JP6646882B2 - メタルマスク用素材およびその製造方法 - Google Patents

メタルマスク用素材およびその製造方法 Download PDF

Info

Publication number: JP6646882B2
Authority: JP; Japan
Prior art keywords: metal mask; less; rolling; mask material; sample
Prior art date: 2016-08-31
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Active

Application number

JP2018537395A

Other languages

English (en)

Japanese (ja)

Other versions

JPWO2018043642A1 (ja

Inventor

章博大森

岡本　拓也

拓也岡本

恭之飯田

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Proterial Ltd

Original Assignee

Hitachi Metals Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2016-08-31

Filing date

2017-08-31

Publication date

2020-02-14

2017-08-31 Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd

2019-06-24 Publication of JPWO2018043642A1 publication Critical patent/JPWO2018043642A1/ja

2020-02-14 Application granted granted Critical

2020-02-14 Publication of JP6646882B2 publication Critical patent/JP6646882B2/ja

Status Active legal-status Critical Current

2037-08-31 Anticipated expiration legal-status Critical

Links

239000000463 material Substances 0.000 title claims description 94
239000002184 metal Substances 0.000 title claims description 64
229910052751 metal Inorganic materials 0.000 title claims description 64
238000004519 manufacturing process Methods 0.000 title claims description 22
238000005096 rolling process Methods 0.000 claims description 69
230000003746 surface roughness Effects 0.000 claims description 38
238000005097 cold rolling Methods 0.000 claims description 33
239000012535 impurity Substances 0.000 claims description 6
238000005530 etching Methods 0.000 description 38
235000019592 roughness Nutrition 0.000 description 11
238000000137 annealing Methods 0.000 description 10
238000000034 method Methods 0.000 description 10
229910045601 alloy Inorganic materials 0.000 description 8
239000000956 alloy Substances 0.000 description 8
230000000694 effects Effects 0.000 description 8
229910001030 Iron–nickel alloy Inorganic materials 0.000 description 7
239000003921 oil Substances 0.000 description 7
239000000203 mixture Substances 0.000 description 4
238000005498 polishing Methods 0.000 description 4
239000000126 substance Substances 0.000 description 4
238000010438 heat treatment Methods 0.000 description 3
238000005098 hot rolling Methods 0.000 description 3
238000005259 measurement Methods 0.000 description 3
239000010731 rolling oil Substances 0.000 description 3
229910000831 Steel Inorganic materials 0.000 description 2
230000015572 biosynthetic process Effects 0.000 description 2
238000005242 forging Methods 0.000 description 2
238000002844 melting Methods 0.000 description 2
230000008018 melting Effects 0.000 description 2
239000010959 steel Substances 0.000 description 2
229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
229910001315 Tool steel Inorganic materials 0.000 description 1
238000002441 X-ray diffraction Methods 0.000 description 1
238000004873 anchoring Methods 0.000 description 1
230000000052 comparative effect Effects 0.000 description 1
239000013078 crystal Substances 0.000 description 1
238000005520 cutting process Methods 0.000 description 1
230000007547 defect Effects 0.000 description 1
238000011156 evaluation Methods 0.000 description 1
230000001747 exhibiting effect Effects 0.000 description 1
230000001771 impaired effect Effects 0.000 description 1
RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
238000000691 measurement method Methods 0.000 description 1
238000000059 patterning Methods 0.000 description 1
238000003825 pressing Methods 0.000 description 1
238000012545 processing Methods 0.000 description 1
238000005204 segregation Methods 0.000 description 1
238000005507 spraying Methods 0.000 description 1
239000000758 substrate Substances 0.000 description 1
238000012360 testing method Methods 0.000 description 1
235000019587 texture Nutrition 0.000 description 1
238000009966 trimming Methods 0.000 description 1
238000007740 vapor deposition Methods 0.000 description 1

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21B—ROLLING OF METAL
- B21B1/00—Metal-rolling methods or mills for making semi-finished products of solid or profiled cross-section; Sequence of operations in milling trains; Layout of rolling-mill plant, e.g. grouping of stands; Succession of passes or of sectional pass alternations
- B21B1/22—Metal-rolling methods or mills for making semi-finished products of solid or profiled cross-section; Sequence of operations in milling trains; Layout of rolling-mill plant, e.g. grouping of stands; Succession of passes or of sectional pass alternations for rolling plates, strips, bands or sheets of indefinite length
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21B—ROLLING OF METAL
- B21B3/00—Rolling materials of special alloys so far as the composition of the alloy requires or permits special rolling methods or sequences ; Rolling of aluminium, copper, zinc or other non-ferrous metals
- B21B3/02—Rolling special iron alloys, e.g. stainless steel
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D6/00—Heat treatment of ferrous alloys
- C21D6/001—Heat treatment of ferrous alloys containing Ni
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
- C21D9/0068—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for particular articles not mentioned below
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
- C21D9/46—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for sheet metals
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C19/00—Alloys based on nickel or cobalt
- C22C19/03—Alloys based on nickel or cobalt based on nickel
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/08—Ferrous alloys, e.g. steel alloys containing nickel
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
Materials Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Crystallography & Structural Chemistry (AREA)
Thermal Sciences (AREA)
Physics & Mathematics (AREA)
Heat Treatment Of Sheet Steel (AREA)
Metal Rolling (AREA)
ing And Chemical Polishing (AREA)
Electrodes For Cathode-Ray Tubes (AREA)

