JP3893671B2 - 基板欠陥検査装置 - Google Patents

基板欠陥検査装置 Download PDF

Info

Publication number: JP3893671B2
Authority: JP; Japan
Prior art keywords: substrate; optical system; inspected; axis; light receiving
Prior art date: 1997-06-16
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

JP17530297A

Other languages

English (en)

Japanese (ja)

Other versions

JPH116803A (ja

JPH116803A5 (2

Inventor

健雄大森

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Nikon Corp

Original Assignee

Nikon Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1997-06-16

Filing date

1997-06-16

Publication date

2007-03-14

1997-06-16 Application filed by Nikon Corp filed Critical Nikon Corp

1997-06-16 Priority to JP17530297A priority Critical patent/JP3893671B2/ja

1999-01-12 Publication of JPH116803A publication Critical patent/JPH116803A/ja

2005-04-21 Publication of JPH116803A5 publication Critical patent/JPH116803A5/ja

2007-03-14 Application granted granted Critical

2007-03-14 Publication of JP3893671B2 publication Critical patent/JP3893671B2/ja

2017-06-16 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

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Length Measuring Devices By Optical Means (AREA)
Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Testing Or Measuring Of Semiconductors Or The Like (AREA)

JP17530297A 1997-06-16 1997-06-16 基板欠陥検査装置 Expired - Lifetime JP3893671B2 (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP17530297A JP3893671B2 (ja)	1997-06-16	1997-06-16	基板欠陥検査装置

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP17530297A JP3893671B2 (ja)	1997-06-16	1997-06-16	基板欠陥検査装置

Publications (3)

Publication Number	Publication Date
JPH116803A JPH116803A (ja)	1999-01-12
JPH116803A5 JPH116803A5 (2)	2005-04-21
JP3893671B2 true JP3893671B2 (ja)	2007-03-14

Family

ID=15993731

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP17530297A Expired - Lifetime JP3893671B2 (ja)	1997-06-16	1997-06-16	基板欠陥検査装置

Country Status (1)

Country	Link
JP (1)	JP3893671B2 (2)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
AU4277501A (en)	2000-03-24	2001-10-03	Olympus Optical Co., Ltd.	Apparatus for detecting defect
JP2007170827A (ja) *	2005-12-19	2007-07-05	Toppan Printing Co Ltd	周期性パターンの欠陥検査装置
JP2013140187A (ja) *	2013-04-22	2013-07-18	Nikon Corp	検査装置
CN116819857A (zh) *	2023-08-22	2023-09-29	苏州默然光电科技有限公司	一种照明单元、视觉检测系统及其方法
US20260056473A1 (en) *	2024-08-23	2026-02-26	Kla Corporation	Catoptric System Using Scheimpflug Optics

1997
- 1997-06-16 JP JP17530297A patent/JP3893671B2/ja not_active Expired - Lifetime

Also Published As

Publication number	Publication date
JPH116803A (ja)	1999-01-12

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