JPH01114670U - - Google Patents
Info
- Publication number
- JPH01114670U JPH01114670U JP670088U JP670088U JPH01114670U JP H01114670 U JPH01114670 U JP H01114670U JP 670088 U JP670088 U JP 670088U JP 670088 U JP670088 U JP 670088U JP H01114670 U JPH01114670 U JP H01114670U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrate holder
- chamber
- sputtering
- line continuous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 14
- 238000004544 sputter deposition Methods 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP670088U JPH01114670U (2) | 1988-01-22 | 1988-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP670088U JPH01114670U (2) | 1988-01-22 | 1988-01-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01114670U true JPH01114670U (2) | 1989-08-02 |
Family
ID=31211085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP670088U Pending JPH01114670U (2) | 1988-01-22 | 1988-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01114670U (2) |
-
1988
- 1988-01-22 JP JP670088U patent/JPH01114670U/ja active Pending
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