JPH01124932A - Manufacture of gas discharge panel - Google Patents
Manufacture of gas discharge panelInfo
- Publication number
- JPH01124932A JPH01124932A JP28368787A JP28368787A JPH01124932A JP H01124932 A JPH01124932 A JP H01124932A JP 28368787 A JP28368787 A JP 28368787A JP 28368787 A JP28368787 A JP 28368787A JP H01124932 A JPH01124932 A JP H01124932A
- Authority
- JP
- Japan
- Prior art keywords
- spacers
- spacer
- gas discharge
- dielectric layer
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【発明の詳細な説明】
〔概 要〕
この発明はガス放電パネルの製造方法に関し、対向する
二枚の基板間を一定間隙に保つ球状の支えを基板上の電
極を避けて設置する能率的方法を得ることを目的とし、
感光性レジスト材料に球状のスペーサを混合し、ガス放
電パネルの一方の基板の誘電体層上全面に塗布し、・マ
スクを用いて露光および現像を行うことによっ°て電極
を避けた場所に感光性レジスト材料と共に前記スペーサ
を残し、その後焼成して感光性レジスト材料を消失せし
めると共に、スペーサを誘電体層に融着せしめる方法で
ある。[Detailed Description of the Invention] [Summary] The present invention relates to a method for manufacturing a gas discharge panel, and provides an efficient method for installing a spherical support that maintains a constant gap between two opposing substrates while avoiding electrodes on the substrates. With the aim of obtaining a photosensitive resist material, spherical spacers are mixed with a photosensitive resist material, and the mixture is applied to the entire surface of the dielectric layer of one substrate of the gas discharge panel, and exposed and developed using a mask. In this method, the spacer is left together with the photosensitive resist material in a place avoiding the electrodes, and then baked to eliminate the photosensitive resist material and at the same time, the spacer is fused to the dielectric layer.
この発明はガス放電パネルの製造方法に関するものであ
る。The present invention relates to a method of manufacturing a gas discharge panel.
さらに詳しくは前記パネルの放電間隙を設定するスペー
サの新しい設置方法に関するものである。More specifically, the present invention relates to a new method of installing spacers for setting the discharge gap of the panel.
一般にガス放電パネルで−1よ、対向配置した一対の電
極基板の間にスペーサを複数個点在させてガ大空間を設
定している。Generally, in a gas discharge panel, a large space is established by interspersing a plurality of spacers between a pair of opposing electrode substrates.
従来このスペーサの設置方法として、実公昭58−23
166号に提示されているようなスペーサを水ガラスに
よって電極絶縁用の誘電体層上に接着固定したものが知
られている。Conventionally, the method of installing this spacer was
166, in which a spacer is adhesively fixed onto a dielectric layer for electrode insulation using water glass is known.
しかし、この方法ではスペーサー個ずつを人手で配置し
、固定しなければならず、そのため゛多大の工数と時間
を要して製造コストが高くなり、またスペーサ配置ずれ
などの作業ミスが生じやすくてパネル品質面において不
都合であった。However, with this method, each spacer must be placed and fixed by hand, which requires a large amount of man-hours and time, increases manufacturing costs, and is prone to work errors such as misalignment of spacers. This was a disadvantage in terms of panel quality.
これに加えて、従来の方法ではスペーサとして比較的大
きい形状のもの、例えば0.5 ミリメートル角の大き
さのスペーサを使用する必要上、割合細かい電極の配列
ピッチ(例えば0.3ミリメートル゛以下)の場合、水
ガラスの使用とあいまって発光しない不良点数が多く出
るという不都合があった。In addition, in the conventional method, it is necessary to use a relatively large spacer, for example, a 0.5 mm square spacer, and the electrode arrangement pitch is relatively fine (for example, 0.3 mm or less). In this case, combined with the use of water glass, there was an inconvenience that there were many defective points that did not emit light.
