JPH01110266U - - Google Patents

Info

Publication number
JPH01110266U
JPH01110266U JP318088U JP318088U JPH01110266U JP H01110266 U JPH01110266 U JP H01110266U JP 318088 U JP318088 U JP 318088U JP 318088 U JP318088 U JP 318088U JP H01110266 U JPH01110266 U JP H01110266U
Authority
JP
Japan
Prior art keywords
slider
liquid phase
epitaxial growth
phase epitaxial
growth apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP318088U
Other languages
English (en)
Other versions
JPH0623577Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP318088U priority Critical patent/JPH0623577Y2/ja
Publication of JPH01110266U publication Critical patent/JPH01110266U/ja
Application granted granted Critical
Publication of JPH0623577Y2 publication Critical patent/JPH0623577Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Description

【図面の簡単な説明】
第１図は本考案の実施例１を示す構成図、第２
図ａは実施例１のスライダ部分を示す平面図、第
２図ｂは同側面図、第３図ａは実施例２のスライ
ダ部分を示す平面図、第３図ｂは同側面図である
。 １……反応管、２……ボート、３……スライダ
、４……スライダ引出棒、５……スライダ駆動部
、６……ピン、６′……回転板、７……回転軸、
８……調整ネジ。

Claims (1)

    【実用新案登録請求の範囲】
  1. 液相エピタキシヤル成長用ボートに摺動可能に
    取付けられたスライダと、該スライダを摺動させ
    るスライダ駆動部とを有する液相エピタキシヤル
    成長装置において、前記ボードとスライダとの摺
    動部に過大な牽引力が作用した際に前記スライダ
    駆動部から前記スライダを切り離す手段を装備し
    たことを特徴とする液相エピタキシヤル成長装置
    。
JP318088U 1988-01-14 1988-01-14 液相エピタキシャル成長装置 Expired - Lifetime JPH0623577Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP318088U JPH0623577Y2 (ja) 1988-01-14 1988-01-14 液相エピタキシャル成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP318088U JPH0623577Y2 (ja) 1988-01-14 1988-01-14 液相エピタキシャル成長装置

Publications (2)

Publication Number Publication Date
JPH01110266U true JPH01110266U (ja) 1989-07-25
JPH0623577Y2 JPH0623577Y2 (ja) 1994-06-22

Family

ID=31204584

Family Applications (1)

Application Number Title Priority Date Filing Date
JP318088U Expired - Lifetime JPH0623577Y2 (ja) 1988-01-14 1988-01-14 液相エピタキシャル成長装置

Country Status (1)

Country Link
JP (1) JPH0623577Y2 (ja)

Also Published As

Publication number Publication date
JPH0623577Y2 (ja) 1994-06-22

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