JPH01129832U - - Google Patents
Info
- Publication number
- JPH01129832U JPH01129832U JP1988024603U JP2460388U JPH01129832U JP H01129832 U JPH01129832 U JP H01129832U JP 1988024603 U JP1988024603 U JP 1988024603U JP 2460388 U JP2460388 U JP 2460388U JP H01129832 U JPH01129832 U JP H01129832U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- fixing
- main body
- holes
- vacuum suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988024603U JPH01129832U (sr) | 1988-02-26 | 1988-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988024603U JPH01129832U (sr) | 1988-02-26 | 1988-02-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01129832U true JPH01129832U (sr) | 1989-09-04 |
Family
ID=31244589
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988024603U Pending JPH01129832U (sr) | 1988-02-26 | 1988-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01129832U (sr) |
-
1988
- 1988-02-26 JP JP1988024603U patent/JPH01129832U/ja active Pending
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