JPH01147268U - - Google Patents

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Publication number
JPH01147268U
JPH01147268U JP4105088U JP4105088U JPH01147268U JP H01147268 U JPH01147268 U JP H01147268U JP 4105088 U JP4105088 U JP 4105088U JP 4105088 U JP4105088 U JP 4105088U JP H01147268 U JPH01147268 U JP H01147268U
Authority
JP
Japan
Prior art keywords
treated
plate
electrode
surface treatment
horizontal component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4105088U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4105088U priority Critical patent/JPH01147268U/ja
Publication of JPH01147268U publication Critical patent/JPH01147268U/ja
Pending legal-status Critical Current

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Description

【図面の簡単な説明】
第１図は本考案の一実施例を示す断面図、第２
図および第３図は表面処理装置の従来例を示す断
面図である。 １１……電極、１２……シリコン基板、１３…
…溶液、１４……処理槽、１６……電源、１８…
…気泡。

Claims (1)

  1. 【実用新案登録請求の範囲】 溶液中に電極とこの電極に対向して平行に設け
    られた被処理板との間に電圧を印加することで生
    じる所定の化学反応により被処理板の表面を処理
    する表面処理装置において、 処理面を前記化学反応により生成される物質が
    付着しないように傾斜させるとともに、電極を被
    処理板の反応領域の水平成分と電極の被処理板に
    対向する面の水平成分との空間的重合を避けて配
    置することを特徴とする表面処理装置。
JP4105088U 1988-03-30 1988-03-30 Pending JPH01147268U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4105088U JPH01147268U (ja) 1988-03-30 1988-03-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4105088U JPH01147268U (ja) 1988-03-30 1988-03-30

Publications (1)

Publication Number Publication Date
JPH01147268U true JPH01147268U (ja) 1989-10-11

Family

ID=31267503

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4105088U Pending JPH01147268U (ja) 1988-03-30 1988-03-30

Country Status (1)

Country Link
JP (1) JPH01147268U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022122494A (ja) * 2021-02-10 2022-08-23 キオクシア株式会社 陽極化成装置及び陽極化成方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022122494A (ja) * 2021-02-10 2022-08-23 キオクシア株式会社 陽極化成装置及び陽極化成方法

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