JPH01145123U - - Google Patents
Info
- Publication number
- JPH01145123U JPH01145123U JP4056188U JP4056188U JPH01145123U JP H01145123 U JPH01145123 U JP H01145123U JP 4056188 U JP4056188 U JP 4056188U JP 4056188 U JP4056188 U JP 4056188U JP H01145123 U JPH01145123 U JP H01145123U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- hawk
- sic
- groove
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000001947 vapour-phase growth Methods 0.000 claims 1
Description
第１図は本考案の溝付きＳｉＣホークの実施例
１を示す斜視図、第２図は入出炉動作時の溝付き
ＳｉＣホークの側面図、第３図は従来のＳｉＣホ
ークの側面図、第４図は第３図のＢ―Ｂ線の断面
図、第５図は実施例２の場合の溝付きＳｉＣホー
クの斜視図、第６図は第５図のＡ―Ａ線の断面図
、第７図ａは実施例２を実現するためのボートの
正面図、第７図ｂは実施例２のためのボートの斜
視図である。
１ａ……ＳｉＣホーク、１ｂ……ＳｉＣホーク
、２ａ……溝、２ｂ……溝、３……ウエハ、４…
…ボート。
Fig. 1 is a perspective view showing Embodiment 1 of the grooved SiC hawk of the present invention, Fig. 2 is a side view of the grooved SiC hawk during loading/unloading operation, and Fig. 3 is a side view of a conventional SiC hawk. 4 is a sectional view taken along line BB in FIG. 3, FIG. 5 is a perspective view of the grooved SiC hawk in Example 2, and FIG. 6 is a sectional view taken along line AA in FIG. 7a is a front view of a boat for implementing the second embodiment, and FIG. 7b is a perspective view of the boat for implementing the second embodiment. 1a...SiC hawk, 1b...SiC hawk, 2a...groove, 2b...groove, 3...wafer, 4...
…boat.
Claims (1)
成長装置においてウエハをのせたボートの入出炉
用ＳｉＣホークに、ボートを保持する溝を有する
ことを特徴とする半導体素子の製造装置。 1. An apparatus for manufacturing semiconductor devices, characterized in that a SiC hawk for entering and exiting a boat on which a wafer is placed has a groove for holding the boat in a tubular furnace type resistance heating hot wall type reduced pressure vapor phase growth apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4056188U JPH01145123U (en) | 1988-03-28 | 1988-03-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4056188U JPH01145123U (en) | 1988-03-28 | 1988-03-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01145123U true JPH01145123U (en) | 1989-10-05 |
Family
ID=31267030
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4056188U Pending JPH01145123U (en) | 1988-03-28 | 1988-03-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01145123U (en) |
-
1988
- 1988-03-28 JP JP4056188U patent/JPH01145123U/ja active Pending