JPH01102754U - - Google Patents
Info
- Publication number
- JPH01102754U JPH01102754U JP19766887U JP19766887U JPH01102754U JP H01102754 U JPH01102754 U JP H01102754U JP 19766887 U JP19766887 U JP 19766887U JP 19766887 U JP19766887 U JP 19766887U JP H01102754 U JPH01102754 U JP H01102754U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- sensors
- insulating substrate
- sensitive film
- input terminal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 229910044991 metal oxide Inorganic materials 0.000 claims 1
- 150000004706 metal oxides Chemical class 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Description
第１図ａ，ｂはこの考案のガス検出器に用いる
ガスセンサの１例を示す上面図と正面図、第２図
ａ，ｂ，ｃは、この考案の要部を示す電気回路と
ガス濃度に対する電圧変化の線図と経過時間に対
する電圧の線図、第３図はこの考案の電気回路の
１例、第４図はこの考案の電気回路のより具体的
な１例、第５図ａは従来のガス検出器の電気回路
、第５図ｂは同図ａのガス濃度と電圧ＶＲとの関
係を示す線図、第５図ｃは同図ａの経過時間に対
するガスセンサ抵抗値のを示す線図である。
２……耐熱性の絶縁基板、３，３′……１組の
電極、３′，３″……他の組の電極、４……ガス
感応膜、５……加熱用のヒータ、６……電圧比較
回路、Ｅ……電源。
Figures 1a, b are top and front views showing an example of a gas sensor used in the gas detector of this invention, and Figures 2a, b, and c are electrical circuits showing the main parts of this invention, and gas concentration A diagram of voltage change and a diagram of voltage versus elapsed time. Figure 3 is an example of the electrical circuit of this invention, Figure 4 is a more specific example of the electrical circuit of this invention, and Figure 5a is the conventional one. Fig. 5b is a diagram showing the relationship between the gas concentration and voltage VR in Fig. 5a, and Fig. 5c is a diagram showing the gas sensor resistance value versus elapsed time in Fig. 5a. It is. 2... Heat-resistant insulating substrate, 3, 3'... One set of electrodes, 3', 3''... Other set of electrodes, 4... Gas sensitive membrane, 5... Heater for heating, 6... ...Voltage comparator circuit, E...Power supply.
Claims (1)
た２組の電極と、これ等の電極の一部或いは全部
を覆うように前記絶縁基板の表面に設けた金属酸
化物半導体のガス感応膜とからなり、前記２組の
電極のうち、一方の組の電極同志の間隔を前記感
応膜の厚みより小さく、他方の組の電極同志の間
隔を前記感応膜の厚み以上としてこれ等各組の電
極を有する二つのセンサを形成し、さらに、これ
等のセンサを加熱するヒータと、二つのセンサの
電極を直列に接続した回路に電圧をかける電源と
、二つのセンサの電極を直列接続した中点を一方
の入力端子に、基準電圧を他方の入力端子にそれ
ぞれ接続した電圧比較回路とを有するガス検出器
。 A heat-resistant insulating substrate, two sets of electrodes provided on the surface of the insulating substrate, and a metal oxide semiconductor gas-sensitive film provided on the surface of the insulating substrate so as to cover some or all of these electrodes. Of the two sets of electrodes, the distance between the electrodes of one set is smaller than the thickness of the sensitive film, and the space between the electrodes of the other set is greater than or equal to the thickness of the sensitive film. It forms two sensors with electrodes, and further includes a heater that heats these sensors, a power source that applies voltage to a circuit that connects the electrodes of the two sensors in series, and a medium that connects the electrodes of the two sensors in series. A gas detector having a voltage comparator circuit in which a point is connected to one input terminal and a reference voltage is connected to the other input terminal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19766887U JPH01102754U (en) | 1987-12-26 | 1987-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19766887U JPH01102754U (en) | 1987-12-26 | 1987-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01102754U true JPH01102754U (en) | 1989-07-11 |
Family
ID=31488211
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19766887U Pending JPH01102754U (en) | 1987-12-26 | 1987-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01102754U (en) |
-
1987
- 1987-12-26 JP JP19766887U patent/JPH01102754U/ja active Pending
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