JP2018537395A 2016-08-31 2017-08-31 メタルマスク用素材およびその製造方法 Active JP6646882B2 (ja)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
JP2016169881		2016-08-31
JP2016169881		2016-08-31
PCT/JP2017/031349 WO2018043642A1 (fr)	2016-08-31	2017-08-31	Matériau pour masque métallique, et procédé de fabrication de celui-ci

Publications (2)

Publication Number	Publication Date
JPWO2018043642A1 JPWO2018043642A1 (ja)	2019-06-24
JP6646882B2 true JP6646882B2 (ja)	2020-02-14

Family

ID=61301875

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP2018537395A Active JP6646882B2 (ja)	2016-08-31	2017-08-31	メタルマスク用素材およびその製造方法

Country Status (5)

Country	Link
EP (1)	EP3508285B1 (fr)
JP (1)	JP6646882B2 (fr)
KR (1)	KR102164912B1 (fr)
CN (1)	CN109641248B (fr)
WO (1)	WO2018043642A1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN114899345B (zh) *	2017-09-07	2026-04-24	Lg伊诺特有限公司	用于制造有机发光二极管沉积掩模的方法
EP3712295A4 (fr)	2017-11-14	2021-12-15	Dai Nippon Printing Co., Ltd.	Plaque métallique pour produire des masques de dépôt en phase vapeur, procédé d'inspection de plaques métalliques, procédé de production de plaques métalliques, masque de dépôt en phase vapeur, dispositif de masque de dépôt en phase vapeur et procédé de production de masques de dépôt en phase vapeur
US12037673B2 (en) *	2018-09-27	2024-07-16	Nippon Steel Chemical & Material Co., Ltd.	Metal mask material, method for manufacturing same, and metal mask
DE202019006014U1 (de)	2018-11-13	2024-01-25	Dai Nippon Printing Co., Ltd.	Metallplatte zur Herstellung von Dampfphasenabscheidungsmasken
KR20210042026A (ko) *	2019-10-08	2021-04-16	다이니폰 인사츠 가부시키가이샤	증착 마스크를 제조하기 위한 금속판, 금속판의 제조 방법, 증착 마스크 및 증착 마스크의 제조 방법
JP6888128B1 (ja) *	2020-01-30	2021-06-16	凸版印刷株式会社	蒸着マスク
JP7721257B2 (ja) *	2020-06-08	2025-08-12	浜松ホトニクス株式会社	加工物の製造方法、加工物、及び、加工装置
JP2024143391A (ja) *	2023-03-30	2024-10-11	Ｔｏｐｐａｎホールディングス株式会社	メタルマスク用基材、メタルマスク用基材の製造方法、および、メタルマスクの製造方法
JP2026052793A (ja) *	2024-09-12	2026-03-25	Ｔｏｐｐａｎホールディングス株式会社	メタルマスク、およびメタルマスクの製造方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH0826437B2 (ja) *	1990-08-22	1996-03-13	日本鋼管株式会社	シャドウマスク用Ｆｅ―Ｎｉ合金薄板およびその製造方法
JP2842022B2 (ja) *	1992-02-13	1998-12-24	日本鋼管株式会社	Ｆｅ−Ｎｉ系シャドウマスク用薄板およびその製造方法
JP3128422B2 (ja) *	1994-03-14	2001-01-29	新日本製鐵株式会社	シャドウマスク用Ｆｅ−Ｎｉ合金薄板およびその製造方法
JP3487471B2 (ja) *	1996-01-30	2004-01-19	日立金属株式会社	エッチング加工性に優れたＦｅ−Ｎｉ系合金薄板
JPH09262603A (ja) *	1996-03-28	1997-10-07	Nippon Yakin Kogyo Co Ltd	シャドウマスク用金属板およびその製造方法
JP2002294407A (ja) *	2001-03-30	2002-10-09	Nippon Mining & Metals Co Ltd	シャドウマスク材用表面高清浄度材
JP2005144466A (ja) *	2003-11-12	2005-06-09	Jfe Steel Kk	エッチング性に優れたシャドウマスク用Ｆｅ−Ｎｉ系合金薄板の製造方法
JP5294072B2 (ja) *	2009-03-18	2013-09-18	日立金属株式会社	エッチング加工用素材の製造方法及びエッチング加工用素材
JP5721691B2 (ja)	2012-11-20	2015-05-20	Jx日鉱日石金属株式会社	メタルマスク材料及びメタルマスク
JP5850185B2 (ja) *	2013-02-01	2016-02-03	新日鐵住金株式会社	対カーボン接触導電性と耐久性に優れた燃料電池セパレータ用チタン材又はチタン合金材、これを用いた燃料電池セパレータ、及び、燃料電池
JP2015193871A (ja) *	2014-03-31	2015-11-05	日立金属株式会社	Ｆｅ−Ｎｉ系合金薄板及びその製造方法
JP6628082B2 (ja) *	2015-01-20	2020-01-08	日立金属株式会社	Ｆｅ−Ｎｉ系合金薄板の製造方法

