JPH01147352A - Method for evaluating element distribution degree - Google Patents

Abstract

PURPOSE:To quantitatively recognize the distribution degree of materials to be evaluated more in details by correcting a fluctuation rate with the correction factor of the fluctuation rate indicating the relative positional relation of the materials to be evaluated with each other. CONSTITUTION:The sample to be measured is two-dimensionally moved stepwise by an X-ray microanalyzer and the X-ray intensity of the element to be measured is measured. The average value of the X-ray intensities in respective positions is determined and a standard deviation is determined simultaneously. The average value and the X-ray intensities in the respective positions are compared and the number N of the positions where the X-ray intensity higher than the average value is measured is determined. Whether the X-ray intensity of the position enclosing the position where the X-ray intensity higher than the average value is measured is above the average value or not is discriminated. The total number M of a group of the elements to be evaluated and the discriminated groups is determined. The distribution degree of the element to be measured is evaluated by the value obtd. after the value obtd. by dividing the standard deviation by the average value is multiplied by the value (correction factor of the fluctuation rate) obtd. by dividing the number M by the number N.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a method for evaluating the degree of element distribution that can be used for evaluating the degree of element distribution using an X-ray microanalyzer.

Conventional technology In recent years, the evaluation method of elemental distribution degree has often been modified.

This is carried out using a x-ray microanalyzer.

The conventional element distribution evaluation method described above will be described below.

The conventional method for evaluating the degree of elemental distribution includes the steps of moving the sample to be measured two-dimensionally in steps using an X-ray microanalyzer, and measuring the X-ray intensity of the element to be measured at each position of the sample. , a step of averaging the X-ray intensity values at each position obtained by the measurement to obtain the average value and simultaneously determining the standard deviation; and a step of displaying the difference between the X-ray intensity value and the average value on a chart. and is obtained by dividing the standard deviation by the mean value (
! ! (hereinafter referred to as fluctuation rate) and the chart (hereinafter simply referred to as chart) to evaluate the degree of distribution of the element to be measured.

Problems to be Solved by the Invention However, in the above method for evaluating the degree of element distribution,
Since the relative positional relationship between the evaluated objects is not taken into consideration,
For example, in the case of a material to be evaluated that is broken down as particles, such as an abrasive in a magnetic recording material, when comparing samples, the results compared using a chart and the results compared based on the fluctuation rate will be the same. The problem was that it did not.

In view of the above-mentioned problems, the present invention has an element that indicates the relative positional relationship between objects to be evaluated, and an element distribution that allows the element distribution degree of the measured sample to be evaluated independently and quantitatively without comparing with other materials. This provides a method for evaluating the degree of

Means for Solving the Problems In order to solve the above-mentioned problems, the method for evaluating the degree of elemental distribution of the present invention includes a step of moving the sample to be measured two-dimensionally in a stepwise manner using an X-ray microanalyzer; a step of measuring the X-ray intensity of the element to be measured at each position of the measurement sample, a step of averaging the X-ray intensity values at each position obtained by the measurement to obtain the average value, and at the same time determining the standard deviation; a step of comparing the X-ray intensity measured at each position with the X-ray intensity to determine the number N of positions where the X-ray intensity is stronger than the average value; The number of positions where the X-ray intensity is equal to or higher than the average value is determined by the number of positions where the X-ray intensity is higher than the average value, and the number of positions where the X-ray intensity of the group of positions adjacent to the group of positions where the X-ray intensity is higher than the average value becomes smaller than the average value. , and the value obtained by dividing the standard deviation by the average value, that is, the fluctuation rate, and the value obtained by dividing the number M by the number N (hereinafter referred to as fluctuation). This method includes the step of evaluating the degree of distribution of the element to be measured using a value obtained by multiplying the measured element by a factor (referred to as a rate correction coefficient).

Effect The present invention corrects the fluctuation rate using the fluctuation rate correction coefficient representing the relative positional relationship between the objects to be evaluated through the above-described process, so compared to the conventional evaluation based on the fluctuation rate, the degree of distribution of the objects to be evaluated can be determined in more detail. This will be understood more quantitatively, and it will match well with the content shown in the Sarabanko chart.

