JPH116803A5 - - Google Patents

Info

Publication number
JPH116803A5
JPH116803A5 JP1997175302A JP17530297A JPH116803A5 JP H116803 A5 JPH116803 A5 JP H116803A5 JP 1997175302 A JP1997175302 A JP 1997175302A JP 17530297 A JP17530297 A JP 17530297A JP H116803 A5 JPH116803 A5 JP H116803A5
Authority
JP
Japan
Prior art keywords
substrate
inspected
optical system
image processing
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997175302A
Other languages
English (en)
Japanese (ja)
Other versions
JP3893671B2 (ja
JPH116803A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP17530297A priority Critical patent/JP3893671B2/ja
Priority claimed from JP17530297A external-priority patent/JP3893671B2/ja
Publication of JPH116803A publication Critical patent/JPH116803A/ja
Publication of JPH116803A5 publication Critical patent/JPH116803A5/ja
Application granted granted Critical
Publication of JP3893671B2 publication Critical patent/JP3893671B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP17530297A 1997-06-16 1997-06-16 基板欠陥検査装置 Expired - Lifetime JP3893671B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17530297A JP3893671B2 (ja) 1997-06-16 1997-06-16 基板欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17530297A JP3893671B2 (ja) 1997-06-16 1997-06-16 基板欠陥検査装置

Publications (3)

Publication Number Publication Date
JPH116803A JPH116803A (ja) 1999-01-12
JPH116803A5 true JPH116803A5 (2) 2005-04-21
JP3893671B2 JP3893671B2 (ja) 2007-03-14

Family

ID=15993731

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17530297A Expired - Lifetime JP3893671B2 (ja) 1997-06-16 1997-06-16 基板欠陥検査装置

Country Status (1)

Country Link
JP (1) JP3893671B2 (2)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU4277501A (en) 2000-03-24 2001-10-03 Olympus Optical Co., Ltd. Apparatus for detecting defect
JP2007170827A (ja) * 2005-12-19 2007-07-05 Toppan Printing Co Ltd 周期性パターンの欠陥検査装置
JP2013140187A (ja) * 2013-04-22 2013-07-18 Nikon Corp 検査装置
CN116819857A (zh) * 2023-08-22 2023-09-29 苏州默然光电科技有限公司 一种照明单元、视觉检测系统及其方法
US20260056473A1 (en) * 2024-08-23 2026-02-26 Kla Corporation Catoptric System Using Scheimpflug Optics

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