JPH01128482A - Gas laser oscillator - Google Patents

Abstract

PURPOSE:To effectively supply X rays irradiated from an X rays generating part to an area between electrodes, to reduce output of the X rays required for preelectrolytic dissociation, and to prevent leakage of the X rays by providing the X rays generating part within a pressure container which is adjacent to the rear face side of electrode. CONSTITUTION:By applying a high-voltage pulse from a power supply for X-rays tube 29 through a switch element 28, voltage is applied between a heat cathode electrode 26 and a target body 25 to allow electrons emitted from the heat cathode 26 to be accelerated and to allow X rays to be generated colliding against the target body 25. The X rays thus generated permeates a discharge surface 22 of a cathode 16, reaches an area between this cathode 16 and an anode 17, and performs preelectrolytic dissociation of gas laser media which is located between these electrodes 16 and 17. This preelectrolytic dissociation allows a stage discharge to be generated between the electrodes 16 and 17. At this time, the electrodes 16 and 17 generate glow discharge on nearly the entire surface, thus enabling laser light to oscillate. An X-rays tube 24 is provided along with the electrode 16 provided within a pressure container 15, thus preventing the generated X rays from leaking to the outside of the pressure container 15.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a gas laser oscillation device that stabilizes discharge between electrodes by pre-ionization using X-rays.

An electrode consisting of a cathode and an anode is provided in a pressure vessel maintained at a predetermined pressure, and the gas laser medium is excited by discharge energy generated between the electrodes. Prior to excitation of this gas laser medium, the discharge between the electrodes is stabilized by preliminary ionization before the electrodes start discharging, and this stabilized discharge oscillates high-quality laser light. It is configured so that it can be done.

As a method for such preliminary ionization, there are methods that utilize X-rays, ultraviolet rays generated by corona discharge, arc discharge, and the like.

A gas laser oscillation device using the above-mentioned pre-Q ionization method using X-rays will be explained with reference to FIG. The gas laser oscillation device shown in the figure is a cylindrical pressure vessel 1 viewed in cross section from the axial direction. Inside this pressure vessel 1, there are cathode and anode electrodes 2.3 on the upper and lower sides. They are provided facing each other in the axial direction.

Here, mirror bodies (not shown) facing each other are provided at both ends in the axial direction of the pressure vessel construction so that the beams are irradiated.

Further, a high voltage power source δ is electrically connected to the picture electrode 2.3 via a capacitor 4 and a high voltage switch 5.

When the high voltage power supply 6 applies a voltage between the electrodes 2.3, electrical energy is temporarily stored in the capacitor 4, and the electrical energy stored in the capacitor 4 is transferred to the high voltage switch 5. The pulsed voltage is converted into a pulsed form and charges a plurality of peaking capacitors 7 connected to the electrode 2.3 consisting of the cathode and anode. When the voltage between the cathode and anode 2.3, that is, the voltage across the peaking capacitor 7, exceeds a discharge breakdown voltage determined by the pressure of the filled gas, etc., a discharge occurs between the picture electrodes 2.3 and excites the gas laser medium.

Further, in the pressure vessel 1 located outside the cathode 2 located above, for example, in the above ff1i2.3, an entrance window 8 through which X-rays are transmitted is provided over substantially the entire length of the electrode 2. ing.

It will be described later that it is opposed to this entrance window 8. Further, an X-ray generating section 11 is provided in the X-ray tube 9 for emitting X-rays from the irradiation window 10.
3 are electrically connected.

On the other hand, the portion of the cathode 2 corresponding to the entrance window 8 is thinly formed to form an X-ray transmitting portion 14 .

In the gas laser oscillation device configured as described above, the electrode 2.3 receives voltage from the high voltage power supply 6, and the X-ray tube 9 receives voltage from the X-ray tube power supply 13, so that the X-ray generating section 11 generates X-rays, and the X-rays are irradiated from the irradiation window 10 toward the entrance window 8 . After passing through the entrance window 8, the X-rays pass through an electrode 2 located inside the pressure vessel 1.
The light passes through the X-ray transmission section 14 and reaches between the picture electrodes 2.3, pre-ionizing the gas laser medium in this region.

Due to this preliminary ionization, a large X-ray output was required to separate the structure so that a stable discharge could be obtained with the voltage applied from the high voltage power supply 8.

In addition, increasing the X-ray output will significantly shorten the life of the X-ray tube 9, and the installation of the X-ray tube 9 and pressure vessel 1
Despite the complicated structure, such as the installation of the entrance window 8, it has been difficult to perform pre-ionization with high efficiency.

