JPH01149474U - - Google Patents

Info

Publication number
JPH01149474U
JPH01149474U JP1988046321U JP4632188U JPH01149474U JP H01149474 U JPH01149474 U JP H01149474U JP 1988046321 U JP1988046321 U JP 1988046321U JP 4632188 U JP4632188 U JP 4632188U JP H01149474 U JPH01149474 U JP H01149474U
Authority
JP
Japan
Prior art keywords
reaction tube
substrate
compound semiconductor
semiconductor
crystals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1988046321U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0516225Y2 (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988046321U priority Critical patent/JPH0516225Y2/ja
Publication of JPH01149474U publication Critical patent/JPH01149474U/ja
Application granted granted Critical
Publication of JPH0516225Y2 publication Critical patent/JPH0516225Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1988046321U 1988-04-06 1988-04-06 Expired - Lifetime JPH0516225Y2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988046321U JPH0516225Y2 (fr) 1988-04-06 1988-04-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988046321U JPH0516225Y2 (fr) 1988-04-06 1988-04-06

Publications (2)

Publication Number Publication Date
JPH01149474U true JPH01149474U (fr) 1989-10-17
JPH0516225Y2 JPH0516225Y2 (fr) 1993-04-28

Family

ID=31272591

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988046321U Expired - Lifetime JPH0516225Y2 (fr) 1988-04-06 1988-04-06

Country Status (1)

Country Link
JP (1) JPH0516225Y2 (fr)

Also Published As

Publication number Publication date
JPH0516225Y2 (fr) 1993-04-28

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