of symbols] 40 Strip-shaped square chip resistor 45 Target surface

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平7−86012(JP,A) 特開 平6−204100(JP,A) 特開 平3−180016(JP,A) 実開 昭59−171303(JP,U) (58)調査した分野(Int.Cl.7,DB名) H01C 7/00 - 17/30 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-7-86012 (JP, A) JP-A-6-204100 (JP, A) JP-A-3-180016 (JP, A) 171303 (JP, U) (58) Field surveyed (Int. Cl. 7 , DB name) H01C 7/ 00-17/30

Claims (1)

(57)【特許請求の範囲】 【請求項1】 角形チップ部品が連なってなる短冊状角
形チップ部品を2本以上積み重ねた組を複数組準備し、
この複数組の短冊状角形チップ部品を互いに間隔をおい
て平行に、かつ端面電極を形成したい面とターゲット面
とが垂直になるように配置して、複数組の短冊状角形チ
ップ部品の端面に薄膜技術により金属薄膜による端面電
極を同時に形成するとき、積み重ねた短冊状角形チップ
部品の高さが平行に配置された複数組の短冊状角形チッ
プ部品の互いの間隔よりも大きくなるように、入射角度
(ターゲット面からの角度)が45度より大きい治具を
用いた角形チップ部品の端面電極形成方法。
(57) [Claims 1] A plurality of sets in which two or more strip-shaped rectangular chip parts in which rectangular chip parts are connected are prepared.
The plurality of sets of rectangular chip parts are spaced from each other.
In parallel, and arranged so that the surface on which the end surface electrode is to be formed and the target surface are perpendicular to each other, when simultaneously forming the end surface electrodes of a metal thin film by the thin film technology on the end surfaces of a plurality of sets of rectangular chip components , Stacked rectangular square chips
Multiple sets of rectangular rectangular chips with component heights arranged in parallel
Angle of incidence so that the distance between
A jig whose (angle from the target surface) is larger than 45 degrees
A method for forming an end face electrode of a square chip component used .
JP21724395A 1995-08-25 1995-08-25 Method for forming edge electrode of square chip component Expired - Fee Related JP3473205B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21724395A JP3473205B2 (en) 1995-08-25 1995-08-25 Method for forming edge electrode of square chip component

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21724395A JP3473205B2 (en) 1995-08-25 1995-08-25 Method for forming edge electrode of square chip component

Publications (2)

Publication Number Publication Date
JPH0963819A JPH0963819A (en) 1997-03-07
JP3473205B2 true JP3473205B2 (en) 2003-12-02

Family

ID=16701102

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21724395A Expired - Fee Related JP3473205B2 (en) 1995-08-25 1995-08-25 Method for forming edge electrode of square chip component

Country Status (1)

Country Link
JP (1) JP3473205B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5115968B2 (en) * 2007-12-26 2013-01-09 コーア株式会社 Chip resistor manufacturing method and chip resistor

Also Published As

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JPH0963819A (en) 1997-03-07

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