JPH01102738A - Production of magnetic disk - Google Patents
Production of magnetic diskInfo
- Publication number
- JPH01102738A JPH01102738A JP26254287A JP26254287A JPH01102738A JP H01102738 A JPH01102738 A JP H01102738A JP 26254287 A JP26254287 A JP 26254287A JP 26254287 A JP26254287 A JP 26254287A JP H01102738 A JPH01102738 A JP H01102738A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic disk
- magnetic
- slider
- substrate
- hard film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明はヘッドスライダとの吸着が防止できる磁気デ
ィスクのslI造方決方法するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention provides a method for manufacturing an SLI magnetic disk that can prevent adhesion to a head slider.
コンピュータの外部記憶装置の一つである。固定磁気デ
ィスク装置の主構成部は磁気ディスクと6[ヘントスラ
イダで構成されている。It is one of the external storage devices for computers. The main components of the fixed magnetic disk drive are composed of a magnetic disk and a 6[Hent slider].
第3図にその概念図を示す。(1)は磁気ディスク、(
8) d 11気ヘッドスライダ%(9)はサスベンシ
ョ/。Figure 3 shows its conceptual diagram. (1) is a magnetic disk, (
8) d 11ki head slider% (9) is suspension shock/.
αQはスピンドル%01)は回転軸である。αQ is the spindle %01) is the rotation axis.
磁気ディスク(1)とは記録情報が書かれて、それを保
持する媒体である。磁気ヘントスライダ(8)とは磁気
ディスクに記録情報を書き込んだシ、読み出し7tlt
)する装置であり、サスベアジョン(9)とは磁気ヘッ
ドスライダを磁気ディスクに押付けるバネである。スピ
ンドルα0とは磁気ディスクを矢印方向に回転させる装
置である。A magnetic disk (1) is a medium on which recorded information is written and holds it. The magnetic hent slider (8) is a 7tlt readout device that writes recorded information on a magnetic disk.
), and the suspension (9) is a spring that presses the magnetic head slider against the magnetic disk. The spindle α0 is a device that rotates the magnetic disk in the direction of the arrow.
固定磁気ディスク装置において、磁気ディスク(1)に
記録情報t−4F@込んだり、読み出し比すする場合は
、矢印方向に磁気ディスクを高速回転C例えば3600
rpm )させる。この回転により生じる空気流で、磁
気へ7ドスライダ(8)は空気軸受の原理で、磁気ディ
スク表面エリサブばクロンのすきまを保って浮上する。In a fixed magnetic disk device, when recording information t-4F@@ to the magnetic disk (1) or reading it from the magnetic disk (1), the magnetic disk is rotated at high speed in the direction of the arrow C, for example, 3600 yen.
rpm). Due to the airflow generated by this rotation, the magnetic slider (8) floats while maintaining the gap between the magnetic disk surfaces and the magnetic disk surface on the basis of the air bearing principle.
すなわち、サスペンション(9)の押付力と空気流の押
出力がつす合って、磁気ヘントスライダ(8)は安定浮
上する。That is, the pressing force of the suspension (9) and the pushing force of the air flow balance each other, and the magnetic hent slider (8) floats stably.
−万、磁気ディスク装置を使用しない時は、スピンドル
α1の回転は停止し、磁気ヘントスライダ(8)はサス
ペン7ヨン(9)により、押し付けられ磁気ディスク上
に接触した状態となる。- When the magnetic disk device is not used, the rotation of the spindle α1 is stopped, and the magnetic hent slider (8) is pressed by the suspension 7 (9) and comes into contact with the magnetic disk.
第4図と第5図は、各々第3図における磁気ヘントスラ
イダ付近の拡大図である。第4図は磁気ディスク装置の
稼動時〔磁気ディスクは回転している)、第5図は磁気
ディスク装置の停止時(磁気ディスクは停止している)
%をそれぞれ示す。4 and 5 are enlarged views of the vicinity of the magnetic hent slider in FIG. 3, respectively. Figure 4 shows when the magnetic disk device is operating (the magnetic disk is rotating), and Figure 5 shows when the magnetic disk device is stopped (the magnetic disk is stopped).