Furthermore, since X-rays with low directivity are irradiated, it is necessary to take precautions such as providing an X-ray absorber such as lead near the X-ray tube 9, making it impossible to avoid increasing the size of the apparatus.

(Point to be solved by the invention) - A gas laser oscillation device that performs preliminary ionization using X-rays on a ship uses X-rays with low directivity irradiated from an X-ray tube located outside the pressure vessel to perform preliminary ionization. Because it is configured to ionize, in order to perform sufficient pre-ionization, it is necessary to increase the X-ray output and to have equipment to prevent leakage of X-rays to the outside, which requires complicated equipment and equipment. The structure made it inevitable to increase the size. Another object of the present invention is to provide a gas laser oscillation device that can be miniaturized while the X-ray tube used has a large X-ray image and has a structure that prevents leakage of X-rays to the outside.

[Structure of the invention]

(Means and effects for solving the problem) This invention has the following features:
A pressure vessel is provided in which the gas laser medium is kept at a predetermined pressure,
An electrode consisting of a cathode and an anode that generates a discharge to excite the gas laser medium is provided in this pressure vessel, and a high voltage power source is connected to these electrodes via a capacitor and a high voltage switch, and X-rays are emitted from the electrode surface. X near the back side of either electrode in the pressure vessel so that
A ray generating section is provided, a high voltage discharge circuit is provided in the X-ray generating section, and an optical resonator that optically resonates the laser beam generated by the excitation is provided, so that the X-ray generating section is brought close to between the electrodes, In addition to efficiently using the output X-rays for pre-ionization,
This gas laser oscillation device has a simple structure and can reliably prevent X-rays from leaking outside the pressure vessel.

This is a cross-sectional view from the direction, and two mirror bodies (not shown) are provided facing each other at both ends of the pressure vessel 15, and the reflectance of one mirror is set low to form an optical resonator (not shown). is formed.

Furthermore, a gas laser medium, such as a CO2-N2-He mixed gas, is sealed in the pressure vessel 15 and maintained at a predetermined pressure. Furthermore, this pressure vessel 1
5, cathode and anode electrodes 16 and 17 are provided on the upper side and the lower side, respectively, and are spaced apart and opposed to each other along the axial direction.

A high voltage power source 20 is electrically connected to these electrodes 16 and 17 via a capacitor 18 and a high voltage switch 19. Electrical energy supplied from the high-voltage power supply 20 is temporarily stored in the capacitor 18, and the electrical energy stored in the capacitor 18 is converted into a pulse by the high-voltage switch 19 to The voltage is applied to a plurality of peaking capacitors 21 connected between .17 and charged. When the voltage across the upper capacitor 21 exceeds a discharge breakdown voltage determined by the pressure of the filled gas, etc., a discharge occurs between the electrodes 16 and 17, exciting the gas laser medium.

On the other hand, the cathode 16 has a discharge surface 22 formed on the lower surface side corresponding to the discharge surface of the anode 17, and an X-ray generating section 23 is integrally provided above the discharge surface 22.

This X-ray generating section 23 is provided in an X-ray tube 24 formed in a rectangular box shape extending in the longitudinal direction of the cathode 16 . A sheet-like target body 25 made of tungsten, for example, is provided at the upper part of the bottom surface located inside the X-ray tube 24 and corresponding to the discharge surface 22.

Further, on the upper side of the target body 25, a hot cathode 26 made of, for example, a wire is provided over substantially the entire length. In this way, the target body 25 is placed inside the X-ray tube 24.
An X-ray generating section 23 is formed by providing a hot cathode 26 and a hot cathode 26 . Further, the X-ray tube 24 is constructed so as to serve as a transmission window for transmitting the wire into the pressure vessel 15 while keeping the inside in a vacuum state of about 10''6 Torr.

Further, a high voltage discharge circuit 27 is connected to the hot cathode 26 . This high voltage discharge circuit 27 is, for example, an X-ray tube 2
4 switch element 28 and an X-ray tube power supply 29 connected to the X-ray tube 24 via this switch element 28.

Then, the X-ray tube power source 2 is connected via the switch element 28.
9 is applied between the hot cathode 26 and the target body 25, the electrons emitted from the hot cathode 26 are accelerated and collide with the target body 25, and X-rays are generated. Ru.

