JP3781435B2 - 弾性境界波デバイス及びその製造方法 - Google Patents

弾性境界波デバイス及びその製造方法 Download PDF

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Publication number
JP3781435B2
JP3781435B2 JP54792098A JP54792098A JP3781435B2 JP 3781435 B2 JP3781435 B2 JP 3781435B2 JP 54792098 A JP54792098 A JP 54792098A JP 54792098 A JP54792098 A JP 54792098A JP 3781435 B2 JP3781435 B2 JP 3781435B2
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Japan
Prior art keywords
electrode
substrate
acoustic wave
boundary acoustic
wave device
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Expired - Lifetime
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JP54792098A
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Japanese (ja)
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JPWO1998051011A1 (ja
Inventor
直之 三島
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Toshiba Corp
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Toshiba Corp
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/0222—Details of interface-acoustic, boundary, pseudo-acoustic or Stonely wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP54792098A 1997-05-08 1998-05-06 弾性境界波デバイス及びその製造方法 Expired - Lifetime JP3781435B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP11840597 1997-05-08
JP9-118405 1997-05-08
PCT/JP1998/002008 WO1998051011A1 (fr) 1997-05-08 1998-05-06 Dispositif a ondes limites elastiques et son procede de fabrication

Publications (2)

Publication Number Publication Date
JPWO1998051011A1 JPWO1998051011A1 (ja) 1999-10-05
JP3781435B2 true JP3781435B2 (ja) 2006-05-31

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JP54792098A Expired - Lifetime JP3781435B2 (ja) 1997-05-08 1998-05-06 弾性境界波デバイス及びその製造方法

Country Status (7)

Country Link
US (1) US6046656A (fr)
EP (1) EP0920129B1 (fr)
JP (1) JP3781435B2 (fr)
KR (1) KR100301322B1 (fr)
CN (1) CN100347953C (fr)
DE (1) DE69836719T2 (fr)
WO (1) WO1998051011A1 (fr)