2017
- 2017-08-31 EP EP17846646.2A patent/EP3508285B1/fr active Active
- 2017-08-31 WO PCT/JP2017/031349 patent/WO2018043642A1/fr not_active Ceased
- 2017-08-31 JP JP2018537395A patent/JP6646882B2/ja active Active
- 2017-08-31 KR KR1020197005481A patent/KR102164912B1/ko active Active
- 2017-08-31 CN CN201780052365.0A patent/CN109641248B/zh active Active

Also Published As

Publication number	Publication date
CN109641248A (zh)	2019-04-16
JPWO2018043642A1 (ja)	2019-06-24
EP3508285A4 (fr)	2020-05-13
KR102164912B1 (ko)	2020-10-13
CN109641248B (zh)	2021-04-06
KR20190030754A (ko)	2019-03-22
EP3508285B1 (fr)	2021-09-29
EP3508285A1 (fr)	2019-07-10
WO2018043642A1 (fr)	2018-03-08

Legal Events

Date	Code	Title	Description
2019-03-12	A621	Written request for application examination	Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190312
2019-12-05	TRDD	Decision of grant or rejection written
2019-12-12	A01	Written decision to grant a patent or to grant a registration (utility model)	Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20191212
2020-01-16	A61	First payment of annual fees (during grant procedure)	Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20191225
2020-01-16	R150	Certificate of patent or registration of utility model	Ref document number: 6646882 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150
2023-07-21	S531	Written request for registration of change of domicile	Free format text: JAPANESE INTERMEDIATE CODE: R313531
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Publication	Publication Date	Title
JP6646882B2 (ja)	2020-02-14	メタルマスク用素材およびその製造方法
JP5294072B2 (ja)	2013-09-18	エッチング加工用素材の製造方法及びエッチング加工用素材
JP2018178197A (ja)	2018-11-15	無方向性電磁鋼板及びその製造方法
JP7156279B2 (ja)	2022-10-19	メタルマスク用薄板の製造方法及びメタルマスク用薄板
JP6598007B2 (ja)	2019-10-30	Ｆｅ−Ｎｉ系合金薄板の製造方法
CN108713067B (zh)	2020-11-20	马氏体系不锈钢箔及其制造方法
JP6807038B2 (ja)	2021-01-06	メタルマスク用素材およびその製造方法
JP7532826B2 (ja)	2024-08-14	Ｆｅ－Ｎｉ系合金薄板の製造方法
JP6424875B2 (ja)	2018-11-21	方向性電磁鋼板およびその製造方法
JP2018178198A (ja)	2018-11-15	無方向性電磁鋼板及びその製造方法
JP2018178196A (ja)	2018-11-15	無方向性電磁鋼板及びその製造方法
CN103442818B (zh)	2016-01-06	轧制铜箔
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JP3562492B2 (ja)	2004-09-08	フォトエッチング加工用ステンレス鋼板およびその製造方法
WO2025100438A1 (fr)	2025-05-15	Procédé de production d'une feuille mince d'alliage à base de fe-ni, et feuille mince d'alliage à base de fe-ni
JP5928396B2 (ja)	2016-06-01	冷間圧延用高炭素熱延鋼板の製造方法
JP5943105B2 (ja)	2016-06-29	鋼板およびその製造方法
JP2018062684A (ja)	2018-04-19	Ｆｅ−Ｎｉ系合金薄板の製造方法及びＦｅ−Ｎｉ系合金薄板
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