JPH01149474U - - Google Patents

Info

Publication number
JPH01149474U
JPH01149474U JP4632188U JP4632188U JPH01149474U JP H01149474 U JPH01149474 U JP H01149474U JP 4632188 U JP4632188 U JP 4632188U JP 4632188 U JP4632188 U JP 4632188U JP H01149474 U JPH01149474 U JP H01149474U
Authority
JP
Japan
Prior art keywords
reaction tube
substrate
compound semiconductor
semiconductor
crystals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4632188U
Other languages
English (en)
Other versions
JPH0516225Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4632188U priority Critical patent/JPH0516225Y2/ja
Publication of JPH01149474U publication Critical patent/JPH01149474U/ja
Application granted granted Critical
Publication of JPH0516225Y2 publication Critical patent/JPH0516225Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Description

【図面の簡単な説明】
第１図は本考案の半導体気相成長装置の一実施
例を示す要部断面図である。 １：反応管、２：ガス供給管、３：フランジ、
５：ベローズ、６：固定台、７：ボルト、８：ナ
ツト、９，１０：Ｏリング。

Claims (1)

    【実用新案登録請求の範囲】
  1. 化合物半導体の成分元素をガス相にして反応管
    内の基板に供給して反応させ、該基板上に前記化
    合物半導体の結晶を成長させる半導体気相成長装
    置において、前記反応管のガス排出側のフランジ
    部と前記反応管を保持する固定台との間に、両者
    を連結して、前記反応管の芯出し作業を容易にす
    る可撓性のベローズが設けてあることを特徴とす
    る半導体気相成長装置。
JP4632188U 1988-04-06 1988-04-06 Expired - Lifetime JPH0516225Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4632188U JPH0516225Y2 (ja) 1988-04-06 1988-04-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4632188U JPH0516225Y2 (ja) 1988-04-06 1988-04-06

Publications (2)

Publication Number Publication Date
JPH01149474U true JPH01149474U (ja) 1989-10-17
JPH0516225Y2 JPH0516225Y2 (ja) 1993-04-28

Family

ID=31272591

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4632188U Expired - Lifetime JPH0516225Y2 (ja) 1988-04-06 1988-04-06

Country Status (1)

Country Link
JP (1) JPH0516225Y2 (ja)

Also Published As

Publication number Publication date
JPH0516225Y2 (ja) 1993-04-28

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