JPH01123760A - Thermal head - Google Patents

Thermal head

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Publication number
JPH01123760A
JPH01123760A JP28265587A JP28265587A JPH01123760A JP H01123760 A JPH01123760 A JP H01123760A JP 28265587 A JP28265587 A JP 28265587A JP 28265587 A JP28265587 A JP 28265587A JP H01123760 A JPH01123760 A JP H01123760A
Authority
JP
Japan
Prior art keywords
resistor
width
electrodes
heating resistor
heat generating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP28265587A
Other languages
Japanese (ja)
Inventor
Yoshinori Yamaguchi
義紀 山口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Business Innovation Corp
Original Assignee
Fuji Xerox Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Xerox Co Ltd filed Critical Fuji Xerox Co Ltd
Priority to JP28265587A priority Critical patent/JPH01123760A/en
Publication of JPH01123760A publication Critical patent/JPH01123760A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To obtain a uniform heat generating temperature distribution over a whole heat generating resistor even if counter electrodes are slightly displaced from the resistor by mask alignment or the like by increasing a width between the resistor and the electrodes in a scanning direction larger than that of the resistor. CONSTITUTION:When the width of a common electrode side discrete electrodes 2' is d2, the width of discrete electrodes 3 is d3 and the width of a heat generating resistor 4 is d4, they are so constructed as to satisfy d4<d2, d4<d3. That is, a conductive layer made of gold paste is formed by screen printing and baking on one side face of a glazed ceramic substrate 1, patterned by photolithography etching with a predetermined mask, thereby forming a common electrode 2 and discrete electrodes 3 of a facing structure. Then, the resistor 4 of the shape isolated at each one bit is formed on counter electrodes 2' and 3. In this case, since the width of the discrete electrodes is formed approx. 5-10mum wider than that of the resistor 4, they are not extended from the electrodes 2', 3 even if the resistor 4 is slightly displaced at is position.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は個別対向型のサーマルヘッドの構造に係り、特
に印字品質を向上させるためのサーマルヘッドの構造に
関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to the structure of an individually facing thermal head, and particularly to the structure of a thermal head for improving printing quality.

〔従来の技術〕[Conventional technology]

サーマル式プリンタ、ファクシミリ等に広く用いられて
いるサーマルヘッドとして、各電極が個別に対向し、各
電極間が発熱抵抗体とそれぞれ重ね合せ部によって接続
された構造の個別対向型サーマルへラドが用いられてい
る。従来、この個別対向型サーマルヘッドは各電極幅と
発熱抵抗体幅はほぼ同じであるのが一般的である。
As a thermal head widely used in thermal printers, facsimile machines, etc., an individual facing thermal head is used, which has a structure in which each electrode faces individually, and each electrode is connected to a heating resistor by an overlapping part. It is being Conventionally, in this individually opposed thermal head, the width of each electrode and the width of the heating resistor are generally approximately the same.

第3図にその一例を示す。第3図において、31はグレ
ーズドセラミック基板、32は共通電極、32′は共通
電極側の個別電極、33は個別電極、34は発熱抵抗体
、35は各電極と発熱抵抗体との重ね合せ部を示す。図
において、対向する個別電極32′、33の幅d32、
d33と発熱抵抗体34の幅d34はほぼ同じであるの
で、それらの重ね合せ部35の幅d35も当然はぼ同じ
幅で形成されている。即ちd32 !=id33娩d3
4#d35である。
An example is shown in FIG. In FIG. 3, 31 is a glazed ceramic substrate, 32 is a common electrode, 32' is an individual electrode on the common electrode side, 33 is an individual electrode, 34 is a heating resistor, and 35 is a superimposed portion of each electrode and the heating resistor. shows. In the figure, the width d32 of the opposing individual electrodes 32' and 33,
Since the width d33 and the width d34 of the heating resistor 34 are approximately the same, the width d35 of the overlapping portion 35 thereof is also formed to have approximately the same width. That is, d32! = id33 delivery d3
4#d35.

ところでサーマルヘッドは対向電橋32′と33の間を
通電することによって発熱抵抗体34に発生する熱を利
用して印字するものであるが、各電極は発熱抵抗体より
も熱伝導がよいので、発熱抵抗体の発熱量の一部が電極
と発熱抵抗体との重ね合せ部35を通じて電極側へ流出
してしまい、結果的に印字品質を得るためには印字電力
が大きくなるという問題点があった。
By the way, the thermal head prints using the heat generated in the heating resistor 34 by passing current between the opposing electric bridges 32' and 33, but each electrode has better thermal conductivity than the heating resistor. , a part of the heat generated by the heating resistor flows out to the electrode side through the overlapping portion 35 between the electrode and the heating resistor, and as a result, there is a problem that printing power becomes large in order to obtain printing quality. there were.

