JPH01144809U

JPH01144809U -

Info

Publication number: JPH01144809U
Application number: JP4111188U
Authority: JP
Priority date: 1988-03-30
Filing date: 1988-03-30
Publication date: 1989-10-04
Anticipated expiration: 2003-03-30
Also published as: JPH0729452Y2

Description

[Brief explanation of the drawing]

第１図は本考案の一実施例を示す構成図、第２
図は同実施例の構成を示す模式的斜視図、第３図
は同実施例においてガラス面とＡｕ面とを連続し
て測定した結果を示すグラフ、第４図ａは同実施
例における測定点付近の測定面を示す平面図で、
光検出素子の像を示した図、同図ｂは同図ａにお
けるスポツトのＹ―Ｙ方向の断面の強度分布図、
同図ｃはスリツトがない場合におけるスポツトの
Ｙ―Ｙ方向の断面の強度分布図、第５図は従来技
術における測定点付近の測定面を示す平面図で、
光検出素子の像を示した図、第６図は従来の変位
測定装置の構成を示す模式的斜視図、第７図は同
従来例の装置におけるＡｕ面及びガラス面の変位
測定方法を示す斜視図、第８図は第７図の測定に
よつて得られた変位測定の結果を示すグラフであ
る。３……測定対象、５……光検出素子、１１……
反射率が低い領域としてのガラス面、１２……反
射率が高い領域としてのＡｕ蒸着面（Ａｕ面）、
３０……結像点としてのスポツト、５０……変位
測定装置、５１……スリツト。 Fig. 1 is a configuration diagram showing one embodiment of the present invention;
The figure is a schematic perspective view showing the configuration of the same example, FIG. 3 is a graph showing the results of continuous measurement of the glass surface and the Au surface in the same example, and FIG. 4 a is the measurement point in the same example. A plan view showing the nearby measurement surface.
A diagram showing an image of a photodetecting element; Figure b is an intensity distribution diagram of a cross section in the YY direction of the spot in Figure a;
Figure c is an intensity distribution diagram of the cross section of the spot in the YY direction when there is no slit, and Figure 5 is a plan view showing the measurement surface near the measurement point in the prior art.
FIG. 6 is a schematic perspective view showing the configuration of a conventional displacement measuring device; FIG. 7 is a perspective view showing a method for measuring displacement of the Au surface and glass surface in the conventional device. 8 are graphs showing the results of displacement measurements obtained by the measurements in FIG. 7. 3...Measurement object, 5...Photodetection element, 11...
Glass surface as a region with low reflectance, 12... Au vapor deposition surface (Au surface) as a region with high reflectance,
30...Spot as an imaging point, 50...Displacement measuring device, 51...Slit.

Claims

[Scope of utility model registration request]

The reflected and scattered light of the laser beam irradiated onto the surface of the measurement object is imaged on the light-receiving surface of a photodetecting element, and the displacement of the surface of the measurement object is detected by photodetection corresponding to the movement of the image-forming point on the light-reception surface. In a displacement measuring device that measures the output electrical signal of an element, a slit is provided in front of the photodetector element along the direction of movement of the imaging point on the light-receiving surface, and when measuring an area with low reflectance, an area with high reflectance can be detected. A displacement measuring device characterized in that a groove is formed so as to block unnecessary peripheral light incident on a light-receiving surface.