JPH01145127U - - Google Patents
Info
- Publication number
- JPH01145127U JPH01145127U JP4263188U JP4263188U JPH01145127U JP H01145127 U JPH01145127 U JP H01145127U JP 4263188 U JP4263188 U JP 4263188U JP 4263188 U JP4263188 U JP 4263188U JP H01145127 U JPH01145127 U JP H01145127U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafers
- container
- over time
- carrier
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 239000012050 conventional carrier Substances 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Description
第１図は本考案の実施例を、第２図は従来のキ
ヤリアの一例をそれぞれ示す斜視図である。
３……容器、４……経時的に色変化する部材。
FIG. 1 is a perspective view showing an embodiment of the present invention, and FIG. 2 is a perspective view showing an example of a conventional carrier. 3... Container, 4... Member whose color changes over time.
Claims (1)
する部材を固定したことを特徴とする半導体ウエ
ハ用キヤリア。 A carrier for semiconductor wafers, characterized in that a member that changes color over time is fixed to a container for accommodating semiconductor wafers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4263188U JPH01145127U (en) | 1988-03-29 | 1988-03-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4263188U JPH01145127U (en) | 1988-03-29 | 1988-03-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01145127U true JPH01145127U (en) | 1989-10-05 |
Family
ID=31269040
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4263188U Pending JPH01145127U (en) | 1988-03-29 | 1988-03-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01145127U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100521314B1 (en) * | 1997-10-13 | 2005-12-30 | 삼성전자주식회사 | Wafer transfer mechanism for semiconductor device manufacturing |
-
1988
- 1988-03-29 JP JP4263188U patent/JPH01145127U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100521314B1 (en) * | 1997-10-13 | 2005-12-30 | 삼성전자주식회사 | Wafer transfer mechanism for semiconductor device manufacturing |