そのため、通電発熱時に発熱抵抗体部から発生する熱の
電極への逃げを低減し、消費印字電力を低減するために
、対向する電極と発熱抵抗体の重ね合せ部の幅を、重ね
合せ領域における発熱抵抗体の主走査方向の幅よりも狭
くすることが提案されている(特願昭62−17777
6号参照)。
Therefore, in order to reduce the escape of heat generated from the heating resistor part to the electrodes when electricity is applied and to reduce the printing power consumption, the width of the overlapping part of the opposing electrode and the heating resistor is adjusted in the overlapping area. It has been proposed to make the width of the heating resistor narrower than the width in the main scanning direction (Japanese Patent Application No. 17777/1986).
(See No. 6).

これは例えば第4図に示す如く、対向する個別電極42
゛、43の幅d42、d43を発熱抵抗体44の主走査
方向の幅d44より狭くすることで実現出来る。  。
For example, as shown in FIG.
This can be achieved by making the widths d42 and d43 of the heating resistor 44 narrower than the width d44 of the heating resistor 44 in the main scanning direction. .

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

ところが実際の個別対向型サーマルヘッドの製造にあた
っては発熱抵抗体と各対向電極との位置関係は、バラツ
キのためビット毎に異なる。即ち、発熱抵抗体の形成の
際のマスク精度のバラツキ、電極形成の際のエツチング
精度のバラツキ、両者の位置合せ精度のバラツキ等によ
るものと考えられる。
However, in actual manufacturing of individual facing type thermal heads, the positional relationship between the heating resistor and each counter electrode varies from bit to bit due to variations. That is, it is thought that this is due to variations in mask precision when forming the heating resistor, variations in etching precision when forming electrodes, variations in alignment precision between the two, and the like.

即ち、第5図(a)に示す如(、対向電極と発熱抵抗体
との位置合せ精度のバラツキにより、両者の位置がずれ
て発熱抵抗体中の電流経路が一方に偏7たり、第5図(
b)に示す如(、発熱抵抗体の形成の際のマスク精度の
バラツキ、電極形成の際のエツチング精度のバラツキに
より、各ビット毎に電極と発熱抵抗体の位置がずれて、
発熱抵抗体の抵抗値が異なり、電流経路に偏りが生じ結
果として抵抗体における温度分布にも偏りが生じ印字品
質が低下するという問題点を生ずる。
In other words, as shown in FIG. 5(a), due to variations in alignment accuracy between the opposing electrode and the heat generating resistor, the positions of the two become misaligned and the current path in the heat generating resistor is biased to one side. figure(
As shown in b), the positions of the electrodes and the heating resistor are shifted for each bit due to variations in mask accuracy when forming the heating resistor and variations in etching accuracy when forming the electrode.
The resistance values of the heating resistors are different, and the current path is biased. As a result, the temperature distribution in the resistor is also biased, resulting in a problem that printing quality is degraded.

また、各対向電極の幅を発熱抵抗体の主走査方向の幅よ
り小さくしたものは、印字電力は小さくすることが出来
るが、発熱抵抗体中の電流経路が中央に偏り、結果とし
て発熱領域が挟まり、印字ドツト形状が、発熱抵抗体サ
イズをきれいに再現しないという問題点がある。
In addition, if the width of each counter electrode is made smaller than the width of the heating resistor in the main scanning direction, the printing power can be reduced, but the current path in the heating resistor is biased toward the center, resulting in a heating area. There is a problem in that the printed dot shape does not accurately reproduce the size of the heating resistor.

さらに発熱抵抗体の発熱領域に偏りを生ずると、発熱抵
抗体が熱的に破壊し易く、信頼性が劣るという問題点も
ある。
Furthermore, if the heat generating area of the heat generating resistor is uneven, the heat generating resistor is likely to be thermally destroyed, resulting in poor reliability.

従って本発明の目的は、発熱抵抗体の抵抗値のバラツキ
を減少させ、温度分布の偏りをなくすることによって印
字品質の向上を図り、歩留りを向上させたサーマルヘッ
ドを提供することである。
Therefore, an object of the present invention is to provide a thermal head that improves printing quality and yield by reducing variations in resistance values of heating resistors and eliminating bias in temperature distribution.

