JPH01153631U - - Google Patents
Info
- Publication number
- JPH01153631U JPH01153631U JP1988044937U JP4493788U JPH01153631U JP H01153631 U JPH01153631 U JP H01153631U JP 1988044937 U JP1988044937 U JP 1988044937U JP 4493788 U JP4493788 U JP 4493788U JP H01153631 U JPH01153631 U JP H01153631U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- reaction tube
- heat treatment
- magnetic body
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988044937U JPH01153631U (th) | 1988-04-01 | 1988-04-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988044937U JPH01153631U (th) | 1988-04-01 | 1988-04-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01153631U true JPH01153631U (th) | 1989-10-23 |
Family
ID=31271270
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988044937U Pending JPH01153631U (th) | 1988-04-01 | 1988-04-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01153631U (th) |
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1988
- 1988-04-01 JP JP1988044937U patent/JPH01153631U/ja active Pending