% is shown respectively.
従来の磁気ディスク装置は以上のように構成されており
、近年、高密度化の要求が高まるにつれて、磁気へ7ド
スライダの浮上すきまの微小化が進められてきている。Conventional magnetic disk drives are constructed as described above, and in recent years, as the demand for higher density has increased, progress has been made in miniaturizing the flying clearance of the magnetic slider.
これに伴い必然的に磁気ディスクと磁気ヘントスライダ
の表面精度の向上がなされてさた。特に磁気ディスクの
表面粗さの向上は著しく、従来の粗さ一λx 2000
Aが現在ではRmax100八近くになってきている。This has inevitably led to improvements in the surface precision of magnetic disks and magnetic Hent sliders. In particular, the improvement in surface roughness of magnetic disks is remarkable, with the conventional roughness - λx 2000
A is now approaching Rmax 1008.
ところが1表面粗度の同上に伴って、別の問題が新たに
生じてきた。それは磁気ディスク装置が停止している時
に、磁気ヘントスライダと磁気ディスクが吸着するとい
う問題である。吸着が生じると磁気ディスクが回転を始
めても磁気へ7ドスライダが浮上できず、磁気へ7ドス
ライダが破損する。仮に吸着が解除されても、磁気ディ
スクと磁気ヘントスライダの間の動摩擦係数が大きいた
め、磁気ディスクが回転を始める時や、停止する時に、
磁気ヘントスライダが磁気ディスク表面に傷七付けると
いう問題があった。However, with the increase in surface roughness, another problem has arisen. The problem is that the magnetic hent slider and the magnetic disk stick together when the magnetic disk drive is stopped. If adhesion occurs, the magnetic slider will not be able to levitate even if the magnetic disk starts rotating, and the magnetic slider will be damaged. Even if the adsorption is released, the coefficient of dynamic friction between the magnetic disk and the magnetic hent slider is large, so when the magnetic disk starts rotating or stops,
There was a problem in that the magnetic hent slider scratched the surface of the magnetic disk.
吸着を・軽減する方法として、最も効果があるのは、磁
気ディスクの表面に凹凸を付け、ある程度表面粗さを大
きくする方法である。凹凸形成の方法に関しては、いく
つかの解決方法が試みられてきたが、いずれも不都合な
点があった。例えば。The most effective method for reducing/reducing adhesion is to create irregularities on the surface of the magnetic disk to increase the surface roughness to some extent. Several solutions have been attempted for forming unevenness, but all of them have disadvantages. for example.
特開昭61−230618号公報に示されている方法や
、ま之一般に多く用いられている方法として基板にテク
スチャーを付ける方法がある。この時の磁気ディスクの
断面図を第6図に示す。図において、(1)はり−市等
の基材、(2)は硬質膜、(3)は磁気記録媒体、(4
)は保護膜である。基材(1)上に硬質膜(21を成膜
したものは一般に「基板」と呼ばれている。基板にテク
スチャーを付ける方法は、基板を回転させ、その上に研
磨テープ等を押し付けることにより、基板上に同心円状
の溝を付ける方法である。(磁気ディスクは基板上に磁
気記録媒体(3)、保護膜(4)ヲスパンタなどで成膜
し完成させる)この方法は吸着の防止にはある程度の効
果があるものの、凹凸形状を任意に操作することができ
な(ハ、同一ディスク面内で凹凸のばらつきが生じる。There is a method disclosed in Japanese Patent Application Laid-Open No. 61-230618, and a method which is commonly used is a method of adding texture to a substrate. A cross-sectional view of the magnetic disk at this time is shown in FIG. In the figure, (1) a base material such as a beam, (2) a hard film, (3) a magnetic recording medium, and (4
) is a protective film. A hard film (21) formed on a base material (1) is generally called a "substrate". Texture can be applied to a substrate by rotating the substrate and pressing an abrasive tape or the like onto it. , is a method of forming concentric grooves on the substrate. (A magnetic disk is completed by forming a magnetic recording medium (3) and a protective film (4) on the substrate using a spunter.) This method is effective in preventing adsorption. Although it is effective to some extent, it is not possible to arbitrarily manipulate the shape of the concavities and convexities (c) variations in the concavities and convexities occur within the same disk surface.
