JPH01108458U - - Google Patents

Info

Publication number
JPH01108458U
JPH01108458U JP308488U JP308488U JPH01108458U JP H01108458 U JPH01108458 U JP H01108458U JP 308488 U JP308488 U JP 308488U JP 308488 U JP308488 U JP 308488U JP H01108458 U JPH01108458 U JP H01108458U
Authority
JP
Japan
Prior art keywords
shaft
atmospheric
region
vacuum region
bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP308488U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP308488U priority Critical patent/JPH01108458U/ja
Publication of JPH01108458U publication Critical patent/JPH01108458U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
  • Sealing Devices (AREA)

Description

【図面の簡単な説明】
第1図は本考案の一実施例を示す回転導入機シ
ール部の断面図、第2図は従来技術を示す回転導
入機のシール部の断面図である。 A…真空領域、B…大気領域、C…軸受、1…
軸、2…シール材(ゴム材)、3…ベアリング、
4…(真空ポンプ)排出孔。

Claims (1)

  1. 【実用新案登録請求の範囲】 真空領域と大気領域との間で気密シールに回転
    を伝達する軸を有する機構において、 上記軸を固定する軸受に、シール材よりの発塵
    が真空領域に入らないように、大気領域へ排出す
    る排出口を形成した回転導入機シール部。
JP308488U 1988-01-13 1988-01-13 Pending JPH01108458U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP308488U JPH01108458U (ja) 1988-01-13 1988-01-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP308488U JPH01108458U (ja) 1988-01-13 1988-01-13

Publications (1)

Publication Number Publication Date
JPH01108458U true JPH01108458U (ja) 1989-07-21

Family

ID=31204406

Family Applications (1)

Application Number Title Priority Date Filing Date
JP308488U Pending JPH01108458U (ja) 1988-01-13 1988-01-13

Country Status (1)

Country Link
JP (1) JPH01108458U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006043648A (ja) * 2004-08-09 2006-02-16 Inoue Mfg Inc 攪拌軸の軸封装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6082667A (ja) * 1983-10-11 1985-05-10 Nippon Soken Inc 真空装置用回転導入機

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6082667A (ja) * 1983-10-11 1985-05-10 Nippon Soken Inc 真空装置用回転導入機

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006043648A (ja) * 2004-08-09 2006-02-16 Inoue Mfg Inc 攪拌軸の軸封装置

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