JPH01100093U - - Google Patents
Info
- Publication number
- JPH01100093U JPH01100093U JP19493387U JP19493387U JPH01100093U JP H01100093 U JPH01100093 U JP H01100093U JP 19493387 U JP19493387 U JP 19493387U JP 19493387 U JP19493387 U JP 19493387U JP H01100093 U JPH01100093 U JP H01100093U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- pillar
- clamp
- lid
- flange
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003795 desorption Methods 0.000 claims 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Description
第１図〜第３図は、本考案の実施例を示す斜視
図であり、第４図は、従来の縦型減圧気相成長装
置用反応管を示す断面図である。
図中、２１……反応管、２２……反応管上端フ
ランジ部、２４……蓋部、２５……反応管下端フ
ランジ部、２６……排気管接続部、３０……反応
管移動台、３１……案内レール、３２……柱、３
３……反応管保持クランプ、３９……角形移動パ
イプ。
1 to 3 are perspective views showing an embodiment of the present invention, and FIG. 4 is a sectional view showing a conventional reaction tube for a vertical reduced pressure vapor phase growth apparatus. In the figure, 21... Reaction tube, 22... Reaction tube upper end flange, 24... Lid, 25... Reaction tube lower end flange, 26... Exhaust pipe connection, 30... Reaction tube moving stage, 31 ... Guide rail, 32 ... Pillar, 3
3...Reaction tube holding clamp, 39...Square moving pipe.
Claims (1)
管を上昇させた時蓋部に密着し得るようにした反
応管上端フランジ部と、前記反応管を載せて移動
し得るようにした移動台に立設した柱と、該柱の
上端に固定したクランプとを具備してなり、反応
管脱着の際は、前記クランプで反応管を保持する
ようにしたことを特徴とする反応管脱着装置。 A reaction tube configured to be able to move up and down, a flange at the upper end of the reaction tube that can be brought into close contact with the lid when the reaction tube is raised, and a moving platform that can be moved on which the reaction tube is placed. 1. A reaction tube desorption device comprising a pillar installed upright and a clamp fixed to the upper end of the pillar, the reaction tube being held by the clamp when the reaction tube is being demounted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19493387U JPH01100093U (en) | 1987-12-24 | 1987-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19493387U JPH01100093U (en) | 1987-12-24 | 1987-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01100093U true JPH01100093U (en) | 1989-07-05 |
Family
ID=31485636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19493387U Pending JPH01100093U (en) | 1987-12-24 | 1987-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01100093U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04163917A (en) * | 1990-10-29 | 1992-06-09 | Fujitsu Ltd | Semiconductor producing equipment |
| JP2008251927A (en) * | 2007-03-30 | 2008-10-16 | Koyo Thermo System Kk | Heat treatment container |
-
1987
- 1987-12-24 JP JP19493387U patent/JPH01100093U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04163917A (en) * | 1990-10-29 | 1992-06-09 | Fujitsu Ltd | Semiconductor producing equipment |
| JP2008251927A (en) * | 2007-03-30 | 2008-10-16 | Koyo Thermo System Kk | Heat treatment container |