JPH01113330U - - Google Patents

Info

Publication number
JPH01113330U
JPH01113330U JP763588U JP763588U JPH01113330U JP H01113330 U JPH01113330 U JP H01113330U JP 763588 U JP763588 U JP 763588U JP 763588 U JP763588 U JP 763588U JP H01113330 U JPH01113330 U JP H01113330U
Authority
JP
Japan
Prior art keywords
protrusions
wafer support
wafer
pillars
disks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP763588U
Other languages
English (en)
Other versions
JPH069489Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP763588U priority Critical patent/JPH069489Y2/ja
Publication of JPH01113330U publication Critical patent/JPH01113330U/ja
Application granted granted Critical
Publication of JPH069489Y2 publication Critical patent/JPH069489Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Description

【図面の簡単な説明】
第１図は、本考案の実施例を示すａ側面図、ｂ
平面図、第２図は、ボート載置台の従来例を示す
側面図、第３図は、従来型のボート載置台にボー
トを載置した状態を示すａ側面図、ｂＡ―Ａ矢示
断面図、第４図は、従来例の問題点を示す側面図
である。 １……ボート（ウエハ支持具）、２……ボート
載置台の支柱、３，３′……円板、４……突起物
。

Claims (1)

    【実用新案登録請求の範囲】
  1. 複数本の支柱を複数個の円板にて固着して円筒
    形状に構成し、上部の円板に複数個の突起物を設
    け、その上にウエハを収納保持するウエハ支持具
    を載置して半導体製造用縦型熱処理炉に収容され
    るウエハ支持具の載置台であつて、前記複数個の
    突起物が前記複数本の支柱の延長線に位置するこ
    とを特徴とするウエハ支持具の載置台。
JP763588U 1988-01-26 1988-01-26 ウエハ支持具の載置台 Expired - Lifetime JPH069489Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP763588U JPH069489Y2 (ja) 1988-01-26 1988-01-26 ウエハ支持具の載置台

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP763588U JPH069489Y2 (ja) 1988-01-26 1988-01-26 ウエハ支持具の載置台

Publications (2)

Publication Number Publication Date
JPH01113330U true JPH01113330U (ja) 1989-07-31
JPH069489Y2 JPH069489Y2 (ja) 1994-03-09

Family

ID=31212811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP763588U Expired - Lifetime JPH069489Y2 (ja) 1988-01-26 1988-01-26 ウエハ支持具の載置台

Country Status (1)

Country Link
JP (1) JPH069489Y2 (ja)

Also Published As

Publication number Publication date
JPH069489Y2 (ja) 1994-03-09

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