JPH01151834U - - Google Patents
Info
- Publication number
- JPH01151834U JPH01151834U JP3863388U JP3863388U JPH01151834U JP H01151834 U JPH01151834 U JP H01151834U JP 3863388 U JP3863388 U JP 3863388U JP 3863388 U JP3863388 U JP 3863388U JP H01151834 U JPH01151834 U JP H01151834U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum container
- bringing
- cooled
- low temperature
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 claims description 3
- 239000000428 dust Substances 0.000 claims 2
- 239000000112 cooling gas Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Description
第１図ａは本考案の実施例１の平面図、第１図
ｂは第１図ａの―′線断面図、第２図ａは本
考案の実施例２の平面図、第２図ｂは第２図ａの
―′線断面図である。 １１……吸着板、１２……冷却用ガス配管、１
３，２２……冷却用ガス導入管、１４，２３……
冷却用ガス排出管、１５，２４……真空容器、１
６，２５……ガス冷却装置、２１……吸着管。
ｂは第１図ａの―′線断面図、第２図ａは本
考案の実施例２の平面図、第２図ｂは第２図ａの
―′線断面図である。 １１……吸着板、１２……冷却用ガス配管、１
３，２２……冷却用ガス導入管、１４，２３……
冷却用ガス排出管、１５，２４……真空容器、１
６，２５……ガス冷却装置、２１……吸着管。
Claims (1)
- 低温に冷却された外表面に浮遊塵埃を接触させ
てこれを捕捉する吸着器を真空容器内に装備した
ことを特徴とする除塵機構。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3863388U JPH01151834U (ja) | 1988-03-24 | 1988-03-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3863388U JPH01151834U (ja) | 1988-03-24 | 1988-03-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01151834U true JPH01151834U (ja) | 1989-10-19 |
Family
ID=31265179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3863388U Pending JPH01151834U (ja) | 1988-03-24 | 1988-03-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01151834U (ja) |
-
1988
- 1988-03-24 JP JP3863388U patent/JPH01151834U/ja active Pending