JPH01148697U - - Google Patents
Info
- Publication number
- JPH01148697U JPH01148697U JP4290488U JP4290488U JPH01148697U JP H01148697 U JPH01148697 U JP H01148697U JP 4290488 U JP4290488 U JP 4290488U JP 4290488 U JP4290488 U JP 4290488U JP H01148697 U JPH01148697 U JP H01148697U
- Authority
- JP
- Japan
- Prior art keywords
- heat
- resistant material
- wire
- heating body
- leader wire
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 7
- 239000003779 heat-resistant material Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 2
- 230000001681 protective effect Effects 0.000 claims description 2
- 239000002470 thermal conductor Substances 0.000 claims 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims 1
- 229910000831 Steel Inorganic materials 0.000 claims 1
- 239000004020 conductor Substances 0.000 claims 1
- 238000002425 crystallisation Methods 0.000 claims 1
- 230000008025 crystallization Effects 0.000 claims 1
- 229910000077 silane Inorganic materials 0.000 claims 1
- 239000010959 steel Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
Landscapes
- Resistance Heating (AREA)
Description
第１図は本考案の第１実施例、第２図は本考案
の第２実施例、第３図は従来の加熱体で、いずれ
も加熱体の長手方向の断面図を示す。
６……耐熱材、７……保護材、４４……引出線
。
FIG. 1 shows a first embodiment of the present invention, FIG. 2 shows a second embodiment of the present invention, and FIG. 3 shows a conventional heating body, all of which are longitudinal sectional views of the heating body. 6...Heat-resistant material, 7...Protective material, 44...Leader line.
Claims (1)
る、ＣＶＤ（Ｃｈｅｍｉｃａｌ Ｖａｐｏｒ Ｄ
ｅｐｏｓｉｔｉｏｎ）薄膜形成装置用の加熱体で
あつて、電熱線を埋設している電気絶縁性の熱伝
導体と、前記電熱線に接続され前記熱伝導体の外
側一方に引き出されている引出線を備えたものに
おいて、前記引出線を、前記熱伝導体に連接して
電気絶縁性の耐熱材で覆い、引出線は該耐熱材か
らさらに外側に延長し、引出線が前記耐熱材から
引き出される出口端部における耐熱材の表面温度
がＳｉの結晶化温度未満になるように、前記耐熱
材による覆いが延長していることを特徴とする棒
状加熱体。 ２ 耐熱材を鋼製パイプの保護材で保護した実用
新案登録請求の範囲第１項記載の棒状加熱体。[Claims for Utility Model Registration] 1. CVD (Chemical Vapor D) installed in a silane gas (SiH 4 ) atmosphere.
eposition) A heating body for a thin film forming apparatus, which includes an electrically insulating thermal conductor in which a heating wire is embedded, and a leader wire connected to the heating wire and drawn out to one side outside the thermal conductor. The leader wire is connected to the heat conductor and covered with an electrically insulating heat resistant material, the leader wire extends further outward from the heat resistant material, and an outlet from which the leader wire is drawn out from the heat resistant material. A rod-shaped heating body, characterized in that the covering with the heat-resistant material extends so that the surface temperature of the heat-resistant material at the end portion is lower than the crystallization temperature of Si. 2. The rod-shaped heating body according to claim 1 of the utility model registration, in which the heat-resistant material is protected by a steel pipe protective material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4290488U JPH01148697U (en) | 1988-04-01 | 1988-04-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4290488U JPH01148697U (en) | 1988-04-01 | 1988-04-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01148697U true JPH01148697U (en) | 1989-10-16 |
Family
ID=31269306
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4290488U Pending JPH01148697U (en) | 1988-04-01 | 1988-04-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01148697U (en) |
-
1988
- 1988-04-01 JP JP4290488U patent/JPH01148697U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6193994U (en) | ||
| JPS6442U (en) | ||
| JPS6356250U (en) | ||
| JPS6231891U (en) | ||
| JPH0322633Y2 (en) | ||
| JPS60119743U (en) | chemical vapor deposition equipment | |
| JPH0221731U (en) | ||
| JPS61148996U (en) | ||
| JPH0187397U (en) | ||
| JPS6258756U (en) | ||
| JPS61132714U (en) | ||
| JPS5834944U (en) | Furnace wall protection device for heat treatment furnace with double furnace insulation structure | |
| JPH0324212U (en) | ||
| JPS62199648U (en) | ||
| JPS5918148U (en) | Temperature measuring device for coke oven | |
| JPS63146598U (en) | ||
| JPS61180485U (en) | ||
| JPS588806U (en) | heat resistant wire | |
| JPS6152420U (en) | ||
| JPS633593U (en) | ||
| JPS63129988U (en) | ||
| JPS5844791U (en) | Immersion heater | |
| JPS58170789U (en) | Sheathed heater terminal | |
| JPH0466088U (en) | ||
| JPS62142802U (en) |