更にパネル全体の重量を軽減するため、基板1の薄形化
が求められ、放電間隙保持のため、より密度高くスペー
サを必要としており、従来の方法では対応できなかった
。Furthermore, in order to reduce the weight of the entire panel, the substrate 1 is required to be made thinner, and in order to maintain the discharge gap, a higher density of spacers is required, which cannot be met by conventional methods.
また、球状スペーサを表示パネル間に設置する先行技術
として特開昭58−160927に示されるようにスペ
ーサ粒子径より小さい厚みの感光剤で保持されたスペー
サ粒子でパネル板を支える構成が知られている。Furthermore, as a prior art technique for installing spherical spacers between display panels, there is a known structure in which the panel board is supported by spacer particles held by a photosensitive material with a thickness smaller than the spacer particle diameter, as shown in Japanese Patent Laid-Open No. 58-160927. There is.
本願の対象とするようなガス放電パネルに適用するに当
たっては、放電面に残留する感光剤が放電特性に悪影響
を及ぼす問題がある。When applied to a gas discharge panel as the object of the present application, there is a problem in that the photosensitizer remaining on the discharge surface has an adverse effect on the discharge characteristics.
この発明は以上のような従来の状況から、対向する二枚
の基板間を一定間隙に保つスペーサを基板上の電極を避
けて設置する能率的方法を得ることを目的とする。SUMMARY OF THE INVENTION In view of the conventional situation as described above, an object of the present invention is to provide an efficient method for installing a spacer to maintain a constant gap between two opposing substrates while avoiding the electrodes on the substrates.
以上のような問題点を解決するため本発明では第1図乃
至第5図に示すように、感光性レジスト材料9に球状の
スペーサ4を混合し、ガス放電パネルの一方の基板1の
誘電体Fia上全面に塗布し、マスクを用いて露光およ
び現像を行うことによって電極2を避けた場所に感光性
レジスト材料9と共に前記スペーサ4を残し、その後焼
成して感光性レジスト材料9を消失せしめると共に、ス
ペーサ4を誘電体層3に融着せしめることを特徴とする
。In order to solve the above-mentioned problems, in the present invention, as shown in FIGS. 1 to 5, spherical spacers 4 are mixed into the photosensitive resist material 9, and the dielectric material of one substrate 1 of the gas discharge panel is mixed with the photosensitive resist material 9. The spacer 4 is left together with the photosensitive resist material 9 in a place avoiding the electrode 2 by coating the entire surface of the FIA, exposing and developing using a mask, and then baking to make the photosensitive resist material 9 disappear. , the spacer 4 is fused to the dielectric layer 3.
以上の方法を適用すると、フォトリソグラフィの正確さ
で電極上を避けてスペーサを配置することが容易に実現
できる。そして球状をした前記スペーサが放電点を覆う
ことがないので、スペーサによる表示欠陥が皆無の表示
パネルを作り出せる。By applying the above method, it is possible to easily arrange the spacer avoiding the top of the electrode with the accuracy of photolithography. Since the spherical spacers do not cover the discharge points, it is possible to create a display panel with no display defects caused by the spacers.
すなわち使用するスペーサ球の直径は予め放電間隙とな
る距離数十〜300ミクロンの値をもとに選別してあっ
て、この値は隣接電極間隔を越えない値となるので配置
位置が適切であれば、放電点を遮ることなくスペーサ機
能を達成できる。また感光性レジストの残留による放電
特性面への悪影響も回避することができる。In other words, the diameter of the spacer sphere to be used is selected in advance based on the value of the discharge gap of several tens to 300 microns, and since this value does not exceed the distance between adjacent electrodes, it is important to ensure that the placement position is appropriate. For example, the spacer function can be achieved without blocking the discharge point. Further, it is possible to avoid an adverse effect on the discharge characteristics due to residual photosensitive resist.
以下この発明を、電極表面が誘電体層で被覆された交流
駆動形ガス放電パネルに適用した実施例につき図面を参
照して詳細に説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the drawings, with reference to an embodiment in which the present invention is applied to an AC-driven gas discharge panel in which the electrode surface is coated with a dielectric layer.