ディスクごとに凹凸形状にばらつきが生じ。There are variations in the uneven shape of each disc.
再現性がない、微妙な加工テクニックを要し、加工時間
が長いなどの問題点かあつ之。Problems include lack of reproducibility, the need for delicate processing techniques, and long processing times.
この発明は上記のような問題点を解決するtめになされ
tもので、安価に、早く、再現性良く、任意形状の凹凸
を磁気ディスク用基板上にjte成することのできる磁
気ディスクの製造方法を得ることを目的とする。The present invention has been made to solve the above-mentioned problems, and provides a method for manufacturing a magnetic disk that can form irregularities of any shape on a magnetic disk substrate inexpensively, quickly, and with good reproducibility. The purpose is to obtain a method.
この発明に係る磁気ディスクの製造方法に、基板上に形
成され之硬質膜表面にスタンプ金押圧し、上記スタンプ
の凹凸形状を上記硬質膜上に転写する工程、及び凹凸形
状の転写された硬質膜上に磁気記録媒体を成膜する工程
t−施すものである。A method for manufacturing a magnetic disk according to the present invention includes a step of pressing a stamp onto the surface of a hard film formed on a substrate and transferring the uneven shape of the stamp onto the hard film, and a step of transferring the uneven shape of the stamp onto the hard film. A step of forming a magnetic recording medium thereon is performed.
この発明によれば、磁気ディスク用基板の凹凸はスタン
プの凹凸を転写することで得られる。ゆえに、短時間に
、簡単に、再現性良く、凹凸を形成することができる。According to this invention, the unevenness of the magnetic disk substrate is obtained by transferring the unevenness of the stamp. Therefore, unevenness can be easily formed in a short time with good reproducibility.
そのうえ、スタンプの凹凸t−変えることにより、凹凸
の太キ姑1分布、ピンチh IFe状などt任意に設定
し、凹凸を形成することができる。Moreover, by changing the unevenness t of the stamp, it is possible to form unevenness by arbitrarily setting the unevenness such as a wide distribution, a pinch h IFe shape, etc.
〔実施例〕
第1図にこの発明の一実施例に係る磁気ディスクを示す
断面図である。図<2いて、(11は例えばA!−重合
金の基材、(2)に例えばN1−Pメツキ膜の硬質膜、
+3)vよ例えばスパッタによる+3−Fe20゜の磁
気記録媒体、(4)は例えばCの保護膜である。[Embodiment] FIG. 1 is a sectional view showing a magnetic disk according to an embodiment of the present invention. In Figure 2, (11 is, for example, A! - a base material of heavy alloy, (2) is, for example, a hard film of N1-P plating film,
+3) v is a +3-Fe20° magnetic recording medium formed by sputtering, for example, and (4) is a protective film of, for example, C.
基材m上に硬質膜(21を形成したものに、通常「基板
」と呼ばれ市販妊れている。この基板?用いて以下の様
に凹凸を形成し之。A hard film (21) formed on a base material m is usually called a "substrate" and is commercially available.Using this substrate, irregularities are formed as follows.
第2図はこの発明の一実施例に係る磁気ディスクの製造
工程を示す断面図であり1図において。FIG. 2 is a sectional view showing the manufacturing process of a magnetic disk according to an embodiment of the present invention, which is similar to FIG.
(5)は基板、(6)iセクィックスのスタンプである
。(5) is a substrate, and (6) is an iSecix stamp.
スタンプの表面には表面粗さRmax 500 Aの凹
凸を設けである。The surface of the stamp is provided with irregularities having a surface roughness of Rmax 500 A.