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FR2799906B1 (fr) * 1999-10-15 2002-01-25 Pierre Tournois Filtre a ondes acoustiques d'interface notamment pour les liaisons sans fil
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JP3841053B2 (ja) * 2002-07-24 2006-11-01 株式会社村田製作所 弾性表面波装置及びその製造方法
JP3815424B2 (ja) * 2002-11-08 2006-08-30 株式会社村田製作所 弾性境界波装置
WO2004095699A1 (fr) * 2003-04-18 2004-11-04 Murata Manufacturing Co., Ltd. Dispositif a onde limite elastique
DE10325281B4 (de) * 2003-06-04 2018-05-17 Snaptrack, Inc. Elektroakustisches Bauelement und Verfahren zur Herstellung
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JP3894917B2 (ja) * 2003-11-12 2007-03-22 富士通メディアデバイス株式会社 弾性境界波デバイス及びその製造方法
WO2005060094A1 (fr) * 2003-12-16 2005-06-30 Murata Manufacturing Co., Ltd. Dispositif a onde limite acoustique
CN101964642A (zh) 2004-01-13 2011-02-02 株式会社村田制作所 边界声波装置
WO2005069486A1 (fr) 2004-01-19 2005-07-28 Murata Manufacturing Co., Ltd. Dispositif a onde limite acoustique
JPWO2005086345A1 (ja) * 2004-03-05 2008-01-24 株式会社村田製作所 弾性境界波装置
CN101741342A (zh) * 2004-03-29 2010-06-16 株式会社村田制作所 声界面波装置
JP4497159B2 (ja) * 2004-04-08 2010-07-07 株式会社村田製作所 弾性境界波フィルタ
DE102004045181B4 (de) * 2004-09-17 2016-02-04 Epcos Ag SAW-Bauelement mit reduziertem Temperaturgang und Verfahren zur Herstellung
US7683735B2 (en) * 2005-02-16 2010-03-23 Murata Manufacturing Co., Ltd. Balanced acoustic wave filter
JP4178328B2 (ja) * 2005-04-25 2008-11-12 株式会社村田製作所 弾性境界波装置
WO2006123518A1 (fr) * 2005-05-16 2006-11-23 Murata Manufacturing Co., Ltd. Dispositif a onde acoustique limitrophe
JP4466655B2 (ja) * 2005-05-20 2010-05-26 株式会社村田製作所 弾性境界波装置
JP2008235950A (ja) * 2005-05-26 2008-10-02 Murata Mfg Co Ltd 弾性境界波装置
US20100078795A1 (en) * 2005-07-01 2010-04-01 Koninklijke Philips Electronics, N.V. Electronic device
JP4001157B2 (ja) * 2005-07-22 2007-10-31 株式会社村田製作所 弾性境界波装置
RU2008122547A (ru) * 2005-11-07 2009-12-20 Айрм Ллк (Bm) Соединения и композиции как модуляторы арпп (активированных рецепторов пролифератора пероксисом)
DE102005055871A1 (de) * 2005-11-23 2007-05-24 Epcos Ag Elektroakustisches Bauelement
DE102005055870A1 (de) * 2005-11-23 2007-05-24 Epcos Ag Elektroakustisches Bauelement
JP4412286B2 (ja) * 2006-01-20 2010-02-10 セイコーエプソン株式会社 弾性表面波素子の製造方法
DE102006003850B4 (de) * 2006-01-26 2015-02-05 Epcos Ag Elektroakustisches Bauelement
WO2007099742A1 (fr) * 2006-03-02 2007-09-07 Murata Manufacturing Co., Ltd. Dispositif d'onde acoustique et procede de fabrication correspondant
ATE543254T1 (de) * 2006-04-06 2012-02-15 Murata Manufacturing Co Duplexer
DE102006019961B4 (de) * 2006-04-28 2008-01-10 Epcos Ag Elektroakustisches Bauelement
JP2008067289A (ja) 2006-09-11 2008-03-21 Fujitsu Media Device Kk 弾性波デバイスおよびフィルタ
JP4943787B2 (ja) * 2006-09-13 2012-05-30 太陽誘電株式会社 弾性波デバイス、共振器およびフィルタ
JP4917396B2 (ja) * 2006-09-25 2012-04-18 太陽誘電株式会社 フィルタおよび分波器
EP2104228A4 (fr) * 2006-12-25 2014-10-08 Murata Manufacturing Co Dispositif a onde limite elastique
JP4793450B2 (ja) * 2007-01-19 2011-10-12 株式会社村田製作所 弾性境界波装置の製造方法
DE102007012383B4 (de) * 2007-03-14 2011-12-29 Epcos Ag Mit geführten akustischen Volumenwellen arbeitendes Bauelement
WO2010032383A1 (fr) * 2008-09-22 2010-03-25 株式会社村田製作所 Dispositif d’onde limite élastique
JP2010130031A (ja) * 2008-11-25 2010-06-10 Panasonic Corp 弾性境界波素子と、これを用いた電子機器
WO2010122993A1 (fr) 2009-04-22 2010-10-28 株式会社村田製作所 Dispositif à onde interface élastique et procédé de fabrication de celui-ci
CN102484466A (zh) * 2009-09-11 2012-05-30 松下电器产业株式会社 弹性波元件与弹性波元件传感器
JP5724262B2 (ja) 2010-09-16 2015-05-27 株式会社村田製作所 電子部品
CN104716924B (zh) * 2013-12-11 2017-10-24 中国科学院苏州纳米技术与纳米仿生研究所 石墨烯谐振器及其制作方法
JP6335831B2 (ja) * 2015-04-16 2018-05-30 信越化学工業株式会社 接合基板の製造方法

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WO1998052279A1 (fr) * 1997-05-12 1998-11-19 Hitachi, Ltd. Dispositif a onde elastique

Also Published As

Publication number Publication date
EP0920129A1 (fr) 1999-06-02
DE69836719T2 (de) 2007-10-04
EP0920129A4 (fr) 2004-10-13
KR20000022521A (ko) 2000-04-25
WO1998051011A1 (fr) 1998-11-12
US6046656A (en) 2000-04-04
CN1225760A (zh) 1999-08-11
EP0920129B1 (fr) 2006-12-27
DE69836719D1 (de) 2007-02-08
KR100301322B1 (ko) 2001-09-22
CN100347953C (zh) 2007-11-07

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