第1図は上記ガス放電パネルの電極を有する一方の基板
1にスペーサとなるガラス球4と、粘着性をもたらす感
光性レジストとを混合した液とをスプレーGによって誘
電体層3上に一面に撒布付着させている説明図である。FIG. 1 shows that a liquid mixture of glass bulbs 4 serving as spacers and a photosensitive resist that provides adhesiveness is sprayed onto one substrate 1 having electrodes of the gas discharge panel onto a dielectric layer 3 by spraying G. It is an explanatory view of making the spray adhere.
使用するスペーサ球の直径は予め放電間隙となる距離数
十〜300ミクロンの値をもとに選別しである一定の大
きさのガラス球を用いている。このようにするとガラス
球4が一時的に基板に固着した状態で、ランダムではあ
るが平均に分布するようになる。The diameter of the spacer sphere used is selected in advance based on the distance of several tens to 300 microns that will be the discharge gap, and glass spheres of a certain size are used. In this way, the glass bulbs 4 are temporarily fixed to the substrate and are distributed evenly, albeit randomly.
以上のように一時的にガラス球4を基板上に保持させた
上で保持力を増すために、もう−度感光性しシストを、
全面に塗布してもよい。As mentioned above, in order to increase the holding force after temporarily holding the glass bulb 4 on the substrate, the cysts are further photo-sensitized.
It may be applied to the entire surface.
上記感光性レジストをスペーサと共に塗布した基板1を
乾燥後拡大して平面図としてみると第2図のようになっ
ている。スペーサ球4は薄く感光性レジストで覆われる
と共に、該材料の付着力で基板1に保持され、ランダム
に分散させられている。FIG. 2 shows an enlarged plan view of the substrate 1 coated with the above-mentioned photosensitive resist together with spacers after drying. The spacer spheres 4 are thinly covered with a photosensitive resist, held on the substrate 1 by the adhesive force of the material, and are randomly dispersed.
この後露光マスクを電極を除く部位、すなわちWで示す
電極間隔の間にある物質が残るように設定して後、露光
および現像すると、第3図のようにスペーサ球4が電極
2を避けた位置、電極の単位間隔Wの中に位置する幅T
を接着幅とする範囲にのみ残留する。この状態で空気中
約500度に加熱して焼成すると、第4図の要部拡大平
面図のように、粘着力を備える感光性レジストは気化蒸
発して除去されると共に、ガラス球4は軟化点に達した
誘電体層3内に沈み込み、誘電体N3と融着し、冷却後
はそのままの位置に固定される。After this, the exposure mask was set so that the part excluding the electrodes, that is, the material between the electrode gaps shown by W, remained, and when exposure and development were performed, the spacer sphere 4 avoided the electrode 2 as shown in Fig. 3. position, the width T located within the unit interval W of the electrodes
It remains only in the area where is the adhesive width. When heated and fired in air at about 500 degrees Celsius in this state, the photosensitive resist with adhesive strength is evaporated and removed, and the glass bulbs 4 are softened, as shown in the enlarged plan view of the main part in FIG. It sinks into the dielectric layer 3 at the point, fuses with the dielectric N3, and is fixed in that position after cooling.
次にこのようにして固着せしめた球状ガラススペーサ4
を持つ基板1と、スペーサを持たない他方の基板5とを
所定の位置に重ねて基板周囲を封着材によりガス封止を
行い、放電ガス空間8に放電ガスを充填すると、第5図
に要部断面図を示すような目的とするガス放電パネルが
完成する。なおスペーサ4を誘電体層3に固着した後、
全表面に図示しない酸化マグネシウム(MgO)等の表
面保護層を蒸着等の手段で形成するのが好ましい。Next, the spherical glass spacer 4 fixed in this way
When the substrate 1 with a spacer and the other substrate 5 without a spacer are stacked in a predetermined position, the periphery of the substrates is sealed with a gas sealing material, and the discharge gas space 8 is filled with discharge gas, as shown in Fig. 5. The intended gas discharge panel is completed, as shown in the cross-sectional view of the main parts. Note that after fixing the spacer 4 to the dielectric layer 3,
It is preferable to form a surface protective layer (not shown) of magnesium oxide (MgO) or the like on the entire surface by means of vapor deposition or the like.
