JPH01123337U - - Google Patents
Info
- Publication number
- JPH01123337U JPH01123337U JP2013988U JP2013988U JPH01123337U JP H01123337 U JPH01123337 U JP H01123337U JP 2013988 U JP2013988 U JP 2013988U JP 2013988 U JP2013988 U JP 2013988U JP H01123337 U JPH01123337 U JP H01123337U
- Authority
- JP
- Japan
- Prior art keywords
- container
- jig
- manufacturing apparatus
- semiconductor manufacturing
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000009792 diffusion process Methods 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Description
第１図はこの考案の一実施例による半導体製造
装置の要部である治具の断面図、第２図、第３図
は第１図の正面図及び側面図、第４図第５図はこ
の考案の半導体製造装置の治具の挿入状態を示す
斜視図、第６図第７図は従来の半導体製造装置の
正面図である。
図において、１はウエハを載せる治具、２はウ
エハ、３は拡散炉、５はガス供給口、６はガス排
気口、８は熱電対、９は熱電対保護管である。な
お、図中、同一符号は同一または相当部分を示す
。
FIG. 1 is a sectional view of a jig which is a main part of a semiconductor manufacturing apparatus according to an embodiment of this invention, FIGS. 2 and 3 are front and side views of FIG. 1, and FIGS. 4 and 5 are FIGS. 6 and 7 are perspective views showing a state in which the jig is inserted in the semiconductor manufacturing apparatus of this invention, and are front views of the conventional semiconductor manufacturing apparatus. In the figure, 1 is a jig for mounting a wafer, 2 is a wafer, 3 is a diffusion furnace, 5 is a gas supply port, 6 is a gas exhaust port, 8 is a thermocouple, and 9 is a thermocouple protection tube. In addition, in the figures, the same reference numerals indicate the same or corresponding parts.
Claims (1)
器と、この容器についたガス配管と、前記容器を
出し入れする治具とからなることを特徴とする半
導体製造装置。 A semiconductor manufacturing apparatus comprising: a sealable container for holding a heater section and a wafer; a gas pipe attached to the container; and a jig for loading and unloading the container.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013988U JPH01123337U (en) | 1988-02-17 | 1988-02-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013988U JPH01123337U (en) | 1988-02-17 | 1988-02-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01123337U true JPH01123337U (en) | 1989-08-22 |
Family
ID=31236256
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013988U Pending JPH01123337U (en) | 1988-02-17 | 1988-02-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01123337U (en) |
-
1988
- 1988-02-17 JP JP2013988U patent/JPH01123337U/ja active Pending
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