JPH01139433U - - Google Patents
Info
- Publication number
- JPH01139433U JPH01139433U JP1988035630U JP3563088U JPH01139433U JP H01139433 U JPH01139433 U JP H01139433U JP 1988035630 U JP1988035630 U JP 1988035630U JP 3563088 U JP3563088 U JP 3563088U JP H01139433 U JPH01139433 U JP H01139433U
- Authority
- JP
- Japan
- Prior art keywords
- stocker
- semiconductor wafers
- carriers
- protrusion
- tilting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988035630U JPH01139433U (it) | 1988-03-16 | 1988-03-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988035630U JPH01139433U (it) | 1988-03-16 | 1988-03-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01139433U true JPH01139433U (it) | 1989-09-22 |
Family
ID=31262273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988035630U Pending JPH01139433U (it) | 1988-03-16 | 1988-03-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01139433U (it) |
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1988
- 1988-03-16 JP JP1988035630U patent/JPH01139433U/ja active Pending