JPH01110267U - - Google Patents
Info
- Publication number
- JPH01110267U JPH01110267U JP463988U JP463988U JPH01110267U JP H01110267 U JPH01110267 U JP H01110267U JP 463988 U JP463988 U JP 463988U JP 463988 U JP463988 U JP 463988U JP H01110267 U JPH01110267 U JP H01110267U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- holder
- fixing
- fixing plate
- main body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 238000002109 crystal growth method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
第１図〜第３図は本考案の１具体例である基板
固定用ホルダーの説明図である。第１図は基板固
定用ホルダーの平面図、第２図は第１図のＡ―Ａ
断面図、第３図は第１図のＢ―Ｂ断面図である。
１：ホルダー本体、２：固定板、３：スプリン
グ、４：スプリング支持具、５：ストツパー、６
：突起部、７：基板。
1 to 3 are explanatory diagrams of a holder for fixing a substrate, which is a specific example of the present invention. Figure 1 is a plan view of the board fixing holder, Figure 2 is A-A in Figure 1.
The sectional view, FIG. 3, is a sectional view taken along line BB in FIG. 1: Holder body, 2: Fixing plate, 3: Spring, 4: Spring supporter, 5: Stopper, 6
: protrusion, 7: substrate.
Claims (1)
において、基板の周囲を包む環状ホルダー本体と
、基板端部を先端のＶ字形溝内に受けて押圧支持
する固定板とからなり、該固定板はホルダー本体
の溝に沿つて摺動可能に設置し、板バネ若しくは
線条バネの両端をホルダー本体の支持具に固定し
、固定板のストツパーを該板バネ若しくは線条バ
ネに係合することにより、基板に対する押圧力を
固定板に付与するようにしたことを特徴とする基
板固定用ホルダー。 A holder for fixing a substrate used in the molecular beam crystal growth method consists of an annular holder body that wraps around the substrate, and a fixing plate that receives and presses the edge of the substrate into a V-shaped groove at the tip, and the fixing plate is attached to the holder. By installing it so that it can slide along the groove of the main body, fixing both ends of the leaf spring or wire spring to the support of the holder main body, and engaging the stopper of the fixing plate with the leaf spring or wire spring, A holder for fixing a substrate, characterized in that a pressing force against the substrate is applied to the fixing plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP463988U JPH01110267U (en) | 1988-01-20 | 1988-01-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP463988U JPH01110267U (en) | 1988-01-20 | 1988-01-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01110267U true JPH01110267U (en) | 1989-07-25 |
Family
ID=31207327
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP463988U Pending JPH01110267U (en) | 1988-01-20 | 1988-01-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01110267U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03120821A (en) * | 1989-09-29 | 1991-05-23 | American Teleph & Telegr Co <Att> | Method of manufacturing integrated circuit device |
-
1988
- 1988-01-20 JP JP463988U patent/JPH01110267U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03120821A (en) * | 1989-09-29 | 1991-05-23 | American Teleph & Telegr Co <Att> | Method of manufacturing integrated circuit device |
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