The X-rays generated in this way are transmitted to the discharge surface 22 of the cathode 16.
and reaches between the cathode 16 and the anode 17,
The gas laser medium between these electrodes 16,17 is preionized.

Due to this pre-ionization, a stable discharge is generated between the electrodes 16 and 17. At this time, the cathode 16 and the anode 17 generate glow discharge on substantially the entire surface thereof, and a stable laser beam is oscillated.

That is, during pre-ionization, the discharge surface 22 of the cathode 16 becomes a transmission window through which the X-rays from the X-ray tube 24 are transmitted, and when discharging between the electrodes 16 and 17, it is opposed to the anode 17. The cathode 16 is configured so that substantially the entire discharge surface 22 serves as an electrode surface on which discharge occurs. Further, the discharge surface 22 of the cathode 16 also functions as a pressure partition on the bottom side of the X-ray tube 24.

In the gas laser oscillation device configured in this way, the X-ray tube 24 is provided integrally with the electrode 16 provided in the pressure vessel work 5 as described above, and therefore the X-ray generation inside the X-ray tube 24 is The structure that prevents the X-rays generated in the section 23 from leaking to the outside of the pressure vessel 15 can be simplified compared to the conventional structure. In other words, compared to the conventional structure in which the X-ray tube 24 is provided outside the pressure vessel 15, it is easier to prevent leakage of X-rays, and the installation structure of the X-ray tube 24 can be simplified. The entire device can be downsized.

Further, the electrode 16 pre-ionized by the X-ray generating section 23
．． In other words, since the X-ray generating section 23 is integrally provided above the discharge surface 22 of the cathode 16, the discharge surface 2
2 and pre-ionize between the electrodes 16 and 17,
Line attenuation is kept to a minimum. This results in a small
Sufficient pre-ionization can be performed with line output. By reducing the X-ray output in this manner, the life of the X-ray tube 24 can be extended.

Note that the present invention is not limited to the above embodiment. For example, in the above embodiment, a hot cathode structure having a hot cathode 26 and a target body 25 is used as the X-ray generating section 23, but the present invention is not limited to this, and a cold cathode structure, a plasma cathode structure, etc. An X-ray generating section 23 is also included.

Further, the materials and shapes of each part, the components of the gas laser medium, etc. are not similarly limited, and any structure may be used as long as the X-ray generating section 23 is provided integrally with the electrode 16. moreover,
The X-ray generating section 23 may be provided not on the electrode 16 but on the opposing electrode 17 side.

〔Effect of the invention〕

As explained above, according to the present invention, by providing the X-ray generation section in the pressure vessel close to the back side of the electrode, the X-rays emitted from the X-ray generation section are distributed between the electrodes. can be supplied effectively. Moreover, by being able to perform pre-ionization with such high efficiency, the X-ray output required for pre-ionization can be reduced. In addition, since most of the generated X-rays are used for pre-ionization,
It is possible to simplify the structure to prevent wire leakage,
It is possible to provide a gas laser oscillation device in which the electrode and the X-ray generating section are brought closer to each other, and the device can be made smaller and simpler.

[Brief explanation of the drawing]

FIGS. 1 to 3 show an embodiment of this invention,
Fig. 1 is a cross-sectional view showing a schematic configuration of a gas laser oscillation device, Fig. 2 is a longitudinal cross-sectional view showing a state in which an X-ray generating section is integrally provided with an electrode, and Fig. 3 is a cross-sectional view of the structure shown in Fig. 2. FIG. 4 is a sectional view taken along the line 1--2, and is a sectional view showing a schematic configuration of a conventional gas laser oscillation device. 15...Pressure vessel, 16.17...Electrode, 18...
・Capacitor, 19... High voltage switch, 20...
・Direct weight, piezoelectric power source, 23...X-ray generating section, 27...high voltage discharge circuit. 11-- Applicant Kozo Iizuka, Director General of the Agency of Industrial Science and Technology

Claims (1)

[Claims] A pressure vessel in which a gas laser medium is maintained at a predetermined pressure, an electrode consisting of a cathode and an anode provided spaced apart and facing each other in the pressure vessel to generate a discharge to excite the gas laser medium, and a capacitor connected to these electrodes. and a high-voltage power supply connected via a high-voltage switch, and an X-ray generating section provided in the pressure vessel close to the back side of one of the electrodes so that X-rays are output from the electrode surface. A gas laser oscillation device comprising: a high-voltage discharge circuit that applies a voltage to the X-ray generating section; and an optical resonator that optically resonates the laser light generated by the excitation.