JPH01155252U - - Google Patents

Info

Publication number
JPH01155252U
JPH01155252U JP5100788U JP5100788U JPH01155252U JP H01155252 U JPH01155252 U JP H01155252U JP 5100788 U JP5100788 U JP 5100788U JP 5100788 U JP5100788 U JP 5100788U JP H01155252 U JPH01155252 U JP H01155252U
Authority
JP
Japan
Prior art keywords
charged particle
particle beam
analysis
slit
entrance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5100788U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5100788U priority Critical patent/JPH01155252U/ja
Publication of JPH01155252U publication Critical patent/JPH01155252U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
JP5100788U 1988-04-15 1988-04-15 Pending JPH01155252U (2)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5100788U JPH01155252U (2) 1988-04-15 1988-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5100788U JPH01155252U (2) 1988-04-15 1988-04-15

Publications (1)

Publication Number Publication Date
JPH01155252U true JPH01155252U (2) 1989-10-25

Family

ID=31277036

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5100788U Pending JPH01155252U (2) 1988-04-15 1988-04-15

Country Status (1)

Country Link
JP (1) JPH01155252U (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2525384A3 (en) * 2011-05-19 2013-08-28 FEI Company Method and structure for controlling magnetic field distributions in an ExB wien filter

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62243231A (ja) * 1986-04-15 1987-10-23 Mitsubishi Electric Corp 半導体製造装置
JPS62272437A (ja) * 1986-05-21 1987-11-26 Mitsubishi Electric Corp イオン注入装置用質量分析装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62243231A (ja) * 1986-04-15 1987-10-23 Mitsubishi Electric Corp 半導体製造装置
JPS62272437A (ja) * 1986-05-21 1987-11-26 Mitsubishi Electric Corp イオン注入装置用質量分析装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2525384A3 (en) * 2011-05-19 2013-08-28 FEI Company Method and structure for controlling magnetic field distributions in an ExB wien filter

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