EXAMPLE Hereinafter, a method for evaluating the degree of distribution according to an example of the present invention will be described with reference to the drawings.

The figure is a flowchart showing a variation rate correction coefficient calculation method of a method for evaluating the degree of distribution in an embodiment of the present invention. 1 is the process of comparing the average value of the X-ray intensity of the element to be evaluated with the X-ray intensity measured at each position and calculating the number N of positions where the X-ray intensity is stronger than the average value, and 2 is the process of calculating the X-ray intensity stronger than the average value. Step 3 is a step of determining whether the X-ray intensity at positions surrounding the measured position is equal to or higher than the above-mentioned average value. 4 indicates the step of determining the fluctuation rate correction coefficient from the numbers N and M using the formula M/N.

The fluctuation rate correction coefficient obtained through the above process is
The degree of distribution is evaluated using the value obtained by dividing the standard deviation by the average value and multiplying by the fluctuation rate.

As described above, according to this embodiment, the number of positions where the X-ray intensity of the positions surrounding the measured position where the X-ray intensity is higher than the average value is equal to or higher than the average value is calculated. By providing a number M obtained when counting the number of positions until the X-ray intensity of a group of positions adjacent to the group of positions where the X-ray intensity was measured becomes smaller than the average value as one, for example, When applied to the evaluation of the degree of distribution of abrasives (for example, A1□03), the number of AI aggregates can be determined, and the obtained value can be used to determine the correction coefficient and correct the fluctuation rate. The degree of distribution of A1□o3 in the tape can be grasped.

Effects of the Invention As described above, the present invention includes a step of comparing the average value and the X-ray intensity measured at each of the positions to determine the number N of positions where the X-ray intensity is stronger than the average value, and The number of positions where the X-ray intensity of the positions surrounding the position where strong X-ray intensity was measured is equal to or higher than the above-mentioned average value, and the number of positions where the X-ray intensity of the positions surrounding the position where strong X-ray intensity was measured is the group of positions where X-ray intensity stronger than the above-mentioned average value was measured and the adjacent positions are calculated. the step of calculating the IM obtained when counting the number of positions until the X-ray intensity becomes smaller than the average value as one, and adding the number M to the value obtained by dividing the standard deviation by the average value; By providing a value divided by , that is, a fluctuation rate correction coefficient, an excellent effect can be obtained in that the relative positional relationship of the objects to be evaluated can be grasped.

Due to this effect, the corrected variation rate can express the degree of distribution of the evaluated object in more detail and more quantitatively than the conventional variation rate. This is especially effective when the substance to be evaluated is present in the sample to be measured in the form of particles.

[Brief explanation of the drawing]

The figure is a flowchart of a method for calculating a fluctuation rate correction coefficient, which is a method for evaluating the degree of distribution in an embodiment of the present invention. 1...Process of obtaining the number N, 2...Process of determining relative positional relationship, 3...Process of obtaining the number M, 4...Process of variation rate correction The process of finding coefficients.

Claims (1)

[Claims] A process of moving the sample to be measured stepwise in two dimensions with an X-ray microanalyzer, a process of measuring the X-ray intensity of the element to be measured at each position of the sample, and a process of measuring the X-ray intensity of the element to be measured at each position of the sample to be measured. a step of averaging the X-ray intensity values of the points and calculating the standard deviation at the same time, and comparing the average value and the X-ray intensities measured at each of the positions, and comparing the X-ray intensities of the positions where the X-ray intensity is stronger than the average value the step of calculating the number N, and the step of calculating the number of positions where the X-ray intensity of the positions surrounding the measured position where the X-ray intensity is stronger than the average value is equal to or higher than the average value; calculating a number M obtained when counting the number of positions until the X-ray intensity of a group of measured positions and adjacent positions becomes smaller than the average value, and calculating the standard deviation by the average value. A method for evaluating the degree of element distribution, characterized in that the degree of distribution of the element to be measured is evaluated by a value obtained by multiplying the value obtained by dividing the number M by the number N.