上下のスタンプ(6)の間に基板(5)を置き、基板(
51をブレスし、磁気ディスク用の基板を得た。その後
、スパツタによシaFe20@よりなる磁気記録媒体(
3)を成膜し、Cの保護膜(4)紫成膜し、実際の磁気
ディスクとして使用した。Place the board (5) between the upper and lower stamps (6), and
51 was pressed to obtain a substrate for a magnetic disk. After that, a magnetic recording medium made of aFe20@ was sputtered (
3) was formed, and a protective film (4) of C was formed into a purple film, which was used as an actual magnetic disk.
上記磁気ディスクの表面粗さは約45OAで均一な凹凸
が観察された。The surface roughness of the magnetic disk was approximately 45 OA, and uniform unevenness was observed.
以上のように、この発明によれば基板上に形成されt硬
質膜表面にスタンプを押圧し、上記スタンプの凹凸形状
を上記硬質膜上に転写し、この凹凸形状の転写された硬
質膜上に磁気記録媒体を成膜するよう、にし友ので早く
、安価VC1再現性良く凹凸を形成することができる。As described above, according to the present invention, a stamp is pressed onto the surface of a hard film formed on a substrate, the uneven shape of the stamp is transferred onto the hard film, and the uneven shape is transferred onto the hard film. As in the case of forming a film on a magnetic recording medium, unevenness can be formed quickly, inexpensively, and with good reproducibility using VC1.
ざらに、スタンプの凹凸を変えることで、凹凸の大きさ
1分布、ピッチ、形状を任意に設定し、均一な凹凸を形
成できる効果がある。Roughly speaking, by changing the unevenness of the stamp, the size distribution, pitch, and shape of the unevenness can be arbitrarily set, and uniform unevenness can be formed.
第1図はこの発明の一実施例に係る磁気ディスクを示す
断面図、第2図はこの発明の一実施例vC係る磁気ディ
スクの製造工程を示す断面図、第3図は磁気ディスク装
f’に示す概念図1g4図は磁気ティスフが稼動してい
る時の磁気へ7ドスライダの位置を示す概念図、第5図
は磁気ディスクが停止しCいる時の磁気ヘントスライダ
の位Ift示す概念図、及び第6図は従来の磁気ディス
クを示す断面図である。
図に2いて、C1)ぼ基材、(2)は硬質膜、13)
id磁気記録媒体、(4) Vi保護膜、C5)は基板
、to)iまスタンバグである。
な21図中同一符号は同一%またvi相当部分を示す。FIG. 1 is a sectional view showing a magnetic disk according to an embodiment of the present invention, FIG. 2 is a sectional view showing a manufacturing process of a magnetic disk according to an embodiment vC of the present invention, and FIG. 3 is a magnetic disk assembly f' The conceptual diagram shown in Figure 1g4 is a conceptual diagram showing the position of the magnetic slider when the magnetic disk is in operation, and Figure 5 is a conceptual diagram showing the position of the magnetic hent slider when the magnetic disk is stopped. and FIG. 6 are cross-sectional views showing a conventional magnetic disk. In Figure 2, C1) is the base material, (2) is the hard film, 13)
id magnetic recording medium, (4) Vi protective film, C5) is the substrate, and to) i is the stand bag. The same reference numerals in Figure 21 indicate the same percentages or portions corresponding to vi.
Claims (1)
記スタンプの凹凸形状を、上記硬質膜上に転写する工程
、及び凹凸形状の転写された硬質膜上に磁気記録媒体を
成膜する工程を施す磁気ディスクの製造方法。A step of pressing a stamp on the surface of a hard film formed on a substrate and transferring the uneven shape of the stamp onto the hard film, and a step of forming a magnetic recording medium on the hard film with the transferred uneven shape. A method of manufacturing a magnetic disk that is subjected to
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26254287A JPH01102738A (en) | 1987-10-15 | 1987-10-15 | Production of magnetic disk |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26254287A JPH01102738A (en) | 1987-10-15 | 1987-10-15 | Production of magnetic disk |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01102738A true JPH01102738A (en) | 1989-04-20 |
Family
ID=17377257
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26254287A Pending JPH01102738A (en) | 1987-10-15 | 1987-10-15 | Production of magnetic disk |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01102738A (en) |
-
1987
- 1987-10-15 JP JP26254287A patent/JPH01102738A/en active Pending
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