JPH01110231U - - Google Patents
Info
- Publication number
- JPH01110231U JPH01110231U JP616788U JP616788U JPH01110231U JP H01110231 U JPH01110231 U JP H01110231U JP 616788 U JP616788 U JP 616788U JP 616788 U JP616788 U JP 616788U JP H01110231 U JPH01110231 U JP H01110231U
- Authority
- JP
- Japan
- Prior art keywords
- resistant
- furnace gas
- inner cylinder
- discharge pipe
- gas discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007797 corrosion Effects 0.000 claims 1
- 238000005260 corrosion Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Silicon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
Description
第１図は本考案を実施した反応炉の一例につい
てその要部（炉内ガス排出管の部分）を示す断面
図、第２図は反応炉全体の一般構造を示す断面図
、第３図は炉内ガス排出管の従来構造を示す断面
図である。
図中、１：ベース、２：カバー、３：反応炉、
６：炉内ガス排出管、７：シリコン析出物、８：
水垢および缶石、１１：内筒、１２：フランジ。
Figure 1 is a cross-sectional view showing the main parts (in-furnace gas discharge pipe) of an example of a reactor in which the present invention is implemented, Figure 2 is a cross-sectional view showing the general structure of the entire reactor, and Figure 3 is a cross-sectional view showing the general structure of the entire reactor. FIG. 2 is a sectional view showing a conventional structure of a furnace gas exhaust pipe. In the figure, 1: base, 2: cover, 3: reactor,
6: Furnace gas exhaust pipe, 7: Silicon deposits, 8:
Limescale and scale, 11: Inner cylinder, 12: Flange.
Claims (1)
いて、炉内ガス排出管６に耐熱および耐腐食性の
内筒１１を着脱可能に嵌入したことを特徴とする
多結晶シリコン製造用反応炉。 A water-cooled metal reactor for producing polycrystalline silicon, characterized in that a heat-resistant and corrosion-resistant inner cylinder 11 is removably fitted into an in-furnace gas discharge pipe 6.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP616788U JPH01110231U (en) | 1988-01-21 | 1988-01-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP616788U JPH01110231U (en) | 1988-01-21 | 1988-01-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01110231U true JPH01110231U (en) | 1989-07-25 |
Family
ID=31210170
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP616788U Pending JPH01110231U (en) | 1988-01-21 | 1988-01-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01110231U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009126774A (en) * | 2007-11-28 | 2009-06-11 | Mitsubishi Materials Corp | Polycrystalline silicon production equipment |
-
1988
- 1988-01-21 JP JP616788U patent/JPH01110231U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009126774A (en) * | 2007-11-28 | 2009-06-11 | Mitsubishi Materials Corp | Polycrystalline silicon production equipment |
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