JPH01149461U

JPH01149461U -

Info

Publication number: JPH01149461U
Application number: JP4453188U
Authority: JP
Priority date: 1988-03-31
Filing date: 1988-03-31
Publication date: 1989-10-17

Description

[Brief explanation of the drawing]

第１図イ，ロは本考案の一実施例の溶接・切断
室を示す断面図、第２図は本考案の一実施例の真
空蒸着装置の模式図、第３図は本考案の他の実施
例の溶接・切断室を示す断面図、第４図は第２図
中の線―に沿う断面図、第５図及び第６図は
従来技術の真空蒸着装置の概略図である。１……コイル材、１ａ……未処理コイル、１ｂ
……処理済コイル、５……真空蒸着室、１１……
真空容器、１２……真空仕切弁、１３……溶接・
切断室、１３ａ……内筒、１３ｂ……外筒、１３
ｃ，１３ｄ，１３ｅ及び１３ｆ……フランジ部、
１４……シール機構、１５……溶接・切断機、１
６……移動機構、１６ａ……台車、１６ｂ……車
輪。 1A and 1B are cross-sectional views showing the welding/cutting chamber of one embodiment of the present invention, FIG. 2 is a schematic diagram of a vacuum evaporation apparatus of one embodiment of the present invention, and FIG. FIG. 4 is a sectional view taken along the line - in FIG. 2, and FIGS. 5 and 6 are schematic views of a vacuum evaporation apparatus of the prior art. 1...Coil material, 1a...Untreated coil, 1b
...Processed coil, 5...Vacuum deposition chamber, 11...
Vacuum container, 12... Vacuum gate valve, 13... Welding
Cutting chamber, 13a... Inner cylinder, 13b... Outer cylinder, 13
c, 13d, 13e and 13f...flange part,
14... Seal mechanism, 15... Welding/cutting machine, 1
6...Movement mechanism, 16a...Dolly, 16b...Wheels.

Claims

[Scope of Claim for Utility Model Registration] (1) In an apparatus for successively vacuum-depositing coil materials from untreated coils to treated coils while storing them in a vacuum container, vacuum gate valves are disposed in front and rear of the vacuum deposition chamber, respectively, and welding/cutting chambers each having a divided structure are disposed in front and rear of the vacuum gate valves, respectively. type vacuum evaporation equipment. (2) The welding/cutting chamber includes an inner cylinder and an outer cylinder, the inner cylinder has a flange provided on one end side in the outer circumferential direction, and the outer cylinder has a flange part provided on one end side in the inner circumferential direction. The inner cylinder and the outer cylinder are provided with a flange part provided around the outer cylinder and a flange part provided around the other end in the outer circumferential direction, and the inner cylinder and the outer cylinder are connected to the flange part of the inner cylinder installed inside the outer cylinder and one end of the outer cylinder. The flange on the other end of the outer cylinder engages with the flange provided around the inner circumferential direction of the outer cylinder via a seal mechanism, and the flange on the other end of the outer cylinder engages with another flange joint provided at an opposing position via a seal mechanism. The continuous vacuum evaporation apparatus according to claim 1, characterized in that the continuous vacuum evaporation apparatus has a divided structure that engages with each other. (3) In an apparatus that continuously vacuum evaporates coil materials while storing coil materials from untreated coils to treated coils in a vacuum container, the front and rear of the vacuum evaporation chamber disposed in the vacuum container. A vacuum gate valve is disposed in each of the vacuum gate valves, and a welding/cutting chamber having a divided structure is disposed in front and rear of the vacuum gate valve, respectively, and a welding/cutting machine is installed adjacent to the welding/cutting chamber. attached,
A continuous vacuum evaporation apparatus characterized in that the welding/cutting machine is equipped with a moving mechanism that extends to a position where it comes into contact with a coil material placed in a welding/cutting chamber.