JPH01119064U - - Google Patents
Info
- Publication number
- JPH01119064U JPH01119064U JP1121788U JP1121788U JPH01119064U JP H01119064 U JPH01119064 U JP H01119064U JP 1121788 U JP1121788 U JP 1121788U JP 1121788 U JP1121788 U JP 1121788U JP H01119064 U JPH01119064 U JP H01119064U
- Authority
- JP
- Japan
- Prior art keywords
- molecular beam
- substrate
- beam source
- opening
- crystal growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 239000013078 crystal Substances 0.000 claims description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1121788U JPH01119064U (da) | 1988-02-01 | 1988-02-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1121788U JPH01119064U (da) | 1988-02-01 | 1988-02-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01119064U true JPH01119064U (da) | 1989-08-11 |
Family
ID=31219576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1121788U Pending JPH01119064U (da) | 1988-02-01 | 1988-02-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01119064U (da) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01239085A (ja) * | 1988-03-18 | 1989-09-25 | Fujitsu Ltd | ガスソースｍｂｅ装置 |
-
1988
- 1988-02-01 JP JP1121788U patent/JPH01119064U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01239085A (ja) * | 1988-03-18 | 1989-09-25 | Fujitsu Ltd | ガスソースｍｂｅ装置 |
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