JPH01113330U - - Google Patents
Info
- Publication number
- JPH01113330U JPH01113330U JP763588U JP763588U JPH01113330U JP H01113330 U JPH01113330 U JP H01113330U JP 763588 U JP763588 U JP 763588U JP 763588 U JP763588 U JP 763588U JP H01113330 U JPH01113330 U JP H01113330U
- Authority
- JP
- Japan
- Prior art keywords
- protrusions
- wafer support
- wafer
- pillars
- disks
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
第１図は、本考案の実施例を示すａ側面図、ｂ
平面図、第２図は、ボート載置台の従来例を示す
側面図、第３図は、従来型のボート載置台にボー
トを載置した状態を示すａ側面図、ｂＡ―Ａ矢示
断面図、第４図は、従来例の問題点を示す側面図
である。
１……ボート（ウエハ支持具）、２……ボート
載置台の支柱、３，３′……円板、４……突起物
。
Figure 1 is a side view showing an embodiment of the present invention, and b is a side view.
A plan view, FIG. 2 is a side view showing a conventional example of a boat mounting table, and FIG. 3 is a side view and b a sectional view taken along arrow A-A showing a state in which a boat is placed on a conventional boat mounting table. , FIG. 4 is a side view showing the problems of the conventional example. 1...Boat (wafer support), 2... Support for boat mounting table, 3, 3'... Disk, 4... Protrusion.
Claims (1)
形状に構成し、上部の円板に複数個の突起物を設
け、その上にウエハを収納保持するウエハ支持具
を載置して半導体製造用縦型熱処理炉に収容され
るウエハ支持具の載置台であつて、前記複数個の
突起物が前記複数本の支柱の延長線に位置するこ
とを特徴とするウエハ支持具の載置台。 A plurality of pillars are fixed with a plurality of disks to form a cylindrical shape, a plurality of protrusions are provided on the upper disk, and a wafer support for storing and holding the wafer is placed on top of the protrusions. A mounting stand for a wafer support housed in a vertical heat treatment furnace for semiconductor manufacturing, wherein the plurality of protrusions are located on extension lines of the plurality of supports. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP763588U JPH069489Y2 (en) | 1988-01-26 | 1988-01-26 | Wafer support mounting table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP763588U JPH069489Y2 (en) | 1988-01-26 | 1988-01-26 | Wafer support mounting table |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01113330U true JPH01113330U (en) | 1989-07-31 |
| JPH069489Y2 JPH069489Y2 (en) | 1994-03-09 |
Family
ID=31212811
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP763588U Expired - Lifetime JPH069489Y2 (en) | 1988-01-26 | 1988-01-26 | Wafer support mounting table |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH069489Y2 (en) |
-
1988
- 1988-01-26 JP JP763588U patent/JPH069489Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH069489Y2 (en) | 1994-03-09 |