JP6388623B2 - ｉｎ−ｓｉｔｕスペクトル工程監視 - Google Patents

ｉｎ−ｓｉｔｕスペクトル工程監視 Download PDF

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Publication number
JP6388623B2
JP6388623B2 JP2016152880A JP2016152880A JP6388623B2 JP 6388623 B2 JP6388623 B2 JP 6388623B2 JP 2016152880 A JP2016152880 A JP 2016152880A JP 2016152880 A JP2016152880 A JP 2016152880A JP 6388623 B2 JP6388623 B2 JP 6388623B2
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JP
Japan
Prior art keywords
probe
light
optical filter
outer housing
sealed outer
Prior art date
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Active
Application number
JP2016152880A
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English (en)
Japanese (ja)
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JP2017049233A (ja
Inventor
エフ キャッチング ベンジャミン
エフ キャッチング ベンジャミン
ケー フォン グンテン マーク
ケー フォン グンテン マーク
アール フルスカ カーチス
アール フルスカ カーチス
スミス パウラ
スミス パウラ
ジー クームス ポール
ジー クームス ポール
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Viavi Solutions Inc
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Viavi Solutions Inc
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Publication of JP2017049233A publication Critical patent/JP2017049233A/ja
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Publication of JP6388623B2 publication Critical patent/JP6388623B2/ja
Active legal-status Critical Current
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/027—Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0289—Field-of-view determination; Aiming or pointing of a spectrometer; Adjusting alignment; Encoding angular position; Size of measurement area; Position tracking
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0297—Constructional arrangements for removing other types of optical noise or for performing calibration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids
    • G01N21/8507—Probe photometers, i.e. with optical measuring part dipped into fluid sample
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1226—Interference filters
    • G01J2003/123—Indexed discrete filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1226—Interference filters
    • G01J2003/1234—Continuously variable IF [CVIF]; Wedge type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1226—Interference filters
    • G01J2003/1239—Interference filters and separate detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/062—LED's
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/068—Optics, miscellaneous

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2016152880A 2015-08-05 2016-08-03 ｉｎ−ｓｉｔｕスペクトル工程監視 Active JP6388623B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/819,179 US9945790B2 (en) 2015-08-05 2015-08-05 In-situ spectral process monitoring
US14/819,179 2015-08-05

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2018152709A Division JP7129849B2 (ja) 2015-08-05 2018-08-14 ｉｎ－ｓｉｔｕスペクトル工程監視

Publications (2)

Publication Number Publication Date
JP2017049233A JP2017049233A (ja) 2017-03-09
JP6388623B2 true JP6388623B2 (ja) 2018-09-12

Family

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JP2016152880A Active JP6388623B2 (ja) 2015-08-05 2016-08-03 ｉｎ−ｓｉｔｕスペクトル工程監視
JP2018152709A Active JP7129849B2 (ja) 2015-08-05 2018-08-14 ｉｎ－ｓｉｔｕスペクトル工程監視

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Country Status (6)

Country Link
US (2) US9945790B2 (fr)
EP (1) EP3128303B1 (fr)
JP (2) JP6388623B2 (fr)
KR (2) KR101885183B1 (fr)
CN (2) CN110702619B (fr)
CA (1) CA2938011C (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7129849B2 (ja) 2015-08-05 2022-09-02 ヴァイアヴィ・ソリューションズ・インコーポレイテッド ｉｎ－ｓｉｔｕスペクトル工程監視

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US10048127B2 (en) 2015-08-05 2018-08-14 Viavi Solutions Inc. Optical filter and spectrometer
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7129849B2 (ja) 2015-08-05 2022-09-02 ヴァイアヴィ・ソリューションズ・インコーポレイテッド ｉｎ－ｓｉｔｕスペクトル工程監視

Also Published As

Publication number Publication date
EP3128303A3 (fr) 2017-05-03
CA2938011C (fr) 2019-02-12
KR20170017797A (ko) 2017-02-15
CN106442337A (zh) 2017-02-22
EP3128303A2 (fr) 2017-02-08
JP7129849B2 (ja) 2022-09-02
CN110702619A (zh) 2020-01-17
US20170038305A1 (en) 2017-02-09
EP3128303B1 (fr) 2023-10-04
US20180231472A1 (en) 2018-08-16
KR101885183B1 (ko) 2018-08-03
CA2938011A1 (fr) 2017-02-05
JP2017049233A (ja) 2017-03-09
JP2018197760A (ja) 2018-12-13
KR102148360B1 (ko) 2020-08-26
CN106442337B (zh) 2019-11-08
US9945790B2 (en) 2018-04-17
KR20180089343A (ko) 2018-08-08
US10481100B2 (en) 2019-11-19
CN110702619B (zh) 2023-04-21

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