JPH01137536U - - Google Patents
Info
- Publication number
- JPH01137536U JPH01137536U JP1988033736U JP3373688U JPH01137536U JP H01137536 U JPH01137536 U JP H01137536U JP 1988033736 U JP1988033736 U JP 1988033736U JP 3373688 U JP3373688 U JP 3373688U JP H01137536 U JPH01137536 U JP H01137536U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- carrier
- wafer carrier
- hole
- ground pin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988033736U JPH01137536U (cs) | 1988-03-16 | 1988-03-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988033736U JPH01137536U (cs) | 1988-03-16 | 1988-03-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01137536U true JPH01137536U (cs) | 1989-09-20 |
Family
ID=31260427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988033736U Pending JPH01137536U (cs) | 1988-03-16 | 1988-03-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01137536U (cs) |
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1988
- 1988-03-16 JP JP1988033736U patent/JPH01137536U/ja active Pending