完成したパネル平面図を第4図に見るとスペーサ4は必
ず一方の基板1の電極間Wに位置すると共に、他方の基
板上の電極6に対してはスペーサ4aの場合のごとく電
極6上に位置する場合もあるが、スペーサ部位は放電点
ではなく、その両隣XおよびYに位置する対向電極同士
が放電点であるために、本スペーサ球が表示放電を遮る
ことはない。Looking at the plan view of the completed panel in FIG. 4, the spacer 4 is always located between the electrodes W on one substrate 1, and the spacer 4 is always located on the electrode 6 on the other substrate as in the case of the spacer 4a. However, since the spacer portion is not a discharge point, and the opposing electrodes located on both sides of it, X and Y, are discharge points, the present spacer sphere does not block the display discharge.
以上この発明の一実施例について説明したが、本発明で
はこれに限らず次のような変形と応用が可能である。す
なわち変形例として、スペーサが球状の他に多面体、直
方体、円柱体(ガラスファイバを含む)なとが使用でき
る。Although one embodiment of the present invention has been described above, the present invention is not limited to this, and the following modifications and applications are possible. That is, as a modification, the spacer may be polyhedral, rectangular parallelepiped, cylindrical (including glass fiber), etc., in addition to being spherical.
また応用例として、電極表面を誘電体層で被覆しない直
流放電形ガス放電パネルへの適用も可能であり、この場
合は基板上にスペーサを保持する誘電体層を電極を避け
てスペーサ部位に作成しておく必要がある。As an example of application, it is also possible to apply it to a DC discharge type gas discharge panel where the electrode surface is not covered with a dielectric layer. In this case, the dielectric layer that holds the spacer on the substrate can be created at the spacer part, avoiding the electrode. It is necessary to do so.
また本発明を直交するマトリクス形パネルについて説明
したが、応用はこれに限ることなく、電極が無定形のセ
グメント形のパネルでも良いのは言うまでもない。Furthermore, although the present invention has been described with respect to orthogonal matrix-type panels, the application is not limited thereto, and it goes without saying that the present invention may also be applied to a segment-type panel in which the electrodes are amorphous.
以上の説明から明らかなように、この発明によれば、簡
便にスペーサが一方の基板上の放電間隙のみに配されて
放電点を妨害すること無く、多数のスペーサでも設置で
きる上に、スペーサが誘電体層に固着されているため動
く心配が無く、また当該パネルの電極配列ピッチよりも
小さい直径のスペーサが使用できるため当該スペーサの
使用によって発光が不良な放電点を生ずることは皆無と
なり、高品質のガス放電パネルを提供できる。As is clear from the above description, according to the present invention, the spacer is simply arranged only in the discharge gap on one substrate, without interfering with the discharge point, and even a large number of spacers can be installed. Since it is fixed to the dielectric layer, there is no need to worry about it moving.Also, since a spacer with a diameter smaller than the electrode arrangement pitch of the panel can be used, the use of this spacer eliminates the possibility of causing a defective discharge point in the light emission, resulting in a high We can provide quality gas discharge panels.