〔問題点を解決するための手段および作用〕上記目的を
達成するため、本発明は個別対向電極構造とし、対向電
極間をそれぞれ重ね合せ部をもって発熱抵抗体と接続す
るサーマルへラドにおいて、対向電極の少くとも重ね合
せ部における主走査方向の幅を、発熱抵抗体の幅より広
くするものである。
[Means and effects for solving the problems] In order to achieve the above object, the present invention has a structure of individual facing electrodes, and in a thermal helad in which the facing electrodes are connected to a heat generating resistor through overlapped portions, the facing electrodes are connected to a heating resistor. The width in the main scanning direction at least in the overlapping portion is made wider than the width of the heating resistor.

この構造にすることによって、マスク合せ等で各対向電
極と発熱抵抗体間に多少の位置ずれが発生しても各電極
と発熱抵抗体の重ね合せが行われない部分が生じること
がなく、発熱抵抗体中の電流経路が一方あるいは中央に
偏ることがなくなり、発熱抵抗体全域にわたり均一な発
熱温度分布を得ることができる。
By adopting this structure, even if a slight positional shift occurs between each opposing electrode and the heat generating resistor due to mask alignment, etc., there will be no part where the electrodes and the heat generating resistor are not overlapped, and the heat will be generated. The current path in the resistor is not biased toward one side or the center, and a uniform heat generation temperature distribution can be obtained over the entire area of the heat generating resistor.

〔実施例丁 本発明の一実施例を第1図について説明する。[Example page] An embodiment of the present invention will be described with reference to FIG.

第1図において工はグレーズドセラミック基板、2は共
通電極、2′は共通電極側個別電極、3は個別電極、4
は発熱抵抗体を示す。第1図において共通電極側個別電
極2゛の幅をd2−個別電極3の幅をd 3 、発熱抵
抗体4の幅をd−とすると、d4<d2、d4<d3を
満足するように構成されている。
In Fig. 1, numeral 1 is a glazed ceramic substrate, 2 is a common electrode, 2' is an individual electrode on the common electrode side, 3 is an individual electrode, and 4 is an individual electrode.
indicates a heating resistor. In FIG. 1, if the width of the individual electrode 2' on the common electrode side is d2 - the width of the individual electrode 3 is d3, and the width of the heating resistor 4 is d-, the configuration is such that d4<d2, d4<d3 are satisfied. has been done.

本実施例の製造方法は、グレーズドセラミック基板1上
に金ペーストから成る導電層をスクリーン印刷・焼成に
より一面に形成し、所定のマスクを用いてフォトリソエ
ツチングによりパターニングして対向する構造の共通電
極2、個別電極3を形成する。対向する各個別電極2′
、3の幅は、次に形成する発熱抵抗体4の幅よりも5〜
10μm程度広く設計する。
In the manufacturing method of this embodiment, a conductive layer made of gold paste is formed on one surface of a glazed ceramic substrate 1 by screen printing and baking, and then patterned by photolithography using a predetermined mask to form a common electrode 2 with an opposing structure. , forming individual electrodes 3. Each opposing individual electrode 2'
, 3 is wider than the width of the heating resistor 4 to be formed next.
Design to be about 10 μm wide.

次に各対向する電極2′、3上に1ビツト毎に分離した
形状の発熱抵抗体を形成する。これは予め各電極上にフ
ォトレジストを塗布焼成し、発熱抵抗体を設ける個所に
開口部を設け、その開口部に例えば酸化ルテニウム(R
u02)とガラスフリットの混合物から成る発熱抵抗体
4を埋め込む。
Next, heating resistors each having a shape separated for each bit are formed on each of the opposing electrodes 2' and 3. This is done by coating and baking a photoresist on each electrode in advance, creating an opening at the location where the heating resistor is to be provided, and filling the opening with, for example, ruthenium oxide (R).
A heating resistor 4 made of a mixture of u02) and glass frit is embedded.

その後、フォトレジストを除去して1ビツト毎に分離し
た発熱抵抗体を形成するものである。
Thereafter, the photoresist is removed to form heating resistors separated for each bit.

本実施例によって形成したサーマルヘッドは、その個別
電極の幅が予め発熱抵抗体4の幅より5〜10μm程度
広く形成しであるため、発熱抵抗体4が多少位置ずれし
て形成されても、個別電極2′、3上からはみ出すこと
はない。
In the thermal head formed according to this embodiment, the width of the individual electrodes is formed in advance to be about 5 to 10 μm wider than the width of the heat generating resistor 4, so even if the heat generating resistor 4 is formed with some misalignment, It does not protrude from above the individual electrodes 2' and 3.

最後に耐摩耗層としてオーバーグレーズ層(図示せず)
を発熱抵抗体上に形成する。
Finally, an overglaze layer (not shown) as a wear-resistant layer.
is formed on the heating resistor.

