JPH0193738U - - Google Patents
Info
- Publication number
- JPH0193738U JPH0193738U JP1987189005U JP18900587U JPH0193738U JP H0193738 U JPH0193738 U JP H0193738U JP 1987189005 U JP1987189005 U JP 1987189005U JP 18900587 U JP18900587 U JP 18900587U JP H0193738 U JPH0193738 U JP H0193738U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- protrusion
- hole
- groove portion
- wafer cassette
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987189005U JPH0193738U (it) | 1987-12-11 | 1987-12-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987189005U JPH0193738U (it) | 1987-12-11 | 1987-12-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0193738U true JPH0193738U (it) | 1989-06-20 |
Family
ID=31480064
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987189005U Pending JPH0193738U (it) | 1987-12-11 | 1987-12-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0193738U (it) |
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1987
- 1987-12-11 JP JP1987189005U patent/JPH0193738U/ja active Pending