JPH01127268U - - Google Patents

Info

Publication number
JPH01127268U
JPH01127268U JP1988021843U JP2184388U JPH01127268U JP H01127268 U JPH01127268 U JP H01127268U JP 1988021843 U JP1988021843 U JP 1988021843U JP 2184388 U JP2184388 U JP 2184388U JP H01127268 U JPH01127268 U JP H01127268U
Authority
JP
Japan
Prior art keywords
diaphragm
piezoresistance layer
semiconductor
pressure sensor
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1988021843U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988021843U priority Critical patent/JPH01127268U/ja
Publication of JPH01127268U publication Critical patent/JPH01127268U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Description

【図面の簡単な説明】
第１図ａ，ｂは本考案一実施例の半導体圧力セ
ンサを示し、第１図ａは上面図、第１図ｂは第１
図ａのＡＡ断面図、第２図ａ，ｂは従来の半導体
圧力センサを示し、第２図ａは上面図、第２図ｂ
は断面図である。 １１……固定部、１２……ダイアフラム、１３
……溝、１４……支持台、１５……ピエゾ抵抗、
１６……低抵抗層配線、１７……電気取出し口。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体単結晶は圧力に応じて起歪する薄肉のダ
    イアフラムとその周辺の厚肉の固定部を具備し、
    前記ダイアフラム上にピエゾ抵抗層を有し且つこ
    のピエゾ抵抗層を有する面のダイアフラムと固定
    部との境界領域に溝を有することを特徴とする半
    導体圧力センサ。
JP1988021843U 1988-02-23 1988-02-23 Pending JPH01127268U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988021843U JPH01127268U (ja) 1988-02-23 1988-02-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988021843U JPH01127268U (ja) 1988-02-23 1988-02-23

Publications (1)

Publication Number Publication Date
JPH01127268U true JPH01127268U (ja) 1989-08-31

Family

ID=31239430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988021843U Pending JPH01127268U (ja) 1988-02-23 1988-02-23

Country Status (1)

Country Link
JP (1) JPH01127268U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009265012A (ja) * 2008-04-28 2009-11-12 Fujikura Ltd 半導体センサ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5839069A (ja) * 1981-08-31 1983-03-07 Shimadzu Corp 半導体ダイヤフラム

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5839069A (ja) * 1981-08-31 1983-03-07 Shimadzu Corp 半導体ダイヤフラム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009265012A (ja) * 2008-04-28 2009-11-12 Fujikura Ltd 半導体センサ

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