JPH01129833U - - Google Patents
Info
- Publication number
- JPH01129833U JPH01129833U JP2495788U JP2495788U JPH01129833U JP H01129833 U JPH01129833 U JP H01129833U JP 2495788 U JP2495788 U JP 2495788U JP 2495788 U JP2495788 U JP 2495788U JP H01129833 U JPH01129833 U JP H01129833U
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- movable body
- chuck device
- support member
- outer peripheral
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011553 magnetic fluid Substances 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 2
- 230000000284 resting effect Effects 0.000 claims 1
Landscapes
- Machine Tool Units (AREA)
Description
第１図は本考案の一実施例を示す模式断面図、
第２図ａ，ｂは第１図のチヤツクの底面図及び模
式断面図、第３図及び第４図は従来のチヤツク装
置の模式断面図である。
１……チヤツク、２……チヤツク支持台、６…
…超音波モータ、７……電磁石、８……エア配管
、９……永久磁石、１０……磁性流体。
FIG. 1 is a schematic sectional view showing an embodiment of the present invention;
2a and 2b are a bottom view and a schematic sectional view of the chuck shown in FIG. 1, and FIGS. 3 and 4 are schematic sectional views of a conventional chuck device. 1...chuck, 2...chuck support base, 6...
...Ultrasonic motor, 7...Electromagnet, 8...Air piping, 9...Permanent magnet, 10...Magnetic fluid.
Claims (1)
該第１の端面上にウエハを固定する円柱状のチヤ
ツク部材と、前記第２の面を乗せ受けて、前記チ
ヤツク部材を回転自在に支持するチヤツク支持部
材とを有するチヤツク装置において、 振動体と該振動体の振動により回転する移動体
とを有する超音波モータを、前記第２の面と前記
チヤツク支持部材との間に設け、前記移動体上に
前記第２の面を面接触させて、チヤツク部材を回
転自在に支持し、 一方、前記移動体を臨み前記第２の面に開口す
る真空吸着用のエア配管部を、前記チヤツク部材
に設けたことを特徴とするチヤツク装置。 ２ 第１請求項記載のチヤツク装置において、前
記チヤツク支持部材に、前記円柱状のチヤツク部
材の外周面を離間して囲周する側壁部を設け、該
側壁部と前記外周部部との間隙を磁性流体で密封
したことを特徴とするチヤツク装置。 ３ 第１及び第２請求項記載のいずれかのチヤツ
ク装置において、前記第２の面に、電磁石部材を
備えたことを特徴とするチヤツク装置。[Claims for Utility Model Registration] 1. Having first and second end surfaces facing each other,
A chuck device having a cylindrical chuck member for fixing a wafer on the first end surface, and a chuck support member for resting and receiving the second surface and rotatably supporting the chuck member, comprising: a vibrating body; an ultrasonic motor having a movable body that rotates due to vibrations of the vibrating body is provided between the second surface and the chuck support member, and the second surface is in surface contact with the movable body, A chuck device, characterized in that the chuck member is rotatably supported, and the chuck member is provided with an air piping portion for vacuum suction that faces the movable body and opens at the second surface. 2. The chuck device according to claim 1, wherein the chuck support member is provided with a side wall portion that surrounds the outer peripheral surface of the columnar chuck member at a distance, and a gap between the side wall portion and the outer peripheral portion is provided. A chuck device characterized by being sealed with magnetic fluid. 3. A chuck device according to any one of claims 1 and 2, characterized in that the second surface is provided with an electromagnetic member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2495788U JPH0534109Y2 (en) | 1988-02-29 | 1988-02-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2495788U JPH0534109Y2 (en) | 1988-02-29 | 1988-02-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01129833U true JPH01129833U (en) | 1989-09-04 |
| JPH0534109Y2 JPH0534109Y2 (en) | 1993-08-30 |
Family
ID=31245255
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2495788U Expired - Lifetime JPH0534109Y2 (en) | 1988-02-29 | 1988-02-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0534109Y2 (en) |
-
1988
- 1988-02-29 JP JP2495788U patent/JPH0534109Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0534109Y2 (en) | 1993-08-30 |