第1図は本発明のスペーサ配置方法第1工程の斜視図、
第2図は本発明のスペーサ配置方法第1工程後の要部拡
大平面図、
第3図は本発明のスペーサ配置方法第2工程後の要部拡
大平面図、
第4図は本発明のスペーサ配置方法第3工程後の要部拡
大平面図、
第5図は本発明の方法によって構成されたガス放電パネ
ルの要部断面図である。
図において、
1および5は基板
2および6は電極、
3および7は誘電体層、
4は球状スペーサ、
8はガス空間、
Wは単位電極間隔、
Tは一時固着幅、
X、Yは放電点である。
第1図
第2図
第3図
第4図
Ai辱ト明Q□M、N;J’?て精ρ気ykrニガスち
又fit論しの喝11)−図第5図FIG. 1 is a perspective view of the first step of the spacer arrangement method of the present invention, FIG. 2 is an enlarged plan view of the main part after the first step of the spacer arrangement method of the present invention, and FIG. 3 is the second step of the spacer arrangement method of the present invention. Fig. 4 is an enlarged plan view of the main part after the third step of the spacer arrangement method of the present invention; Fig. 5 is a sectional view of the main part of the gas discharge panel constructed by the method of the present invention. It is. In the figure, 1 and 5 are substrates 2 and 6 are electrodes, 3 and 7 are dielectric layers, 4 is a spherical spacer, 8 is a gas space, W is a unit electrode spacing, T is a temporary fixing width, and X and Y are discharge points. It is. Figure 1 Figure 2 Figure 3 Figure 4 Ai insult Q□M, N; J'? 11) - Figure 5
Claims (1)
、または該電極間のみに設けられた基板(1)、(5)
より低融点である誘電体層(3)、(7)を有する一対
の基板(1)、(5)をガス放電空間(8)を隔てて対
向配置したガス放電パネルにおいて、 感光性レジスト材料(9)に球状のスペーサ(4)を混
合し、ガス放電パネルの一方の基板(1)の誘電体層(
3)上全面に塗布し、マスクを用いて露光および現像を
行うことによって電極(2)を避けた場所に感光性レジ
スト材料(9)と共に前記スペーサ(4)を残し、その
後焼成して感光性レジスト材料(9)を消失せしめると
共に、スペーサ(4)を誘電体層(3)に融着せしめる
ことを特徴とするガス放電パネルの製造方法。[Claims] A plurality of electrodes (2), (6) and a substrate (1), (5) provided over the entire surface of the electrodes or only between the electrodes.
In a gas discharge panel in which a pair of substrates (1) and (5) having dielectric layers (3) and (7) having a lower melting point are arranged facing each other across a gas discharge space (8), a photosensitive resist material ( 9) with a spherical spacer (4), and the dielectric layer (1) of one substrate (1) of the gas discharge panel is mixed with
3) The spacer (4) is left together with the photosensitive resist material (9) in a place avoiding the electrode (2) by coating the entire upper surface, exposing and developing using a mask, and then baking it to make it photosensitive. A method for producing a gas discharge panel, characterized in that the resist material (9) is made to disappear and the spacers (4) are fused to the dielectric layer (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28368787A JPH01124932A (en) | 1987-11-09 | 1987-11-09 | Manufacture of gas discharge panel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28368787A JPH01124932A (en) | 1987-11-09 | 1987-11-09 | Manufacture of gas discharge panel |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01124932A true JPH01124932A (en) | 1989-05-17 |
Family
ID=17668774
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28368787A Pending JPH01124932A (en) | 1987-11-09 | 1987-11-09 | Manufacture of gas discharge panel |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01124932A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR19980041209A (en) * | 1996-11-30 | 1998-08-17 | 손욱 | Field effect electron emission device employing ellipsoidal spacer and assembly method thereof |
| KR19990068996A (en) * | 1998-02-03 | 1999-09-06 | 손욱 | Spacer manufacturing method of field effect display device |
-
1987
- 1987-11-09 JP JP28368787A patent/JPH01124932A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR19980041209A (en) * | 1996-11-30 | 1998-08-17 | 손욱 | Field effect electron emission device employing ellipsoidal spacer and assembly method thereof |
| KR19990068996A (en) * | 1998-02-03 | 1999-09-06 | 손욱 | Spacer manufacturing method of field effect display device |
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