本発明の他の実施例を第2図に示す。第2図において、
第1図と同一番号は同一部分を示し、20は共通電極を
示す。
Another embodiment of the invention is shown in FIG. In Figure 2,
The same numbers as in FIG. 1 indicate the same parts, and 20 indicates a common electrode.

この実施例においては共通電極20には個別電極を形成
せず、ライン状の共通電極とし、対向する個別電極3に
対応した形状で発熱抵抗体を形成する。このような構成
のサーマルヘッドも上記第一実施例と同様の効果を得る
ことができる。
In this embodiment, no individual electrodes are formed on the common electrode 20, but a line-shaped common electrode is used, and a heating resistor is formed in a shape corresponding to the opposing individual electrode 3. The thermal head having such a configuration can also obtain the same effects as the first embodiment.

また、発熱抵抗体の形成方法としては上記実施例で説明
した方法の他に、希望の発熱抵抗体形状より広範囲に抵
抗体を形成し、ドライエツチングまたはウェットエツチ
ングによって1ビツト毎に分離した抵抗体を形成する方
法を用いることが出来る。
In addition to the method described in the above embodiments, the heating resistor may be formed by forming the resistor over a wider area than the desired shape of the heating resistor, and separating the resistor into bits by dry etching or wet etching. A method of forming a can be used.

さらに発熱抵抗体として厚膜型のものについて説明した
が、本発明はこれに限られず、各電極形成後、抵抗体層
を基板全面に形成後、フォトリソ技術によりバターニン
グして抵抗体を形成する薄膜型サーマルヘッドについて
も適用できることは言うまでもない。″ 〔発明の効果〕 本発明の構造にすることにより、個別対向型サーマルヘ
ッドの発熱抵抗体の抵抗値は、各電極と発熱抵抗体との
接触が確実となるため、1ビツト毎のバラツキが減少し
、その通電・発熱時の電流経路も一方あるいは中央に偏
ることがなく抵抗体全体にわたり均一となりその発熱温
度分布も均一となる。
Furthermore, although a thick film type heating resistor has been described, the present invention is not limited to this. After forming each electrode, a resistor layer is formed on the entire surface of the substrate, and then patterning is performed using photolithography technology to form a resistor. Needless to say, the present invention can also be applied to thin film type thermal heads. [Effects of the Invention] By employing the structure of the present invention, the resistance value of the heating resistor of the individually opposed thermal head can be reduced from variation for each bit because the contact between each electrode and the heating resistor is ensured. The current path during energization and heat generation is not biased to one side or the center, but is uniform over the entire resistor, and the heat generation temperature distribution is also uniform.

従って印字ドツトの再現性が向上し、その品質も向上し
信頼性が増し歩留りのよいサーマルヘッドを形成するこ
とができる。
Therefore, the reproducibility of printed dots is improved, the quality thereof is also improved, and a thermal head with increased reliability and high yield can be formed.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明のサーマルヘッドの一実施例の構成図、 第2図は本発明のサーマルヘッドの他の実施例の構成図
、 第3図〜第5図は従来例のサーマルヘッドの構成説明図
である。 1・−・グレーズドセラミック基板、 2−共通電極、 2′・−共通電極側個別電極、 3−個別電極、 4−・−発熱抵抗体。
FIG. 1 is a configuration diagram of one embodiment of the thermal head of the present invention, FIG. 2 is a configuration diagram of another embodiment of the thermal head of the present invention, and FIGS. 3 to 5 are configuration diagrams of conventional thermal heads. It is an explanatory diagram. 1.--Glazed ceramic substrate, 2--Common electrode, 2'--Individual electrode on common electrode side, 3--Individual electrode, 4--Heating resistor.

Claims (1)

【特許請求の範囲】[Claims] 電極が個別に対向し、前記電極間が抵抗体とそれぞれ重
ね合せ部をもって接続されたサーマルヘッドにおいて、
前記重ね合せ部における前記抵抗体の幅を前記電極の幅
より狭くしたことを特徴とするサーマルヘッド。
In a thermal head in which electrodes are individually opposed to each other and each of the electrodes is connected to a resistor through an overlapping portion,
A thermal head characterized in that the width of the resistor at the overlapping portion is narrower than the width of the electrode.
JP28265587A 1987-11-09 1987-11-09 Thermal head Pending JPH01123760A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28265587A JPH01123760A (en) 1987-11-09 1987-11-09 Thermal head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28265587A JPH01123760A (en) 1987-11-09 1987-11-09 Thermal head

Publications (1)

Publication Number Publication Date
JPH01123760A true JPH01123760A (en) 1989-05-16

Family

ID=17655340

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28265587A Pending JPH01123760A (en) 1987-11-09 1987-11-09 Thermal head

Country Status (1)

Country Link
JP (1) JPH01123760A (en)

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