JPH01115151U

JPH01115151U -

Info

Publication number: JPH01115151U
Application number: JP965388U
Authority: JP
Priority date: 1988-01-29
Filing date: 1988-01-29
Publication date: 1989-08-02

Description

[Brief explanation of the drawing]

第１図及び第２図は電子線描画装置等に於ける
鏡筒、試料室及びその周辺の概略構成を示す側面
図、第３図は本案を付加した場合の側面図、第４
図は絞り保持台の例を示す図、第５図は絞りの形
状の例を示す図、第６図は試料固定アダプタに試
料おさえを用いて試料をセツトした場合の側面図
、第７図は大気中にある試料を真空度を下げるこ
となく真空度の高い試料室にセツトする場合の試
料室及びその周辺の概略構成を示す側面図である
。１……鏡筒、２……対物レンズ、３……対物レ
ンズ絞り、４……試料、５……試料固定アダプタ
、６……試料室、７……ＸＹステージ、８……絞
り保持台、９……エアシリンダ、１０……引きバ
ネ、１１……エアシリンダ用バルブ、１２……試
料おさえ、１３……予備排気室、１４……ロード
棒、１５……予備排気室用バルブ、１６……隔壁
。 Figures 1 and 2 are side views showing the schematic configuration of the lens barrel, sample chamber, and their surroundings in an electron beam lithography system, etc. Figure 3 is a side view when the present invention is added;
The figure shows an example of an aperture holding stand, Figure 5 shows an example of the shape of the aperture, Figure 6 is a side view when a sample is set on the sample fixing adapter using a sample holder, and Figure 7 is a side view. FIG. 2 is a side view showing a schematic configuration of a sample chamber and its surroundings when a sample in the atmosphere is set in a sample chamber with a high degree of vacuum without lowering the degree of vacuum. 1... Lens barrel, 2... Objective lens, 3... Objective lens aperture, 4... Sample, 5... Sample fixing adapter, 6... Sample chamber, 7... XY stage, 8... Aperture holder, 9...Air cylinder, 10...Tension spring, 11...Valve for air cylinder, 12...Sample holding, 13...Preliminary exhaust chamber, 14...Load rod, 15...Valve for preliminary exhaust chamber, 16... ...bulkhead.

Claims

[Claims for Utility Model Registration] 1. Processing of a sample by irradiating a sample mounted on a moving stage with charged particles, or monitoring, analysis, measurement, etc. of a sample image using a sample signal generated from the sample. 1. An objective lens diaphragm exchange device characterized in that the apparatus has a mechanism for attaching and detaching a diaphragm on the optical axis of a charged particle beam on a moving stage. 2. According to claim 1, when exchanging a sample in a vacuum with a sample in the atmosphere, the sample is attached to a sample holder, and the sample holder is configured so that the sample holder can be exchanged without lowering the degree of vacuum in the sample chamber. By adding a function for attaching and detaching the objective lens diaphragm to the mechanical part corresponding to the sample holder in the developed device, we have made it possible to replace the objective lens diaphragm without lowering the degree of vacuum in the sample chamber and lens barrel. Characteristic objective lens aperture exchange device.